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1. 发明授权

US07190530B2 Projection objectives including a plurality of mirrors with lenses ahead of mirror M3 有权
标题翻译：投影物镜包括多个镜子，前视镜M3
公开(公告)号：US07190530B2
公开(公告)日：2007-03-13
申请号：US11356525
申请日：2006-02-16
申请人： Hans-Jurgen Mann , Russell Hudyma , Alexander Epple
发明人： Hans-Jurgen Mann , Russell Hudyma , Alexander Epple
IPC分类号： G02B17/00
CPC分类号： G02B17/0892 , G02B17/0844 , G02B17/0856 , G03F7/70225
摘要： According to one exemplary embodiment, a projection objective is provided and includes at least two non-planar (curved) mirrors, wherein an axial distance between a next to last non-planar mirror and a last non-planar mirror, as defined along a light path, is greater than an axial distance between the last non-planar mirror and a first refracting surface of lenses following in the light path. In one exemplary embodiment, the first refracting surface is associated with a single pass type lens. The present objectives form images with numerical apertures of at least about 0.80 or higher, e.g., 0.95. Preferably, the objective does not include folding mirrors and there is no intermediate image between the two mirrors, as well as the pupil of the objective being free of obscuration.
摘要翻译：根据一个示例性实施例，提供了一种投影物镜，并且包括至少两个非平面（弯曲）反射镜，其中，沿着光线定义的下一个至最后的非平面镜与最后的非平面镜之间的轴向距离路径大于最后的非平面镜与在光路中跟随的透镜的第一折射表面之间的轴向距离。在一个示例性实施例中，第一折射表面与单遍型透镜相关联。当前目标形成具有至少约0.80或更高（例如0.95）的数值孔径的图像。优选地，该目的不包括折叠反射镜，并且在两个反射镜之间不存在中间图像，以及物镜的瞳孔没有遮蔽。

2. 发明申请

US20050036213A1 Projection objectives including a plurality of mirrors with lenses ahead of mirror M3 失效
标题翻译：投影物镜包括多个镜子，前视镜M3
公开(公告)号：US20050036213A1
公开(公告)日：2005-02-17
申请号：US10639780
申请日：2003-08-12
申请人： Hans-Jurgen Mann , Russell Hudyma , Alexander Epple
发明人： Hans-Jurgen Mann , Russell Hudyma , Alexander Epple
IPC分类号： G02B17/08 , G03F7/20 , G02B17/00
CPC分类号： G02B17/0892 , G02B17/0844 , G02B17/0856 , G03F7/70225
摘要： According to one exemplary embodiment, a projection objective is provided and includes at least two non-planar (curved) mirrors, wherein an axial distance between a next to last non-planar mirror and a last non-planar mirror, as defined along a light path, is greater than an axial distance between the last non-planar mirror and a first refracting surface of lenses following in the light path. In one exemplary embodiment, the first refracting surface is associated with a single pass type lens. The present objectives form images with numerical apertures of at least about 0.80 or higher, e.g., 0.95. Preferably, the objective does not include folding mirrors and there is no intermediate image between the two mirrors, as well as the pupil of the objective being free of obscuration.
摘要翻译：根据一个示例性实施例，提供了一种投影物镜，并且包括至少两个非平面（弯曲）反射镜，其中在沿着光线定义的下一个至最后的非平面镜与最后的非平面镜之间的轴向距离路径大于最后的非平面镜与在光路中跟随的透镜的第一折射表面之间的轴向距离。在一个示例性实施例中，第一折射表面与单遍型透镜相关联。当前目标形成具有至少约0.80或更高（例如0.95）的数值孔径的图像。优选地，该目的不包括折叠反射镜，并且在两个反射镜之间不存在中间图像，以及物镜的瞳孔没有遮蔽。

3. 发明申请

US20060050258A1 Projection system for EUV lithography 有权
公开(公告)号：US20060050258A1
公开(公告)日：2006-03-09
申请号：US11243407
申请日：2005-10-04
申请人： Russell Hudyma , Hans-Jurgen Mann , Udo Dinger
发明人： Russell Hudyma , Hans-Jurgen Mann , Udo Dinger
IPC分类号： G03B27/54
CPC分类号： G02B17/0657 , G02B17/0652 , G03B27/54 , G03F7/70233 , G03F7/70275
摘要： An EUV optical projection system includes at least six reflecting surfaces for imaging an object (OB) on an image (IM). The system is preferably configured to form an intermediate image (IMI) along an optical path from the object (OB) to the image (IM) between a secondary mirror (M2) and a tertiary mirror (M3), such that a primary mirror (M1) and the secondary mirror (M2) form a first optical group (G1) and the tertiary mirror (M3), a fourth mirror (M4), a fifth mirror (M5) and a sixth mirror (M6) form a second optical group (G2). The system also preferably includes an aperture stop (APE) located along the optical path from the object (OB) to the image (IM) between the primary mirror (M1) and the secondary mirror (M2). The secondary mirror (M2) is preferably concave, and the tertiary mirror (M3) is preferably convex. Each of the six reflecting surfaces preferably receives a chief ray (CR) from a central field point at an incidence angle of less than substantially 15°. The system preferably has a numerical aperture greater than 0.18 at the image (IM). The system is preferably configured such that a chief ray (CR) converges toward the optical axis (OA) while propagating between the secondary mirror (M2) and the tertiary mirror (M3).

4. 发明申请

US20070153252A1 Projection system for EUV lithograhphy 有权
标题翻译： EUV光刻投影系统
公开(公告)号：US20070153252A1
公开(公告)日：2007-07-05
申请号：US11657420
申请日：2007-01-24
申请人： Russell Hudyma , Hans-Jurgen Mann , Udo Dinger
发明人： Russell Hudyma , Hans-Jurgen Mann , Udo Dinger
IPC分类号： G03B27/54
CPC分类号： G02B17/0657 , G02B17/0652 , G03B27/54 , G03F7/70233 , G03F7/70275
摘要： There is provided an EUV optical projection system. The system includes a first mirror, a second mirror, a third mirror, a fourth mirror, a fifth mirror, and a sixth mirror situated in an optical path from an object plane to an image plane, for imaging an object in said object plane into an image in said image plane. The image has a width W and a secant length SL, and the width W is greater than about 2 mm.
摘要翻译：提供了一个EUV光学投影系统。该系统包括位于从物平面到像平面的光路中的第一镜，第二镜，第三镜，第四镜，第五镜和第六镜，用于将所述物平面中的物体成像成所述图像平面中的图像。图像具有宽度W和割线长度SL，宽度W大于约2mm。

5. 发明申请

US20070070322A1 Projection system for EUV lithography 审中-公开
标题翻译： EUV光刻投影系统
公开(公告)号：US20070070322A1
公开(公告)日：2007-03-29
申请号：US11604997
申请日：2006-11-28
申请人： Russell Hudyma , Hans-Jurgen Mann , Udo Dinger
发明人： Russell Hudyma , Hans-Jurgen Mann , Udo Dinger
IPC分类号： G03B27/54
CPC分类号： G03F7/70233 , G02B17/0652 , G02B17/0657 , G03F7/70275
摘要： An EUV optical projection system includes at least six mirrors (M1, M2, M3, M4, M5, M6) for imaging an object (OB) to an image (IM). At least one mirror pair is preferably configured as an at least phase compensating mirror pair. The system is preferably configured to form an intermediate image (IMI) along an optical path from the object (OB) to the image (IM) between a second mirror (M2) and a third mirror (M3), such that a first mirror (M1) and the second mirror (M2) form a first optical group (G1) and the third mirror (M3), a fourth mirror (M4), a fifth mirror (M5) and a sixth mirror (M6) form a second optical group (G1). The system also preferably includes an aperture stop (APE) located along the optical path from the object (OB) to the image (IM) between the first mirror (M1) and the second mirror (M2). The second mirror (M2) is preferably convex, and the third mirror (M3) is preferably concave. The system preferably forms an image (IM) with a numerical aperture greater than 0.18.
摘要翻译： EUV光学投影系统包括用于将物体（OB）成像到图像（IM）的至少六个反射镜（M 1，M 2，M 3，M 4，M 5，M 6）。优选地，至少一个镜对配置为至少相位补偿镜对。该系统优选地被配置成沿着从物体（OB）到第二反射镜（M 2）和第三反射镜（M 3）之间的图像（IM））的光路形成中间图像（IMI），使得第一反射镜（M 1）和第二反射镜（M 2）形成第一光学组（G 1）和第三反射镜（M 3），第四反射镜（M 4），第五反射镜（M5）和第六反射镜（M 6）形成第二光学组（G 1）。该系统还优选地包括沿着从物体（OB）到第一反射镜（M 1）和第二反射镜（M 2）之间的图像（IM））的光路定位的孔径光阑（APE）。第二镜（M 2）优选为凸面，第三镜（M 3）优选为凹面。该系统优选地形成数值孔径大于0.18的图像（IM）。

6. 发明申请

US20060171040A1 Projection objectives including a plurality of mirrors with lenses ahead of mirror M3 有权
标题翻译：投影物镜包括多个镜子，前视镜M3
公开(公告)号：US20060171040A1
公开(公告)日：2006-08-03
申请号：US11356525
申请日：2006-02-16
申请人： Hans-Juergen Mann , Russell Hudyma , Alexander Epple
发明人： Hans-Juergen Mann , Russell Hudyma , Alexander Epple
IPC分类号： G02B17/00
CPC分类号： G02B17/0892 , G02B17/0844 , G02B17/0856 , G03F7/70225
摘要： According to one exemplary embodiment, a projection objective is provided and includes at least two non-planar (curved) mirrors, wherein an axial distance between a next to last non-planar mirror and a last non-planar mirror, as defined along a light path, is greater than an axial distance between the last non-planar mirror and a first refracting surface of lenses following in the light path. In one exemplary embodiment, the first refracting surface is associated with a single pass type lens. The present objectives form images with numerical apertures of at least about 0.80 or higher, e.g., 0.95. Preferably, the objective does not include folding mirrors and there is no intermediate image between the two mirrors, as well as the pupil of the objective being free of obscuration.
摘要翻译：根据一个示例性实施例，提供了一种投影物镜，并且包括至少两个非平面（弯曲）反射镜，其中，沿着光线定义的下一个至最后的非平面镜与最后的非平面镜之间的轴向距离路径大于最后的非平面镜与在光路中跟随的透镜的第一折射表面之间的轴向距离。在一个示例性实施例中，第一折射表面与单遍型透镜相关联。当前目标形成具有至少约0.80或更高（例如0.95）的数值孔径的图像。优选地，该目的不包括折叠反射镜，并且在两个反射镜之间不存在中间图像，以及物镜的瞳孔没有遮蔽。

7. 发明授权

US07085075B2 Projection objectives including a plurality of mirrors with lenses ahead of mirror M3 失效
公开(公告)号：US07085075B2
公开(公告)日：2006-08-01
申请号：US10639780
申请日：2003-08-12
申请人： Hans-Juergen Mann , Russell Hudyma , Alexander Epple
发明人： Hans-Juergen Mann , Russell Hudyma , Alexander Epple
IPC分类号： G02B17/00
CPC分类号： G02B17/0892 , G02B17/0844 , G02B17/0856 , G03F7/70225
摘要： According to one exemplary embodiment, a projection objective is provided and includes at least two non-planar (curved) mirrors, wherein an axial distance between a next to last non-planar mirror and a last non-planar mirror, as defined along a light path, is greater than an axial distance between the last non-planar mirror and a first refracting surface of lenses following in the light path. In one exemplary embodiment, the first refracting surface is associated with a single pass type lens. The present objectives form images with numerical apertures of at least about 0.80 or higher, e.g., 0.95. Preferably, the objective does not include folding mirrors and there is no intermediate image between the two mirrors, as well as the pupil of the objective being free of obscuration.

8. 发明授权

US07382540B2 Refractive projection objective 有权
$Refractive projection objective$
标题翻译：折射投影物镜
公开(公告)号：US07382540B2
公开(公告)日：2008-06-03
申请号：US11716679
申请日：2007-03-12
申请人： Hans-Juergen Rostalski , Karl-Heinz Schuster , Russell Hudyma , Wilhelm Ulrich , Rolf Freimann
发明人： Hans-Juergen Rostalski , Karl-Heinz Schuster , Russell Hudyma , Wilhelm Ulrich , Rolf Freimann
IPC分类号： G02B9/00 , G02B9/60
CPC分类号： G03F7/70241 , G02B13/143 , G02B13/24
摘要： Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8
摘要翻译：具有大于0.7的数值孔径的折射投影物镜，由设置在两个凸部之间的第一凸面，第二凸面和腰部组成。第一凸度具有由D1表示的最大直径，并且第二凸度具有由D2表示的最大直径和0.8 2 <1.1。

9. 发明申请

US20070247722A1 Refractive projection objective 有权
$Refractive projection objective$
标题翻译：折射投影物镜
公开(公告)号：US20070247722A1
公开(公告)日：2007-10-25
申请号：US11716679
申请日：2007-03-12
申请人： Hans-Juergen Rostalski , Karl-Heinz Schuster , Russell Hudyma , Wilhelm Ulrich , Rolf Freimann
发明人： Hans-Juergen Rostalski , Karl-Heinz Schuster , Russell Hudyma , Wilhelm Ulrich , Rolf Freimann
IPC分类号： G02B9/60 , G02B3/00
CPC分类号： G03F7/70241 , G02B13/143 , G02B13/24
摘要： Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8
摘要翻译：具有大于0.7的数值孔径的折射投影物镜，由设置在两个凸部之间的第一凸面，第二凸面和腰部组成。第一凸度具有由D 1表示的最大直径，并且第二凸度具有由D 2表示的最大直径和0.8

10. 发明授权

US07151592B2 Projection system for EUV lithography 有权
标题翻译： EUV光刻投影系统
公开(公告)号：US07151592B2
公开(公告)日：2006-12-19
申请号：US10454830
申请日：2003-06-04
申请人： Russell Hudyma , Hans-Jürgen Mann , Udo Dinger
发明人： Russell Hudyma , Hans-Jürgen Mann , Udo Dinger
IPC分类号： G03B27/54 , G03B27/72 , G02B5/10
CPC分类号： G03F7/70233 , G02B17/0652 , G02B17/0657 , G03F7/70275
摘要： An EUV optical projection system includes at least six mirrors (M1, M2, M3, M4, M5, M6) for imaging an object (OB) to an image (IM). At least one mirror pair is preferably configured as an at least phase compensating mirror pair. The system is preferably configured to form an intermediate image (IMI) along an optical path from the object (OB) to the image (IM) between a second mirror (M2) and a third mirror (M3), such that a first mirror (M1) and the second mirror (M2) form a first optical group (G1) and the third mirror (M3), a fourth mirror (M4), a fifth mirror (M5) and a sixth mirror (M6) form a second optical group (G1). The system also preferably includes an aperture stop (APE) located along the optical path from the object (OB) to the image (IM) between the first mirror (M1) and the second mirror (M2). The second mirror (M2) is preferably convex, and the third mirror (M3) is preferably concave. The system preferably forms an image (IM) with a numerical aperture greater than 0.18.
摘要翻译： EUV光学投影系统包括用于将物体（OB）成像到图像（IM）的至少六个反射镜（M 1，M 2，M 3，M 4，M 5，M 6）。优选地，至少一个镜对配置为至少相位补偿镜对。该系统优选地被配置成沿着从物体（OB）到第二反射镜（M 2）和第三反射镜（M 3）之间的图像（IM））的光路形成中间图像（IMI），使得第一反射镜（M 1）和第二反射镜（M 2）形成第一光学组（G 1）和第三反射镜（M 3），第四反射镜（M 4），第五反射镜（M5）和第六反射镜（M 6）形成第二光学组（G 1）。该系统还优选地包括沿着从物体（OB）到第一反射镜（M 1）和第二反射镜（M 2）之间的图像（IM））的光路定位的孔径光阑（APE）。第二镜（M 2）优选为凸面，第三镜（M 3）优选为凹面。该系统优选地形成数值孔径大于0.18的图像（IM）。

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