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    • 5. 发明授权
    • Method for fabricating patterned magnetic recording media
    • 图案化磁记录介质的制造方法
    • US07378028B2
    • 2008-05-27
    • US10859202
    • 2004-06-03
    • Koichi WagoHongYing WangNobuo KuratakaGennady GauznerNeil Deeman
    • Koichi WagoHongYing WangNobuo KuratakaGennady GauznerNeil Deeman
    • G11B11/00
    • G11B5/855Y10T428/24802
    • A method of fabricating a patterned magnetic layer comprises sequential steps of:(a) providing a workpiece comprising a non-magnetic substrate, a layer of magnetic material overlying a surface of the substrate, and a layer of a non-magnetic material overlying the layer of magnetic material;(b) forming a layer of a mask material on the layer of non-magnetic material;(c) forming a topographical pattern comprising a plurality of recesses in the layer of mask material;(d) selectively removing portions of the layer of non-magnetic material proximate lower portions of the recesses, thereby exposing selected portions of the layer of magnetic material;(e) treating the exposed portions of the layer of magnetic material with a liquid for reducing the magnetic properties thereof; and(f) removing the topographically patterned layer of mask material.
    • 制造图案化磁性层的方法包括以下顺序的步骤:(a)提供包括非磁性衬底的工件,覆盖在衬底表面上的一层磁性材料,以及覆盖该层的非磁性材料层 的磁性材料; (b)在非磁性材料层上形成掩模材料层; (c)在所述掩模材料层中形成包括多个凹部的形貌图案; (d)选择性地去除所述凹陷的下部附近的非磁性材料层的部分,从而暴露所述磁性材料层的选定部分; (e)用液体处理磁性材料层的暴露部分以降低其磁特性; 和(f)去除掩模材料的地形图案层。
    • 6. 发明授权
    • Styrene-acrylonitrile as a resist for making patterned media
    • 苯乙烯 - 丙烯腈作为制造图案化介质的抗蚀剂
    • US06617012B1
    • 2003-09-09
    • US10112192
    • 2002-03-29
    • HongYing WangKoichi WagoNeil DeemanNobuo Kurataka
    • HongYing WangKoichi WagoNeil DeemanNobuo Kurataka
    • B32B702
    • G11B5/855B32B27/06G11B5/59633G11B5/74G11B5/82Y10S428/90Y10S977/712Y10S977/838Y10S977/887Y10T428/249921Y10T428/31678
    • A system and method for forming servo patterns on magnetic medium is disclosed. A magnetic film coated with a layer of styrene-acrylonitrile is stamped with a nickel stamper reproducing the negative image of the stamper pattern on the styrene-acrylonitrile. Ions are then accelerated towards the surface of the styrene-acrylonitrile, which stops the ions in the areas where the styrene-acrylonitrile is thick and allows the ions to penetrate through to the magnetic layer in the areas where the styrene-acrylonitrile is thin. The ions, which penetrate through to the magnetic layer, interact with the magnetic layer altering the magnetic layer's structure reducing its coercivity (Hc) and remnant moment (Mrt). This reproduces the stamped styrene-acrylonitrile pattern on the magnetic layer. The styrene-acrylonitrile is then removed by oxygen plasma etching the surface leaving behind a patterned magnetic medium.
    • 公开了一种用于在磁介质上形成伺服图案的系统和方法。 用苯乙烯 - 丙烯腈层涂覆的磁性薄膜印有镍压模,其在苯乙烯 - 丙烯腈上再现压模图案的负像。 离子然后被加速到苯乙烯 - 丙烯腈的表面,这阻止了苯乙烯 - 丙烯腈厚的区域中的离子,并允许离子穿透到苯乙烯 - 丙烯腈薄的区域中的磁性层。 穿透到磁性层的离子与磁性层相互作用,从而改变了磁层的结构,降低了矫顽力(Hc)和剩余力矩(Mrt)。 这就在磁性层上再现了印模的苯乙烯 - 丙烯腈图案。 然后通过氧等离子体蚀刻表面留下图案化的磁性介质来除去苯乙烯 - 丙烯腈。