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    • 3. 发明授权
    • Semiconductor device
    • 半导体器件
    • US5670885A
    • 1997-09-23
    • US475504
    • 1995-06-07
    • Takashi IwaiMotoo Nakano
    • Takashi IwaiMotoo Nakano
    • H01L27/02G01R27/00
    • H01L27/0248
    • A semiconductor device has a first-conduction-type semiconductor substrate (19), an internal circuit including a vertical bipolar transistor (18) formed in a second-conduction-type semiconductor layer (20), and a protective element (14). The protective element comprises a first-conduction-type diffusion layer (22a) formed at an upper part of a second-conduction-type semiconductor layer (20a) disposed on the semiconductor substrate (19), and a second-conduction-type diffusion layer (27, 30) formed in the first-conduction-type diffusion layer (22a). The diffusion layer (27, 30) is at least partly deeper than an emitter diffusion layer (23) of the vertical bipolar transistor (18).
    • 半导体器件具有第一导电型半导体衬底(19),包括形成在第二导电型半导体层(20)中的垂直双极晶体管(18)的内部电路和保护元件(14)。 保护元件包括形成在设置在半导体衬底(19)上的第二导电型半导体层(20a)的上部的第一导电型扩散层(22a)和第二导电型扩散层 (27,30)形成在第一导电型扩散层(22a)中。 扩散层(27,30)至少部分地比垂直双极晶体管(18)的发射极扩散层(23)更深。
    • 4. 发明授权
    • Semiconductor device with protective element
    • 具有保护元件的半导体器件
    • US5648676A
    • 1997-07-15
    • US591955
    • 1996-01-23
    • Takashi IwaiMotoo Nakano
    • Takashi IwaiMotoo Nakano
    • H01L27/02H01L29/00
    • H01L27/0248
    • A semiconductor device has a first-conduction-type semiconductor substrate (19), an internal circuit including a vertical bipolar transistor (18) formed in a second-conduction-type semiconductor layer (20), and a protective element (14). The protective element comprises a first-conduction-type diffusion layer (22a) formed at an upper part of a second-conduction-type semiconductor layer (20a) disposed on the semiconductor substrate (19), and a second-conduction-type diffusion layer (27, 30) formed in the first-conduction-type diffusion layer (22a). The diffusion layer (27, 30) is at least partly deeper than an emitter diffusion layer (23) of the vertical bipolar transistor (18).
    • 半导体器件具有第一导电型半导体衬底(19),包括形成在第二导电型半导体层(20)中的垂直双极晶体管(18)的内部电路和保护元件(14)。 保护元件包括形成在设置在半导体衬底(19)上的第二导电型半导体层(20a)的上部的第一导电型扩散层(22a)和第二导电型扩散层 (27,30)形成在第一导电型扩散层(22a)中。 扩散层(27,30)至少部分地比垂直双极晶体管(18)的发射极扩散层(23)更深。
    • 9. 发明授权
    • Method of producing dynamic random-access memory cells
    • 生成动态随机存取存储单元的方法
    • US4350536A
    • 1982-09-21
    • US180947
    • 1980-08-25
    • Motoo NakanoTsutomu Ogawa
    • Motoo NakanoTsutomu Ogawa
    • H01L27/10H01L21/822H01L21/8242H01L27/04H01L27/108H01L29/78H01L21/02H01L21/18H01L21/22H01L21/265
    • H01L27/1085H01L27/10805
    • The invention is concerned with an improved method of producing a one-transistor cell for a dynamic RAM having a capacitor plate, a transfer gate and a shallow n.sup.+ -type region and a deeper p.sup.+ -type region for a junction capacitance. After formation of a thin oxide layer of a dielectric for an MOS capacitance, a patterned photo resist layer is formed. Using the photo resist layer as a mask, n-type impurities are doped into a semiconductor substrate. The capacitor plate and a masking layer are deposited on the photo resist layer and the thin oxide layer. P-type impurities are doped into the capacitor plate. Then, portions of the capacitor plate and masking layer on the photo resist layer are removed by removing the photo resist layer. An end portion of the capacitor plate is removed from under an edge of the remaining masking layer by etching. The p-type impurities are diffused into the silicon substrate by heating to form the deeper p.sup.+ -type region which does not extend beyond the n.sup.+ -type region.
    • 本发明涉及一种用于动态RAM的单晶体管单元的改进方法,其具有用于结电容的电容器板,传输栅极和浅n +型区域和较深p +型区域。 在形成用于MOS电容的电介质的薄氧化物层之后,形成图案化的光致抗蚀剂层。 使用光致抗蚀剂层作为掩模,将n型杂质掺杂到半导体衬底中。 电容器板和掩模层沉积在光致抗蚀剂层和薄氧化物层上。 P型杂质被掺杂到电容器板中。 然后,通过除去光致抗蚀剂层来除去光致抗蚀剂层上的电容器板和掩模层的部分。 电容器板的端部通过蚀刻从剩下的掩模层的边缘下方去除。 p型杂质通过加热扩散到硅衬底中以形成不延伸超过n +型区域的较深p +型区域。
    • 10. 发明授权
    • Method of manufacturing a non-volatile memory
    • 制造非易失性存储器的方法
    • US4727043A
    • 1988-02-23
    • US792238
    • 1985-10-29
    • Takashi MatsumotoMotoo Nakano
    • Takashi MatsumotoMotoo Nakano
    • H01L21/8247H01L21/265H01L29/788H01L29/792H01L21/283
    • H01L21/2652H01L29/7883
    • An improved electrically alterable read-only memory (EAROM) is offered by the method of the invention, the memory device comprising a floating gate type field effect transistor in which a part of the floating gate and a part of the drain region formed in a silicon substrate overlap. According to the method, impurity atoms are ion implanted into a part of a region where the drain region is to be formed through an insulation layer of silicon dioxide on the region. Thereafter, the insulation layer through which ion implantation was carried out is removed and a fresh insulation layer of silicon dioxide is formed where the old insulation layer was removed. By this method, a good, thin insulation film is fabricated. By virtue of the fresh insulation layer devoid of trap centers which trap electric charges, the insulation layer is free from defects that interrupt flow of electrons required for writing or erasing of information.
    • 通过本发明的方法提供改进的可电性可变的只读存储器(EAROM),该存储器件包括浮置栅型场效应晶体管,其中浮置栅极的一部分和漏极区的一部分形成于硅 衬底重叠。 根据该方法,通过该区域上的二氧化硅的绝缘层将杂质原子离子注入到要形成漏极区域的部分的一部分中。 此后,去除进行离子注入的绝缘层,并且在旧绝缘层被去除的地方形成新的绝缘层二氧化硅。 通过这种方法,制造出良好的薄绝缘膜。 由于没有陷阱电荷的陷阱中心的新鲜绝缘层,绝缘层没有中断写入或擦除信息所需的电子流的缺陷。