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1. 发明授权

US07891016B2 Automatic landing method and apparatus for scanning probe microscope using the same 有权
标题翻译：扫描探针显微镜的自动着陆方法及装置
公开(公告)号：US07891016B2
公开(公告)日：2011-02-15
申请号：US12225404
申请日：2008-05-29
申请人： Haiwon Lee , Chung Choo Chung , Cheolsu Han
发明人： Haiwon Lee , Chung Choo Chung , Cheolsu Han
IPC分类号： G01Q10/06 , G01Q20/04 , G01B11/08 , G01B9/02
CPC分类号： G01Q10/065 , G01Q10/06 , G01Q20/02
摘要： Disclosed herein are an automatic landing method for a scanning probe microscope and an automatic landing apparatus using the same. The method comprises irradiating light to a cantilever using a light source; collecting interference fringes generated by the light being diffracted from the edge of the cantilever and then being incident to a surface of the sample; driving the tip in the sample direction until the pattern of the interference fringes reaches a predetermined pattern region (first driving); and driving the tip in the sample direction after the interference fringe pattern reached the predetermined pattern region (second driving). The method in accordance with the present invention is very effective particularly for samples having a large surface area, because it enables automatic landing of a tip according to recognition and selection of an optimal time point for individual landing steps, irrespective of adverse changes in landing conditions, such as surface irregularities of samples. Further, the present invention enables a very inexpensive and effective application of a scanning probe microscope (SPM), because it is possible to achieve rapid and reliable driving of a tip to within an approximate distance of a sample.
摘要翻译：这里公开了扫描探针显微镜和使用该自动着陆装置的自动着陆装置的自动着陆方法。该方法包括使用光源将光照射到悬臂; 收集由悬臂的边缘衍射的光然后入射到样品的表面产生的干涉条纹; 在样品方向上驱动尖端，直到干涉条纹的图案到达预定图案区域（第一驱动）; 并且在干涉条纹图案到达预定图案区域（第二驱动）之后沿样品方向驱动尖端。根据本发明的方法对于具有大的表面积的样品是非常有效的，因为它可以根据识别和选择各个着陆步骤的最佳时间点而自动着地，而不管着陆条件的不利变化如何，如样品的表面不规则。此外，本发明能够实现扫描探针显微镜（SPM）的非常便宜和有效的应用，因为可以实现将尖端快速可靠地驱动到样品的近似距离内。

2. 发明申请

US20090293160A1 Automatic Landing Method and Apparatus for Scanning Probe Microscope Using the Same 有权
标题翻译：扫描探针显微镜的自动着陆方法和装置
公开(公告)号：US20090293160A1
公开(公告)日：2009-11-26
申请号：US12225404
申请日：2008-05-29
申请人： Haiwon Lee , Chung Choo Chung , Cheolsu Han
发明人： Haiwon Lee , Chung Choo Chung , Cheolsu Han
IPC分类号： G01N13/10
CPC分类号： G01Q10/065 , G01Q10/06 , G01Q20/02
摘要： Disclosed herein are an automatic landing method for a scanning probe microscope and an automatic landing apparatus using the same. The method comprises irradiating light to a cantilever using a light source; collecting interference fringes generated by the light being diffracted from the edge of the cantilever and then being incident to a surface of the sample; driving the tip in the sample direction until the pattern of the interference fringes reaches a predetermined pattern region (first driving); and driving the tip in the sample direction after the interference fringe pattern reached the predetermined pattern region (second driving). The method in accordance with the present invention is very effective particularly for samples having a large surface area, because it enables automatic landing of a tip according to recognition and selection of an optimal time point for individual landing steps, irrespective of adverse changes in landing conditions, such as surface irregularities of samples. Further, the present invention enables a very inexpensive and effective application of a scanning probe microscope (SPM), because it is possible to achieve rapid and reliable driving of a tip to within an approximate distance of a sample.
摘要翻译：这里公开了扫描探针显微镜和使用该自动着陆装置的自动着陆装置的自动着陆方法。该方法包括使用光源将光照射到悬臂; 收集由悬臂的边缘衍射的光然后入射到样品的表面产生的干涉条纹; 在样品方向上驱动尖端，直到干涉条纹的图案到达预定图案区域（第一驱动）; 并且在干涉条纹图案到达预定图案区域（第二驱动）之后沿样品方向驱动尖端。根据本发明的方法对于具有大的表面积的样品是非常有效的，因为它可以根据识别和选择各个着陆步骤的最佳时间点而自动着地，而不管着陆条件的不利变化如何，如样品的表面不规则。此外，本发明能够实现扫描探针显微镜（SPM）的非常便宜和有效的应用，因为可以实现将尖端快速可靠地驱动到样品的近似距离内。

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