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1. 发明申请

US20090051934A1 Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus 有权
标题翻译：用于振动检测和振动分析的方法和装置以及配备有这种装置的光刻设备
公开(公告)号：US20090051934A1
公开(公告)日：2009-02-26
申请号：US12216514
申请日：2008-07-07
申请人： Haico Victor Kok , Hoite Pieter Tolsma , Gerbrand Van Der Zouw , Koen Kivits , Ron Van De Laak , Johannes Maria Kuiper
发明人： Haico Victor Kok , Hoite Pieter Tolsma , Gerbrand Van Der Zouw , Koen Kivits , Ron Van De Laak , Johannes Maria Kuiper
IPC分类号： G01B11/14
CPC分类号： G03F7/70666 , G03F7/709 , G03F9/7096
摘要： The invention provides a method for determining vibration-related information by projecting an aerial image at an image position in a projection plane, mapping an intensity of the aerial image into an image map, the image map arranged for comprising values of coordinates of sampling locations and of the intensity sampled at each sampling location, and measuring intensity of the aerial image received through a slot pattern. The method further includes determining from the image map a detection position of a slope portion of the image map, at the detection position of the slope portion, measuring of a temporal intensity of the aerial image and measuring of relative positions of the slot pattern and the image position, the relative positions of the slot being measured as position-related data of the slot pattern and determining from the temporal intensity of the aerial image vibration-related information for said aerial image.
摘要翻译：本发明提供了一种用于通过在投影平面中的图像位置处投射空中图像来确定振动相关信息的方法，将空间图像的强度映射到图像映射中，该图像映射被布置为包括采样位置的坐标值，在每个采样位置采样的强度，以及测量通过槽模式接收的空间图像的强度。该方法还包括从图像映射确定图像映射的斜率部分的检测位置，在斜率部分的检测位置处，测量空中图像的时间强度，以及测量狭槽图案的相对位置和图像位置，将被测量的时隙的相对位置作为时隙图案的位置相关数据，并根据所述空间图像的空间图像振动相关信息的时间强度确定。

2. 发明授权

US07409302B2 Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus 有权
标题翻译：用于振动检测和振动分析的方法和装置以及配备有这种装置的光刻设备
公开(公告)号：US07409302B2
公开(公告)日：2008-08-05
申请号：US11226468
申请日：2005-09-15
申请人： Haico Victor Kok , Koen Kivits , Ron Van De Laak , Johannes Maria Kuiper , Gerbrand Van Der Zouw , Hoite Pieter Theodoor Tolsma
发明人： Haico Victor Kok , Koen Kivits , Ron Van De Laak , Johannes Maria Kuiper , Gerbrand Van Der Zouw , Hoite Pieter Theodoor Tolsma
IPC分类号： G01L7/00
CPC分类号： G03F7/70666 , G03F7/709 , G03F9/7096
摘要： The invention provides a method for determining vibration-related information by projecting an aerial image at an image position in a projection plane, mapping an intensity of the aerial image into an image map, the image map arranged for comprising values of coordinates of sampling locations and of the intensity sampled at each sampling location, and measuring intensity of the aerial image received through a slot pattern. The method further includes determining from the image map a detection position of a slope portion of the image map, at the detection position of the slope portion, measuring of a temporal intensity of the aerial image and measuring of relative positions of the slot pattern and the image position, the relative positions of the slot being measured as position-related data of the slot pattern and determining from the temporal intensity of the aerial image vibration-related information for said aerial image.
摘要翻译：本发明提供了一种用于通过在投影平面中的图像位置处投射空中图像来确定振动相关信息的方法，将空间图像的强度映射到图像映射中，该图像映射被布置为包括采样位置的坐标值，在每个采样位置采样的强度，以及测量通过槽模式接收的空间图像的强度。该方法还包括从图像映射确定图像映射的斜率部分的检测位置，在斜率部分的检测位置处，测量空中图像的时间强度，以及测量狭槽图案的相对位置和图像位置，将被测量的时隙的相对位置作为时隙图案的位置相关数据，并根据所述空间图像的空间图像振动相关信息的时间强度确定。

3. 发明授权

US07773235B2 Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus 有权
标题翻译：用于振动检测和振动分析的方法和装置以及配备有这种装置的光刻设备
公开(公告)号：US07773235B2
公开(公告)日：2010-08-10
申请号：US12216514
申请日：2008-07-07
申请人： Haico Victor Kok , Koen Kivits , Ron Van de Laak , Johannes Maria Kuiper , Gerbrand Van der Zouw , Hoite P Theodoor Tolsma
发明人： Haico Victor Kok , Koen Kivits , Ron Van de Laak , Johannes Maria Kuiper , Gerbrand Van der Zouw , Hoite P Theodoor Tolsma
IPC分类号： G01B11/14
CPC分类号： G03F7/70666 , G03F7/709 , G03F9/7096
摘要： The invention provides a method for determining vibration-related information by projecting an aerial image at an image position in a projection plane, mapping an intensity of the aerial image into an image map, the image map arranged for comprising values of coordinates of sampling locations and of the intensity sampled at each sampling location, and measuring intensity of the aerial image received through a slot pattern. The method further includes determining from the image map a detection position of a slope portion of the image map, at the detection position of the slope portion, measuring of a temporal intensity of the aerial image and measuring of relative positions of the slot pattern and the image position, the relative positions of the slot being measured as position-related data of the slot pattern and determining from the temporal intensity of the aerial image vibration-related information for said aerial image.
摘要翻译：本发明提供了一种用于通过在投影平面中的图像位置处投射空中图像来确定振动相关信息的方法，将空间图像的强度映射到图像映射中，该图像映射被布置为包括采样位置的坐标值，在每个采样位置采样的强度，以及测量通过槽模式接收的空间图像的强度。该方法还包括从图像映射确定图像映射的斜率部分的检测位置，在斜率部分的检测位置处，测量空中图像的时间强度，以及测量狭槽图案的相对位置和图像位置，将被测量的时隙的相对位置作为时隙图案的位置相关数据，并根据所述空间图像的空间图像振动相关信息的时间强度确定。

4. 发明授权

US07308368B2 Method and apparatus for vibration detection, method and apparatus for vibration analysis, lithographic apparatus, device manufacturing method, and computer program 有权
标题翻译：用于振动检测的方法和装置，用于振动分析的方法和装置，光刻设备，装置制造方法和计算机程序
公开(公告)号：US07308368B2
公开(公告)日：2007-12-11
申请号：US10941019
申请日：2004-09-15
申请人： Haico Victor Kok , Koen Kivits , Ron Van De Laak , Hans Kuiper
发明人： Haico Victor Kok , Koen Kivits , Ron Van De Laak , Hans Kuiper
IPC分类号： G06F19/00
CPC分类号： G03F7/70666 , G03F7/709 , G03F9/7096
摘要： A method is provided for determining information relating to vibration. The method includes projecting an aerial image at an image position in a projection plane; mapping an intensity of the aerial image into an image map that contains values of coordinates of sampling locations and of the intensity sampled at each sampling location; and measuring intensity of the aerial image received through a slot pattern. The method may also include determining from the image map a detection position of a slope portion of the image map; at the detection position of the slope portion, measuring a temporal intensity of the aerial image and relative positions of the slot pattern and the image position; and determining from the temporal intensity of the aerial image information relating to vibration for the aerial image. The relative positions of the slot can be measured as position-related data of the slot pattern.
摘要翻译：提供了一种用于确定与振动有关的信息的方法。该方法包括在投影平面中的图像位置投影航空图像; 将空间图像的强度映射成包含采样位置的坐标值和在每个采样位置采样的强度的图像映射; 并测量通过狭槽模式接收的空中图像的强度。该方法还可以包括从图像映射确定图像映射的斜率部分的检测位置; 在倾斜部分的检测位置处，测量空中图像的时间强度和缝隙图案和图像位置的相对位置; 并根据与航空图像的振动有关的空中图像信息的时间强度来确定。槽的相对位置可以被测量为槽模式的位置相关数据。

5. 发明申请

US20060061746A1 Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped such an apparatus 有权
标题翻译：用于振动检测和振动分析的方法和装置，以及装备有该装置的光刻设备
公开(公告)号：US20060061746A1
公开(公告)日：2006-03-23
申请号：US11226468
申请日：2005-09-15
申请人： Haico Kok , Hoite Tolsma , Gerbrand Zouw , Koen Kivits , Ron Van De Laak , Johannes Kuiper
发明人： Haico Kok , Hoite Tolsma , Gerbrand Zouw , Koen Kivits , Ron Van De Laak , Johannes Kuiper
IPC分类号： G03B27/42
CPC分类号： G03F7/70666 , G03F7/709 , G03F9/7096
摘要： The invention provides a method for determining vibration-related information by projecting an aerial image at an image position in a projection plane, mapping an intensity of the aerial image into an image map, the image map arranged for comprising values of coordinates of sampling locations and of the intensity sampled at each sampling location, and measuring intensity of the aerial image received through a slot pattern. The method further includes determining from the image map a detection position of a slope portion of the image map, at the detection position of the slope portion, measuring of a temporal intensity of the aerial image and measuring of relative positions of the slot pattern and the image position, the relative positions of the slot being measured as position-related data of the slot pattern and determining from the temporal intensity of the aerial image vibration-related information for said aerial image.
摘要翻译：本发明提供了一种用于通过在投影平面中的图像位置处投射空中图像来确定振动相关信息的方法，将空间图像的强度映射到图像映射中，该图像映射被布置为包括采样位置的坐标值，在每个采样位置采样的强度，以及测量通过槽模式接收的空间图像的强度。该方法还包括从图像映射确定图像映射的斜率部分的检测位置，在斜率部分的检测位置处，测量空中图像的时间强度，以及测量狭槽图案的相对位置和图像位置，将被测量的时隙的相对位置作为时隙图案的位置相关数据，并根据所述空间图像的空间图像振动相关信息的时间强度确定。

6. 发明授权

US08427627B2 Lithographic apparatus and methods 有权
标题翻译：平版印刷设备和方法
公开(公告)号：US08427627B2
公开(公告)日：2013-04-23
申请号：US12398403
申请日：2009-03-05
申请人： Koen Kivits , Hans Jansen , Vasco Miguel Matias Serrao
发明人： Koen Kivits , Hans Jansen , Vasco Miguel Matias Serrao
IPC分类号： G03B27/52 , G03B27/32
CPC分类号： G03F7/7085 , G03F7/70341 , G03F7/70925
摘要： A system for cleaning a limited area of a top surface of a substrate table or an object positioned on a top surface of a substrate table is disclosed. The optical system used during normal imaging is adjusted to limit the cross-sectional area of a radiation beam to form a cleaning radiation beam which impinges on the limited area.
摘要翻译：公开了一种用于清洁衬底台或位于衬底台顶表面上的物体的顶表面的有限区域的系统。调整在正常成像期间使用的光学系统以限制辐射束的横截面积以形成撞击有限区域的清洁辐射束。

7. 发明申请

US20060058972A1 Method and apparatus for vibration detection, method and apparatus for vibration analysis, lithographic apparatus, device manufacturing method, and computer program 有权
标题翻译：用于振动检测的方法和装置，用于振动分析的方法和装置，光刻设备，装置制造方法和计算机程序
公开(公告)号：US20060058972A1
公开(公告)日：2006-03-16
申请号：US10941019
申请日：2004-09-15
申请人： Haico Kok , Koen Kivits , Ron De Laak , Hans Kuiper
发明人： Haico Kok , Koen Kivits , Ron De Laak , Hans Kuiper
IPC分类号： G01L7/00 , G01F17/00
CPC分类号： G03F7/70666 , G03F7/709 , G03F9/7096
摘要： According to one embodiment, a method for determining information relating to vibration includes projecting an aerial image at an image position in a projection plane; mapping an intensity of the aerial image into an image map, the image map arranged for comprising values of coordinates of sampling locations and of the intensity sampled at each sampling location; and measuring intensity of the aerial image received through a slot pattern. Further, the method includes determining from the image map a detection position of a slope portion of the image map; at the detection position of the slope portion, measuring a temporal intensity of the aerial image and relative positions of the slot pattern and the image position, the relative positions of the slot being measured as position-related data of the slot pattern; and determining from the temporal intensity of the aerial image information relating to vibration for said aerial image.
摘要翻译：根据一个实施例，一种用于确定与振动有关的信息的方法包括在投影平面中的图像位置投影空中图像; 将所述空间图像的强度映射到图像映射中，所述图像映射被布置为包括采样位置的坐标值和在每个采样位置采样的强度值; 并测量通过狭槽模式接收的空中图像的强度。此外，该方法包括从图像映射确定图像映射的斜率部分的检测位置; 在斜坡部分的检测位置处，测量空中图像的时间强度和缝隙图案和图像位置的相对位置，测量的时隙的相对位置作为时隙图案的位置相关数据; 并根据与所述航空图像的振动有关的空中图像信息的时间强度来确定。

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