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    • 6. 发明专利
    • DE4014648A1
    • 1991-11-14
    • DE4014648
    • 1990-05-08
    • HOECHST AG
    • ROESCHERT HORST DIPL CHEM DRPAWLOWSKI GEORG DIPL CHEM DRMERREM HANS-JOACHIM DIPL CHEMDAMMEL RALPH DIPL CHEM DRSPIESS WALTER DIPL PHYS DR
    • G03F7/004G03F7/016G03F7/039H01L21/027
    • A description is given of a positive-working radiation-sensitive mixture essentially containing a photoactive component and a water-insoluble binder which is soluble, or at least swellable, in aqueous alkali solution. The mixture is characterised in that the photoactive component used is a compound containing alpha -diazo- beta -keto ester and sulphonic acid ester units of the general formula I … … where …… R and R are, independently of one another, an aliphatic, cycloaliphatic, araliphatic or aromatic radical containing 4 to 20 carbon atoms, in which individual CH2 groups may be replaced by oxygen or sulphur atoms or by -NR - or -NH- groups and/or contain keto groups, … X is an aliphatic, cycloaliphatic, carbocyclic, heterocyclic or araliphatic radical containing 2 to 22 carbon atoms, in which individual CH2 groups may be replaced by oxygen or sulphur atoms or by the groups -NR -, -C(O)-O-, -C(O)-NR -, … … -NR -C(O)-NR -, -O-C(O)-NR -, … … -O-C(O)-O- or CH- groups by … … where … R and R are, independently of one another, hydrogen or an aliphatic, carbocyclic or araliphatic radical, … m is an integer from 3 to 8 and … n is an integer from 1 to 3. …… The radiation-sensitive mixture is particularly suitable for exposure with radiation of a wavelength of 190 to 300 nm.