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1. 发明专利

JPH05250738A 失效
公开(公告)号：JPH05250738A
公开(公告)日：1993-09-28
申请号：JP4668192
申请日：1992-03-04
申请人： HITACHI LTD , HITACHI MAXELL
发明人： NIIHARA TOSHIO , KATO KEIZO , ANDO KEIKICHI
IPC分类号： G11B11/10 , G11B11/105
摘要： PURPOSE:To provide a substrate for magneto-optical disc having high flatness and no microcrack or irregularities. CONSTITUTION:A resin layer 2 is formed on a transparent disc 1 and then the resin layer 2 is etched to provide a guide groove 3 and a pit 4. According to the constitution, disc noise can be reduced significantly in a magneto-optical disc medium.

2. 发明专利

JPH04105010A METHOD AND DEVICE FOR SHAPE AND DIMENSION MEASUREMENT 失效
公开(公告)号：JPH04105010A
公开(公告)日：1992-04-07
申请号：JP22250990
申请日：1990-08-27
申请人： HITACHI LTD , HITACHI MAXELL
发明人： KATO KEIZO , MATSUOKA GENYA , NAKAYAMA YOSHINORI , HORIGOME SHINKICHI , FURUYA HISAHIRO
IPC分类号： G01B15/00 , H01J37/244 , H01J37/28
摘要： PURPOSE:To provide accurate measurability for the pattern shape dimension of the specimen surface by irradiating specimen with an electron beam, sensing secondary electrons emitted, determining the inclination angle of the specimen surface, and calculating and displaying the section shape. CONSTITUTION:An electron beam generated by an electron gun 11 when a low acceleration voltage is impressed, is passed through a deflector 14 and a lens system 13 and cast onto a pattern to be measured on a specimen wafer 12 placed on a specimen table 15, and there scanning is made. Signals from a secondary electron sensor 16 (16a, 16b) are added and averaged by a signal processing circuit 21 according to the set number of deflection scanning passes. An inclination angle converter 22 determines the inclination angle of projections and recesses on the surface of specimen from these signals added and averaged by the circuit 21, while a shape calculating device 23 determines the z-coordinates of the depth in the scanning direction (x) from the correlationship before and after the inclination angle. At a shape dimension measuring device 24, on the other hand, the x-coordinate of the deflection signal given by a deflection control circuit 25 and the z-coordinate determined by the shape calculating device 23 are fed to a display device, where the section shape of the specimen surface is displayed figuratively, and the shape dimensions are measured.

3. 发明专利

JPH02152042A OPTICAL MEMORY SUBSTRATE 失效
公开(公告)号：JPH02152042A
公开(公告)日：1990-06-12
申请号：JP30604888
申请日：1988-12-05
申请人： HITACHI LTD , HITACHI MAXELL
发明人： KATO KEIZO , KIRINO FUMIYOSHI , OTA NORIO , HORIGOME SHINKICHI
IPC分类号： G11B11/10 , G11B7/24 , G11B7/26 , G11B11/105
摘要： PURPOSE:To enhance mechanical strength and to stabilize recording and reproducing during high-speed rotation by forming pits or guide grooves of prescribed patterns on the accurately polished surface of a metallic substrate. CONSTITUTION:A photoresist film 2 is formed on the accurately polished and worked metallic substrate 1 and a photomask 3 formed the guide grooves and pits of the prescribed patterns 5 is disposed thereon and is irradiated with UV rays 4. The prescribed patterns of the photomask 3 are transferred as patterns onto the photoresist film 2 after development and the resist film is subjected to plasma etching, by which the patterns 7b are obtd. on the surface of the metallic substrate 1. The photoresist film 2 is then removed and the guide grooves and pits of the prescribed patterns 5 are formed.

4. 发明专利

JPS63302440A MANUFACTURE OF STAMPER FOR OPTICAL DISK 失效
公开(公告)号：JPS63302440A
公开(公告)日：1988-12-09
申请号：JP13811887
申请日：1987-06-03
申请人： HITACHI LTD , HITACHI MAXELL
发明人： OKAMOTO KAZUHISA , KATO KEIZO , HORIGOME SHINKICHI , MATSUSHIMA SEIICHI
IPC分类号： G11B7/26
摘要： PURPOSE:To manufacture a stamper inexpensively and with a high yield, by manufacturing the stamper in which a guide groove and a signal pit are formed on a metallic plate with two number of processes, a laser processing and an arranging processing. CONSTITUTION:The metallic plate 1 to process the guide groove is mounted on a rotary table 3 on a rotating device 2, and it is interlocked with a laser system 5 by using a controller 4. By rotating the rotary table 3 and controlling rotating speed by the controller 4, a fine guide groove and the signal pit are laser-processed concentrically or spirally by a laser beam 6. After laser processing and formation, the metallic plate 1 is removed from the rotary table 3, and the diameter of the metallic plate 1 is waveformed and processed required for 2P or injection. Thus, since the stamper can be manufactured with two number of processes, it is possible to improve the yield of the stamper and to reduce its cost.

5. 发明专利

JPH09245383A PRODUCTION OF OPTICAL MASTER DISK 失效
公开(公告)号：JPH09245383A
公开(公告)日：1997-09-19
申请号：JP5133396
申请日：1996-03-08
申请人： HITACHI LTD , HITACHI MAXELL
发明人： KATO KEIZO , UENO TAKUMI , ANDO TETSUO
IPC分类号： G11B7/26
摘要： PROBLEM TO BE SOLVED: To form groove pits which are stable to a fluctuation in film thicknesses and are made finer by forming a photoresist film and a color fadable film on the surface of a glass substrate and exposing pit patterns thereto. SOLUTION: The photoresist film 2 is applied on the surface of the flat glass substrate 1 polished with high accuracy and is subjected to a heat treatment. The color fadable film 3 is further applied thereon after cooling and a heat-treated. The concentrical pit patterns are then exposed thereon by an optical disk exposure device. The exposure is executed by condensing the collimating beams 5 on an Ar laser beam to a condenser lens 4 and irradiating the color fadable film 3 and the photoresist film 2 with a laser spot. The color fadable film 3 induces photoreaction only in the irradiated parts, thereby forming color fading 6 and allowing the transmission of the beams. At this time, the film thickness D of the color fadable film 3 and the photoresist film 2 is formed within the range of the equation when the wavelength of the laser beam 5 is defined as λ and the numerical aperture of the condenser lens 4 as NA. The laser spot transmitted through the film forms a latent image 7 on the photoresist film 2 and forms rugged pits 8 after the development. As a result, the groove pits which are stable to the fluctuation in the film thickness and are made finer are formed.

6. 发明专利

JPH08171743A OPTICAL MASTER DISK AND ITS CUTTING METHOD 失效
公开(公告)号：JPH08171743A
公开(公告)日：1996-07-02
申请号：JP31345594
申请日：1994-12-16
申请人： HITACHI MAXELL , HITACHI LTD
发明人： YASUI TOSHIAKI , KATO KEIZO , ITO SHO
IPC分类号： G11B7/00 , G11B7/0045 , G11B7/26
摘要： PURPOSE: To obtain an optical master disk capable of stably forming rugged patterns in which slender and deep pits corresponding to prepits and shallow grooves corresponding to guide grooves coexist. CONSTITUTION: A photoresist layer is formed on a substrate and the deep pits which are the basis for the prepits and the shallow grooves which are the bases for the guide grooves are cut on this photoresist layer. A photoresist material which is formed by using a novolak resin having a ratio Mw/Mn of =40000 therefrom as a base and contains a diazide photosensitive agent having a parameter A of 0.7 to 0.8 and the absorbance of light of a wavelength 458nm of 1/5 to 1/20 the absorbance of light of a wavelength of about 365nm is used as the photoresist material for forming the photoresist layer described above.

7. 发明专利

JPS63281239A INFORMATION RECORDING MASTER DISK 失效
公开(公告)号：JPS63281239A
公开(公告)日：1988-11-17
申请号：JP11469287
申请日：1987-05-13
申请人： HITACHI LTD , HITACHI MAXELL
发明人： KATO KEIZO , HORIGOME SHINKICHI , OKAMOTO KAZUHISA
IPC分类号： G11B7/26 , G11B7/24
摘要： PURPOSE:To enable formation of pits and guide grooves by a photopolymer method or photocast method, etc., even to an opaque substrate consisting of metals, etc., by adopting an information recording master disk having UV transmittivity. CONSTITUTION:The information recording master disk 6 is formed of a material which allows transmission of UV rays. Namely, a UV curing resin 7 is formed on the information recording master disk 6 and further, the metallic substrate 8 consisting of Al, Cu, Fe, ceramics, etc., is formed on the same, then the UV rays 9 are projected thereon from the information recording master disk 6 side. The information recording master disk 6 is, for example, a quartz glass substrate and, therefore, allows the transmission of the UV rays 9. The UV curing resin 7 irradiated with the UV rays 9 is cured and the pits and guide grooves 6 of the information recording master disk 6 are formed at this time; in addition, the master disk is adhered to the substrate 8. Ruggedness such as pits and guide grooves can be thereby formed to a replica disk formed by using the opaque substrate and the replica disk having high resistance to breakage is obtd.

8. 发明专利

JPH01143035A INFORMATION RECORDING MASTER DISK AND ITS PRODUCTION 失效
公开(公告)号：JPH01143035A
公开(公告)日：1989-06-05
申请号：JP29979887
申请日：1987-11-30
申请人： HITACHI LTD , HITACHI MAXELL
发明人： KATO KEIZO , OTA NORIO , ITO SHO , FUJITA MASUMI
IPC分类号： G11B7/26 , G11B7/24
摘要： PURPOSE:To facilitate control of the depths of guide grooves or pits and track address information grooves or pits to optimum depths by forming the above- mentioned grooves or pits to different depths. CONSTITUTION:The guide grooves or pits 4 of prescribed patterns are first formed on a substrate 1, then the track address information grooves or pits 8 of at least one kind of the prescribed patterns by following up to the guide grooves or pits 4 are formed. The guide grooves or pits 4 and the track address information grooves or pits 8 are formed by separate stages and the respective grooves or pits 4, 8 are formed to the different depths, by which the information recording master disk is produced.

9. 发明专利

JPS63308745A INFORMATION RECORDING MEDIUM 失效
公开(公告)号：JPS63308745A
公开(公告)日：1988-12-16
申请号：JP14317187
申请日：1987-06-10
申请人： HITACHI LTD , HITACHI MAXELL
发明人： KATO KEIZO , KIRINO FUMIYOSHI , HORIGOME SHINKICHI , OKAMOTO KAZUHISA
IPC分类号： G11B7/26
摘要： PURPOSE:To decrease surface roughness and to obtain an information recording medium having high reliability by forming guide grooves and pits respectively independently, thereby forming the guide grooves and pits having arbitrary depths. CONSTITUTION:A dielectric film 2 is formed on a polished glass substrate 1 and a photoresist film 3 having 1,000-2,000Angstrom thickness is formed thereon. The dielectric film 2 consists of SiO, ZnS, etc. The exposed parts of the photoresist film 3 are removed by development by which the guide grooves 4 are formed. The recording master disk formed with the guide grooves 4 is etched under a high-frequency discharge in a vacuum where gaseous Ar is present in an etching deice. The dielectric film 2 corresponding to the parts of the guide grooves 4 where the photoresist film 3 is removed is etched to obtain the guide grooves 5. A photoresist film 7 is freshly formed after the removal of the photoresist film 3 and the guide grooves 5 are reproduced. Exposure for the additional recording of the pits is executed and the resist film 7 of the exposed parts is removed by the development to form the pits 6. The additional recording maser disk subjected to the etching is subjected to the treatments similar to the treatment at the time of forming the guide grooves to form the pits 8 in the dielectric film 2; thereafter, the resist film 7 is removed.

10. 发明专利

DE2309058A1 未知
公开(公告)号：DE2309058A1
公开(公告)日：1973-09-13
申请号：DE2309058
申请日：1973-02-23
申请人： HITACHI LTD
发明人： HACHIOJI TOKIO , YONEZAWA SEIJI , IYAMA AKIYOSHI , ITO HISATSUGU , KATO KEIZO
IPC分类号： G03H1/26 , G02B27/44 , G03B15/00 , G02B27/00
摘要： A hologram reconstruction system employs a hologram with a color picture recorded thereon, on which a collimated beam generated from a laser source is illuminated and a lens converges transmitted beams of the hologram. A rotary disc having sectorial slits is disposed at the back focal plane of the lens, and a camera tube converts the diffraction beams of respective components of red, green and blue derived through the slits of the rotary disc in the form of black and white densities into video signals. A magnetic head records the output signals from the camera tube on a magnetic disc, whereby the recorded electric signals are read out through the magnetic head from the magnetic disc, to reconstruct a color image in conformity with the NTSC system.

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