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1. 发明专利

JPH11294596A MONITORING DEVICE AND METHOD FOR MECHANICAL SEAL 失效
公开(公告)号：JPH11294596A
公开(公告)日：1999-10-29
申请号：JP9296098
申请日：1998-04-06
申请人： HITACHI LTD , HITACHI TECHNO ENG
发明人： KASHIBE MITSUNORI , ISHIYAMA YOSHIO , KANZAKI ATSUMITSU , KAWAMURA SUNAO
IPC分类号： F16J15/34
摘要： PROBLEM TO BE SOLVED: To predict a life without disassembling a mechanical seal by detecting the magnitude of the magnetic field from a magnetic field generation section generating the positional displacement corresponding to the abrasion of sliding members kept in face contact, and arithmetically processing the allowable limit data based on the detected value and measured data. SOLUTION: A rotary shaft 2 extending in a sealed container 1 is sealed by a shaft seal seat 3 and a fixed seat 4 fixed to a shaft seal box 6. A magnetic sensor 8 facing the magnetic field 7 arranged on a rotary ring 5 is inserted into a position adjusting device 9 and is supported on the shaft seal box 6. The change of the magnetic force generated from the magnetic field 7 in response to the state change of the rotary ring 5 is detected by the magnetic sensor 8 and is converted into a digital signal by a converter 10, and the change of the magnetic field is quantitatively grasped and processed by a data processing device 11. The life of sliding members 3, 5 is predicted based on the allowable limit data corresponding to the detected magnitude of the magnetic field and the measured data at least at two points indicating the relation between the rotation accumulated time of the rotary shaft 2 and the magnetic field detected value.

2. 发明专利

JPH08254402A ROTARY SHAFT MONITORING DEVICE 失效
公开(公告)号：JPH08254402A
公开(公告)日：1996-10-01
申请号：JP5854995
申请日：1995-03-17
申请人： HITACHI LTD , HITACHI TECHNO ENG
发明人： KASHIBE MITSUNORI , KANZAKI ATSUMITSU , FURUKAWA KEISHIN , KINOSHITA TAKATOSHI , KAWAMURA SUNAO , OKUTO KATSUYA
IPC分类号： G01B7/00 , G01B7/312
摘要： PURPOSE: To measure the run-out and movement quantities of a rotary shaft without any contact with the rotary shaft. CONSTITUTION: A rotary shaft monitoring device is composed of a rotary shaft 1, a magnetic field 2, a sensor 3, a sleeve 6, a magnetic field protection box 7, and a sensor position adjuster. A magnetic substance (for example, a permanent magnet) is mounted on a part which is provided on the rotary shaft 1 or the outer circumference of the rotary shaft, the magnet is detected by the magnetic sensor 3 so that the run-out quantity of the rotary shaft 1 and the axial movement quantity are detected and an abnormal diagnosis such as a low speed rotor can be easily measured.

3. 发明专利

JPS6321372A CRYOPUMP AND CONTROL METHOD THEREOF 失效
公开(公告)号：JPS6321372A
公开(公告)日：1988-01-28
申请号：JP16463686
申请日：1986-07-15
申请人： HITACHI LTD , HITACHI TECHNO ENG
发明人： TAKAHASHI TSUYOSHI , KASHIBE MITSUNORI , TAKADA TADASHI
IPC分类号： F04B37/08
摘要： PURPOSE:To cut cost by arranging a plurality of contact rods which can contact the second panel, onto the first panel. CONSTITUTION:The first panel 4 cooled below about 100 deg.K and the second panel 5 cooled below about 20 deg.K are installed into a refrigerator 1, and a plurality of contact rods 7 which can contact the second panel 5 are arranged onto the first panel 4. Therefore, the heat source for the second panel 5 can be taken from the first panel 4, and the need of separately installing a heating means can be avoided, and cost cut is permitted.

4. 发明专利

JPH06241323A AUTOMATIC LUBRICATION LIQUID CIRCULATING DEVICE 失效
公开(公告)号：JPH06241323A
公开(公告)日：1994-08-30
申请号：JP3009893
申请日：1993-02-19
申请人： HITACHI LTD , HITACHI TECHNO ENG
发明人： KANZAKI ATSUMITSU , FURUKAWA KEISHIN , KASHIBE MITSUNORI , KINOSHITA TAKATOSHI , MAEDA NORIFUMI
IPC分类号： F16J15/34
摘要： PURPOSE:To automatically circulate lubrication liquid so as to carry out continuous operation by connecting a shaft seal device to a lubrication liquid charge pot in which a liquid feed pipe from a liquid feed tank is inserted through a pair of pipe lines in which a non-shaft seal type pump driven by cooling fluid of the lubrication liquid is located. CONSTITUTION:A shaft seal device 1 and a lubrication liquid charge pot 2 are connected together through a pair of circulation pipe lines 4, 5, and a liquid feed pipe connected to a liquid feed tank 9 is inserted into the pot 2. Further, a non-shaft seal type pump 3 is located in the pipe line 4, and is connected to a cooling water pipe line 8 connected to a cooling coil 7 in the pot 2 so as to be driven by cooling water. The lubrication liquid from the pot 2 is circulated through the shaft seal device 1. Meanwhile if the lubrication liquid leaks, the pressure of an air layer zone 13 in the pot 2 decreases, and accordingly, the lubrication liquid is automatically fed into the pot 2 from the tank 9.

5. 发明专利

JPH01253575A CRYOPUMP 失效
公开(公告)号：JPH01253575A
公开(公告)日：1989-10-09
申请号：JP8125788
申请日：1988-04-04
申请人： HITACHI LTD , HITACHI TECHNO ENG
发明人： TAKADA TADASHI , TAKAHASHI TSUYOSHI , KASHIBE MITSUNORI , YOSHIMATSU YUKIYOSHI
IPC分类号： F04B37/08
摘要： PURPOSE:To suppress the exhaust speed of the second panel by providing an auxiliary baffle inside the first panel in a cryopump provided with the first panel to be cooled, a baffle, and the second panel arranged in a space made by them and cooled to a further lower temperature. CONSTITUTION:A cryopump cools the first and second panels 4 and 5 fitted to cold stages 2 and 3 cooled by a refrigerator main body 1 to about 80K and 20K, for example. The moisture in the residual gas from an exhausted chamber 10 is adsorbed mainly by a baffle 6, components such as N2 and Ar are exhausted by the second panel 5 respectively, and the quantity of the gas flowing into the second panel 5 is restricted by a screen valve 11 between the baffle 6 and the second panel 5. In this case, an auxiliary baffle 13 closing a gap deltabetween the first panel 4 and the screen valve 11 when the screen valve 11 is fully closed is fitted to the inner wall of the first panel 4 so that the exhaust speed of the second panel 15 can be suppressed small.

6. 发明专利

JPS63306361A COLD ACCUMULATOR TYPE REFRIGERATOR 失效
公开(公告)号：JPS63306361A
公开(公告)日：1988-12-14
申请号：JP13980887
申请日：1987-06-05
申请人： HITACHI LTD , HITACHI TECHNO ENG
发明人： KASHIBE MITSUNORI , TAKAHASHI TSUYOSHI , TAKADA TADASHI
IPC分类号： F25B9/00 , F25B9/14

7. 发明专利

JPS63124880A CRYOPUMP REGENERATING METHOD 失效
公开(公告)号：JPS63124880A
公开(公告)日：1988-05-28
申请号：JP26760086
申请日：1986-11-12
申请人： HITACHI LTD , HITACHI TECHNO ENG
发明人： KASHIBE MITSUNORI , TAKAHASHI TSUYOSHI , TAKADA TADASHI
IPC分类号： F04B37/08
摘要： PURPOSE:To reduce the regeneration time, by increasing temperature of a panel detaching it from a cylinder and emitting gas from the panel to be exhausted by a turbo molecular pump or the like when regeneration is performed. CONSTITUTION:A shape memory alloy 5 of spring shape is used for connecting a cylinder 3 with a panel 4, and its temperature is increased detaching the panel 4 from a cylinder 2 by a change of temperature when regeneration is performed. In this way, a molecule of gas, condensed to the panel 4, is detached from it, but this molecule of gas is exhausted by a vacuum through a turbo molecular pump 8. Accordingly, reduction of the regeneration time is promoted because regeneration can be processed without stopping a helium refrigerator.

8. 发明专利

JP2000186774A VESSEL WITH MONITORING MECHANICAL SEAL 失效
公开(公告)号：JP2000186774A
公开(公告)日：2000-07-04
申请号：JP2000018587
申请日：2000-01-27
申请人： HITACHI LTD , HITACHI TECHNO ENG
发明人： KASHIBE MITSUNORI , KANZAKI ATSUMITSU , FURUKAWA KEISHIN , OKUTO KATSUYA
IPC分类号： F16J15/34
摘要： PROBLEM TO BE SOLVED: To measure the wear state of a rotary ring without inserting a measuring instrument into a shaft seal box or regularly setting it by providing a measurable mark on the circumferential part of the rotary ring, and providing an observation window capable of setting the measuring instrument on the outer peripheral part of the shaft seal box of a vessel. SOLUTION: This vessel is formed of a sealed vessel 1, a rotating shaft 2, a fixed seat 3 fixed to a shaft seal seat 4, a rotary ring 5 having a detection mark 6 such as irregular line, reflection mark, magnetic metal or permanent magnet on the outside surface, a sensor inserting metal fitting 9 capable of setting a measuring instrument 11 in a fixed position, and a spring receiver 12 fixed to the rotating shaft 2. The rotary ring 5 is rotated by a drive pin 12, the rotary ring 5 is brought into contact with the surface of the fixed seat 3 by a spring 14, and the airtightness within the vessel 1 and within the shaft seal chamber 10 is held by a sliding surface 15. According to this, the wear of the sliding surface 14 by a long-term operation and the axial movement of the rotary ring 5 according to it can be sensed to grasp the wear quantity of the sliding surface 15. Thus, the wear state of a sliding part can be detected without directly inserting a measuring sensor into the shaft seal box or regularly setting it.

9. 发明专利

JPH01111183A LIQUEFIED-GAS STORAGE VESSEL 失效
公开(公告)号：JPH01111183A
公开(公告)日：1989-04-27
申请号：JP26641287
申请日：1987-10-23
申请人： HITACHI LTD , HITACHI TECHNO ENG
发明人： TAKAHASHI TSUYOSHI , TAKADA TADASHI , KASHIBE MITSUNORI
IPC分类号： F25B9/00 , F25B9/14 , F25D3/10 , F25D13/00
摘要： PURPOSE: To eliminate periodical supply of liquefied nitrogen manually by performing an inverter control of a refrigerating machine by a pressure in a container. CONSTITUTION: Capacity of a compressor unit 4 for driving a refrigerating machine 3 with an inverter 7 is controlled to change generation of cold of the refrigerating machine 3. In this case, a controller 6 compares a pressure value measured by a manometer 5 with a precept reference value to calculate a pressure difference and inputs a signal corresponding to the pressure difference to control the inverter 7. A liquefied nitrogen tank 2 is a closed container heat insulated by vacuum. Therefore, as liquefied nitrogen is evaporated, the pressure in a liquefied nitrogen tank 2 is increased. In addition, when a vaporized nitrogen gas is condensed by the refrigerating machine 3, the pressure in the liquefied nitrogen tank 2 is reduced. This operation is controlled by the controller 6. When the pressure applied exceeds a set pressure value, the liquefying capacity of the refrigerating machine 3 is increased by a signal from the manometer 5 and when it is negative, the refrigerating capacity of the refrigerating machine 3 is lowered, thereby keeping a pressure balance.

10. 发明专利

JPS63239383A CRYOPUMP 失效
公开(公告)号：JPS63239383A
公开(公告)日：1988-10-05
申请号：JP7153187
申请日：1987-03-27
申请人： HITACHI LTD , HITACHI TECHNO ENG
发明人： KASHIBE MITSUNORI , TAKAHASHI TSUYOSHI , TAKADA TADASHI
IPC分类号： F04B37/08
摘要： PURPOSE:To obtain a cryopump whose gas discharge speed is variable, by providing a shutter means which may change the exposed area of a second panel for absorbing and trapping a low boiling point component, after a high boiling point component is absorbed and trapped from gas to be discharged by means of a baffle. CONSTITUTION:A shutter composed of a foldable thin film is secured at one end to a supporter 8 part and at the other end to a support 12 so that it is attached openably. A magnet 13 at the forward end of a support 12 is moved together with the shutter in association with the movement of a magnet 18 driven by a motor 19. Accordingly, the shutter 14 passes through a baffle 6 so that it may open and close its surface for exhaust gas such as N2, O2 or the like which is absorbed and trapped by a second panel 7. Further, since the shutter 14 is located downstream side of the baffle 6 in the direction of gas flow, no moisture and carbon oxide gas or the like are condensed on the shutter. Accordingly, it is possible to change the discharge speed satisfactorily without the rotation being stopped. Further, it is possible to prevent moisture and carbon oxide gas from being hindered in discharge to the baffle 6 even when the shutter 14 is fully closed.

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