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    • 3. 发明专利
    • METHOD AND APPARATUS FOR WORKING MICRO FABRICATION PART
    • JPS6369994A
    • 1988-03-30
    • JP21166286
    • 1986-09-10
    • HITACHI LTDHITACHI PLANT ENG & CONSTR CO
    • KUDO KAZUEKOZONO YUZOHANAZONO MASANOBUOGINO HIROYUKIFUKUZAWA KUNIYUKI
    • C25D5/02
    • PURPOSE:To prevent other site from being contaminated with working liquid and to accurately work only a micro fabrication part, by locally feeding the working liquid to the part and applying laser beams on the part while sealing this working liquid with other fluid. CONSTITUTION:A feed part 14 of working liquid is filled by feeding the working liquid through an introduction pipe 10 thereof provided to a locally-working cell and continuously brought into contact with a micro fabrication part. The working liquid is rounded to a suction part 15 thereof from the lower part of a first cone 1 and sucked through a suction pipe 11 of working liquid. On the other hand, fluid such as air is allowed to flow through an introduction pipe 12 of liquid for sealing, and a feed part 16 thereof is filled and thereby the flow of working liquid through the lower part of a second cone 2 is sealed. This fluid for sealing is rounded through the lower part of a third cone 3 and sucked through a suction pipe 13 of fluid for sealing. In this state, laser beams are vertically applied toward the fine part to be worked from the upper part of the locally-working cell and passed through a cover plate 5 and the working liquid and converged on the micro fabrication part and working such as plating or etching is performed.
    • 9. 发明专利
    • FOREIGN MATTER INSPECTION
    • JPH04147091A
    • 1992-05-20
    • JP27200490
    • 1990-10-09
    • HITACHI PLANT ENG & CONSTR CO
    • FUKUZAWA KUNIYUKIKOIDE HIDEOHAYATA FUMITAKA
    • G01V5/00G06T1/00H04N7/18
    • PURPOSE:To enable the reduction of inspection time of a foreign matter mixture by reducing an original image in a specified ratio to process it with the use of a filter to enlarge a reduced reference image to return to the image of the original size so as to image-calculate between the original image and the returned reference image. CONSTITUTION:At first X-ray transmission images of a raw flesh and a processed flesh, for instance, are integral-incorporated 1 into images constituted by the picture elements of 256X256 so as to make original images in less noise. Next, the image reduction processing 2 for reducing the original images in a ratio of 1 to 4 is performed. In addition, a space filter is operated to perform space filter processing 3 on the reduced original image. Next, the image enlargement processing 4 for enlarging the image of the original size of the reduced space processing image is performed to between-image-operation-process 5 between the original-size-returned space filter processing image and the original image so as to make a differential image. The differential image is made binary 6 with the aid of a proper threshold so as to selectively detect the image made by a foreign matter alone from the whole image. The good of ham is automatically discriminated 7 in accordance with the size of the detected image.