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    • 5. 发明专利
    • Magnetic recording medium and its production
    • 磁记录媒体及其制作
    • JP2000076638A
    • 2000-03-14
    • JP24023898
    • 1998-08-26
    • Hitachi LtdHitachi Maxell Ltd日立マクセル株式会社株式会社日立製作所
    • OGAWA YOICHIYANO AKIRAKITAGAKI NAOKISHIRAI HIROSHITAKAYAMA TAKANOBU
    • G11B5/66G11B5/64G11B5/65G11B5/84
    • PROBLEM TO BE SOLVED: To enable superior C/N characteristics by forming a metallic magnetic thin film comprising crystal grains of a specified grain diameter formed on a substrate so that the grain diameter of the crystal grains is increased as it goes from the substrate side of the thin film toward the outer surface side.
      SOLUTION: A metallic magnetic thin film 10 is formed from crystal grains of ≤20 nm average grain diameter so that the grain diameters of the Co crystal grains 11 and Co-O crystal grains 12 are stepwise increased as they go from the substrate side of the thin film 10 toward the outer surface side. The grain diameter is controlled and formed by adjusting the temperature of a can while optionally combining the intrusion of an inert gas as well. By increasing the grain diameter of the crystal grains near the outer surface of the thin film 10, the crystal magnetic anisotropy of the grains is enhanced and output is increased. Because of the small crystal grains on the substrate side, magnetic domains are made small, noise is reduced and a C-N ratio is increased. The tilt direction of the columnar crystal grains of a lower metallic magnetic layer 10a and an upper metallic magnetic thin film 10b may be changed.
      COPYRIGHT: (C)2000,JPO
    • 要解决的问题:为了通过形成包含在基板上形成的特定晶粒直径的金属磁性薄膜,使得晶粒的晶粒直径从基板侧的基板侧开始增加,从而实现优异的C / N特性 该薄膜朝向外表面侧。 解决方案:金属磁性薄膜10由<= 20nm平均粒径的晶粒形成,使得Co晶粒11和Co-O晶粒12的晶粒直径从基底侧逐渐增加 薄膜10朝向外表面侧。 通过调节罐的温度来控制和形成颗粒直径,同时可选地组合惰性气体的侵入。 通过增加薄膜10的外表面附近的晶粒的粒径,晶粒的晶体磁各向异性提高,输出增加。 由于基板侧的晶粒小,所以磁畴变小,噪声降低,C-N比增大。 可以改变下金属磁性层10a和上金属磁性薄膜10b的柱状晶粒的倾斜方向。