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1. 发明专利

DE602006002677D1 未知
公开(公告)号：DE602006002677D1
公开(公告)日：2008-10-23
申请号：DE602006002677
申请日：2006-07-28
申请人： HITACHI LTD , HITACHI HIGH TECH CORP , BABCOCK HITACHI KK
发明人： NISHIOKA AKIRA , AMOU KIYOSHI , SUKEGAWA YOSHIHIRO , KOWATARI TAKEHIKO , HAMADA YASUNAGA , HAMADA IKUHISA , MUKAI TOSHIFUMI , TAGUCHI YOSHINORI , YOKOTA HIROSHI
IPC分类号： F01N3/20 , B01D53/86
摘要： An exhaust aftertreatment system comprises an injector for injecting urea water into an exhaust duct, and a denitration catalyst disposed downstream of the injector with respect to a flow of exhaust gas 1. The exhaust aftertreatment system reduces nitrogen oxides in the exhaust gas 1 by the denitration catalyst 6 while using ammonia produced from the urea water injected from the injector 10. The urea water is injected along a direction of the flow of the exhaust gas within the exhaust duct 3, and a porous plate 12 is disposed in multiple stages in a space of the exhaust duct such that droplets of the injected urea water impinge against the porous plate 12 before reaching a wall surface of the exhaust duct 3. A surface of the porous plate 12 subjected to the impingement of the droplets is arranged to face downstream with respect to the flow of the exhaust gas 1. Deposition of the urea water is prevented by causing film boiling when the droplets impinge against the porous plate 12, and the urea water reflected by the porous plate 12 is uniformly dispersed into the exhaust gas 1. Thus, the urea water is uniformly dispersed into the exhaust gas 1 without increasing a pressure loss of the exhaust gas 1. The urea water is prevented from depositing on the wall surface and producing a precipitate in the form of a solid.

2. 发明专利

DE112008000984T5 未知
公开(公告)号：DE112008000984T5
公开(公告)日：2010-03-04
申请号：DE112008000984
申请日：2008-04-11
申请人： BABCOCK HITACHI KK
发明人： SHIMAMURA JUN , NAKAMOTO TAKANORI , KATSUBE TOSHIO , KIKKAWA HIROFUMI , NOSAKA HIROYUKI , SAITOU TAKAYUKI , TAGUCHI YOSHINORI , ISHIZAKA HIROSHI
IPC分类号： B01D53/64 , B01D53/34 , B01D53/50 , B01D53/81
摘要： A system is provided that prevents inhibition of adsorption of Hg and other heavy metals by activated carbon or other heavy metal adsorbent due to prior adsorption of sulfur trioxide (SO3) in an exhaust gas containing SO3. As it has been found that while SO3 is adsorbed, the adsorption of SO3 precedes the adsorption of Hg and other heavy metals onto activated carbon, a basic substance injection system is disposed along an exhaust gas flow channel at an upstream side of an activated carbon injection system, thereby attaining effective removal of Hg and other heavy metals from the exhaust gas by adsorption thereof onto surface pores of the activated carbon. The SO3 concentration after removal by basic substance conversion is computed from the SO3 concentration before removal, and the activated carbon injection rate can be controlled based on the concentration after removal.

3. 发明专利

JP2006326571A Fluid mixing device 有权
标题翻译：流体混合装置
公开(公告)号：JP2006326571A
公开(公告)日：2006-12-07
申请号：JP2005334558
申请日：2005-11-18
申请人： Babcock Hitachi Kk , Hitachi High-Technologies Corp , Hitachi Ltd , バブコック日立株式会社 , 株式会社日立ハイテクノロジーズ , 株式会社日立製作所
发明人： NISHIOKA AKIRA , AMO KIYOSHI , SUKEGAWA YOSHIHIRO , KOWATARI TAKEHIKO , HAMADA YASUHISA , HAMADA IKUHISA , MUKAI TOSHIFUMI , TAGUCHI YOSHINORI , YOKOTA HIROSHI
IPC分类号： B01F3/02
CPC分类号： B01F5/061 , B01D53/8631 , B01F5/0415 , B01F5/0428 , B01F2005/0017 , B01F2005/0441 , B01F2215/0422 , F23D14/64 , F23J15/003 , F23R3/14 , F23R3/286 , Y10T137/87587 , Y10T137/87652
摘要： PROBLEM TO BE SOLVED: To evenly mix fluids 1, 2 in small spacing by suppressing the pressure loss of the fluid 1 as much as possible and allowing only a required quantity of the fluid 2 to be sucked when to mix the fluids 1 and 2 by injecting the fluid 2 into a channel in which the fluid 1 flows. SOLUTION: An internal cylinder 13 that narrows a diameter of the channel to a diameter smaller than an internal diameter of the channel 11 is provided inside a cylindrical channel 11 in which the fluid 1 flows, a stationery swirler 15 consisting of 4 radially arranged blades is provided inside the cylinder 13, header spacing to which the fluid 2 is supplied is provided on the outer periphery of the wall of the cylinder 13 that contacts a burble region generated by allowing the fluid 1 to hit on the swirler 15, and an opening 16 that communicates the burble region with the header spacing is provided on the wall of the cylinder 13 that contacts the burble region. The fluid 2 supplied into the header spacing inflows from the opening 16 to the burble region formed along a downstream surface of the swirler 15 by allowing the fluid 1 to hit on the swirler 15, and is mixed to the fluid 1 to which swirl force is applied by the swirler 15 while swirling after diffused in a direction along the blades of the swirler 15. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：通过尽可能地抑制流体1的压力损失来均匀地将流体1,2均匀地混合，并且当混合流体1时仅允许所需量的流体2被吸入并且通过将流体2注入到流体1流动的通道中。解决方案：在流体1流动的圆柱形通道11内部设置将通道直径缩小至小于通道11的内径的直径的内筒13，由径向4组成的文具旋流器15 在气缸13的内部设有排出的叶片，在气缸13的壁的外周设置有流体2供给的集管间隔，其与通过使流体1撞击旋流器15而产生的燃烧区域接触，在与气泡区域接触的气缸13的壁上设置有将燃烧区域与头部间隔连通的开口16。通过允许流体1撞击到旋流器15上，供应到集管间隔中的流体2从开口16流入沿着旋流器15的下游表面形成的燃烧区域，并且混合到旋流力为在旋流器15的叶片方向扩散后旋转的旋转器15施加。版权所有（C）2007，JPO＆INPIT

4. 发明专利

JP2007032472A Exhaust gas treatment device using urea water 审中-公开
标题翻译：使用尿素水的排气处理装置
公开(公告)号：JP2007032472A
公开(公告)日：2007-02-08
申请号：JP2005219090
申请日：2005-07-28
申请人： Babcock Hitachi Kk , Hitachi High-Technologies Corp , Hitachi Ltd , バブコック日立株式会社 , 株式会社日立ハイテクノロジーズ , 株式会社日立製作所
发明人： NISHIOKA AKIRA , AMO KIYOSHI , SUKEGAWA YOSHIHIRO , KOWATARI TAKEHIKO , HAMADA YASUHISA , HAMADA IKUHISA , MUKAI TOSHIFUMI , TAGUCHI YOSHINORI , YOKOTA HIROSHI
IPC分类号： F01N3/08 , B01D53/94 , F01N3/24 , F01N3/28
CPC分类号： F01N3/2066 , B01D53/90 , B01D53/9431 , B01D2251/2067 , B01F3/04049 , B01F5/0268 , B01F5/0473 , F01N3/035 , F01N3/106 , F01N3/108 , F01N3/2053 , F01N13/0097 , F01N2240/20 , F01N2240/40 , F01N2570/14 , F01N2610/02 , F01N2610/102 , F01N2610/1453 , Y02A50/2344 , Y02T10/24
摘要： PROBLEM TO BE SOLVED: To uniformly disperse urea water in exhaust gas without increasing the pressure loss of the exhaust gas, while preventing the urea water from being deposited on a wall and then precipitated as solid materials.
SOLUTION: The exhaust gas treatment device comprises an injection device 10 for injecting the urea water to an exhaust flue 3, and a NOx removal catalyst 6 provided in the injection device on the downstream side of exhaust gas. It uses ammonia produced from the injected urea water for reducing nitrogen oxide in the exhaust gas with the NOx removal catalyst 6. The urea water is injected 11 thereto across the flowing direction of the exhaust gas in the exhaust flue. Porous plates 12, 13 are provided in multiple stages in an exhaust flue space in the way that the injected urea water droplets arrive at the wall face of the exhaust flue, where the urea water droplets collide therewith. The porous plates are arranged therein with their colliding faces inclined to the downstream side of the exhaust gas. The droplets are film-boiled when colliding with the porous plates to prevent the deposition of the urea water, and the reflected urea water is uniformly dispersed into the exhaust gas.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了均匀地将尿素水分散在排气中，而不增加废气的压力损失，同时防止尿素水沉积在壁上，然后作为固体材料沉淀。解决方案：废气处理装置包括用于将尿素水喷射到排气烟道3的喷射装置10和设置在排气下游侧的喷射装置中的NOx去除催化剂6。使用由喷射的尿素水生成的氨，用NO x除去催化剂6还原废气中的氮氧化物。尿素水通过排气烟道中排气的流动方向喷入11。多孔板12,13在排气烟道空间中以多级设置，使得喷射的尿素水滴到达排气烟道的壁面，尿素水滴与其相撞。多孔板布置在其中，其碰撞面向排气的下游侧倾斜。当与多孔板碰撞时液滴沸腾以防止尿素水的沉积，并且反射的尿素水均匀地分散在废气中。版权所有（C）2007，JPO＆INPIT

5. 发明专利

JP2011235247A Exhaust gas treatment system including carbon dioxide chemical absorption facility and method 有权
标题翻译：废气处理系统，包括二氧化碳吸收设备和方法
公开(公告)号：JP2011235247A
公开(公告)日：2011-11-24
申请号：JP2010109905
申请日：2010-05-12
申请人： Babcock Hitachi Kk , バブコック日立株式会社
发明人： SHIMIZU NOBUAKI , MORIMOTO NOBUO , ODA NAOKI , TAGUCHI YOSHINORI
IPC分类号： B01D53/64 , B01D53/14 , B01D53/50 , B01D53/62 , B01D53/77 , B01D53/94 , F23J15/00
CPC分类号： F23J15/006 , B01D53/501 , B01D53/62 , B01D53/75 , B01D53/8665 , B01D2257/302 , B01D2257/504 , B01D2257/602 , B01D2258/0283 , F23G7/07 , F23J15/025 , F23J15/04 , F23J15/08 , F23J2215/20 , F23J2215/50 , F23J2215/60 , F23J2219/40 , F23L2900/15043 , Y02C10/04 , Y02C10/06 , Y02E20/326 , Y02E20/348
摘要： PROBLEM TO BE SOLVED: To provide an exhaust gas treatment system without causing divalent mercury (Hg) absorbed in limestone slurry liquid out of the mercury in an exhaust gas to be reduced in the form of metal mercury (HgO) and re-released to the exhaust gas due to the variation of operation conditions such as pH of absorption liquid.SOLUTION: The exhaust gas treatment system includes: an air preheater 3 which heats combustion air for a fossil fuel combustion furnace; a dust-collection device 5 collecting soot and dust in the exhaust gas; a wet desulfurization device 7 that provides a wet treatment of sulfur oxides in the exhaust gas; and COchemical absorption facilities 11 that absorb and separate COfrom the exhaust gas. The exhaust gas treatment system includes: a heat exchanger 4 for exhaust gas heat recovery disposed between the air preheater and the dust-collection device; a heat exchanger 8 for reheating exhaust gas that increases the exhaust gas temperature by using the heat recovered by the heat exchanger for exhaust gas heat recovery, disposed between the wet desulfurization device and the COchemical absorption facilities; and a catalyst device 10 for oxidizing mercury in exhaust gas, disposed between the heat exchanger for reheating exhaust gas and the COchemical absorption facilities.
摘要翻译：要解决的问题：提供废气处理系统，而不会使排出气体中的汞中的石灰石浆液中吸收的二价汞（Hg 2 + ）以形式减少的金属汞（HgO），并且由于诸如吸收液体的pH的操作条件的变化而再次释放到废气中。解决方案：废气处理系统包括：空气预热器3，其加热用于化石燃料燃烧炉的燃烧空气; 在废气中收集灰尘的集尘装置5; 提供废气中硫氧化物的湿式处理的湿式脱硫装置7; 和从废气吸收和分离CO 2 的CO 2 化学吸收设备11。废气处理系统包括：设置在空气预热器和集尘装置之间的用于排气热回收的热交换器4; 设置在湿式脱硫装置和CO＆lt; SB POS =“POST”＆gt; 2＆lt; SB＆lt; SB＆gt;之间的废气热回收用热回收回收热量的废气再加热用热交换器8 化学吸收设施; 以及用于氧化废气中的汞的催化剂装置10，设置在用于再热废气的热交换器和CO 2 化学吸收设备之间。版权所有（C）2012，JPO＆INPIT

6. 发明专利

JP2010269277A Method and apparatus of suppressing mercury re-release in desulfurization apparatus 有权
标题翻译：减压装置中抑制汞再释放的方法和装置
公开(公告)号：JP2010269277A
公开(公告)日：2010-12-02
申请号：JP2009124939
申请日：2009-05-25
申请人： Babcock Hitachi Kk , バブコック日立株式会社
发明人： MAEDA RYOHEI , NAKAMOTO TAKANORI , KATAGAWA ATSUSHI , MORIMOTO NOBUO , TAGUCHI YOSHINORI , OMINE SHIGETO
IPC分类号： B01D53/64 , B01D53/34 , B01D53/50 , B01D53/68 , B01D53/77
摘要： PROBLEM TO BE SOLVED: To provide a low-priced and efficient method for suppressing a mercury re-release that prevents bivalent mercury in an absorption liquid from being reduced to metallic mercury and being re-released to an exhaust gas.
SOLUTION: A mercury removing apparatus 25 is provided upstream a desulfurization apparatus 4a, a limestone is supplied into the mercury removing apparatus 25 and the absorption liquid mainly consisting of calcium sulfite that is being circulated inside the mercury removing apparatus 25 is allowed to gas-liquid contact the exhaust gas. This allows the bivalent mercury in the exhaust gas to be efficiently absorbed in the mercury removing apparatus 25 and prevents the bivalent mercury from being introduced into the desulfurization apparatus 4a. This can prevent the bivalent mercury from being reduced to metallic mercury in the desulfurization apparatus 4a and the metallic mercury from being released to the exhaust gas. In addition, an antioxidant (inhibitor) is added into the mercury removing apparatus if required.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种低成本和有效的抑制汞再释放的方法，其防止吸收液体中的二价汞被还原成金属汞并被再释放到废气中。解决方案：在脱硫装置4a的上游设置有除汞装置25，将石灰石供给到除汞装置25中，主要由在除汞装置25内循环的亚硫酸钙组成的吸收液被允许气液接触废气。这样就可以使排气中的二价汞被有效地吸收在除汞装置25中，防止二价汞被引入脱硫装置4a中。这可以防止脱硫装置4a中的二价汞被还原为金属汞，并且金属汞被释放到废气中。此外，如果需要，将抗氧化剂（抑制剂）加入到除汞装置中。版权所有（C）2011，JPO＆INPIT

7. 发明专利

JP2005265234A Ammonia containing exhaust gas treating device and method 审中-公开
标题翻译：含有废气处理装置的氨气和方法
公开(公告)号：JP2005265234A
公开(公告)日：2005-09-29
申请号：JP2004076004
申请日：2004-03-17
申请人： Babcock Hitachi Kk , バブコック日立株式会社
发明人： KOBAYASHI KAZUKI , TOMINAGA SHIGERU , TAGUCHI YOSHINORI , ICHIYANAGI HIROSHI , MUKAI TOSHIFUMI , KAWAZOE HIROSHI
IPC分类号： F16K3/06 , B01D53/58 , B01D53/86 , B01D53/94 , F23G5/50 , F23G7/06
摘要： PROBLEM TO BE SOLVED: To provide a treating device and a treating method for reducing amount of generation of NOx and leak ammonia at an outlet of the device as much as possible when treating high concentration ammonia containing exhaust gas using a heat reserve combustion device. SOLUTION: This ammonia containing exhaust gas treating device is composed of a heat reserve combustion device which has a heat reserve chamber communicating with a combustion furnace for burning ammonia containing exhaust gas, partitioned by a partition wall, and having a plurality of heat reserve towers storing heat reserve body inside them, a change-over valve communicating with the heat reserve chamber, and a communicating pipe for connecting mutually corresponding heat reserve towers and change-over valve mutually and in which exhaust gas is sequentially supplied and heated into each heat reserve tower by switching gas by the change-over valve, ammonia in the heated exhaust gas is burned and treated by the combustion furnace, and the treated gas is exhausted after heating the heat reserve body in the tower through other heat reserve towers and a denitration catalyst device for treating NOx and undecomposed ammonia generated in the heat reserve combustion device. A rotary distribution valve is used as the change-over valve. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种处理装置和处理方法，该处理装置和处理方法在使用热储备燃烧处理含有高浓度氨的废气时尽可能多地减少装置出口处的NOx的产生量和泄漏氨设备。解决方案：该含氨废气处理装置由储热燃烧装置构成，该储热燃烧装置具有与燃烧炉连通的储热室，燃烧炉用于燃烧含有废气的氨，由分隔壁隔开，并具有多个热量在其内部储存储热体的储备塔，与储热室连通的换向阀，以及连通相互对应的相互对应的储热塔和转换阀的连通管，其中废气依次供给并加热到每个通过转换阀切换气体的热储备塔，加热废气中的氨被燃烧炉燃烧和处理，并且在通过其他热量储备塔加热塔中的储热体后，处理后的废气被排出用于处理在储备燃烧装置中产生的NOx和未分解的氨的脱硝催化剂装置。旋转分配阀用作转换阀。版权所有（C）2005，JPO＆NCIPI

8. 发明专利

JP2005155969A Heat storing type exhaust gas treating apparatus and distributing valve apparatus thereof 有权
标题翻译：热存储型排气装置及其分配阀装置
公开(公告)号：JP2005155969A
公开(公告)日：2005-06-16
申请号：JP2003392520
申请日：2003-11-21
申请人： Babcock Hitachi Kk , バブコック日立株式会社
发明人： HIROTA MASARU , MIYOSHI YASUHIRO , NAKAJIMA NAOTO , HOSODA TOKUO , YAMASHITA KOICHIRO , MUKAI TOSHIFUMI , ICHIYANAGI HIROSHI , KAWAZOE HIROSHI , TAGUCHI YOSHINORI , KINOSHITA HIROSHI , MIENO TORU
IPC分类号： F23G7/06
摘要： PROBLEM TO BE SOLVED: To provide a distributing valve apparatus of a heat storing type exhaust gas treating apparatus having improved gas sealing properties even if high-temperature gas containing hard dust is treated.
SOLUTION: The distributing valve apparatus comprises a multiple pipe header 14 having a channel 12 of gas to be treated and a channel 13 of gas treated provided so that they communicate with all heat storing chambers in a partition chamber 15; a fixed valve arranged between the multiple pipe header and the partition chamber; and a rotary valve 15 that is provided in contact with the fixed valve, and successively connects or disconnects each gas channel of the multiple pipe header and each heat accumulating chamber of the partition chamber in cooperation with the fixed valve. A bearing 17 for supporting the rotary valve 15 is provided at the outer periphery section of the multiple pipe header 14, a circular wearing 19 is provided at a position that opposes an inner pipe 18 of the multiple pipe header 14 in the rotary valve 15, and a flexible seal material 20 that slides on the wall surface of the multiple pipe header and seals the gap between the wearing 19 and the inner pipe 18 is provided at the entire periphery of the side of the channel of gas to be treated.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：即使处理含有硬质粉尘的高温气体，也提供具有改善的气体密封性能的储热型废气处理装置的分配阀装置。解决方案：分配阀装置包括具有待处理气体的通道12和经处理的气体通道13的多管集管14，其设置成使其与分隔室15中的所有储热室连通; 一个设置在多个管道头和分隔室之间的固定阀; 以及设置成与固定阀接触的旋转阀15，并且与固定阀协同地依次连接或分离多个管道集管的每个气体通道和分隔室的每个蓄热室。用于支撑旋转阀15的轴承17设置在多管集管14的外周部，圆形磨损件19设置在与旋转阀15中的多个管集管14的内管18相对的位置，并且在待处理气体的通道侧的整个周边设置有在多个管头的壁面上滑动并且密封穿着件19和内管18之间的间隙的柔性密封材料20。版权所有（C）2005，JPO＆NCIPI

9. 发明专利

JP2008259992A Method and device for cleaning exhaust gas 有权
标题翻译：清洁排气的方法和装置
公开(公告)号：JP2008259992A
公开(公告)日：2008-10-30
申请号：JP2007106195
申请日：2007-04-13
申请人： Babcock Hitachi Kk , バブコック日立株式会社
发明人： SHIMAMURA JUN , NAKAMOTO TAKANORI , KATSUBE TOSHIO , YOSHIKAWA HIROBUMI , NOSAKA HIROYUKI , SAITO TAKAYUKI , TAGUCHI YOSHINORI , ISHIZAKA HIROSHI
IPC分类号： B01D53/64 , B01D53/34 , B01D53/50 , B01D53/81
CPC分类号： B01D53/83 , B01D53/501 , B01D53/64 , B01D2253/102 , B01D2257/302 , B01D2257/602 , F23J15/003 , F23J2215/20 , F23J2215/60 , F23J2219/40
摘要： PROBLEM TO BE SOLVED: To provide a system preventing Hg adsorption by activated carbon from being impaired by preceding adsorption by SO 3 in exhaust gas containing sulfuric anhydride (SO 3 ). SOLUTION: Mercury (Hg) can be effectively removed from exhaust gas by adsorbing it into surface fine pores of activated carbon by setting a basic substance atomizing device 11 in an exhaust gas passage in the head flow side of an activated carbon atomizing device 12, since activated carbon is found to adsorb SO 3 prior to Hg while SO 3 is adsorbed into activated carbon. SO 3 concentration after removal by conversion of the basic substance is calculated from SO 3 concentration before removal, and the blowing amount of activated carbon can be controlled from the concentration. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了提供一种防止活性炭的Hg吸附由于含有硫酸酐的废气中的SO 3 SB 3吸附而受到损害的系统（SO 3 SB 3 ）。解决方案：通过在活性炭雾化装置的头部流动侧的废气通道中设置碱性物质雾化装置11，可以将汞（Hg）吸附在活性炭的表面细孔中，从废气中有效地除去如图12所示，由于在Hg之前发现活性炭吸附SO 3 SB 3，而SO 3 SB吸附到活性炭中。通过转移碱性物质去除后的SO 3 SB 3浓度由去除前的SO 3 SB 3浓度计算，并且可以从浓度控制活性炭的吹入量。版权所有（C）2009，JPO＆INPIT

10. 发明专利

JP2003130323A ROTATING DISTRIBUTION TYPE THERMAL STORAGE COMBUSTION DEVICE 审中-公开
公开(公告)号：JP2003130323A
公开(公告)日：2003-05-08
申请号：JP2001327962
申请日：2001-10-25
申请人： BABCOCK HITACHI KK
发明人： TAGUCHI YOSHINORI , MUKAI TOSHIFUMI , ICHIYANAGI HIROSHI , KAWAZOE HIROSHI , KARASUTANI HISASHI
IPC分类号： F23G7/06
摘要： PROBLEM TO BE SOLVED: To provide a rotating distribution type thermal storage combustion device capable of controlling pressure fluctuation in a device and eliminating influence by the pressure fluctuation to a treated gas exhaust source. SOLUTION: This rotating distribution type thermal storage combustion device is provided with a combustion furnace 11, a thermal storage chamber 10 having a plurality of thermal storage towers 10a, a distributing chamber 9 composed of partitioned chambers of the same number as the thermal storage towers 10a, connecting pipes 8 connecting the partitioned chambers with thermal storage towers corresponding to each other, a fixed valve 6, a rotating valve 7 and an exhaust means of treated gas. The treated gas is supplied to the thermal storage towers, is heated by gas switch by the rotation of the rotating valve and is burned in the combustion furnace. The treated gas is exhausted after heating thermal storage medium in other thermal storage towers. A pressure correcting means in which the output is adjusted by the rotating position signal of the rotating valve controlling gas pressure fluctuation in a device entrance part is arranged.

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