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1. 发明专利

CA2228781A1 OPTICAL SWITCH, METHOD OF MANUFACTURING SAME, AND OPTICAL COMMUNICATION EQUIPMENT USING SAME 未知
公开(公告)号：CA2228781A1
公开(公告)日：1998-08-17
申请号：CA2228781
申请日：1998-02-05
申请人： HITACHI LTD , HITACHI CABLE
发明人： KOMATSU NORIFUMI , HORINO MASAYA , AKASHI TERUHISA , MURANISHI MASARU , SATO KAZUTAKA , KOBAYASHI DAI , OKANO HIROAKI
IPC分类号： G02B26/08 , G02B6/122 , G02B6/35 , H04B10/00 , H04B10/27 , G08C23/04 , H04N7/22
摘要： An optical switch for switching an optical path of an input optical signal comprises a substrate composed of a silica glass substrate, a separation layer formed on the silica glass substrate, a plurality of cantilever beams and formed in parallel to one another on the separation layer and connected at their tip ends to a connection member, at least one silica glass optical waveguide core formed on the cantilever beams, a plurality of optical waveguide fixed in opposition to the silica glass optical waveguide core, a cover for covering the cantilever beams, and a switch drive unit for bending the cantilever beams. The switch drive unit comprises electromagnetic actuators, which comprise soft magnetic bodies formed on the connection member for the cantilever beams and on the substrate, soft magnetic yokes formed of a soft magnetic body, permanent magnets, and wire coils.

2. 发明专利

CA2228781C OPTICAL SWITCH, METHOD OF MANUFACTURING SAME, AND OPTICAL COMMUNICATION EQUIPMENT USING SAME 未知
公开(公告)号：CA2228781C
公开(公告)日：2001-10-02
申请号：CA2228781
申请日：1998-02-05
申请人： HITACHI LTD , HITACHI CABLE
发明人： AKASHI TERUHISA , KOMATSU NORIFUMI , HORINO MASAYA , KOBAYASHI DAI , SATO KAZUTAKA , OKANO HIROAKI , MURANISHI MASARU
IPC分类号： G02B26/08 , G02B6/122 , G02B6/35 , H04B10/00 , H04B10/27 , G08C23/04 , H04N7/22
摘要： An optical switch for switching an optical path of an input optical signal comprises a substrate composed of a silica glass substrate, a separation layer formed on the silica glass substrate, a plurality of cantilever beams and formed in parallel to one another on the separation layer and connected at their tip ends to a connection member, at least one silica glass optical waveguide core formed on the cantilever beams, a plurality of optical waveguide fixed in opposition to the silica glass optical waveguide core, a cover for covering the cantilever beams, and a switch drive unit for bending the cantilever beams. The switch drive unit comprises electromagnetic actuators, which comprise soft magnetic bodies formed on the connection member for the cantilever beams and on the substrate, soft magnetic yokes formed of a soft magnetic body, permanent magnets, and wire coils.

3. 发明专利

JP2002082293A OPTICAL SWICH AND OPTICAL SWITCHING SYSTEM 失效
公开(公告)号：JP2002082293A
公开(公告)日：2002-03-22
申请号：JP2000273553
申请日：2000-09-05
申请人： HITACHI LTD , HITACHI METALS LTD , HITACHI CABLE
发明人： HORINO MASAYA
IPC分类号： G02B6/38 , G02B26/08
摘要： PROBLEM TO BE SOLVED: To provide an optical switch and an optical switching system which are compact, inexpensive and reliable, and enable to confirm the operation state of a movable side optical waveguide and quickly start the switching of optical coupling by detecting the position of a movable side optical waveguide by utilizing the electromagnetic coils of an actuator. SOLUTION: The optical switch is provided with an optical switch part having an optical coupling switching part of optical fibers and a switch diving circuit 20 for driving the switch part, the circuit 20 is formed of position detection circuits 72 to 74 for detecting the position of a movable fiber block 15 for moving movable side optical fibers and a current generation circuit 44 for allowing a current to flow into electromagnetic coils 3, 10 and the position of the block 15 is detected by the circuits 72 to 74 on the basis of a voltage difference generated between two electromagnetic coils 3, 10 by allowing an alternating current (AC) to flow into the coils 3, 10.

4. 发明专利

JP2000028935A WAVEGUIDE TYPE OPTICAL SWITCH AND ITS PRODUCTION 失效
公开(公告)号：JP2000028935A
公开(公告)日：2000-01-28
申请号：JP19989998
申请日：1998-07-15
申请人： HITACHI LTD , HITACHI CABLE
发明人： HORINO MASAYA , SATO KAZUYASU , KENMOCHI HIROYUKI , OKANO HIROAKI , KOBAYASHI MASARU
IPC分类号： G02B26/08
摘要： PROBLEM TO BE SOLVED: To realize a method for producing a waveguide type optical switch which has a high dimensional precision and is small-sized and suitable for remote control and also which has a small insertion loss. SOLUTION: A working part 12e whose width is narrower than the depth of working and two working parts 11f and 15 on both sides of this narrow working part which have a width wider than the depth of working are subjected to anisotropic dry etching. When holes reaching a separation layer 2 are formed in working parts 11f and 15 having the wider width, anisotropic dry etching is stopped at the timing when a hole is not formed in the hole 12e of the narrow working part. Etching liquid is supplied to working parts 11f and 15 having the wider width, and a separation layer 2b under the narrow working part 12e is completely removed while partially leaving a separation layer 2a between a connection member 8 and a substrate 1. Then the hole 12e of the narrow working part is pierced by anisotropic dry etching, and the separation layer 2a under the connection member 8 is completely removed.

5. 发明专利

JPH11287930A STRUCTURE OF RECEPTACLE TYPE OPTICAL MODULE 失效
公开(公告)号：JPH11287930A
公开(公告)日：1999-10-19
申请号：JP9295898
申请日：1998-04-06
申请人： HITACHI LTD , HITACHI CABLE
发明人： ISHIKAWA TADAAKI , SHIMAOKA MAKOTO , HORINO MASAYA , FUKUDA KAZUYUKI , TERAOKA TATSUO , HORIE MAKOTO , TAKAHASHI RYUTA
IPC分类号： G02B6/42
摘要： PROBLEM TO BE SOLVED: To provide an inexpensive optical module structure having satisfactory reflected light characteristics as a module by adhering and fixing an obliquely ground ferrule in the state of photocoupling with an optical waveguide. SOLUTION: The optical waveguide is formed on an optical waveguide substrate 1 and a pit 1a, for which electric wiring is executed for loading a semiconductor optical element, exists. A gap between the substrate 1 and a module case bottom component 3a is filled with a resin 7 of a low elastic coefficient. Inside the ferrule 2, a fiber 6 for transmitting optical signals is adhered and fixed for the full length. A side face 2a of the ferrule 2 adhered to the substrate 1 on the side of photocoupling with the optical waveguide is obliquely ground for suppressing end face reflections. Between the ferrule 2 and the substrate 1, the optical waveguide and the fiber 6 are adhered and fixed by an adhesive agent while being photocoupled. The ferrule 2 is adhered and fixed by inserting its fixer 8 into a groove part between the component 3a and a lid 3b.

6. 发明专利

JP2000214355A RECEPTACLE TYPE OPTICAL MODULE 失效
公开(公告)号：JP2000214355A
公开(公告)日：2000-08-04
申请号：JP1410199
申请日：1999-01-22
申请人： HITACHI LTD , HITACHI CABLE
发明人： ISHIKAWA TADAAKI , SHIMAOKA MAKOTO , HORINO MASAYA , FUKUDA KAZUYUKI , NASU SHINGO , HORIE MAKOTO , NISHIO TOMOYUKI , TERAOKA TATSUO
IPC分类号： G02B6/30 , G02B6/42 , H01L33/62 , H01S5/00 , H01S5/022 , H01L33/00
摘要： PROBLEM TO BE SOLVED: To provide a receptacle type optical module that is small in characteristic change to ambient temperature change and that can be manufactured at low cost. SOLUTION: This receptacle type optical module is equipped with an optical waveguide substrate 1 which is provided with an optical waveguide and which is loaded with a semiconductor optical element 4a optically connected to the waveguide, a ferule 2 having an optical fiber 6 inside with one end connected to the optical waveguide, and a receptacle sleeve 13 which is fixed on the ferule 2 and which connects an optical connector plug inserted from the outside with the other end of the ferule 2. In such optical module, a leaf spring 3 is provided which is fixed on the waveguide substrate 1 at one end and on the receptacle sleeve 13 at the other end, and which is formed with a folded part 3a in the middle; and also a case 18 formed with a sliding structure is provided which, at one end, is fixed on a terminal base 17 attached with the optical waveguide substrate 1 and which, at the other end, is only abutted on the receptacle sleeve 13.

7. 发明专利

JPH10227986A OPTICAL SWITCH AND ITS MANUFACTURE, AND OPTICAL COMMUNICATION EQUIPMENT USING OPTICAL SWITCH 失效
公开(公告)号：JPH10227986A
公开(公告)日：1998-08-25
申请号：JP3172397
申请日：1997-02-17
申请人： HITACHI LTD , HITACHI CABLE
发明人： HORINO MASAYA , SATOU KAZUYASU , AKASHI TERUHISA , MURANISHI MASARU , KOMATSU AYAFUMI , KOBAYASHI MASARU , OKANO HIROAKI
IPC分类号： G02B26/08 , G02B6/122 , G02B6/35 , H04B10/00 , H04B10/27 , H04B10/02
摘要： PROBLEM TO BE SOLVED: To obtain a low-cost optical waveguide type switch with small insertion loss by forming a separation layer on a quartz glass substrate and forming cantilevers, an optical waveguide on them, optical waveguides, and a switch driving means which deforms the cantilevers on the separation layer. SOLUTION: On the quartz glass substrate 15, a quartz glass waveguide layer 13 and a movable-side optical waveguide 2 are formed on the cantilevers 3a and 3b across the separation layer 14. A coupling member 4 is formed on the free-end side of the cantilevers 3a and 3b, internal yokes 12a to 12d of soft magnetic bodies are formed opposite the coupling member 4 on the quartz glass waveguide layer 13 having a soft magnetic body film 5 is formed on its top surface, and on them, a driving part consisting of coils 6a and 6b, external yokes 7a and 7b of soft magnetic bodies, and a permanent magnet 8 is formed. Further, fixed-side optical waveguides 10 are formed on the free-end side of the movable-side optical waveguide 2 so that they face the free-end side according to the movement quantity of the waveguide.

8. 发明专利

JP2005107552A Optical switch and its waveguide manufacturing method 有权
标题翻译：光开关及其波导制造方法
公开(公告)号：JP2005107552A
公开(公告)日：2005-04-21
申请号：JP2005001446
申请日：2005-01-06
申请人： Hitachi Cable Ltd , Hitachi Ltd , 日立電線株式会社 , 株式会社日立製作所
发明人： HORINO MASAYA , KAJIYAMA SHINICHI , HAJIKAWA SATORU
IPC分类号： G02B26/08
摘要： PROBLEM TO BE SOLVED: To ease the assembling process of an optical switch in which generation of insertion loss and reflection returning light beams is suppressed regardless of the changes in environmental temperature and an optical path is always switched in an effective manner. SOLUTION: The optical switch is provided with a base 19, an input side waveguide chip 2 and an output side waveguide chip 4 which are provided on the base, an input side silicon block 3 which is provided on the input side waveguide chip, an output side silicon block 5 which is provided on the output side waveguide chip. The end faces of the input side waveguide chip and the output side waveguide chip, which face each other, have an angle that is greater than 0 degree with respect to the vertical direction to the surface of the base. The input side silicon block and the output side silicon block are not arranged in the vertical direction with respect to the surface of the base in the gap between the input side waveguide chip and the output side waveguide chip. Thus, observation can be made from the top of the gap between the input side waveguide chip and the output side waveguide chip to ease the assembling process of the optical switch. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了简化不管环境温度变化而抑制插入损耗和反射返回光束的产生的光开关的组装过程，并且始终以有效的方式切换光路。解决方案：光开关设置有设置在基座上的基座19，输入侧波导芯片2和输出侧波导芯片4，输入侧硅块3设置在输入侧波导芯片输出侧硅块5，其设置在输出侧波导芯片上。彼此面对的输入侧波导芯片和输出侧波导芯片的端面相对于基板的表面的垂直方向具有大于0度的角度。输入侧硅块和输出侧硅块在输入侧波导芯片和输出侧波导芯片之间的间隙中相对于基板的表面没有布置在垂直方向上。因此，可以从输入侧波导芯片和输出侧波导芯片之间的间隙的顶部进行观察，以便于光开关的组装处理。版权所有（C）2005，JPO＆NCIPI

9. 发明专利

JP2002023077A OPTICAL SWITCH FOR OPTICAL FIBER 失效
公开(公告)号：JP2002023077A
公开(公告)日：2002-01-23
申请号：JP2000204854
申请日：2000-07-06
申请人： HITACHI CABLE , HITACHI LTD
发明人： KAJIYAMA SHINICHI , HAJIKAWA SATORU , KUROSAWA MASAAKI , HORINO MASAYA
IPC分类号： G02B6/40 , G02B26/08
摘要： PROBLEM TO BE SOLVED: To provide an optical switch, with which switching operation for the optical axis of an optical fiber is facilitated, the optical axes of the optical fibers are surely matched and switching reproducibility for the optical axis of the optical fiber is satisfactory. SOLUTION: This device is provided with a central yoke 4 having a permanent magnet 5, main body 3 of yoke having exciting coils 7a and 7b and two both terminal yokes 6a and 6b, two actuators 8a and 8b, movable block 9 of magnetic substance installed between them and sucked by the permanent magnet, guide block 10 having an optical fiber mounting groove 12a housed in the movable block for mounting an optical fiber 11a for optical path switching and pin holes 13a and 13b and fixed stand 14 having guide pins 15a and 15b to be inserted to the pin holes for helping the slide of the movable block, each of pin holes permits only the horizontal movement of the guide block while holding the guide pin between two sides, the movable block is driven orthogonally with the optical axis by controlling two actuators, and the optical path is switched by moving the optical fiber for optical path switching mounted on the guide block.

10. 发明专利

JP2003181800A PIEZOELECTRIC MICRO-ACTUATOR AND MICRO-MIRROR EQUIPPED WITH THE SAME 审中-公开
公开(公告)号：JP2003181800A
公开(公告)日：2003-07-02
申请号：JP2001385615
申请日：2001-12-19
申请人： HITACHI LTD , HITACHI METALS LTD , HITACHI CABLE
发明人： HORINO MASAYA , ISHIKAWA TADAAKI , ITO YASUHIRO , TAKAHASHI RYUTA
IPC分类号： G02B26/08 , B81B3/00 , G02B26/10 , H01L41/09 , H02N2/00
摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric micro-actuator and a micro-mirror equipped therewith capable of generating a large angle of rotation with low applied voltage and easily being realized by applying micromachining technology. SOLUTION: In the device, a piezoelectric element film 201a which is positioned in one side face side of an intermediate electrode 204 and a piezoelectric element film 201b which is positioned in the other side face of the intermediate electrode 204 are arranged so that the polarization directions become opposite to each other. Positive electrodes and negative electrodes are alternately arranged on the outer surfaces of the piezoelectric element film 201a positioned in one side face side and the piezoelectric element film 201b positioned in the other side face, and the voltage is applied to the electrodes. As a result, the piezoelectric element films are alternately bent and deformed in the opposite directions at adjacent linear parts 102b. COPYRIGHT: (C)2003,JPO

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