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1. 发明专利

DE112011105204T5 Autonomes Bewegungssystem 未知
公开(公告)号：DE112011105204T5
公开(公告)日：2014-07-03
申请号：DE112011105204
申请日：2011-05-31
申请人： HITACHI LTD
发明人： HARA YOSHITAKA , ONO YUKIHIKO , YAMAMOTO KENJIRO , OSHIMA AKIRA
IPC分类号： G05D1/02
摘要： Ein Problem der vorliegenden Erfindung in einer Umgebung einer Werksanlage oder einer Stadt, wo es Objekte wie etwa Fußgänger oder Hindernisse gibt, ist die Realisierung eines autonomen Bewegungssystems, das stets über Sicherheit und Schnelligkeit verfügt, selbst auf schmalen Wegen oder in einem großen Raum, wenn ein Fahrzeug autonom über eine Referenzroute fährt, die auf einer Karte mit einer geschätzten Eigenposition festgelegt ist. Um zu vermeiden, dass ein Hindernis in einer verfolgbaren Bewegungsrichtung liegt, die ausgehend von einer aktuellen Position des autonom beweglichen Körpers der Referenzroute folgt, berechnet eine Routenfestlegungseinrichtung eine Verkehrsentfernung und eine Verkehrsbreite als einen Verkehrsbereich mit einer bestimmten Verkehrsbreite, bei dem es nicht möglich ist, dass ein Hindernis in jeweilige Bewegungsrichtungen eindringt, und legt auf der Grundlage der verfolgbaren Bewegungsrichtung und des Verkehrsbereichs die Bewegungsrichtung des autonom beweglichen Körpers fest. Eine Geschwindigkeitsfestlegungseinrichtung legt als Reaktion auf den Bremszustand des autonom beweglichen Körpers sowie die Position und die Geschwindigkeit des Hindernisses eine Bewegungsgeschwindigkeit fest, die dem autonom beweglichen Körper ein Anhalten ermöglicht, bevor er mit dem Hindernis kollidiert.

2. 发明专利

AU2012376428B2 Map data creation device, autonomous movement system and autonomous movement control device 未知
公开(公告)号：AU2012376428B2
公开(公告)日：2015-06-25
申请号：AU2012376428
申请日：2012-04-05
申请人： HITACHI LTD
发明人： ONO YUKIHIKO , YAMAMOTO KENJIRO , ICHINOSE RYOKO , OSHIMA AKIRA
IPC分类号： G01C21/00
摘要： The invention addresses the problem of being able to generate map data even if a location not suited to identification of a matching position exists. The invention is characterized by creating the map data, which is used for autonomous movement by a vehicle (1a), a vehicle (1b) and/or another vehicle (1), said map data being created on the basis of: a relative position of the vehicle (1b), which exists in the perimeter of the vehicle (1a), in relation to the vehicle (1a), said relative position being measured by the vehicle (1a); and object shape data of an object existing in the neighborhood of the vehicle (1b), said object shape data being measured by the vehicle (1b). The relative position of the vehicle (1b) in relation to the vehicle (1a) is computed on the basis of the object shape data measured by the vehicle (1a).

3. 发明公开

EP2703196A4 VEHICLE SUSPENSION SYSTEM 审中-公开
公开(公告)号：EP2703196A4
公开(公告)日：2014-10-01
申请号：EP11864228
申请日：2011-04-27
申请人： HITACHI LTD
发明人： ONO YUKIHIKO , YAMAMOTO KENJIRO
IPC分类号： B60G17/015 , B60G17/019 , B60G17/02
CPC分类号： B60G17/01908 , B60G17/021 , B60G2204/421 , B60G2300/22 , B60G2400/051
摘要： To achieve a small and low power consumption suspension, which can be installed in a vehicle, such as a personal mobility vehicle, there is provided a vehicle suspension system including: a suspension that is connected to a vehicle body and a shaft mounted to wheels; an actuator that includes an output for vertically moving a suspension position of the suspension on the basis of inclination angle information of the vehicle; and a self-weight support mechanism that acts on the actuator to support vehicle weight. The self-weight support mechanism is composed of a spring mounted to the actuator, the actuator, and a link mechanism connected the suspension and the actuator.

4. 发明专利

CA2869374C MAP DATA CREATION DEVICE, AUTONOMOUS MOVEMENT SYSTEM AND AUTONOMOUS MOVEMENT CONTROL DEVICE 未知
公开(公告)号：CA2869374C
公开(公告)日：2019-04-16
申请号：CA2869374
申请日：2012-04-05
申请人： HITACHI LTD
发明人： ONO YUKIHIKO , YAMAMOTO KENJIRO , ICHINOSE RYOKO , OSHIMA AKIRA
IPC分类号： G01C21/00
摘要： The invention is intended to be able to generate map data even if a location not suited for identification of a matching position exists. A map data creation device creates map data, the map data being used for autonomous movement by a vehicle (1a), a vehicle (1b) and/or other vehicles (1), based on a relative position of the vehicle (1b) which exists around the vehicle (1a), relative to the vehicle (1a), the relative position being measured by the vehicle (1a), and object shape data of an object which exists around the vehicle (1b), the object shape being measured by the vehicle (1b). Moreover, the relative position of the vehicle (1b) relative to the vehicle (1a) is calculated based on the object shape data measured by the vehicle (1a).

5. 发明专利

AU2012376428A1 Map data creation device, autonomous movement system and autonomous movement control device 未知
公开(公告)号：AU2012376428A1
公开(公告)日：2014-10-23
申请号：AU2012376428
申请日：2012-04-05
申请人： HITACHI LTD
发明人： ONO YUKIHIKO , YAMAMOTO KENJIRO , ICHINOSE RYOKO , OSHIMA AKIRA
IPC分类号： G01C21/00
摘要： The invention addresses the problem of being able to generate map data even if a location not suited to identification of a matching position exists. The invention is characterized by creating the map data, which is used for autonomous movement by a vehicle (1a), a vehicle (1b) and/or another vehicle (1), said map data being created on the basis of: a relative position of the vehicle (1b), which exists in the perimeter of the vehicle (1a), in relation to the vehicle (1a), said relative position being measured by the vehicle (1a); and object shape data of an object existing in the neighborhood of the vehicle (1b), said object shape data being measured by the vehicle (1b). The relative position of the vehicle (1b) in relation to the vehicle (1a) is computed on the basis of the object shape data measured by the vehicle (1a).

6. 发明专利

DE112011105210T5 Ortskurvenkorrekturverfahren, Ortskurvenkorrekturvorrichtung und mobiles Objektgerät 未知
公开(公告)号：DE112011105210T5
公开(公告)日：2014-05-28
申请号：DE112011105210
申请日：2011-05-20
申请人： HITACHI LTD
发明人： HOSODA YUJI , YAMAMOTO KENJIRO , OSHIMA AKIRA , HARA YOSHITAKA
IPC分类号： G01C21/30
摘要： Ein Ziel besteht in einer Berechnung einer sehr genauen Ortskurve. Ein Verwaltungsteil (20) zum Korrigieren einer Bewegungsortskurve eines mobilen Objekts (V) ist dadurch gekennzeichnet, dass er eine Bewertungsfunktionserzeugungseinheit (21) aufweist, die mehrere Knoten auf durch eine Raddrehbetragsmesseinheit (16) erhaltenen Ortskurvendaten des mobilen Objekts (V) festlegt, durch die Raddrehbetragsmesseinheit (16) erhaltene Positionsdaten des mobilen Objekts (V) mit den Knoten korreliert und durch andere Einheiten der Messeinrichtung als die Raddrehbetragsmesseinheit erhaltene Positionsdaten des mobilen Objekts (V) mit den Knoten korreliert, Positionen, an denen die Knoten auftreten können, durch eine Wahrscheinlichkeit darstellt, Positionen, an denen mit den Knoten korrelierte Positionsdaten auftreten können, durch eine Wahrscheinlichkeit darstellt und eine Bewertungsfunktion, welche die Knoten und die Positionsdaten als Variablen aufweist, auf der Grundlage jeder Wahrscheinlichkeit berechnet, und eine Ortskurvenoptimierungsberechnungseinheit (22), die auf der Grundlage der Bewertungsfunktion eine Ortskurve berechnet, auf der jeder Knoten mit der höchsten Wahrscheinlichkeit auftritt.

7. 发明专利

CA2869374A1 MAP DATA CREATION DEVICE, AUTONOMOUS MOVEMENT SYSTEM AND AUTONOMOUS MOVEMENT CONTROL DEVICE 未知
公开(公告)号：CA2869374A1
公开(公告)日：2013-10-10
申请号：CA2869374
申请日：2012-04-05
申请人： HITACHI LTD
发明人： ONO YUKIHIKO , YAMAMOTO KENJIRO , ICHINOSE RYOKO , OSHIMA AKIRA
IPC分类号： G01C21/00
摘要： The invention addresses the problem of being able to generate map data even if a location not suited to identification of a matching position exists. The invention is characterized by creating the map data, which is used for autonomous movement by a vehicle (1a), a vehicle (1b) and/or another vehicle (1), said map data being created on the basis of: a relative position of the vehicle (1b), which exists in the perimeter of the vehicle (1a), in relation to the vehicle (1a), said relative position being measured by the vehicle (1a); and object shape data of an object existing in the neighborhood of the vehicle (1b), said object shape data being measured by the vehicle (1b). The relative position of the vehicle (1b) in relation to the vehicle (1a) is computed on the basis of the object shape data measured by the vehicle (1a).

8. 发明专利

JP2002251975A INSPECTION DEVICE USING ELECTRON BEAM AND INSPECTION METHOD USING ELECTRON BEAM 失效
公开(公告)号：JP2002251975A
公开(公告)日：2002-09-06
申请号：JP2001050485
申请日：2001-02-26
申请人： HITACHI LTD
发明人： GUNJI YASUHIRO , NINOMIYA HIROSHI , KAMETANI MASATSUGU , KOYAMA MASAHIRO , YAMAMOTO KENJIRO
IPC分类号： G01B15/00 , G01N23/225 , G01R1/06 , G01R31/302 , H01J37/22 , H01J37/28 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To prevent performance degradation caused by change in image qual ity or deflection/distortion near both end parts of a scanned area and enable high-accuracy detection and confirmation of inspection image areas by means of a monitor 50, when conducting inspection for detects of a sample 9 such as semiconductor wafer. SOLUTION: The inspection device is provided with a means for conducting comparison inspection for defectives of the sample 9 based on image signals obtained by controlling blanking signals 220 and vertical synchronizing signals to delete portions 401, 402 near both ends of the horizontally and vertically scanned area.

9. 发明专利

JP2000100363A ELECTRON BEAN LITHOGRAPHY SYSTEM 失效
公开(公告)号：JP2000100363A
公开(公告)日：2000-04-07
申请号：JP26430898
申请日：1998-09-18
申请人： HITACHI LTD
发明人： KAMETANI MASATSUGU , YAMAMOTO KENJIRO , YODA HARUO , ANDO MASAAKI , KAWANO MASAMICHI
IPC分类号： H01J37/20 , H01J37/147
摘要： PROBLEM TO BE SOLVED: To reduce overheads and realize high-speed responses and low cost by obtaining third position information and drafting information, related to and based on second target position information, and third coefficient information from a coefficient processing part, and inputting in parallel the second target position information into a first auxiliary deflection commanding part and into the coefficient processing part. SOLUTION: A main deflection control part 1, in charge of main deflection processing, is connected directly with hot lines to auxiliary deflection processing parts 7 to 9 of a control part 26, in charge of auxiliary deflection processing and of coefficient generating/processing (for sub-auxiliary deflection processing). A control part 27, in charge of sub-auxiliary deflection processing requiring high-speed/high responsiveness, comprises a sub-auxiliary deflection absolute construction (correction) processing part 10 and a high-speed follow-up construction processing part 11, and coefficient information outputted from the processing part 7 is inputted directly into the two processing parts 10, 11, which perform deflection calculation and high- speed correction from the amount of deflection for sub-auxiliary deflection and the amount of high-speed follow-up deflection directly obtained from a deflection-amount input/calculation processing part 12 and output the amount of deflection corrected. A coefficient matrix corresponds to the coefficient information obtained from the processing part 7.

10. 发明专利

JP2000100362A CHARGED PARTICLE BEAM SCANNING TYPE AUTOMATIC INSPECTION APPARATUS 失效
公开(公告)号：JP2000100362A
公开(公告)日：2000-04-07
申请号：JP26429598
申请日：1998-09-18
申请人： HITACHI LTD
发明人： KAMETANI MASATSUGU , YAMAMOTO KENJIRO , NINOMIYA HIROSHI , YAMADA OSAMU , IKE KATSUHISA
IPC分类号： H01J37/147 , G01N23/20 , G01N23/225 , G06T1/00 , G06T3/00 , H01J37/28 , H01L21/66 , G06T7/00
摘要： PROBLEM TO BE SOLVED: To improve the accuracy of a chip comparison inspection and to inspect the vicinity of an wafer periphery having large distortion by enabling correction of a deflected scanning position, in a time equal to or shorter than a cycle for taking in the information of an inspection object, and performing the correction of an inspection position and deflected distortion quickly and accurately. SOLUTION: This automatic inspection device has a deflection control means 105 for controlling the deflection of a charged particle beam 101 with which an inspection object 102 is irradiated. In this case, inspection is performed by a digital deflection control system where the deflection control means 105 operates all of deflection scanning signals digitally and correction signals, and sequentially converts digital values into analog values according to the time series of digital control signals for forming a deflection scanning waveform 106.

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