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1. 发明专利

DE69125044T2 未知
公开(公告)号：DE69125044T2
公开(公告)日：1997-08-07
申请号：DE69125044
申请日：1991-04-04
申请人： HITACHI LTD
发明人： TANIYAMA MINORU , MASE MASAHIRO , NAKAMORI KAZUAKI , NAGAOKA TAKASHI
IPC分类号： F04C29/02 , F04C29/04 , F04D19/04 , F04D29/58
摘要： A vacuum pump of the present invention comprises a housing (103) including a suction port (101) and an exhaust port (102), a stator (105) fixed in the housing (103), a rotor (104) rotatably supported in the housing (103), and a cooling jacket (109) provided adjacent to the stator (105). Gas sucked from the suction port (101) and having a pressure substantially equal to or close to the atmospheric pressure is exhausted from the exhaust port (102). A cooling fluid having a thermal conductivity smaller than that of water, for example, of 0.08 to 0.25 Kcal/m.h. DEG C flows through the cooling jacket (109). When the gas contains aluminum chloride, the cooling fluid flows into the cooling jacket (109) in such a manner that the temperature inside a gas conduit is maintained to be higher than the sublimation temperature of aluminum chloride. Lubrication oil (110) may be supplied as the cooling fluid to the cooling jacket (109) from the same supply line as lubrication oil supplied to oil lubricating bearings (107a,107b) provided below a pump mechanism unit. A closed-loop line may be comprised of the cooling jacket (109), a tank, the supply line (111), and a return line, to thereby circulate the cooling fluid by means of a pump (113).

2. 发明专利

DE3669356D1 未知
公开(公告)号：DE3669356D1
公开(公告)日：1990-04-12
申请号：DE3669356
申请日：1986-12-18
申请人： HITACHI LTD
发明人： TANIYAMA MINORU , MASE MASAHIRO , NAGAOKA TAKASHI
IPC分类号： F04D19/04 , F04D29/10 , F16J15/40

3. 发明专利

DE69303447D1 未知
公开(公告)号：DE69303447D1
公开(公告)日：1996-08-08
申请号：DE69303447
申请日：1993-09-16
申请人： HITACHI LTD
发明人： NAKAMORI KAZUAKI , TANIYAMA MINORU , MURATA KATSUHIKO
IPC分类号： F04D19/04 , F04D29/06 , F04D29/70

4. 发明专利

DE3613198A1 未知
公开(公告)号：DE3613198A1
公开(公告)日：1986-10-30
申请号：DE3613198
申请日：1986-04-18
申请人： HITACHI LTD
发明人： MASE MASAHIRO , NAGAOKA TAKAHASHI , TSUTSUMI YOSHITSUGU , TANIYAMA MINORU , TERAJIMA MAKOTO
IPC分类号： F04D19/04 , F04D17/16 , F04D19/02
摘要： A vacuum pump including a centrifugal compressor stage on the side of a suction opening and a circumferential flow compressor on the side of an exhaust opening. The centrifugal compressor pump works as a Siegbahn pump at a steady state, and works as a centrifugal compressor under a transient condition at the initial stage of the pump operation, thus obtaining a high pumping speed under the transient condition.

5. 发明专利

DE69125044D1 未知
公开(公告)号：DE69125044D1
公开(公告)日：1997-04-17
申请号：DE69125044
申请日：1991-04-04
申请人： HITACHI LTD
发明人： TANIYAMA MINORU , MASE MASAHIRO , NAKAMORI KAZUAKI , NAGAOKA TAKASHI
IPC分类号： F04C29/02 , F04C29/04 , F04D19/04 , F04D29/58
摘要： A vacuum pump of the present invention comprises a housing (103) including a suction port (101) and an exhaust port (102), a stator (105) fixed in the housing (103), a rotor (104) rotatably supported in the housing (103), and a cooling jacket (109) provided adjacent to the stator (105). Gas sucked from the suction port (101) and having a pressure substantially equal to or close to the atmospheric pressure is exhausted from the exhaust port (102). A cooling fluid having a thermal conductivity smaller than that of water, for example, of 0.08 to 0.25 Kcal/m.h. DEG C flows through the cooling jacket (109). When the gas contains aluminum chloride, the cooling fluid flows into the cooling jacket (109) in such a manner that the temperature inside a gas conduit is maintained to be higher than the sublimation temperature of aluminum chloride. Lubrication oil (110) may be supplied as the cooling fluid to the cooling jacket (109) from the same supply line as lubrication oil supplied to oil lubricating bearings (107a,107b) provided below a pump mechanism unit. A closed-loop line may be comprised of the cooling jacket (109), a tank, the supply line (111), and a return line, to thereby circulate the cooling fluid by means of a pump (113).

6. 发明专利

DE69303447T2 未知
公开(公告)号：DE69303447T2
公开(公告)日：1996-10-31
申请号：DE69303447
申请日：1993-09-16
申请人： HITACHI LTD
发明人： NAKAMORI KAZUAKI , TANIYAMA MINORU , MURATA KATSUHIKO
IPC分类号： F04D19/04 , F04D29/06 , F04D29/70

7. 发明专利

JP2000073984A VACUUM PUMP 失效
公开(公告)号：JP2000073984A
公开(公告)日：2000-03-07
申请号：JP24929098
申请日：1998-09-03
申请人： HITACHI LTD
发明人： MASE MASAHIRO , SAKAGAMI SEIJI , TANIYAMA MINORU
IPC分类号： F04D29/063 , F04D19/04 , F04D29/06 , F04D29/58
摘要： PROBLEM TO BE SOLVED: To improve efficiency of a vacuum pump by reducing a bearing loss of the vacuum pump employing oil lubricating rolling bearing. SOLUTION: Lubrication oil supplied through an oil feed port 12a and supplied to a bearing 7a is led to a bearing oil nozzle 33 for supplying oil to the primary bearing and to a shaft cooling nozzle 31 for cooling a shaft 40 and the bearing 7a. Shaft cooling oil is sprayed on the bearing 7a, a heat generating area or, in other words a rotor 4, and a shaft between the bearings and then received in an oil receiver 34, after which it is discharged outside the bearing through a discharge passage 32. Thus lubricating oil quantity on the bearing can be reduced.

8. 发明专利

JPH06101699A VACUUM PUMP 失效
公开(公告)号：JPH06101699A
公开(公告)日：1994-04-12
申请号：JP25117992
申请日：1992-09-21
申请人： HITACHI LTD , HITACHI TECHNO ENG
发明人： NAKAMORI KAZUAKI , TANIYAMA MINORU , MURATA KATSUHIKO
IPC分类号： F04D19/04 , F04D29/06 , F04D29/70
摘要： PURPOSE:To elongate an oil replenishing cycle by reducing oil content discharged from the drive side in a dry vacuum pump having a large maintenance- free characteristic in which purge gas is introduced from the outside to separate the mechanism section side and drive section side from each other of the pump and the gas discharged from the latter has mixed oil content so that oil needs to be replenished. CONSTITUTION:An oil mist filter 13 having a high effect of recovering oil content is connected to an exhaust port 18 of a pump driving section and a drain piping 17 of the oil mist filter 13 is combined with the suction side piping of an oil pump 12 in a bearing lubricating oil supply line to constitute an automatic oil recovering line. Thus, a period of an oil replenishing cycle can be elongated to provide the maintenance-free vacuum pump for a long period.

9. 发明专利

JPS6385292A VACUUM PUMP 失效
公开(公告)号：JPS6385292A
公开(公告)日：1988-04-15
申请号：JP22818186
申请日：1986-09-29
申请人： HITACHI LTD
发明人： OSAKABE ICHIRO , NAGAOKA TAKASHI , TANIYAMA MINORU , MASE MASAHIRO , TSURU SEIJI
IPC分类号： F04D19/04
摘要： PURPOSE:To improve the compression ratio of the final compression pump stage and obtain the small-sized vacuum pump having high faculty by exhausting the gas in the vacuum pump by the ejector effect of the jetted gas by installing a gas injection port midway in an exhaust passage and an exhaust pipe having a throttle. CONSTITUTION:A rotary shaft 1 is supported by a bearing 7 in a housing 2 having a suction port 2A and an exhaust port 2B. In the housing 2, a centrifugal compression pump stage 5 and a circumferential flow compression pump stage 6 are connected in succession from the suction port 2A side to the exhaust port 2B side. In this case, in the midway of an exhaust passage 2C communicating to the exhaust port 2B, a nozzle 12 for jetting the high pressure gas supplied from a high pressure gas inlet 11 towards the exhaust port 2B is installed. The gas jetted from the injection port 12A flows into an exhaust pipe 2D having a throttle, and the vicinity of the nozzle 12 is allowed to act as ejector type vacuum pump stage is increased.

10. 发明专利

JPS62258186A MULTI-STAGE TYPE VACUUM PUMP 失效
公开(公告)号：JPS62258186A
公开(公告)日：1987-11-10
申请号：JP10094386
申请日：1986-05-02
申请人： HITACHI LTD
发明人： NAGAOKA TAKASHI , OSAKABE ICHIRO , MURATA YUKIO , TANIYAMA MINORU , IKEMURA KAZUHIKO
IPC分类号： F04D19/04
摘要： PURPOSE:To reduce leakage at a stator, by providing a water-cooled jacket at the outer periphery of a stator made integrally with it by a precision casting. CONSTITUTION:A pump stage 12 comprises an impeller 12A and a stator 12B having a groove defined in its inner diameter and a water-cooled jacket 17 disposed on its outer diameter. The stator 12B has a half-divided construction divided longitudinally by a surface including its center line. The half-divided portion is made integrally by precision casting. As a result, there is no gap between the stators for reducing leakage of gas handled, whereby cooling efficiency can be improved.

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