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    • 5. 发明专利
    • ION SOURCE
    • JP2001143629A
    • 2001-05-25
    • JP32503699
    • 1999-11-16
    • HITACHI LTD
    • TANAKA MASANOBUAMAMIYA KENSUKETAKEUCHI KAZUHIROSATO TADASHI
    • H01J27/08H01J37/08
    • PROBLEM TO BE SOLVED: To simplify a structure of a discharging vessel top plate, minimize a plasma loss and enhance an ion production efficiency. SOLUTION: A structure for insulating a discharging vessel top plate 2 from a discharging vessel 1 which is a discharging cathode by an insulating spacer 12, while removing a plasma closing magnet on a discharging vessel top plate 2 having been mounted as a conventional ion source, is provided. Thereby, the structure on the discharging vessel top plate 2 is simplified, a plasma loss on the discharging vessel top plate in the absence of the magnet is minimized and the reduction of an ion production efficiency can be prevented. Further, to set a potential of the discharging vessel top plate 2, a resistor 15 is disposed between the discharging vessel 1 and the discharging the vessel top plate 2 to connect them. Furthermore, according to the present invention, by enhancing the ion production efficiency, the life of a filament can be lengthened by a high current of an ion beam 9 and/or the reduction of a discharging power.
    • 6. 发明专利
    • CHARGED PARTICLE BEAM IRRADIATION APPARATUS
    • JP2001084948A
    • 2001-03-30
    • JP26319299
    • 1999-09-17
    • HITACHI LTD
    • TAKEUCHI KAZUHIROKAWAKUBO YUKIOSATO TADASHI
    • H01J37/18G21K5/04H01J37/301
    • PROBLEM TO BE SOLVED: To shorten the time for interrupting irradiation with charged particle beam during maintenance of a diaphragm to approximately consecutively continue processing with irradiation with the charged particle beam during the maintenance, by making the diaphragm partitioning between a reactor and an irradiated object movable. SOLUTION: It is preferable to allow to interchange or maintain a diaphragm 3 without opening a charged particle source side to air, by providing a gate valve 8 between the diaphragm 3 and a charged particle source, and a sealing mechanism 7 between the diaphragm 3 and a wall of the device. Electron beam 1 is stopped by turning off a switch of the acceleration voltage of the electron beam 1. Upstream and downstream sides of the diaphragm 3 are then under atmospheric pressure by closing the gate valve 8. The diaphragm 3 is slid by the sealing mechanism 7 and moved, and new diaphragm 3 is placed on an optical path of the electron beam 1. The gate valve 8 is opened and the acceleration voltage of the electron beam 1 is turned on, and new micro aperture 5 is pierced by the electron beam itself to continue operation. The diaphragm 3 moved is maintained by performing filling of the enlarged micro aperture 5 through welding and the like.
    • 8. 发明专利
    • ELECTROMAGNETIC MOLTEN FURNACE
    • JPH11297464A
    • 1999-10-29
    • JP9294898
    • 1998-04-06
    • HITACHI LTD
    • ABE MITSUJITAKEUCHI KAZUHIRO
    • H05B6/06F23G5/00F27B14/20F27D11/06H05B6/18
    • PROBLEM TO BE SOLVED: To provide stable heating distribution by providing a magnetic measuring system for finding the eddy current intensity distribution and a calorific value by measuring a magnetic sensor around a molten furnace. SOLUTION: The distribution of an eddy current is found from the distribution of magnetic field intensity, a time change in the eddy current in respective places is known by finding the time change in this distribution, and a phase of the eddy current to an input electric current in the respective places can also be known, by comparing the change with an input electric current waveform to a coil. The intensity of the eddy current relates to a quantity of electric conductor, and a delay of the phase depends on electric conductivity of the electric conductor, so that the eddy current/heating distribution and electrical conductivity inside of a furnace can be estimated by knowing intensity and a waveform of the eddy current. The time change in the eddy current in the furnace can be found by making a prescribed calculation on measuring data of time series, and reduction in a heating element in the furnace can be obtained from the result when the eddy current weakens, so that a heating element can be added.
    • 9. 发明专利
    • PLASMA SECTION FORM DISPLAY DEVICE
    • JPH0694867A
    • 1994-04-08
    • JP24166392
    • 1992-09-10
    • HITACHI LTD
    • HARA SHIGEMITSUTAKEUCHI KAZUHIROABE MITSUJI
    • G21B1/00
    • PURPOSE:To carry out a high speed operation of a plasma section form, and to realize the actual time display, by dividing the contents of a plasma section form operation into an operation of sum of products to find the magnetic flux distribution from the input magnetic signal, and an operation to find the plasma surface coordinates from the magnetic flux distribution, and allocating one processor or more to each operation. CONSTITUTION:A plasma 1 to display the section form is produced in a vacuum container 2, and a signal detected by a magnetic sensor 3 is integrated by an integrator 4, and made into an analog data signal of a poloidal magnetic field. This signal is transferred from a CPU (host) 6 to a DSP 7 through an A/D converter 5. In the DSP 7, the calculation of the magnetic flux distribution of the operation main body of the sum of products is carried out, the magnetic flux distribution data is transferred to a DSP 8 and a DSP 9, and the plasma surface coordinates are operated in parallel. The result of the calculation is written in the image memory on a graphic board 10 through the CPU 6, the plasma section form is displayed on the screen of a CRT 11, and the actual time of the plasma section form can be displayed.
    • 10. 发明专利
    • PLASMA POSITION AND SHAPE CONTROLLER OF NUCLEAR FUSION DEVICE
    • JPH0572365A
    • 1993-03-26
    • JP23331991
    • 1991-09-12
    • HITACHI LTD
    • TAKEUCHI KAZUHIROABE MITSUJIKINOSHITA SHIGEMI
    • G21B1/11G21B1/00G21B1/25
    • PURPOSE:To heighten the safety of the device by providing an operation part for evaluating quenching probability and selecting a control method having a small risk of quenching by means of measured data of temperature, electric current and a magnetic field of a superconducting coil. CONSTITUTION:The position and shape of plasma 1 is controlled with a superconducting coil 2. Measured data Tj, Hj, Jj transmitted from coil temperature, electric current and magnetic field meters 16, 17, 18 are sent to a plasma position and shape operation part 3 and a quenching probability operation part 4. An control error deltai between plasma a position-shape and its aimed value is calculated from the operation part 3. Quenching probability Pj is calculated from temperature Tj, a magnetic field Hj and electric current Jj in the operation part 4. The probability Pj and the error deltai are considered, and a control method with a small risk of quenching is selected from an evaluation function of a control system to determine a voltage command value of the coil 2. The voltage Vj is applied to the coil 2 by the use of a power source 6 on the basis of its command value and the plasma position and shape are controlled.