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1. 发明专利

JPH03133081A TEMPERATURE CONTROLLER 失效
公开(公告)号：JPH03133081A
公开(公告)日：1991-06-06
申请号：JP26891989
申请日：1989-10-18
申请人： HITACHI LTD
发明人： YAMAZAKI MATSUO , MATSUKIYO HIDEJI , SHISHIUCHI KAZUO
IPC分类号： H05B3/00
摘要： PURPOSE:To readily select the most suitable heater for both a controlled temperature value and the specification of a sample stand by inserting a stepdown transformer between the output of a thyristor and a heater. CONSTITUTION:A stepdown transformer 3 is inserted between the output of a thyristor 2 and a heater 4 and the output specification of a temperature adjuster 1 which is supplied to the gate of the thyristor 2 is ON/OFF controlled. Insertion of the stepdown transformer 3 between the output of the thyristor 2 and the heater 4 enables a desired voltage to be obtained on the secondary side of the stepdown transformer 3 whereby an AC voltage source corresponding to the voltage specification of the heater 4 is obtained. The ON/OFF control of the output specification of the temperature adjuster 1 supplied to the gate of the thyristor 2 most utilizes the conversion efficiency of the transformer 3 whereby an AC voltage source with less noise is obtained. Selection of the most suitable heater for both a controlled temperature value and the specification of a sample stand is thus facilitated.

2. 发明专利

JPH02304368A PROBE FOR INSPECTING SEMICONDUCTOR AND SEMICONDUCTOR INSPECTION DEVICE 失效
公开(公告)号：JPH02304368A
公开(公告)日：1990-12-18
申请号：JP12431889
申请日：1989-05-19
申请人： HITACHI LTD
发明人： YAMAZAKI MATSUO , WATANABE KIKUO , TAKAHASHI MASAHIRO , IMAI KUNINORI , SHISHIUCHI KAZUO
IPC分类号： G01R31/26 , G01R1/06 , G01R1/067 , H01L21/66
摘要： PURPOSE:To obtain a probe whose temperature strain is small even in the environment in which a temperature is varied greatly by forming an insulating layer in the probe and a handle part with a vitreous material having a thermal expansion coefficient being approximate to that of the probe. CONSTITUTION:On the outer periphery of the probe 2 constituted of a conductive metallic wire, an insulating layer 3 constituted of a vitreous material whose thermal expansion coefficient is approximate to that of the probe 2 is formed, and by bringing a conductive layer 4 for shielding to vapor deposition to the outer peripheral part of the layer 3, a probe is formed. Also, a handle 5 for attaching the probe is formed integrally with the layer 3 by the same vitreous material as the layer 3. Moreover, as for the signal terminal of the probe, a coaxial connector 6 is used, the signal pin of the connector 6 is connected to the probe 2, and a shielding part is connected to the layer 4 with a conductive adhesive 7. In such a manner, even in the using environment in which a temperature is varied extending from a low temperature to a high temperature, the probe whose temperature strain is small can be obtained.

3. 发明专利

JPH03131769A MOUNTING METHOD FOR ELECTRON BEAM CURRENT DETECTOR 失效
公开(公告)号：JPH03131769A
公开(公告)日：1991-06-05
申请号：JP26891889
申请日：1989-10-18
申请人： HITACHI LTD
发明人： YAMAZAKI MATSUO , MATSUKIYO HIDEJI , SHISHIUCHI KAZUO
IPC分类号： G01D3/02 , G01R15/00 , G01R19/00 , G01R31/302
摘要： PURPOSE:To observe the fast rising and falling characteristics of a current waveform by mounting the current/voltage converting amplifier of the current beam detector very closely to a Faraday cup. CONSTITUTION:An electron gun power source 10 heats a cathode 4 and applies a voltage between a grid 5 and the cathode 4, and a sample base (anode) 7 to generate an electron beam. Then the Faraday cup 8 detects the current value of the electron beam reaching the sample base 7 and the current-voltage converting amplifier 2 converts the current into a voltage through an input connector mounted very closely to the cup 8, so that a current waveform is displayed on a current monitor 3. Consequently, the electrostatic capacity from the cup 8 to the amplifier 2 becomes small and the fast rising/falling characteristics of the current waveform can be observed. Further, tolerance to a disturbance is obtained by connecting the input connector of the amplifier directly to the output connector of the cup 8.

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