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1. 发明专利

JP2002267668A METHOD OF USING, PROVIDING AND PRODUCING INFORMATION ON DNA ARRAY 失效
公开(公告)号：JP2002267668A
公开(公告)日：2002-09-18
申请号：JP2001069611
申请日：2001-03-13
申请人： HITACHI LTD
发明人： TOMITA HIROYUKI , NINOMIYA TAKESHI
IPC分类号： G01N33/53 , C12M1/00 , C12N15/09 , G01N33/566 , G01N37/00 , G06F17/30 , G06F19/00 , G06F19/20
摘要： PROBLEM TO BE SOLVED: To provide a system which standardizes and accuracy-guarantees the accuracy of the measurement result of a device called a DNA array or a DNA chip. SOLUTION: An apparatus for standardizing the measurement result of the DNA array is constructed in such a way that DNA arrays which are put on the market by each DNA manufacturing company or DNA arrays which are made by a DNA array consumer himself are compared, that the result of their measurement is stored in a form such as a conversion table or the like and that, according to the demand of the DNA array consumer, information required for the normalization of the DNA arrays is provided. Consequently, it is possible to standardize or guarantee the accuracy of the measurement result of the device called the DNA array or the DNA chip.

2. 发明专利

JPH11352063A ELECTROCHEMILUMINESCENCE ANALYTICAL EQUIPMENT 失效
公开(公告)号：JPH11352063A
公开(公告)日：1999-12-24
申请号：JP16179198
申请日：1998-06-10
申请人： HITACHI LTD
发明人： TOMITA HIROYUKI , MIYAHARA YUJI , KAJIYAMA TOMOHARU , NINOMIYA TAKESHI
IPC分类号： G01N21/76
摘要： PROBLEM TO BE SOLVED: To automatically analyze according to an ECL method with the use of a batch system by using a container, a part of which passes a light and an electrode rod of a shape having a similar section to the container and a front face agreeing with a bottom face of the container. SOLUTION: A working electrode 31, counter electrode 32 are set at a lower face. A reference electrode 33 is preferably set separately to control a potential of the working electrode 31. A reaction vessel 1 and an electrode rod 9 are formed nearly the same in section form. A recess is formed at a central part of the rod 9 for preventing a solution from leaking from the reaction vessel 1, when the electrode rod 9 is pressed to the vessel 1. The electrode 31 and the electrode 32 are connected respectively by a wire 35 to a working electrode terminal 36 and a counter electrode terminal 37. A strut 34 of the electrode rod 9 works also as a terminal for the electrode 33. The strut 34, terminal 36, terminal 37 are separated from each other by an insulating body 38 for preventing short-circuiting. The rod 9 is fixed by forming a hole for the electrodes 31 and 32 in a circular resin bar 39, warming the resin bar 39 and inserting the rod into the hole. The electrodes 31, 32 are preferably flush with each other.

3. 发明专利

JPH1050659A SURFACE TREATING APPARATUS 失效
公开(公告)号：JPH1050659A
公开(公告)日：1998-02-20
申请号：JP12048297
申请日：1997-05-12
申请人： HITACHI LTD
发明人： SUZUKI KEIZO , NINOMIYA TAKESHI , NISHIMATSU SHIGERU , OKADA OSAMI
IPC分类号： H01L21/302 , H01L21/205 , H01L21/306 , H01L21/31
摘要： PROBLEM TO BE SOLVED: To provide a surface treating apparatus which is improved for treating the surface of a work with little damages, contaminations and temp. rise. SOLUTION: A surface treating gas M is heated in a gas-heating furnace 6 and jetted into a vacuum chamber 1 through a nozzle 7 to form an activated particle beam M' which is then ejected on the surface of a work 2 to make desired surface treatment. The hole 7 is surrounded by a heat source 5 for heating the furnace 6 and pref. heated at the same temp. as in the furnace 6. This prevents the heated and excited particles from being cooled to lose the chemical activity while passing through the nozzle 7. Since no high-energy beam such as the conventional ion beam or plasma excited beam is used, this enables the surface treatment with little damages, low contamination and low temp. rise.

4. 发明专利

JPH0961600A SCANNING X-RAY MICROSCOPE 失效
公开(公告)号：JPH0961600A
公开(公告)日：1997-03-07
申请号：JP21567395
申请日：1995-08-24
申请人： HITACHI LTD
发明人： NINOMIYA TAKESHI , HASEGAWA MASAKI , YONEYAMA AKIO , YAMAMOTO KENICHI
IPC分类号： G21K7/00
摘要： PROBLEM TO BE SOLVED: To provide a scanning X-ray microscope which can analyze chemical state in area of wafer or disc level in size with a high space resolution. SOLUTION: A sample 6 is set on a fine adjustment stage 7, which is placed on a coarse adjustment stage 8. The stages 7 and 8 are scanned while X rays 5 are condensed to irradiate the sample 6 by using an optical element 3, and photoelectrons generated in the process are detected to visualize the chemical state on the surface of the sample 6 as an image. The use of both sample stages combining the fine adjustment stage 7 which enables the highly precise scanning and the coarse adjustment stage 8 which can scan a wide area, makes it possible to scan the wide range on the surface of the sample with high precision by using X-ray microbeams. Consequently, the chemical state over a wide range of 10 by 10mm square or larger can be analyzed with a high space resolution.

5. 发明专利

JPH0855598A SCANNING PHOTOELECTRON MICROSCOPE 失效
公开(公告)号：JPH0855598A
公开(公告)日：1996-02-27
申请号：JP18923994
申请日：1994-08-11
申请人： HITACHI LTD
发明人： NINOMIYA TAKESHI , HASEGAWA MASAKI
IPC分类号： G21K5/02 , H01J37/252
摘要： PURPOSE:To provide a scanning photoelectron microscope which enables analysis of chemical and electron states at high space resolutions. CONSTITUTION:A laser beam from a pulsed laser 1 is focused onto a target 3 using a condenser 2, and a plasma is generated by aberrations. X-rays from the plasma are monochromated by a spectrograph 5 and then focused onto the surface of a sample 7 using an optical element 6. Photoelectrons generated are detected by an energy analyzer 9. An inexpensive, simple scanning photoelectron microscope can thus be obtained.

6. 发明专利

JPH0843331A METHOD AND DEVICE FOR X-RAY ANALYSIS 失效
公开(公告)号：JPH0843331A
公开(公告)日：1996-02-16
申请号：JP17641594
申请日：1994-07-28
申请人： HITACHI LTD
发明人： NINOMIYA TAKESHI , SUDO ITSUKI , KURE TOKUO
IPC分类号： G01N23/225
摘要： PURPOSE:To provide an X-ray analyzing device, which can accurately analyze a residual film of the bottom surface of a fine hole. CONSTITUTION:Electron beams 8 from an electron source 1 are accelerated and converged, and the surface of a sample 6 is irradiated with the electron beams 8, and the generated X-ray 9 is detected by a detecting head 11. Change of the irradiation position of the electron beam 8 is corrected by a deflecting coil 5', and change of the incident current quantity and incident energy of the electron beam 8 to the sample 6 can be corrected. Consequently, since electron beam irradiation position, incident current quantity, incident energy during the measurement of the X-ray can be maintained constant, analysis of 2 residual film can be accurately performed.

7. 发明专利

JPH07318521A METHOD AND APPARATUS FOR ANALYZING WITH X-RAYS 失效
公开(公告)号：JPH07318521A
公开(公告)日：1995-12-08
申请号：JP10812794
申请日：1994-05-23
申请人： HITACHI LTD
发明人： HASEGAWA MASAKI , NINOMIYA TAKESHI
IPC分类号： G01N23/227
摘要： PURPOSE:To improve energy resolution and to accurately analyze a chemical state by condensing exciting lights in a region of the size of a predetermined diameter or less on a sample surface by using an optical element. CONSTITUTION:In order to fall the entire energy analyzer within the inner diameter of a standard tube which can be connected to an ICF253 flange, the radius of a semispherical grid 2 is set to 40mm, and the diameter of its opening A is set to its 1%, and hence it becomes about 40mum. Then, when a radiant light from a normal deflecting electromagnet is, for example, limited by a pinhole as a light source (size of about 600mumPHI), a Walter reflecting mirror having a contraction ratio of l/30 is used as an exciting light condensing optical element 4, and the light is incident on the surface of a sample S at an angle of 25 degrees, even if an irradiating area is limited to the 1/10 (about 40mum) or less of the diameter of the opening A, sufficient quantity of the exciting light can be radiated to the sample S. Accordingly, the irradiating area can be reduced from the size of the opening A without remarkably attenuating the intensity of the incident exciting light, thereby improving its energy resolution.

8. 发明专利

JPH07260714A X-RAY ANALYZER 失效
公开(公告)号：JPH07260714A
公开(公告)日：1995-10-13
申请号：JP5546694
申请日：1994-03-25
申请人： HITACHI LTD
发明人： NINOMIYA TAKESHI , HASEGAWA MASAKI
IPC分类号： G01N23/22
摘要： PURPOSE:To make it possible to execute fine regulation of an optical element for convergence of an X ray easily and in a short time by a method wherein a two-dimensional image detector for detecting a sectional image of a convergent X ray is disposed on the optical axis of the X ray. CONSTITUTION:An image detector 1 and a sample support stage 5 are disposed for the main body of equipment through the intermediary of a moving mechanism 2 or 7 so that they can be inserted into and removed from the focal position of an X ray in a replacing manner. In the case when an imaging system of an optical element 9 is regulated, the sample support stage 5 is withdrawn from the focal position by operating the moving mechanism 7 and then the image detector 1 is inserted into the focal position by operating the moving mechanism 2. Information on a two-dimensional image detected by the image detector 1 is processed by using an image processing device 3 and then displayed as a sectional image of a convergent X ray on the screen of a monitor thereof. By operating a controller 11 while observing the sectional image of the convergent X ray, accordingly, a manufacturer or a user of the equipment can regulate the optical element 9 finely to be in the optimum condition through the intermediary of a regulating mechanism 10.

9. 发明专利

JPH0727549A SCANNING ELECTRON MICROSCOPE WITH LENGTH MEASURING FUNCTION 失效
公开(公告)号：JPH0727549A
公开(公告)日：1995-01-27
申请号：JP17588893
申请日：1993-06-24
申请人： HITACHI LTD
发明人： TODOKORO HIDEO , TERAKADO SADAO , KURODA KATSUHIRO , NINOMIYA TAKESHI , KURE TOKUO , MIZUNO FUMIO , YAMADA SATORU
IPC分类号： G01B15/00 , H01J37/22
摘要： PURPOSE:To measure the length of a portion not directly radiated with an electron beam by radiating the electron beam capable of transmitting part of a sample and reaching the portion not exposed to the electron beam. CONSTITUTION:A high-energy electron beam 43 capable of transmitting part of a sample substrate 1 and reaching a portion not exposed to the electron beam 43 is radiated to the substrate 1. Surface secondary electrons 46 are generated from the surface of the substrate 1, and second electrons 47 are generated from the side wall of a reverse tapered contact hole. Bottom secondary electrons 48 are generated by the electron beam 43 reentering from the bottom face. Side wall secondary electrons 47 are generated when the reflected electrons 49 generated on the bottom face enter the side wall, and escape secondary electrons 41 are generated when the reflected electrons 49 escape from the surface. The signal from a taper section is the most intense among the signals generated from the surface, bottom face, and taper section of the substrate 1 respectively, thus the taper section is observed as a bright ring, and the diameter of the bottom face is directly measured.

10. 发明专利

JPH05126769A METHOD AND APPARATUS FOR ANALYZING SURFACE 失效
公开(公告)号：JPH05126769A
公开(公告)日：1993-05-21
申请号：JP28756691
申请日：1991-11-01
申请人： HITACHI LTD
发明人： HASEGAWA MASAKI , NINOMIYA TAKESHI
IPC分类号： G01N23/223 , G01R31/26 , G01R31/302 , H01L21/66
摘要： PURPOSE:To make it possible to perform the automatic focusing of a probe beam on the surface of a sample and to make the analysis of the surface of a minute area highly accurate by detecting the fluorescence region on the surface of the sample, and automatically adjusting the arrangement of each element of an optical system so that the size of the fluorescence region becomes the minimum size. CONSTITUTION:The fluorescence, which is formed by the application of a probe beam on the surface of a sample 3, is condensed with an optical element 2, which is similar to a condensing optical element. The beam is taken out of the optical axis of the element 2 with a reflecting mirror 9. The expanded image of a fluorescence generating region is formed on a detector 10. The two-dimensional image signal is converted into the numerical-value data with a signal processing device 11, and the data are sent into a control device 12. The device 12 moves a sample stage 4 so that the fluorescence region becomes the minimum size based on the diameter of the fluorescence region computed by using the data and the position data of the sample 3 inputted from a controller 6 of a sample moving mechanism 5 and optimizes the position of the sample 3. Thus, the converging point of the probe beam can be automatically focused on the surface of the sample, and the surface of the minute area can be readily analyzed highly accurately.

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