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1. 发明专利

DE69320753D1 未知
公开(公告)号：DE69320753D1
公开(公告)日：1998-10-08
申请号：DE69320753
申请日：1993-11-04
申请人： HITACHI LTD , HITACHI CONSTRUCTION MACHINERY
发明人： HOSAKA SUMIO , KIKUGAWA ATSUSHI , HONDA YUKIO , KOYANAGI HAJIME , NAGASAWA KIYOSI
IPC分类号： G01B5/28 , G01B7/00 , G01B7/34 , G01B21/30 , G01N27/00 , G01Q20/02 , G01Q20/04 , G01Q30/06 , G01Q70/04

2. 发明专利

DE69309318D1 未知
公开(公告)号：DE69309318D1
公开(公告)日：1997-05-07
申请号：DE69309318
申请日：1993-01-05
申请人： HITACHI LTD
发明人： HOSAKA SUMIO , KIKUGAWA ATSUSHI , HONDA YUKIO , KOYANAGI HAJIME , HOSOKI SHIGEYUKI , HASEGAWA TSUYOSHI
IPC分类号： G01B7/34 , G01Q10/00 , G01Q20/02 , G01Q60/02 , G01Q60/08 , G01Q60/24 , G01Q60/26 , G01Q60/32 , G11B5/00 , G11B11/00 , G01N27/00
摘要： A surface observing apparatus for obtaining information of a specimen comprises a probe (17) disposed in the close vicinity of the specimen (2), a deformable cantilever (1) for holding the probe (17), a scanning mechanism for scanning a surface of the specimen with the probe (17), and detectors (3, 4, 5) for detecting displacements of the cantilever (1) to thereby allow information of the specimen to be derived on the basis of the displacement of the cantilever (1). The apparatus further comprise a first detector (9) for detecting a force acting on the probe from the displacement of the cantilever, and a second detector (7) for measuring a change in the force acting on the probe on the basis of the displacement of the cantilever.

3. 发明专利

DE69320753T2 未知
公开(公告)号：DE69320753T2
公开(公告)日：1999-03-25
申请号：DE69320753
申请日：1993-11-04
申请人： HITACHI LTD , HITACHI CONSTRUCTION MACHINERY
发明人： HOSAKA SUMIO , KIKUGAWA ATSUSHI , HONDA YUKIO , KOYANAGI HAJIME , NAGASAWA KIYOSI
IPC分类号： G01B5/28 , G01B7/00 , G01B7/34 , G01B21/30 , G01N27/00 , G01Q20/02 , G01Q20/04 , G01Q30/06 , G01Q70/04

4. 发明专利

DE69309318T2 未知
公开(公告)号：DE69309318T2
公开(公告)日：1997-10-30
申请号：DE69309318
申请日：1993-01-05
申请人： HITACHI LTD
发明人： HOSAKA SUMIO , KIKUGAWA ATSUSHI , HONDA YUKIO , KOYANAGI HAJIME , HOSOKI SHIGEYUKI , HASEGAWA TSUYOSHI
IPC分类号： G01B7/34 , G01Q10/00 , G01Q20/02 , G01Q60/02 , G01Q60/08 , G01Q60/24 , G01Q60/26 , G01Q60/32 , G11B5/00 , G11B11/00 , G01N27/00
摘要： A surface observing apparatus for obtaining information of a specimen comprises a probe (17) disposed in the close vicinity of the specimen (2), a deformable cantilever (1) for holding the probe (17), a scanning mechanism for scanning a surface of the specimen with the probe (17), and detectors (3, 4, 5) for detecting displacements of the cantilever (1) to thereby allow information of the specimen to be derived on the basis of the displacement of the cantilever (1). The apparatus further comprise a first detector (9) for detecting a force acting on the probe from the displacement of the cantilever, and a second detector (7) for measuring a change in the force acting on the probe on the basis of the displacement of the cantilever.

5. 发明专利

JPH10214419A MAGNETIC RECORDING MEDIUM AND MAGNETIC RECORDER 失效
公开(公告)号：JPH10214419A
公开(公告)日：1998-08-11
申请号：JP1823597
申请日：1997-01-31
申请人： HITACHI LTD
发明人： HOSAKA SUMIO , KIKUKAWA ATSUSHI , KOYANAGI HAJIME , MIYAMOTO MITSUHIDE
IPC分类号： G11B5/00 , G11B5/127 , G11B5/82 , G11B9/00 , G11B21/21
摘要： PROBLEM TO BE SOLVED: To realized a magnetic recording for ultra high-density of not less than 10Gb/in . SOLUTION: This recording medium consists of substrate 7 having V-shaped structure and the magnetic film 6 formed on the substrate. Unit recording bit areas 8 are formed in the longitudinal direction of the V-shaped structure. This device has a magnetic head 1 formed on a cantilever 10. The magnetic head 1 is constituted of an upper magnetic pole 3, a coil 4, a lower magnetic pole 5 and an insulating substance for separation and a leakage flux 9 is formed at the tip of the head. Thus, the magnetic recording of ultra high-density can be realized and the device can be inexpensively provided.

6. 发明专利

JP2000298990A RECORDING ELEMENT 失效
公开(公告)号：JP2000298990A
公开(公告)日：2000-10-24
申请号：JP10370899
申请日：1999-04-12
申请人： HITACHI LTD
发明人： HOSAKA SUMIO , KOYANAGI HAJIME , ISSHIKI FUMIO
IPC分类号： G11C13/04
摘要： PROBLEM TO BE SOLVED: To realize phase variation record with super-high density without using a mechanical system by using difference of resistance values of a crystalline phase and an amorphous phase in phase variation materials for storage principle of information. SOLUTION: A memory unit (cell) of information is a recording element having such plural structure that a storage member 2 using phase variation materials is held between a first electrode 1 and a second electrode 3. When this storage member 2 is a crystalline phase, a current I made to flow between the first and the second electrodes is easy to flow. On the other hand, when the storage member 2 is an amorphous phase, a current I made to flow between the first and the second electrodes is hard to flow. Then, when read-out voltage is assumed as Vr, current I2, and I2 can be measured. As resistance values of a crystalline phase and an amorphous phase of the storage member 2 are different by about two figures, values of current are different by almost two figures. By using this characteristic, it can be read out that information is '1' or '0'.

7. 发明专利

JPH11248718A PATTERN FORMING METHOD AND DEVICE 失效
公开(公告)号：JPH11248718A
公开(公告)日：1999-09-17
申请号：JP5178498
申请日：1998-03-04
申请人： HITACHI LTD
发明人： KOYANAGI HAJIME , HOSAKA SUMIO
IPC分类号： H01L21/302 , G01N37/00 , G01Q80/00 , G01Q90/00 , G11B9/14 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To form a pattern in a micro-scale newly on a resist film of film thickness that does not bring about any defects by providing a contact force exceeding the elastic limit of the surface of the resist for between a probe electrode and the surface of the resist, plastically deforming the surface. and simultaneously exposing the resist by a current passing between the probe electrode and a substrate. SOLUTION: A contact force between a probe electrode 1 and the surface of a resist 14 deflects a blade spring 2. Laser light from a laser diode 3 is condensed onto the back surface of the blade spring 2, and the displacement of the reflected light is detected by a position sensor 5 to detect the contact force between the probe electrode 1 and the resist 14. A force servo circuit 7 outputs a signal to a Z-direction micro-motion device 17 so that a signal from the sensor 5 may become a constant value. A current detector 11 detects a current between the probe electrode 1 and a substrate 13 via the resist 14 outputs a signal to a current servo circuit 12, and regulates impressed voltage to an electrode 1 so that the signal may become a constant value. A groove in a scale of tens of nanometers or less is formed on the surface of the resist 14 through the use of a rotation driving device 15 and a radial driving device 16.

8. 发明专利

JPH09199042A CIRCUIT ELEMENT 失效
公开(公告)号：JPH09199042A
公开(公告)日：1997-07-31
申请号：JP730396
申请日：1996-01-19
申请人： HITACHI LTD
发明人： HOSAKA SUMIO , KIKUKAWA ATSUSHI , KOYANAGI HAJIME
IPC分类号： H01J19/24 , H01J21/06 , H01J21/10 , H01L29/66
摘要： PROBLEM TO BE SOLVED: To provide a solid element capable of being operated at the room temperature by arranging multiple fine electrodes in tunnel coupling between a source electrode and a drain electrode, and controlling the current flowing between the source electrode and the drain electrode with a control electrode coupled with the fine electrodes by electrostatic capacity. SOLUTION: Multiple fine conductors 2 arranged sporadically for tunnel coupling to feed currents and multiple control fine conductors 3 sandwiched by the fine conductors 2 are formed between a source electrode 1 and a drain electrode 4 provided on an insulator. The control fine conductors 3 are coupled with a control electrode 5 by electrostatic capacity, and they control the current flowing between the source electrode 1 and the drain electrode 4 based on the signal from the control electrode 5. A circuit element capable of realizing an amplifier and a switching element in a solid with the insulator and the conductors is obtained.

9. 发明专利

JPH06180870A STORAGE DEVICE 失效
公开(公告)号：JPH06180870A
公开(公告)日：1994-06-28
申请号：JP33412492
申请日：1992-12-15
申请人： HITACHI LTD
发明人： KOYANAGI HAJIME , HOSAKA SUMIO
IPC分类号： B41M5/20 , B41M5/24 , G01D15/08 , G01Q60/10 , G01Q60/40 , G01Q80/00 , G11B9/00 , G11B9/14 , H01J37/28
摘要： PURPOSE:To provide an information storage device capable of stably operating in the atmosphere and at a normal temperature and performing high density recording whose recording unit is nm order at high speed on information recording. CONSTITUTION:This device is constituted of an SPM device with a conductive probe 2, a recording medium 1 and a voltage applying device 12 applying voltage between the probe and the medium. Thus, the stable recording with recording unit of nm order is rearized at high speed in the atmosphere and at a normal temperature since the recording is performed using an SPM.

10. 发明专利

JP2000206126A MINUTE CANTILEVER AND APPARATUS UTILIZING MINUTE FORCE 失效
公开(公告)号：JP2000206126A
公开(公告)日：2000-07-28
申请号：JP897899
申请日：1999-01-18
申请人： HITACHI LTD , HITACHI CONSTRUCTION MACHINERY
发明人： HOSAKA SUMIO , KIKUKAWA ATSUSHI , ETO KIMITOSHI , KOYANAGI HAJIME , ONOZATO AKIMASA , MURAYAMA TAKESHI
IPC分类号： G11B7/12 , G01B7/34 , G01B21/30 , G01N37/00 , G01Q60/38 , G01Q60/40
摘要： PROBLEM TO BE SOLVED: To make highly accurately and easily formable a minute cantilever having a low spring constant and a high resonance frequency by controlling the thickness by a semiconductor lithography technique, and forming the cantilever and a cantilever support stage of different materials on the same face. SOLUTION: A silicon active layer 4 of an SOI(silicon on insulator) wafer is anisotropically etched, thereby forming an active layer part 7 to be a cantilever support stage. A silicon oxide film 5 is etched thereby forming square through windows 8. Square prisms 9 are formed to a silicon substrate 6 with using the oxide film 5 as a mask. A cantilever material such as silicon nitride or the like is vapor deposited to form a cantilever film 10, on which a photoresist pattern for the cantilever is formed by a photolithography technique. The cantilever is formed by reactive ion etching with using the photoresist pattern as a mask. The silicon substrate part 6 and silicon oxide film 5 are removed at the end. The minute cantilever with a probe 1' is thus formed.

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