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1. 发明专利

JP2002141013A ELECTRON DETECTING DEVICE, CHARGED PARTICLE BEAM DEVICE, SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE, AND PROCESSING, OBSERVATION, INSPECTION METHODS FOR SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE 失效
公开(公告)号：JP2002141013A
公开(公告)日：2002-05-17
申请号：JP2000339137
申请日：2000-11-01
申请人： HITACHI LTD
发明人： TANAKA MASAOMI , KATSUYAMA MASAMI , ASAI SUUYO
IPC分类号： G01N23/225 , G03F7/20 , H01J37/244 , H01J37/305 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To reduce an erroneous signal caused by reflected electron of higher order or secondary electron which lower the detection accuracy of the reflected electron. SOLUTION: For the electron detecting device of which, a holder is composed of a plurality of cylinders having a spinning part, a detector is mounted inside the cylinder having the spinning part with an intended intake angle, and the spinning part of the cylinder having a detector selectively collects only the reflected electron directly traveled from a sample. The cylinder or the spinning part with not intended intake angle catches the reflected electron or the like traveled from the sample so as not to make them become the reflected electron of higher order or the like, and also catches the reflected electron of higher order collided against the top end part of the cylinder or the spinning part, and prevents the detector from receiving the reflected electron of higher order.

2. 发明专利

JP2001274223A MOVING TABLE APPARATUS 失效
公开(公告)号：JP2001274223A
公开(公告)日：2001-10-05
申请号：JP2000087111
申请日：2000-03-23
申请人： HITACHI LTD
发明人： MIZUOCHI MAKI , FUKUSHIMA YOSHIMASA , KATSUYAMA MASAMI , KOBAYASHI TOSHITAKA
IPC分类号： B23Q1/00 , B23Q1/58 , B23Q1/62 , B23Q17/24 , H01L21/68 , B23Q1/25
摘要： PROBLEM TO BE SOLVED: To provide a moving table apparatus guided by a roller guide mechanism, with which a constant distance between a bar mirror and a sample can be kept by avoiding deformation of the sample table due to the accuracy of the guide mechanism, such as mounting of rail, variations in rollers and the like, while ensuring rigidity of the guide. SOLUTION: A conventional Y table (top table) 1 is divided into a transfer table 21 for holding a guide, an X bar mirror 5, a Y bar mirror 6 and a sample table 20, on which samples are placed and the tables are linked via elastic bodies 25.

3. 发明专利

JP2000269307A MOVABLE TABLE APPARATUS 失效
公开(公告)号：JP2000269307A
公开(公告)日：2000-09-29
申请号：JP6953499
申请日：1999-03-16
申请人： HITACHI LTD
发明人： MIZUOCHI MAKI , FUKUSHIMA YOSHIMASA , KATSUYAMA MASAMI , KURIMOTO KOZO
IPC分类号： B23Q1/00 , B23Q1/26 , B23Q1/40 , B23Q1/56 , B23Q1/62 , G12B5/00 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To absorb variations of a roller dimension, or changes of the distance between guide rails due to temperature changes, by a method wherein an elastic body deformable in a pressurized direction to a first guide is provided between a second table mounting a first table movable in a straight line and the guide. SOLUTION: An elastic body 30 is fixed to an X table 2 with bolts, and a fixing side guide rail 4 is fixed to the elastic body 30 with bolts. The elastic body 30 gives a pressing force for closely contacting a fixing side guide rail 4 and a moving side guide rail 5 opposite to a roller 7 by a preloading screw 20. When preloaded by the elastic body 30, when a diameter of the roller 7 which the moving the side guide rail 5 newly pinches after a Y table 1 moves downwardly of a paper face is larger than that of the roller 7 which the moving side guide rail 5 has already pinched, a displacement of the guide rail is absorbed to keep the pressure constant. Furthermore, when the roller 7 is ejected from between the guide rails, the guide rail is pressed to the roller to make the pressure constant.

4. 发明专利

JPH05144696A PROJECTION ALIGNER 失效
公开(公告)号：JPH05144696A
公开(公告)日：1993-06-11
申请号：JP30449791
申请日：1991-11-20
申请人： HITACHI LTD
发明人： KUROSAKI TOSHISHIGE , KATSUYAMA MASAMI , FURUKAWA TAKAYASU
IPC分类号： G03F7/20 , H01L21/027 , H01L21/30
摘要： PURPOSE:To obtain a means which relates to the structure body of an aligner used in a lithography process of semiconductor elemenet manufacture and especially prevents foreign matters from adhering to a substrate, an object to be exposed. CONSTITUTION:The rib of a structure body 4 is arranged on the side opposite to the wafer 6 side. Thereby foreign matters are prevented from dropping from the structure body, and defects of a wafer due to foreign matters are not generated, so that yield can be improved.

5. 发明专利

JPH03163848A VACUUM SUCTION BASE 失效
公开(公告)号：JPH03163848A
公开(公告)日：1991-07-15
申请号：JP30217689
申请日：1989-11-22
申请人： HITACHI LTD
发明人： KATSUYAMA MASAMI , SAKAIZAWA HIDEYUKI
IPC分类号： H01L21/683 , G03F7/20 , H01L21/027 , H01L21/30
摘要： PURPOSE:To enhance the flatness of wafers by a method wherein a sheet specimen is arranged to come into contact with the ends of multiple projections arrayed in the pitch not exceeding 2mm forming the same surfaces as well as the upper end of an outer peripheral part including the projections so as to make the projections approach to the outer peripheral part. CONSTITUTION:A wafer suction surface comprising an outer peripheral part 2 and a pin part vacuum-sucks at the rear surface of a wafer 1 to be fixed on a wafer suction base 6 by vacuumizing vacuum holes 4 and a bottom part 5. Taking into consideration of the deformation in the wafer when it is vacuum- sucked at, the pitch of projections 3 and the outer peripheral part 2 is specified not to exceed 1mm likewise the pitch between the projections 3 not to exceed 2mm. Furthermore, in oder to improve the effect of avoiding the adhesion of foreign matters, the space of the projections 3 must be narrowed but in order to avoid the damage due to the flattening work load, both the width of outer peripheral part and the diameter of the projections 3 are specified not to exceed 0.5mm. Through these procedures, the deterioration in the flatness due to the existence of the dust, etc., can be avoided.

6. 发明专利

JPH05321980A VIBRATION DAMPING DEVICE 失效
公开(公告)号：JPH05321980A
公开(公告)日：1993-12-07
申请号：JP12323992
申请日：1992-05-15
申请人： HITACHI LTD
发明人： KATSUYAMA MASAMI
IPC分类号： F16F15/06 , F16F15/067 , G03F7/20 , H01L21/027 , H01L21/30 , H01L21/68
摘要： PURPOSE:To reduce relative displacement between the upper part and the lower part of a device body frame by removing the rotational movement of the frame by internal excitation and reducing moment force applied to the frame. CONSTITUTION:This vibration damping device is constituted of a damping system 3 which works upon the perpendicular and horizontal directions of an inclined spring 2 which supports a body 1. It is thus possible to remove the rotational movement of a device on the vibration damping device, and prevent a body frame from being deformed by moment force applied to a device body for minimum relative displacement of the upper part and the lower part of the frame.

7. 发明专利

JPH1149357A STRAIGHT ADVANCE MOVING TABLE 失效
公开(公告)号：JPH1149357A
公开(公告)日：1999-02-23
申请号：JP20280197
申请日：1997-07-29
申请人： HITACHI LTD
发明人： HARADA KUNIO , FUKUSHIMA YOSHIMASA , SAKAI HIROYUKI , KATSUYAMA MASAMI , SATO HIDETOSHI , KANETOMO MASABUMI , YAMAMOTO TATSUHARU , MATSUMURA YASUHIDE , KASHIMA HIDEO , SUGAYA MASAKAZU
IPC分类号： B65G49/07 , F16C29/04 , F16C29/12
摘要： PROBLEM TO BE SOLVED: To provide a straight advance moving table which prevents rolling elements and retainer from dislocation without degradation in the accuracy and rigidity and can enhance the throughput of the device concerned. SOLUTION: A means is provided to preclude the risk of dislocation of retainer 7' and rolling elements (ball, roller, etc.), of each straight motion bearing, and two retainers installed on straight motion bearings 3 furnished on both sides of a moving part 2 are consolidated, and a gear 12 rotatable in the straight motion direction of the moving part 2 is installed, and in such a way as pinching this gear 12, racks 13 and 13' are furnished on the base 1 and moving part 2 in such an arrangement that the longitudinal direction of the racks 13 and 13' is identical to the advancing direction of the moving part 2. Thereby the retainer 7' and rolling elements 6 can be precluded from risk of dislocation.

8. 发明专利

JPH0945605A ELECTRON BEAM LITHOGRAPHY EQUIPMENT 失效
公开(公告)号：JPH0945605A
公开(公告)日：1997-02-14
申请号：JP19351095
申请日：1995-07-28
申请人： HITACHI LTD
发明人： KOBAYASHI TOSHITAKA , TSUNODA MASAHIRO , KATSUYAMA MASAMI
IPC分类号： H01J37/305 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To realize an electron beam lithography equipment which wherein an can grasp an accurate upper surface shape of a sample arranged in a sample stand and improve pattern generation accuracy and pattern generation efficiency. SOLUTION: A height direction deformation amount calculation part 40 calculates an upper surface coordinate of a sample for each sample material, etc. A taper element calculation part 41 calculates a taper element of a sample 1, and the outputs of the deformation amount calculation part 40 and a calculated taper element of the element calculation part 41 are added by an adder 42 and supplied to a matrix preparation part 34. A matrix showing an upper surface shape of a sample is prepared by the reparation part 34 and stored in a sample deformation amount data storage part 29 through a computer 20. The computer 20 supplies stored data of the storage part 29 to a focal correction value calculation part 43, and a calculated focal point correction value of the calculation part 43 and a detected sample upper surface height of a height detection system 21 are added by an adder 44. An aimed focal point value calculated by an aimed focal point value calculation part 36 and an output value of the adder 44 are subtracted by a subtracter 45, focal point error data is generated and supplied to a focal point correction control part 22 and a focal point corrector 11 is controlled.

9. 发明专利

JP2004172635A Moving table apparatus 有权
公开(公告)号：JP2004172635A
公开(公告)日：2004-06-17
申请号：JP2004030997
申请日：2004-02-06
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： MIZUOCHI MAKI , FUKUSHIMA YOSHIMASA , KATSUYAMA MASAMI , KOBAYASHI TOSHITAKA
IPC分类号： G03F7/20 , B23Q1/00 , B23Q1/01 , B23Q1/62 , H01L21/027 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To provide a moving table apparatus guided by a roller guide mechanism, with which a constant distance between a bar mirror and a sample can be kept by avoiding deformation of the sample table due to the accuracy of the guide mechanism, such as mounting of rail, variations in rollers and the like, while ensuring rigidity of the guide. SOLUTION: A conventional Y table (top table) 1 is divided into a transfer table 21 for holding a guide, an X bar mirror 5, a Y bar mirror 6 and a sample table 20 on which samples 30 are placed, and the tables are linked via elastic bodies 25. COPYRIGHT: (C)2004,JPO

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