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1. 发明专利

JPH095171A TEMPERATURE MEASURING APPARATUS 失效
公开(公告)号：JPH095171A
公开(公告)日：1997-01-10
申请号：JP15295895
申请日：1995-06-20
申请人： HITACHI LTD
发明人： YAMAZAKI MASARU , IIZUKA MASAMI , ENDO KAZUHIKO
IPC分类号： G01J5/48 , B23K1/00
摘要： PURPOSE: To measure the temperature of an object to be measured with a higher accuracy free from disturbance. CONSTITUTION: Metal members 10 and 12 are photographed by a camera 18 to generate an image signal and the image signal is stored into a frame memory 24 as image data responding to luminance thereof. The image is divided into the maximum area of the sum of the luminance and other areas sequentially by a window position calculating section 26, based on the image data. A main window is set in the highest area of the sum of the luminance and the luminance of a pixel representative within the main window is converted to temperature by a temperature converting section 32 to determine the temperatures of the metal members 10 and 12.

2. 发明专利

JPH08137757A SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE 失效
公开(公告)号：JPH08137757A
公开(公告)日：1996-05-31
申请号：JP27408194
申请日：1994-11-08
申请人： HITACHI LTD , HITACHI MICROCOMPUTER SYST
发明人： TAKECHI KENJI , IIZUKA MASAMI , WATANABE AKIHIKO , NAKAJIMA MITSUYOSHI , KATO SETSUKO
IPC分类号： G06F12/14 , G06F9/06 , G06F21/02 , G06F21/22
摘要： PURPOSE: To securely execute security in terms of hardware at the ROM write mode and the on-board write mode of a semiconductor integrated circuit device incorporated with a non-volatile memory. CONSTITUTION: A security mode setting signal and a security bit setting signal are inputted to a NOR circuit 3 through an invertor circuit 2, and the outputs are outputted to security bit SB1 and SB2 of a selection means 5 and a storage means 6. In the case when security bit SB1 is a Hi-signal, the output of a tristate buffer 15 becomes a high impedance and security at the ROM write mode is executed. In the case when a security bit SB2 is the Hi signal, output becomes only the Hi signal and security at the on-board write mode is executed even if read/write signals are inputted.

3. 发明专利

JPH0283181A ARTICULATED ROBOT FOR INDUSTRIAL USE 失效
公开(公告)号：JPH0283181A
公开(公告)日：1990-03-23
申请号：JP23001188
申请日：1988-09-16
申请人： HITACHI LTD
发明人： IIZUKA MASAMI
IPC分类号： B25J9/06
摘要： PURPOSE:To reduce the sum in the length of the member composed of each arm or wrist assembly body and to secure the large work space of a robot by offsetting so that an upper arm rotating axis becomes in the twist positional relation with a whirling axis. CONSTITUTION:An upper arm rotating axis II is offset so as to become in a twist positional relation with a whirling axis I. Accordingly, the work space equivalent to the robot not offset can be achieved by shortening the sum of the length of each member composed of an arm, wrist rotating body, etc. Aa a result, the weight, torque and inertia of each member are reduced, so the capacity of the driving system element of each member can be reduced. That is, the outside dimension can be reduced. Also the support structure of each member can be made smaller.

4. 发明专利

JPS6445592A MULTI-JOINT TYPE ROBOT FOR HIGH PRECISION DETECTION 失效
公开(公告)号：JPS6445592A
公开(公告)日：1989-02-20
申请号：JP19979887
申请日：1987-08-12
申请人： HITACHI LTD
发明人： TAKAGI YUSUKE , IIZUKA MASAMI , SUGIYAMA KENGO , SUGIMOTO KOICHI , KOJIMA YOSHIO
IPC分类号： B25J19/02 , B25J17/00 , G05B19/18
摘要： PURPOSE: To accurately detect position and attitude of a tip of a wrist by providing each joint with an angle detecting unit for detecting angle between turning arms directly or through a rotation transmitting unit. CONSTITUTION: Each joint part 9 is provided with an angle detecting unit 12 such as a rotary encoder directly or through a rotation transmitting unit 11 for detecting a real angle between a static part and a turning arm or between both the turning arms. Detection values of this angle detecting unit 12 is input to a computing processing unit 13 so as to accurately detects position and attitude of a tip of a wrist of a multi-joint robot.

5. 发明专利

JPS6382045A VOLTAGE CONTROL CIRCUIT 失效
公开(公告)号：JPS6382045A
公开(公告)日：1988-04-12
申请号：JP22604486
申请日：1986-09-26
申请人： HITACHI LTD
发明人： IIZUKA MASAMI , HAGISAWA HIROSHI , NAGAI YASUO
IPC分类号： H01L27/04 , H01L21/822 , H04M1/00 , H04M1/72
摘要： PURPOSE:To drive a load circuit in response to both a call signal and dial pulses by detecting the voltage level of a voltage which varies with an input signal and driving the load circuit selectively. CONSTITUTION:The call signal Pa and dial puses Pb differ in voltage level. When the call signal Pa is supplied, a voltage Va is applied to a voltage control circuit 22 through lines I1 and I2. Further, when the dial pulses Pb are supplied, a voltage Vb is supplied to the control circuit 22 through the lines I1 and I2. When the call signal Pa is supplied, the voltage Va is applied to an oscillation circuit 23 to generate a frequency signal F1 of specific frequency. When the dial pulses Pb are supplied, the voltage Va is applied to an oscillation circuit 23, which generates the frequency signal f1. The frequency signal, however, is generated corresponding to the time width of the dial pulses Pb.

6. 发明专利

JPS6298936A SIGNAL MULTIPLEX COMMUNICATION EQUIPMENT 失效
公开(公告)号：JPS6298936A
公开(公告)日：1987-05-08
申请号：JP23738185
申请日：1985-10-25
申请人： HITACHI LTD
发明人： IIZUKA MASAMI
IPC分类号： H04L27/10 , H04J1/00
摘要： PURPOSE:To attain simultaneous processing having plural communication contents by providing a modulation circuit, a signal converter and a demodulation circuit so as to transmit plural signals via a signal transmission path. CONSTITUTION:When a data signal V1 is at a high level, a frequency signal f1 is obtained from an FM modulator 3 and when the data signal V1 is at a low level, a frequency signal f2 is obtained from the FM modulator 3. An output signal FM obtained from the FM modulator 3 is alternate frequency signals f1, f2 and the expansion of the frequency is continuous. A band pass filter circuit 4 supplies the frequency signals f1, f2 to a 2/4-wire converter 5 of the next stage and the own generating signal is phase-shifted to the frequency signals f1, f2. Further, a DTMF signal whose frequency is set in the audio band is obtained from the 2/4-wire converter 5 and the frequency setting into the voice band is attained by utilizing a telephone line as the multiple communication. Thus, two signals are transmitted simultaneously by using one signal transmission path.

7. 发明专利

JPS61294945A SIGNAL MULTIPLEX COMMUNICATION EQUIPMENT 失效
公开(公告)号：JPS61294945A
公开(公告)日：1986-12-25
申请号：JP13403585
申请日：1985-06-21
申请人： HITACHI LTD
发明人： IIZUKA MASAMI
IPC分类号： H04J9/00
摘要： PURPOSE:To increase the information transmission quantity at one transmission path and to improve the secrecy by applying FM modulation to a data signal, using an analog signal to apply AM modulation and sending the result thereby sending simultaneously two sets of information. CONSTITUTION:When a data signal V2 goes to a high level, a frequency signal f1 is obtained from an FM modulator 3 and when the data signal V2 is at a low level, a frequency signal f2 is obtained from the FM modulator 3. An AM modulator 1 uses an output signal FM as a carrier to apply AM modulation by a voice signal V1. Thus, the output signal V0 of the AM modulator 1 has a carrier being frequency signals f1, f2 FM-modulated and an envelope modulated by the voice signal V1. An AM detector 11 and a band pass filter 12 reproduce the analog signal V1. Since the band pass filter 12 eliminates the frequency components f1, f2 of the data signal V2 out of the output signal V0, the analog signal V1 is obtained as the result.

8. 发明专利

JP2001068048A CHARGED PARTICLE BEAM APPARATUS AND AUTOMATIC ASTIGMATISM ADJUSTING METHOD 失效
公开(公告)号：JP2001068048A
公开(公告)日：2001-03-16
申请号：JP2000192664
申请日：2000-06-22
申请人： HITACHI LTD
发明人： WATANABE MASAHIRO , SHINADA HIROYUKI , TAKATO ATSUKO , IIZUKA MASAMI , GUNJI YASUHIRO , TAKEDA MASATAKE , HAYAKAWA KOICHI
IPC分类号： H01J37/153 , H01J37/21 , H01J37/28
摘要： PROBLEM TO BE SOLVED: To automatically correct astigmatism and focus with a small number of two-dimensional images by feeding back an astigmatism correction amount and a focus correction amount, based on the astigmatic difference and focus offset of a beam calculated from a two-dimensional image obtained by detecting a particle image generated from a sample scanned and irradiated with a converged charged particle beam, thereby adjusting and controlling the astigmatism and focusing. SOLUTION: An overall control device 26 calculates an astigmatism correction amount, according to an astigmatic difference memorized in a memory device 57 from a previously found relationship between the astigmatic difference that is a characteristic of an astigmatism corrector 60, and the astigmatism correction amount, and calculates a focus correction amount according to a focus offset value stored in the memory device 57 from a previously found relationship of the characteristic of an object lens 18, and provides them to an astigmatism adjustment part 64. A particle image with its astigmatism and focus corrected is displayed on a display means 58 directly or via an astigmatism/focus correction amount computing image processing circuit 53, so that the quality of the correction of the astigmatism or the like can be confirmed visually.

9. 发明专利

JP2000188310A CIRCUIT PATTERN INSPECTION DEVICE 失效
公开(公告)号：JP2000188310A
公开(公告)日：2000-07-04
申请号：JP36406098
申请日：1998-12-22
申请人： HITACHI LTD
发明人： TAKATO ATSUKO , MURAKOSHI HISAYA , SHINADA HIROYUKI , OSHIMA TAKU , NOZOE MARI , TOYAMA HIROSHI , IWABUCHI HIROKO , IIZUKA MASAMI
IPC分类号： H01L21/66
摘要： PROBLEM TO BE SOLVED: To reflect inspection results in the manufacturing conditions of a semiconductor device so as to improve the reliability of the device, by respectively installing amplifier circuits and arithmetic circuits which perform arithmetic processing on the outputs of a plurality of elements in accordance with inspection modes to the elements, and acquiring secondary electronic images, etc., by performing arithmetic processing on the outputs of the elements. SOLUTION: For image formation, either a method in which a substrate 10 to be inspected is two-dimensionally scanned with an electron beam 201 while an X-Y stage is kept in a standstill state or a method in which the substrate 10 is scanned one-dimensionally only with the beam 201 while the stage 11 is continuously moved in the direction perpendicular to the scanning direction can be selected. Efficient inspections can be performed in such a way that, when only the specific location of the substrate 10 is inspected, the inspection is performed while the stage 11 is kept in a standstill state and, when the wide area of the substrate 10 is inspected, the inspection is performed while the stage 11 is continuously moved. In order to obtain the image of the surface of the substrate 10, secondary electrons 202 and antielectrons by projecting the electron beam 201 upon the substrate 10 in a narrowed- down state and detecting the electrons synchronously to the scanning with the beam 201 and the movement of the stage 11.

10. 发明专利

JPH1183636A RADIATION TEMPERATURE-MEASURING APPARATUS 失效
公开(公告)号：JPH1183636A
公开(公告)日：1999-03-26
申请号：JP24240097
申请日：1997-09-08
申请人： HITACHI LTD
发明人： IIZUKA MASAMI , YAMAZAKI MASARU
IPC分类号： G01J5/00 , G01J5/60
摘要： PROBLEM TO BE SOLVED: To enlarge a temperature measuring range by using one photodetecting element and setting a face of a different emissivity at a measuring surface. SOLUTION: A first surface 2 having an emissivity of nearly 1 and a second surface 3 having an emissivity of nearly 0.11 are set at a measuring surface of an object 1 to be measured. Temperature measuring positions are set at the surfaces 2, 3 by a temperature measuring position-setting means 14, and a temperature judgment value for switching of luminance temperature correspondence relationships and temperature measuring positions of the surfaces 2, 3 is set by a judgment temperature-setting means 13. A first measuring surface is determined. The luminance temperature correspondence relationship and temperature measuring position corresponding to the measuring surface are selected by an initial setting-selecting means 10, and then a measurement is started. An optical system 4 allows only infrared rays of a heat radiation from the temperature measuring position to pass through and a photodetecting element 5 detects the rays. A voltage value corresponding to a detected infrared radiation luminance is amplified by an amplifier 6 and converted to a temperature by a temperature conversion means 8 with the use of the luminance temperature correspondence relationship set by the setting means 11. At this time, a low temperature (high temperature) can be measured at the surface of a large emissivity (small emissivity), so that a measuring temperature range is enlarged.

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