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1. 发明专利

JPH1039151A OPTICAL WAVEGUIDE AND ITS PRODUCTION 失效
公开(公告)号：JPH1039151A
公开(公告)日：1998-02-13
申请号：JP19661696
申请日：1996-07-25
申请人： HITACHI CABLE , NIPPON TELEGRAPH & TELEPHONE , HITACHI LTD
发明人： YAMADA YASUBUMI , YANAGISAWA MASAHIRO , OKANO HIROAKI , HIGUCHI KEIICHI , UETSUKA NAOTO , TERAOKA TATSUO , AOKI SATOSHI , IWATO TAISUKE
IPC分类号： G02B6/122 , G02B6/13 , G02B6/132 , G02B6/136 , G02B6/42 , H01L27/15
摘要： PROBLEM TO BE SOLVED: To make it possible to suppress propagation loss low by disposing an auxiliary buffer layer between a core waveguide and a buffer layer. SOLUTION: The optical waveguide 1 is constituted by having the buffer layer 13 which has refractive index n0 and is embedded into a recessed part, the auxiliary buffer layer 14 which is formed on the buffer layer 13 and consists of a quartz glass film having refractive index n0 , the core waveguide 16 which is formed into a desired shape thereon and has refractive index n1 and a clad layer 17 which is formed thereon and has the refractive index n0 on an Si substrate 10 having a projecting part having an Si bench 11 formed on its front surface. The thickness of the auxiliary buffer layer 14 is preferably in the range of 0.1 to 10μm. An aperture 18 for exposing the Si bench 11 is formed by etching the clad layer 17 and the auxiliary buffer layer 14 in order to mount a semiconductor element, such as semiconductor light source or semiconductor photodetector, on the Si substrate 10. The auxiliary buffer layer 14 having the same refractive index as the refractive index of the buffer layer 13 is thus formed between the core waveguide 16 and the buffer layer 13.

2. 发明专利

JPH1114846A SINGLE-MODE OPTICAL WAVEGUIDE AND ITS MANUFACTURE, AND OPTICAL MODULE USING THE SAME 失效
公开(公告)号：JPH1114846A
公开(公告)日：1999-01-22
申请号：JP16621497
申请日：1997-06-23
申请人： HITACHI CABLE , NIPPON TELEGRAPH & TELEPHONE , HITACHI LTD
发明人： MORIWAKI KAZUYUKI , HIBINO YOSHINORI , YAMADA YASUBUMI , OKAWA MASAHIRO , UETSUKA NAOTO , OKANO HIROAKI , TERAOKA TATSUO , NISHIO TOMOYUKI , IWATO TAISUKE , KANETANI TATSUNORI , KUROIWA TSUTOMU
IPC分类号： G02B6/42 , G02B6/122 , G02B6/13
摘要： PROBLEM TO BE SOLVED: To provide the single-mode optical waveguide which has high position precision as to a positioning index, a thin groove for filter insertion, etc., and small-sized constitution and can prevent a clad mode from leaking to a reflection port, and its manufacture and the optical module using it. SOLUTION: A bench 25 for mounting a light emitting element 22 and a light receiving element 19 is formed on a substrate 11, a buffer layer 27 is formed except at benches 25 and 46 on the substrate 11, and a height adjustment layer 28 for optical axis alignment with both the elements 22 and 19 is formed on the buffer layer 27; and a waveguide core 12 is formed on the height adjustment layer 28, the alignment index for both the elements 19 and 22 is formed on the bench 25, and a clad layer 13 is formed on the substrate 11 where the index is formed. Then a deep groove for exposing the benches 25, 42a, and 46 is formed on the clad layer 13, and electrodes 39 to 41 for supplying a current to the light emitting element 22 and leading a current out of the photodetecting element 19 are formed on the bench 25 to obtain the single-mode optical waveguide.

3. 发明专利

JP2000216473A ELEMENT FOR OPTICAL MODULE AND ITS MANUFACTURE 失效
公开(公告)号：JP2000216473A
公开(公告)日：2000-08-04
申请号：JP1448099
申请日：1999-01-22
申请人： HITACHI CABLE , NIPPON TELEGRAPH & TELEPHONE , HITACHI LTD
发明人： KOMANO HARUYASU , OKANO HIROAKI , HIGUCHI KEIICHI , HASHIMOTO TOSHIKAZU , KUROIWA TSUTOMU
IPC分类号： G02B6/42 , H01S5/00 , H01S5/022
摘要： PROBLEM TO BE SOLVED: To obtain an element for an optical module which is applicable to high-speed data communication and its manufacturing method. SOLUTION: In an element for an optical module wherein a part whereon a waveguide and an LD 2 and a PD 3 are mounted is formed on s substrate 1 and each of the LD 2 and the PD 3 is mounted on each mount part with a buffer layer 10 interposed, a clearance between the substrate 1 and the PD 3 become large by mounting the PD 3 on a thick insulation film 70 whose thickness is about 5 μm or more and 50 μm or less and therefore electric capacity is low and high-speed data communication is possible.

4. 发明专利

JPH1078536A HYBRID OPTICAL INTEGRATED CIRCUIT AND ITS PRODUCTION 失效
公开(公告)号：JPH1078536A
公开(公告)日：1998-03-24
申请号：JP23553896
申请日：1996-09-05
申请人： HITACHI CABLE , NIPPON TELEGRAPH & TELEPHONE , HITACHI LTD
发明人： SEKINE SATOSHI , YANAGISAWA MASAHIRO , YAMADA YASUBUMI , OKANO HIROAKI , HIGUCHI KEIICHI , UETSUKA NAOTO , TERAOKA TATSUO , KANETANI TATSUNORI , KUROIWA TSUTOMU
IPC分类号： G02B6/30 , G02B6/122 , G02B6/13 , G02B6/42 , H01L27/15
摘要： PROBLEM TO BE SOLVED: To provide a hybrid optical integrated circuit in which semiconductor elements and optical waveguides formed on an Si substrate are optically coupled with high accuracy and a process for producing the same. SOLUTION: The semiconductor elements 20 having plural alignment marks 21 for optical axis adjustment on the rear surfaces and the Si substrate 22 likewise formed with plural alignment marks 23 for optical axis adjustment are subjected to optical axis alignment by these alignment marks 21, 23 for optical axis adjustment using means for image processing, etc. In this case, the plural optical axis aligmnent marks formed on the substrate 22 are formed round, by which the semiconductor elements 20 and the optical waveguides formed on the Si substrate 22 are optically coupled with the high accuracy. The hybrid optical integrated circuit having the extremely high accuracy is, therefore, obtd.

5. 发明专利

JP2000275553A LIQUID MOVING TYPE OPTICAL SWITCH 失效
公开(公告)号：JP2000275553A
公开(公告)日：2000-10-06
申请号：JP8008999
申请日：1999-03-24
申请人： HITACHI CABLE , NIPPON TELEGRAPH & TELEPHONE , NTT ELECTRONICS CORP
发明人： KOBAYASHI MASARU , HORIE MAKOTO , OKANO HIROAKI , SATO MAKOTO , SHIMOKAWA FUSAO , HORIGUCHI MASAHARU
IPC分类号： G02B26/08
摘要： PROBLEM TO BE SOLVED: To provide the liquid moving type optical switch which has superior reliability. SOLUTION: Heaters 105a and 105b and electric wires 101a, 101b, and 102 are formed of the same conductive film and equal in film thickness and the heaters 105a and 105b or electric wires 101a, 101b, and 102 surround the periphery of a groove 103 for optical path switching except a groove 104 for refractive index matching liquid, so when the lid is joined with the optical waveguide substrate, the groove 103 for optical path switching is sealed except the groove 104 for refractive index matching liquid, thereby eliminating the need for flattening. Consequently, the formation and polishing of an insulating film are omitted to obtain advantages in the manufacture and improve the reliability. Further, Si is used for the peak part of the conductive film and then the lid made of multicomponent glass can be joined with the optical waveguide substrate by anode joining to eliminate the need to process the Si and conductive film in different processes, thereby simplifying the manufacture processes.

6. 发明专利

JP2000275554A LIQUID MOVING TYPE OPTICAL SWITCH 失效
公开(公告)号：JP2000275554A
公开(公告)日：2000-10-06
申请号：JP8009099
申请日：1999-03-24
申请人： HITACHI CABLE , NIPPON TELEGRAPH & TELEPHONE , NTT ELECTRONICS CORP
发明人： KOBAYASHI MASARU , HORIE MAKOTO , OKANO HIROAKI , SATO MAKOTO , SHIMOKAWA FUSAO , HORIGUCHI MASAHARU
IPC分类号： G02B26/08 , G02F1/313
摘要： PROBLEM TO BE SOLVED: To provide the liquid moving type optical switch which has superior reliability. SOLUTION: A heating means is formed in recessed parts 102 and 103, so when a lid 110 is joined with an optical waveguide substrate 100, the lid 110 does not come into contact with the heating means and the lid 110 is joined with the top part of the optical waveguide substrate 100 itself. The recessed parts 102 and 103 are formed at a specific distance from a groove 101 for optical path switching, so the periphery of the groove 101 is completely sealed with the optical waveguide substrate 100 and lid 110. Consequently, the need to flatten the optical waveguide substrate 100 is eliminated and the formation and polishing of an insulating film are omitted to obtain advantages in the manufacture and improve the reliability.

7. 发明专利

JP2000275552A LIQUID MOVING TYPE OPTICAL SWITCH 失效
公开(公告)号：JP2000275552A
公开(公告)日：2000-10-06
申请号：JP8008899
申请日：1999-03-24
申请人： HITACHI CABLE , NIPPON TELEGRAPH & TELEPHONE , NTT ELECTRONICS CORP
发明人： HORIE MAKOTO , KOBAYASHI MASARU , OKANO HIROAKI , SATO MAKOTO , SHIMOKAWA FUSAO , HORIGUCHI MASAHARU
IPC分类号： G02B26/08
摘要： PROBLEM TO BE SOLVED: To provide the liquid moving type optical switch which is highly reliable and easily made small-sized. SOLUTION: A groove 23 for injection is formed on the side of a lid 21, so a resin material for sealing refractive index matching liquid after the refractive index matching liquid is injected into a groove 6 for optical path switching becomes easy to come into contact between the lid 21 and an optical waveguide substrate, thereby completing the sealing. The internal refractive index matching liquid never leaks out and light is normally switched even in severe external environment, specially, under environmental conditions wherein the temperature and humidity are high and a heat cycle is applied. Further, multicomponent glass which has a

8. 发明专利

JPH08271742A WAVEGUIDE WITH FILTER AND PRODUCTION OF BLOCK FOR FIXING FILTER 失效
公开(公告)号：JPH08271742A
公开(公告)日：1996-10-18
申请号：JP7800695
申请日：1995-04-03
申请人： HITACHI CABLE , NIPPON TELEGRAPH & TELEPHONE
发明人： TOMITA NOBUO , SHIRATA TOMOYUKI , UETSUKA NAOTO , KUROSAWA MASAAKI , OKANO HIROAKI , TAKEYA NORIAKI
IPC分类号： G02B6/12
摘要： PURPOSE: To provide a waveguide with a filter with which the efficient fixing of a cord and a thin-film filter in a manner as to make both perpendicular is possible without warping this thin-film filter at the time of inserting and fixing the thin-film filter into the slit of a waveguide element and a process for producing a block for fixing the filter. CONSTITUTION: The thin-film filter 6 to be inserted into the slit of the waveguide with the filter formed by inserting the thin-film filter 6 into the slit crossing the core 2 of the waveguide element 4 formed on a waveguide substrate 1, then fixing the filter is fixed to the block 10 for fixing the filter and thereafter, this thin-film filter 6 is inserted into the slit and is fixed together with the block 10 for fixing the filter to the waveguide element 4.

9. 发明专利

JPH0543274A PRODUCTION OF SUBSTRATE WITH GLASS FILM 失效
公开(公告)号：JPH0543274A
公开(公告)日：1993-02-23
申请号：JP20052991
申请日：1991-08-09
申请人： HITACHI CABLE , NIPPON TELEGRAPH & TELEPHONE
发明人： NAKAZAWA MASATAKA , KIMURA YASURO , OKANO HIROAKI , TOKUNAGA TOSHIHIDE , IMOTO KATSUYUKI
IPC分类号： C03C17/25
摘要： PURPOSE:To form a transparent glass film which is uniformly doped with a rare earth element and has >=5mum thickness on a substrate surface. CONSTITUTION:A metal alkoxide soln. 6 and water 4 are put into the same container 1 and are rested for a prescribed period of time, by which a gel film 5 is formed at the boundary between the soln. 6 and the water 4. The gel film is left standing on the substrate 2 by draining water from the inside of the container 1. The film is sintered in a gaseous rare earth element atmosphere after drying.

10. 发明专利

JP2001142010A LIQUID MOVING TYPE OPTICAL SWITCH 失效
公开(公告)号：JP2001142010A
公开(公告)日：2001-05-25
申请号：JP31990199
申请日：1999-11-10
申请人： HITACHI CABLE , NIPPON TELEGRAPH & TELEPHONE , NTT ELECTRONICS CORP
发明人： HIGUCHI KEIICHI , HORIE MAKOTO , OKANO HIROAKI , SAKATA TOMOMI , SHIMOKAWA FUSAO , SATO MAKOTO
IPC分类号： G02B26/08
摘要： PROBLEM TO BE SOLVED: To provide a liquid moving type optical switch which has the lower dependence of the loss in optical routes after optical path switching upon wavelengths. SOLUTION: This liquid moving type optical switch 315 is provided with optical path switching grooves 312 which have wall surfaces forming a prescribed angle with the optical axes of optical waveguides in the respective intersection parts where (m) pieces of the optical waveguides not intersecting with each other and (n) pieces of the optical waveguides not intersecting with each other intersect with each other in a substrate, a refractive index matching liquid which is sealed in part within the optical path switching grooves 312 and has a refractive index approximately equal to the refractive index of the optical waveguides, a cap 324 which is joined to the substrate in order to cover the optical path switching grooves 312 and heating means 309 and 310 which are disposed near the optical path switching grooves 312 and are used to heat the refractive index matching liquid. The optical waveguides are activated in a single mode by the cut-off wavelengths of the optical waveguides shorter than the wavelength of the light to be used and, therefore the probability that a higher mode occurs is extremely lowered and the dependence of the loss in the optical routes after the optical path switching upon the wavelengths is made smaller.

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