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1. 发明授权

US07705331B1 Methods and systems for providing illumination of a specimen for a process performed on the specimen 有权
标题翻译：用于提供样品照射的方法和系统，用于在样品上进行的过程
公开(公告)号：US07705331B1
公开(公告)日：2010-04-27
申请号：US11771430
申请日：2007-06-29
申请人： Greg Kirk , Rich Solarz , Chris Kirk , Gil Delgado , Anatoly Schemelinin , Jim Li , Qibiao Chen , Charles Nenghe Wang
发明人： Greg Kirk , Rich Solarz , Chris Kirk , Gil Delgado , Anatoly Schemelinin , Jim Li , Qibiao Chen , Charles Nenghe Wang
IPC分类号： G21G4/00
CPC分类号： G03F7/70616 , G01N21/8806 , G01N21/94 , G01N21/9501 , G01N21/956 , G01N2021/8825 , G01N2201/061 , G03F7/70033 , G03F7/70575 , H01J65/04
摘要： Methods and systems for providing illumination of a specimen for a process performed on the specimen are provided. One system configured to provide illumination of a specimen for a process performed on the specimen includes a laser configured to generate excitation light. The system also includes focusing optics configured to focus the excitation light to a plasma in an electrodeless lamp such that the plasma generates light. The system is also configured such that the light illuminates the specimen during the process.
摘要翻译：提供了用于提供用于对样本进行的处理的样本的照明的方法和系统。被配置为提供对于在样本上执行的处理的样本的照明的一个系统包括被配置为产生激发光的激光器。该系统还包括配置成将激发光聚焦到无电极灯中的等离子体的聚焦光学元件，使得等离子体产生光。该系统还被配置为使得该光在该过程期间照射样本。

2. 发明授权

US07654715B1 System and method for illuminating a specimen with uniform angular and spatial distribution 有权
标题翻译：用于照射具有均匀角度和空间分布的样本的系统和方法
公开(公告)号：US07654715B1
公开(公告)日：2010-02-02
申请号：US11836216
申请日：2007-08-09
申请人： Qibiao Chen , Charles N. Wang
发明人： Qibiao Chen , Charles N. Wang
IPC分类号： F21V33/00
CPC分类号： G01N21/9501 , G01N21/8806 , G02B6/0008 , G02B6/4298
摘要： A system for illuminating a specimen are disclosed herein. In general, the system may include an illumination source configured to generate light with an uneven distribution at a pupil plane and field stop of the system, a lightpipe coupled for redistributing the light across the pupil plane and field stop, and at least one optical element configured to direct the redistributed light onto a specimen. The lightpipe may generally include a cone-shaped portion and a rectangular-shaped portion. The cone-shaped portion is configured for modifying an angular distribution of the generated light, so that the redistributed light is uniformly distributed across the pupil plane of the system. The rectangular-shaped portion is formed contiguous with the cone-shaped portion and configured for modifying a spatial distribution of the generated light, so that the redistributed light is uniformly distributed across a field stop of the system. A method for illuminating a specimen and a system for inspecting a specimen are also disclosed herein.
摘要翻译：本文公开了用于照射样本的系统。通常，系统可以包括被配置为产生在系统的光瞳平面和场停止处具有不均匀分布的光的照明源，耦合用于将光重新分布在瞳孔平面和场停止处的光管，以及至少一个光学元件被配置为将再分布的光引导到样本上。光管通常可以包括锥形部分和矩形部分。锥形部分被配置为修改所产生的光的角分布，使得重新分布的光均匀地分布在系统的光瞳平面上。矩形部分形成为与锥形部分相邻并且被配置用于修改所产生的光的空间分布，使得重新分布的光均匀分布在系统的场停止处。本文还公开了一种用于照射样本的方法和用于检查样本的系统。

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