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    • 2. 发明授权
    • Processes for the production of organometallic compounds
    • 用于生产有机金属化合物的方法
    • US07816550B2
    • 2010-10-19
    • US11053836
    • 2005-02-10
    • David Michael Thompson
    • David Michael Thompson
    • C07F15/00
    • C07F15/0046C23C16/18
    • This invention relates to processes for the production of organometallic compounds represented by the formula M(L)3 wherein M is a Group VIII metal, e.g., ruthenium, and L is the same or different and represents a substituted or unsubstituted amidinato group or a substituted or unsubstituted amidinato-like group, which process comprises (i) reacting a substituted or unsubstituted metal source compound, e.g., ruthenium (II) compound, with a substituted or unsubstituted amidinate or amidinate-like compound in the presence of a solvent and under reaction conditions sufficient to produce a reaction mixture comprising said organometallic compound, e.g., ruthenium (III) compound, and (ii) separating said organometallic compound from said reaction mixture. The organometallic compounds are useful in semiconductor applications as chemical vapor or atomic layer deposition precursors for film depositions.
    • 本发明涉及制备由式M(L)3表示的有机金属化合物的方法,其中M是VIII族金属,例如钌,L相同或不同,代表取代或未取代的脒基或取代的 或未取代的脒基样基团,该方法包括(ⅰ)使取代或未取代的金属源化合物例如钌(II)化合物与取代或未取代的脒基或脒化物的化合物在溶剂存在下反应 足以产生包含所述有机金属化合物(例如钌(III))化合物的反应混合物的条件,和(ii)从所述反应混合物中分离所述有机金属化合物。 有机金属化合物可用作半导体应用,作为用于膜沉积的化学蒸气或原子层沉积前体。
    • 4. 发明授权
    • Processes for the production of organometallic compounds
    • 用于生产有机金属化合物的方法
    • US07973188B2
    • 2011-07-05
    • US12877297
    • 2010-09-08
    • David Michael Thompson
    • David Michael Thompson
    • C07F15/00C23C16/00
    • C07F15/0046C23C16/18
    • This invention relates to processes for the production of organometallic compounds represented by the formula M(L)3 wherein M is a Group VIII metal, e.g., ruthenium, and L is the same or different and represents a substituted or unsubstituted amidinato group or a substituted or unsubstituted amidinato-like group, which process comprises (i) reacting a substituted or unsubstituted metal source compound, e.g., ruthenium (II) compound, with a substituted or unsubstituted amidinate or amidinate-like compound in the presence of a solvent and under reaction conditions sufficient to produce a reaction mixture comprising said organometallic compound, e.g., ruthenium (III) compound, and (ii) separating said organometallic compound from said reaction mixture. The organometallic compounds are useful in semiconductor applications as chemical vapor or atomic layer deposition precursors for film depositions.
    • 本发明涉及制备由式M(L)3表示的有机金属化合物的方法,其中M是VIII族金属,例如钌,L相同或不同,代表取代或未取代的脒基或取代的 或未取代的脒基样基团,该方法包括(ⅰ)使取代或未取代的金属源化合物例如钌(II)化合物与取代或未取代的脒基或脒化物的化合物在溶剂存在下反应 足以产生包含所述有机金属化合物(例如钌(III))化合物的反应混合物的条件,和(ii)从所述反应混合物中分离所述有机金属化合物。 有机金属化合物可用作半导体应用,作为用于膜沉积的化学蒸气或原子层沉积前体。
    • 5. 发明申请
    • PROCESSES FOR THE PRODUCTION OF ORGANOMETALLIC COMPOUNDS
    • 生产有机化合物的方法
    • US20110008971A1
    • 2011-01-13
    • US12877297
    • 2010-09-08
    • David Michael Thompson
    • David Michael Thompson
    • H01L21/312C07F15/00H01B1/12
    • C07F15/0046C23C16/18
    • This invention relates to processes for the production of organometallic compounds represented by the formula M(L)3 wherein M is a Group VIII metal, e.g., ruthenium, and L is the same or different and represents a substituted or unsubstituted amidinato group or a substituted or unsubstituted amidinato-like group, which process comprises (i) reacting a substituted or unsubstituted metal source compound, e.g., ruthenium (II) compound, with a substituted or unsubstituted amidinate or amidinate-like compound in the presence of a solvent and under reaction conditions sufficient to produce a reaction mixture comprising said organometallic compound, e.g., ruthenium (III) compound, and (ii) separating said organometallic compound from said reaction mixture. The organometallic compounds are useful in semiconductor applications as chemical vapor or atomic layer deposition precursors for film depositions.
    • 本发明涉及制备由式M(L)3表示的有机金属化合物的方法,其中M是VIII族金属,例如钌,L相同或不同,代表取代或未取代的脒基或取代的 或未取代的脒基样基团,该方法包括(ⅰ)使取代或未取代的金属源化合物例如钌(II)化合物与取代或未取代的脒基或脒化物的化合物在溶剂存在下反应 足以产生包含所述有机金属化合物(例如钌(III))化合物的反应混合物的条件,和(ii)从所述反应混合物中分离所述有机金属化合物。 有机金属化合物可用作半导体应用,作为用于膜沉积的化学蒸气或原子层沉积前体。