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1. 发明授权

US5435849A Apparatus for plasma deposition 失效
标题翻译：等离子体沉积设备
公开(公告)号：US5435849A
公开(公告)日：1995-07-25
申请号：US3573
申请日：1993-01-13
申请人： Gordon L. Cann , Cecil B. Shepard, Jr. , Frank X. McKevitt
发明人： Gordon L. Cann , Cecil B. Shepard, Jr. , Frank X. McKevitt
IPC分类号： C23C16/27 , C23C16/458 , C23C16/513 , C23C16/50
CPC分类号： C23C16/27 , C23C16/458 , C23C16/4584 , C23C16/513
摘要： The substrate in a plasma jet deposition system is provided with structural attributes, such as apertures and/or grooves, that facilitate efficient deposition. Groups of substrates are arranged with respect to the plasma beam in a manner which also facilitates efficient deposition. In addition to increasing the portion of the plasma beam volume which contacts the substrate surface or surfaces, it is advantageous to provide for the efficient evacuation of spent fluids away from the substrate so that fresh plasma containing the operative species can easily and continuously contact the substrate surface.
摘要翻译：等离子体喷射沉积系统中的衬底具有有助于有效沉积的结构属性，例如孔和/或凹槽。一组基板相对于等离子体束以一种有利于有效沉积的方式布置。除了增加与衬底表面或表面接触的等离子体束体积的部分之外，有利的是提供有效排出废流体离开衬底，使得包含操作性物质的新鲜等离子体可以容易地和连续地接触衬底表面。

2. 发明授权

US5487787A Apparatus and method for plasma deposition 失效
标题翻译：用于等离子体沉积的装置和方法
公开(公告)号：US5487787A
公开(公告)日：1996-01-30
申请号：US369427
申请日：1995-01-06
申请人： Gordon L. Cann , Cecil B. Shepard, Jr. , Frank X. McKevitt
发明人： Gordon L. Cann , Cecil B. Shepard, Jr. , Frank X. McKevitt
IPC分类号： C23C16/27 , C23C16/458 , C23C16/513 , C23C16/00
CPC分类号： C23C16/27 , C23C16/458 , C23C16/4584 , C23C16/513
摘要： The substrate in a plasma jet deposition system is provided with structural attributes, such as apertures and/or grooves, that facilitate efficient deposition. Groups of substrates are arranged with respect to the plasma beam in a manner which also facilitates efficient deposition. In addition to increasing the portion of the plasma beam volume which contacts the substrate surface or surfaces, it is advantageous to provide for the efficient evacuation of spent fluids away from the substrate so that fresh plasma containing the operative species can easily and continuously contact the substrate surface.
摘要翻译：等离子体喷射沉积系统中的衬底具有有助于有效沉积的结构属性，例如孔和/或凹槽。一组基板相对于等离子体束以一种有利于有效沉积的方式布置。除了增加与衬底表面或表面接触的等离子体束体积的部分之外，有利的是提供有效排出废流体离开衬底，使得包含操作性物质的新鲜等离子体可以容易地和连续地接触衬底表面。

3. 发明授权

US5342660A Method for plasma jet deposition 失效
标题翻译：等离子体喷射沉积方法
公开(公告)号：US5342660A
公开(公告)日：1994-08-30
申请号：US698538
申请日：1991-05-10
申请人： Gordon L. Cann , Cecil B. Shepard, Jr.
发明人： Gordon L. Cann , Cecil B. Shepard, Jr.
IPC分类号： C23C16/27 , C23C16/458 , C23C16/513 , B05D3/06
CPC分类号： C23C16/458 , C23C16/27 , C23C16/4584 , C23C16/513
摘要： The disclosure is directed to a method for depositing a substance, such as synthetic diamond. A plasma beam is produced, and contains the constituents of the substance to be deposited. A substrate is provided, and has a surface in the path of the beam, the area of said surface being substantially larger than the cross-sectional area of the beam impinging on the surface. Repetitive motion is introduced between the substrate and the beam as the substance is deposited on the surface. The substrate, the beam, or both can be moved. Spinning of the substrate, with the beam non-concentric thereon, is one of the disclosed techniques.
摘要翻译：本公开涉及用于沉积诸如人造金刚石的物质的方法。产生等离子体束，并含有待沉积物质的成分。提供基板，并且在光束的路径中具有表面，所述表面的面积基本上大于撞击在表面上的光束的横截面积。当物质沉积在表面上时，在基板和光束之间引入重复运动。可移动基板，光束或两者。衬底的旋转，其中与其不同心的光束是所公开的技术之一。

4. 发明授权

US5204144A Method for plasma deposition on apertured substrates 失效
标题翻译：多孔基片上等离子体沉积的方法
公开(公告)号：US5204144A
公开(公告)日：1993-04-20
申请号：US698446
申请日：1991-05-10
申请人： Gordon L. Cann , Cecil B. Shephard, Jr. , Frank X. McKevitt
发明人： Gordon L. Cann , Cecil B. Shephard, Jr. , Frank X. McKevitt
IPC分类号： C23C16/27 , C23C16/458 , C23C16/513
CPC分类号： C23C16/27 , C23C16/458 , C23C16/4584 , C23C16/513
摘要： The substrate in a plasma jet deposition system is provided with structural attributes, such as apertures and/or grooves, that facilitate efficient deposition. Groups of substrates are arranged with respect to the plasma beam in a manner which also facilitates efficient deposition. In addition to increasing the portion of the plasma beam volume which contacts the substrate surface or surfaces, it is advantageous to provide for the efficient evacuation of spent fluids away from the substrate so that fresh plasma containing the operative species can easily and continuously contact the substrate surface.
摘要翻译：等离子体喷射沉积系统中的衬底具有有助于有效沉积的结构属性，例如孔和/或凹槽。一组基板相对于等离子体束以一种有利于有效沉积的方式布置。除了增加与衬底表面或表面接触的等离子体束体积的部分之外，有利的是提供有效排出废流体离开衬底，使得包含操作性物质的新鲜等离子体可以容易地和连续地接触衬底表面。

5. 发明授权

US5182093A Diamond deposition cell 失效
标题翻译：金刚石沉积池
公开(公告)号：US5182093A
公开(公告)日：1993-01-26
申请号：US462496
申请日：1990-01-08
申请人： Gordon L. Cann
发明人： Gordon L. Cann
IPC分类号： C23C16/27 , C23C16/44 , C30B25/02
CPC分类号： C23C16/44 , C23C16/27 , C30B25/02 , C30B29/04 , Y10S427/103
摘要： In a first embodiment of an improved diamond deposition cell, a chamber is evacuated to a low pressure and a graphite element in the chamber is heated to a selected high temperature and heats a substrate positioned within the chamber spaced by a selected gap from the graphite body to a selected lower temperature. Hydrogen or a mixture of hydrogen and hydrocarbon gas is admitted to the chamber and part of the hydrogen reacts with the hot graphite body to form atomic hydrogen and hydrocarbon gasses. Hydrogen and hydrocarbon gasses cycle repeatedly across the gap between the facing surfaces of the body and the substrate in the kinetic regime resulting in a net transfer of carbon to the substrate and its deposition as diamond crystals or film on the substrate. In a second embodiment, the graphite body is heated by combusting gasses in a cavity therein. Products of such combustion, hydrogen and, optionally, additional hydrocarbon gas are admitted to the gap between the surfaces of the graphite body and the substrate. The temperatures of the facing surfaces, the pressure in the gap and the ratio of the constituent gasses results in carbon atoms being deposited on the substrate in the form of diamond film and other carbon products.
摘要翻译：在改进的金刚石沉积池的第一实施例中，将室抽真空至低压，并且将室中的石墨元件加热至选定的高温，并将位于腔室内的基板与石墨体间隔开选定的间隙到选定的较低温度。氢气或氢气和烃气体的混合物进入室，部分氢气与热石墨体反应形成原子氢和烃气。氢气和碳氢化合物在动力学状态下重复地跨越体的相对表面和基底之间的间隙循环，导致碳向衬底的净转移并且其作为金刚石晶体或膜沉积在衬底上。在第二实施例中，通过在其中的空腔中燃烧气体来加热石墨体。这种燃烧的产物，氢气和任选的另外的烃气体被允许进入石墨体和衬底的表面之间的间隙。面向表面的温度，间隙中的压力和构成气体的比例导致碳原子以金刚石膜和其它碳产物的形式沉积在基底上。

6. 再颁专利

USRE32918E Heater/emitter assembly 失效
标题翻译：加热器/发射器组件
公开(公告)号：USRE32918E
公开(公告)日：1989-05-09
申请号：US930101
申请日：1986-11-13
申请人： Gordon L. Cann
发明人： Gordon L. Cann
IPC分类号： B64G1/40 , F02K9/68
CPC分类号： F02K9/68 , B64G1/405 , B64G1/406
摘要： A heater/emitter for a rocket engine assembly utilizes a resistance heated wire coil or coils which may also function as a cathode emitter or as a thermal driver for an auxiliary emitter. This heater/emitter may if desired be formed into a bifilar and may be supported by the wire lead itself or by isolated supports. The power leads are located in a lead channel and feature an overwrapping of similar wire material which reduces the internal resistance heating of the lead to increase the electrical conductivity of the supporting lead and increase the thermal conduction thereof to establish a cooler and structurally-stronger lead. A plurality of radiation discs or shields are spaced along the leads to further minimize energy losses from the heater out of the lead channel. The heater/emitter itself is enclosed, except for the lead channel, by a heat exchanger housing. The function of this housing is to accept energy from the hot heater coil and in turn transfer that energy to a fluid flowing through the heat exchanger. Power is transferred from the hot heater coil to the heat exchanger firstly by means of radiation heat transfer, and secondly by impingement of thermionic electrons accelerated thru a potential imposed between the emitter and the heat exchanger. This packaging approach permits radiation transfer efficiencies, from coil to heat exchanger, of 90 to 95 percent. The thermionic electron emission and acceleration efficiency approaches 100 percent. The dual energy transfer mode permits single device operation over wider power ranges and thrust levels than would be permitted by single mode devices. The device may be operated in the single mode as a radiation transfer heater or as a combination radiator and emitter, or may function with the principal energy transfer being in the emitter mode only.

7. 发明授权

US4495399A Micro-arc milling of metallic and non-metallic substrates 失效
标题翻译：金属和非金属基板的微弧铣削
公开(公告)号：US4495399A
公开(公告)日：1985-01-22
申请号：US354546
申请日：1982-03-04
申请人： Gordon L. Cann
发明人： Gordon L. Cann
IPC分类号： B23K9/23 , H05K1/00 , H05K3/00 , B23K9/00
CPC分类号： B23K9/23 , H05K3/0041 , H05K1/0298 , H05K2203/081 , H05K2203/095 , H05K2203/1105
摘要： By using a controlled arc-heated gas flow, material may be milled away from a substrate. By controlling the size of a gas flow aperture as well as other variables such as gas flow and arc current, small holes can be drilled into the substrate. Typically, these holes would have a diameter between 0.025 mm and 0.125 mm.In one embodiment, an arc made between an anode and cathode is placed above the work. A gas vortex is produced and is caused to pass through the arc, with the holes being drilled by the heated high-energy gas. Alternatively, the work may be used as the anode, with the gas flow carrying away material heated at the arc attachment point of the anode.The use of the arc-generated plasma gas vortex is particularly advantageous in the milling of multi-layer circuit boards.
摘要翻译：通过使用可控制的电弧加热气流，材料可以从衬底上研磨掉。通过控制气流孔径的尺寸以及气流和电弧电流等其它变量，可以在基板上钻出小孔。通常，这些孔的直径为0.025mm至0.125mm。在一个实施例中，在阳极和阴极之间形成的电弧放置在工件上方。产生气体涡流并使其通过电弧，孔被加热的高能气体钻探。或者，可以将工件用作阳极，气流携带在阳极的电弧附着点加热的材料。使用电弧产生的等离子体气体涡流在多层电路板的铣削中是特别有利的。

8. 发明授权

US5672430A CVD diamond radiation detector 失效
标题翻译： CVD金刚石辐射探测器
公开(公告)号：US5672430A
公开(公告)日：1997-09-30
申请号：US447779
申请日：1995-05-23
申请人： Grant Lu , Gordon L. Cann
发明人： Grant Lu , Gordon L. Cann
IPC分类号： C30B29/04 , C23C16/27 , G01T1/24 , G01T1/26 , C23C16/26
CPC分类号： C23C16/276 , C23C16/27 , G01T1/26 , Y10T428/30
摘要： The process is an arc jet CVD diamond deposition process with very low methane, less than 0.07%, and the addition of water. The resulting material has is characterized by a narrow Raman peak, a relatively large lattice constant, and a charge carrier collection distance of at least 25 microns. Also disclosed is a particle detector device which makes use of the diamond material according to the invention.
摘要翻译：该方法是具有非常低的甲烷，小于0.07％和加入水的电弧喷射CVD金刚石沉积方法。所得材料的特征在于窄拉曼峰，相对大的晶格常数和至少25微米的电荷载体收集距离。还公开了使用根据本发明的金刚石材料的粒子检测器装置。

9. 发明授权

US5310596A Multi-layer superhard film structure 失效
标题翻译：多层超硬膜结构
公开(公告)号：US5310596A
公开(公告)日：1994-05-10
申请号：US810364
申请日：1991-12-18
申请人： Louis K. Bigelow , Robert M. Frey , Gordon L. Cann
发明人： Louis K. Bigelow , Robert M. Frey , Gordon L. Cann
IPC分类号： B23B27/14 , B23P15/28 , C23C16/26 , C23C16/27 , C23C30/00 , C30B25/02 , C30B29/04 , C30B21/04 , C23C28/04
CPC分类号： C23C16/272 , C23C16/26 , C23C16/27 , C23C16/279 , C23C30/005 , Y10T428/24942 , Y10T428/265 , Y10T428/30
摘要： A multi-layer diamond film is grown by d.c. arc assisted plasma deposition. A series of layers are deposited on each other by periodically back-etching the surface and renucleating during deposition. There may also be deposited a thin layer of non-diamond carbon material between the diamond layers, but no other non-carbon material. Renucleation is controlled by varying the proportion of methane to hydrogen in the feed gases, by temperature cycling of the substrate, or by inducing modal changes in the arc.
摘要翻译：多层金刚石薄膜通过直径电弧辅助等离子体沉积。通过周期性地反向蚀刻表面并在沉积期间再次沉积一系列层。还可以在金刚石层之间沉积非金刚石碳材料薄层，但没有其它非碳材料。通过改变进料气体中甲烷与氢的比例，通过衬底的温度循环，或通过诱发电弧的模式变化来控制再核化。

10. 发明授权

US4569198A Heater/emitter assembly 失效
标题翻译：加热器/发射器组件
公开(公告)号：US4569198A
公开(公告)日：1986-02-11
申请号：US735301
申请日：1985-05-17
申请人： Gordon L. Cann
发明人： Gordon L. Cann
IPC分类号： B64G1/40 , F02K9/68 , H05B3/42 , H05B1/00
CPC分类号： B64G1/406 , B64G1/405 , F02K9/68 , H05B3/42
摘要： A heater/emitter for a rocket engine assembly utilizes a resistance heated wire coil or coils which may also function as a cathode emitter or as a thermal driver for an auxiliary emitter. This heater/emitter may if desired be formed into a bifilar and may be supported by the wire lead itself or by isolated supports. The power leads are located in a lead channel and feature an overwrapping of similar wire material which reduces the internal resistance heating of the lead to increase the electrical conductivity of the supporting lead and increase the thermal conduction thereof to establish a cooler and structurally-stronger lead. A plurality of radiation discs or shields are spaced along the leads to further minimize energy losses from the heater out of the lead channel. The heater/emitter itself is enclosed, except for the lead channel, by a heat exchanger housing. The function of this housing is to accept energy from the hot heater coil and in turn transfer that energy to a fluid flowing through the heat exchanger. Power is transferred from the hot heater coil to the heat exchanger firstly by means of radiation heat transfer, and secondly by impingement of thermionic electrons accelerated thru a potential imposed between the emitter and the heat exchanger. This packaging approach permits radiation transfer efficiencies, from coil to heat exchanger, of 90 to 95 percent. The thermionic electron emission and acceleration efficiency approaches 100 percent. The dual energy transfer mode permits single device operation over wider power ranges and thrust levels than would be permitted by single mode devices. The device may be operated in the single mode as a radiation transfer heater or as a combination radiator and emitter, or may function with the principal energy transfer being in the emitter mode only.
摘要翻译：用于火箭发动机组件的加热器/发射器使用电阻加热的线圈或线圈，其也可以用作阴极发射器或用作辅助发射器的热驱动器。如果需要，该加热器/发射器可以形成双头并且可以由导线本身或隔离的支撑件支撑。电源引线位于引线通道中，并且具有类似线材的外包装，其减少引线的内部电阻加热，以增加支撑引线的导电性并增加其导热，从而建立较冷和结构强的引线。多个辐射盘或屏蔽沿着引线间隔开，以进一步最小化从加热器引出通道的能量损失。加热器/发射器本身由导热通道除外，由热交换器外壳封闭。该壳体的功能是接受来自热加热器线圈的能量，并将能量转移到流过热交换器的流体。电力首先通过辐射热传递从热加热器线圈传递到热交换器，其次是通过在发射器和热交换器之间施加的电势加速的热离子电子的冲击。这种包装方法允许从线圈到热交换器的辐射传递效率为90％至95％。热离子电子发射和加速效率接近100％。双能量传输模式允许单个设备在比单模设备允许的更宽的功率范围和推力水平下工作。该装置可以以单一模式作为辐射传递加热器或作为辐射器和发射器的组合操作，或者可以仅在主发射器模式下进行主能量传递。

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