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    • 5. 发明授权
    • Semiconductor devices including buried digit lines that are laterally offset from corresponding active-device regions
    • 半导体器件包括从相应的有源器件区域横向偏移的埋置数字线
    • US07547935B2
    • 2009-06-16
    • US10920938
    • 2004-08-17
    • Tyler A. Lowrey
    • Tyler A. Lowrey
    • H01L29/76H01L23/48
    • H01L21/76897H01L21/76838H01L27/105H01L27/1052H01L27/10811H01L27/10885H01L27/10888
    • A method of electrically linking contacts of a semiconductor device to their corresponding digit lines. The method includes disposing a quantity of mask material into a trench through which the contact is exposed. The mask also abuts a connect region of a conductive element of a corresponding digit line and, therefore, protrudes somewhat over a surface of the semiconductor device. A layer of insulative material is disposed over the semiconductor device with the mask material being exposed therethrough. The mask material is then removed, leaving open cavities that include the trench and a strap region continuous with the trench and with a connect region of the corresponding digit line. Conductive material is disposed within the cavity and electrically isolated from conductive material disposed in adjacent cavities, which define conductive plugs or studs and conductive straps from the conductive material. These plugs or studs and straps provide an electrically conductive link between each contact of the semiconductor device and its corresponding digit line. Semiconductor devices that include features that have been fabricated in accordance with the method of the present invention are also within the scope of the present invention.
    • 一种将半导体器件的触点电连接到其对应的数字线的方法。 该方法包括将一定量的掩模材料设置在暴露于触点的沟槽中。 掩模还邻接相应数字线的导电元件的连接区域,因此在半导体器件的表面上略微突出。 绝缘材料层设置在半导体器件上,掩模材料暴露在其中。 然后去除掩模材料,留下包括沟槽的开放空腔和与沟槽连续的带区域以及相应数字线的连接区域。 导电材料设置在空腔内并与设置在相邻空腔中的导电材料电绝缘,其从导电材料限定导电塞或螺栓和导电带。 这些插头或螺柱和带在半导体器件的每个触点与其对应的数字线之间提供导电连接。 包括根据本发明的方法制造的特征的半导体器件也在本发明的范围内。