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1. 发明授权

US06874443B2 Layer-by-layer etching apparatus using neutral beam and etching method using the same 失效
标题翻译：使用中性光束的逐层蚀刻装置及使用其的蚀刻方法
公开(公告)号：US06874443B2
公开(公告)日：2005-04-05
申请号：US10086497
申请日：2002-02-28
申请人： Geun-young Yeom , Min-jae Chung , Do-haing Lee , Sung-min Cho , Sae-hoon Chung
发明人： Geun-young Yeom , Min-jae Chung , Do-haing Lee , Sung-min Cho , Sae-hoon Chung
IPC分类号： H01L21/3065 , C23F4/00 , C23C16/00 , C23F1/00
CPC分类号： C23F4/00 , H01J2237/08
摘要： A layer-by-layer etching apparatus and an etching method using a neutral beam which enables to control etching depth to an atomic level by controlling the etching of each atom of a material layer to be etched under precise control of the supply of an etching gas and irradiation of the neutral beam and enables to minimize etching damage. In the layer-by-layer etching method, a substrate to be etched, on which a layer to be etched is exposed, is loaded on a stage in a reaction chamber. An etching gas is supplied into the reaction chamber to adsorb the etching gas on the surface of an exposed portion of the layer to be etched. Excessive etching gas remaining after being adsorbed is removed. A neutral beam is irradiated on the layer to be etched on which the etching gas is adsorbed. Etch by-products generated by the irradiation of the neutral beam is removed.
摘要翻译：一种逐层蚀刻装置和使用中性光束的蚀刻方法，其能够通过在精确控制蚀刻气体的供给的精确控制下控制蚀刻材料层的每个原子的蚀刻，从而将蚀刻深度控制为原子水平并照射中性光束并且能够最小化蚀刻损伤。在逐层蚀刻方法中，将要蚀刻的层被蚀刻的基板暴露在反应室的台上。将蚀刻气体供应到反应室中，以将蚀刻气体吸附在被蚀刻层的暴露部分的表面上。吸附后残留的蚀刻气体过剩被去除。中性光束照射在被蚀刻的蚀刻气体被吸附的层上。除去由中性束的照射产生的副产物。

2. 发明授权

US07094702B2 Layer-by-layer etching apparatus using neutral beam and method of etching using the same 有权
公开(公告)号：US07094702B2
公开(公告)日：2006-08-22
申请号：US10442566
申请日：2003-05-21
申请人： Geun-young Yeom , Min-jae Chung , Do-haing Lee , Sung-min Cho , Sae-hoon Chung
发明人： Geun-young Yeom , Min-jae Chung , Do-haing Lee , Sung-min Cho , Sae-hoon Chung
IPC分类号： H01L21/302
CPC分类号： C23F4/00 , H01J2237/08
摘要： A layer-by-layer etching apparatus and an etching method using a neutral beam which enables to control etching depth to an atomic level by controlling the etching of each atom of a material layer to be etched under precise control of the supply of an etching gas and irradiation of the neutral beam and enables to minimize etching damage. In the layer-by-layer etching method, a substrate to be etched, on which a layer to be etched is exposed, is loaded on a stage in a reaction chamber. An etching gas is supplied into the reaction chamber to adsorb the etching gas on the surface of an exposed portion of the layer to be etched. Excessive etching gas remaining after being adsorbed is removed. A neutral beam is irradiated on the layer to be etched on which the etching gas is adsorbed. Etch by-products generated by the irradiation of the neutral beam is removed.

3. 发明授权

US06639698B2 Optical scanning unit with rotatable hologram disc 失效
公开(公告)号：US06639698B2
公开(公告)日：2003-10-28
申请号：US09957033
申请日：2001-09-21
申请人： Hwan-young Choi , Moon-gyu Lee , Sung-min Cho , Jae-Youn Eum , Jin-seung Choi , Young-il Kim , Jee-hong Min
发明人： Hwan-young Choi , Moon-gyu Lee , Sung-min Cho , Jae-Youn Eum , Jin-seung Choi , Young-il Kim , Jee-hong Min
IPC分类号： G02B532
CPC分类号： G02B26/106
摘要： An optical scanning unit with a rotatable hologram disc, including a light source, a rotatable hologram disc provided with a plurality of holograms, the holograms being formed concentrically along a radial direction to diffract a beam emitted from the light source by multiple steps, a reflecting member that reflects the beam emitted from the light source and diffracted by one of the holograms into another hologram, and a fixed hologram correcting the diffracted beam incident through the rotatable hologram disc to focus it on a scanning object. In the optical scanning unit, the light passes through the plurality of holograms formed along a radial direction of the rotatable hologram disc so that a scan width can be extended without reducing a scan speed of the optical scanning unit.

4. 发明授权

US06185017B2 Diffractive deflection beam scanning system 失效
$Diffractive deflection beam scanning system$
标题翻译：衍射偏转光束扫描系统
公开(公告)号：US06185017B2
公开(公告)日：2001-02-06
申请号：US09436753
申请日：1999-11-09
申请人： Sung-min Cho , Won-hyung Lee , Hwan-young Choi , Moon-gyu Lee , Jee-hong Min , Young-il Kim , Jin-seung Choi , Jae-yong Eum
发明人： Sung-min Cho , Won-hyung Lee , Hwan-young Choi , Moon-gyu Lee , Jee-hong Min , Young-il Kim , Jin-seung Choi , Jae-yong Eum
IPC分类号： G02B532
CPC分类号： H04N1/1265 , G02B26/106 , H04N1/1911
摘要： A diffractive deflection beam scanning system including: a plurality of light sources; a deflection disc rotatably mounted over the light sources, having patterns capable of diffracting and deflecting beams emitted from the light sources; a plurality of first reflecting mirrors for changing the traveling paths of beams diffracted and deflected by the deflection disc; a plurality of second reflecting mirrors for reflecting the beams reflected by the first reflecting mirrors in a beam scan direction, wherein the light sources are disposed in a straight line along a bisecting line of the deflection disc, perpendicular to the beam scan direction, and the second reflecting mirrors are arranged over the center of the deflection disc at different heights.
摘要翻译：一种衍射偏转光束扫描系统，包括：多个光源; 可旋转地安装在光源上的偏转盘，具有能够衍射和偏转从光源发射的光束的图案; 多个第一反射镜，用于改变由偏转盘衍射和偏转的光束的行进路径; 多个第二反射镜，用于在光束扫描方向上反射由第一反射镜反射的光束，其中光源沿着垂直于光束扫描方向的偏转盘的平分线设置在直线上，第二反射镜布置在不同高度的偏转盘的中心上方。

5. 发明授权

US06181447B2 Laser scanning unit 失效
标题翻译：激光扫描单元
公开(公告)号：US06181447B2
公开(公告)日：2001-01-30
申请号：US09422349
申请日：1999-10-21
申请人： Jae-yong Eum , Hwan-young Choi , Sung-min Cho , Moon-gyu Lee , Jee-hong Min , Young-il Kim
发明人： Jae-yong Eum , Hwan-young Choi , Sung-min Cho , Moon-gyu Lee , Jee-hong Min , Young-il Kim
IPC分类号： G02B532
CPC分类号： G02B26/106
摘要： A laser scanning unit (LSU) in a structure capable of radiating heat generated by a light source. The LSU includes at least one light source, a driving source for providing rotational force, and a deflection disk installed on a rotary shaft of the driving source, for diffracting and deflecting light incident from the light sources. The deflection disk has at least one radiating portion which is depressed in and/or protrudes from the surface of the deflection disk facing the light source and induces air flow by contact with air, such that the heat generated by the light sources is radiated by the air flow induced due to the radiating portion.
摘要翻译：一种能够散发由光源产生的热的结构的激光扫描单元（LSU）。 LSU包括至少一个光源，用于提供旋转力的驱动源和安装在驱动源的旋转轴上的偏转盘，用于衍射和偏转从光源入射的光。偏转盘具有至少一个辐射部分，该辐射部分被压在面向光源的偏转盘的表面中和/或从偏转盘的表面突出并且通过与空气接触而引起空气流动，使得由光源产生的热量被辐射由于辐射部分引起的空气流动。

6. 发明授权

US06181448B2 Multi-laser scanning unit 失效
标题翻译：多功能激光扫描单元
公开(公告)号：US06181448B2
公开(公告)日：2001-01-30
申请号：US09427073
申请日：1999-10-26
申请人： Hwan-young Choi , Won-hyung Lee , Sung-min Cho , Moon-gyu Lee , Jee-hong Min , Young-il Kim , Jin-seung Choi , Jae-yong Eum
发明人： Hwan-young Choi , Won-hyung Lee , Sung-min Cho , Moon-gyu Lee , Jee-hong Min , Young-il Kim , Jin-seung Choi , Jae-yong Eum
IPC分类号： G02B532
CPC分类号： G02B26/106
摘要： A multi-laser scanning unit (LSU) in which scanning lines incident parallel onto a photoreceptor have the same scanning direction. The multi-laser scanning unit includes: a driving source for providing a rotatory force; a deflection disk installed around a rotary shaft of the driving source having a plurality of sectors each with a hologram pattern for diffracting and deflecting incident light, for scanning light through rotation; a plurality of light sources installed facing one surface of the deflection disk for irradiating a plurality of light lines onto predetermined points of the deflection disk; and a light path changing portion for changing traveling paths of the plurality of scanning lines formed by the rotation of the deflection disk, wherein the plurality of light sources are arranged such that two incident points which are the farthest from each other among the plurality of incident points formed on the deflection disk form 180° with the center point of the deflection disk.
摘要翻译：多个激光扫描单元（LSU），其中平行于感光体的扫描线具有相同的扫描方向。多激光扫描单元包括：用于提供旋转力的驱动源; 安装在所述驱动源的旋转轴周围的偏转盘具有多个扇区，每个扇区均具有用于衍射和偏转入射光的全息图，用于通过旋转扫描光; 多个光源，其安装在偏转盘的一个表面上，用于将多条光线照射到偏转盘的预定点上; 以及光路改变部分，用于改变通过偏转盘的旋转形成的多条扫描线的行进路径，其中多个光源被布置成使得在多个事件中彼此最远的两个入射点在偏转盘上形成的点与偏转盘的中心点形成180°。

7. 发明授权

US06069727A Laser scanning unit 失效
标题翻译：激光扫描单元
公开(公告)号：US06069727A
公开(公告)日：2000-05-30
申请号：US931259
申请日：1997-09-16
申请人： Sung-min Cho , Hwan-young Choi
发明人： Sung-min Cho , Hwan-young Choi
IPC分类号： B41J2/44 , G02B26/08 , G02B26/10 , G06K15/12 , H04N1/113
CPC分类号： G02B26/105 , G02B26/0841
摘要： A laser scanning unit in which a digital micro mirror device is used as a laser beam deflecting device and which is used in a laser printer, a facsimile unit, and the like. The laser scanning unit according to the present invention includes a laser diode for emitting laser beams, a photo-sensitive drum for receiving the laser beams emitted by the laser diode, and a deflecting device which is disposed between the laser diode and the photo-sensitive drum, for deflecting the laser beams toward the photo-sensitive drum. The deflecting device comprises a reflecting member for reflecting the laser beams emitted from the laser diode toward the photo-sensitive drum at a predetermined angle, a rotating member for rotating the reflecting member at a range of predetermined angles, and a supporting member for supporting the reflecting member so that the reflecting member can be rotated.
摘要翻译：激光扫描单元，其中使用数字微镜装置作为激光束偏转装置，并且其用于激光打印机，传真单元等。根据本发明的激光扫描单元包括用于发射激光束的激光二极管，用于接收由激光二极管发射的激光束的感光鼓，以及设置在激光二极管和光敏元件之间的偏转装置鼓，用于将激光束偏转到感光鼓。偏转装置包括用于将从激光二极管发射的激光束以预定角度向感光鼓反射的反射部件，用于使反射部件旋转预定角度的旋转部件，以及用于支撑反射构件，使得反射构件能够旋转。

8. 发明授权

US06292278B1 Beam scanning system adopting deflection disc 失效
标题翻译：光束扫描系统采用偏转光盘
公开(公告)号：US06292278B1
公开(公告)日：2001-09-18
申请号：US09437900
申请日：1999-11-09
申请人： Sung-min Cho , Won-hyung Lee , Hwan-young Choi , Moon-gyu Lee , Jee-hong Min , Young-il Kim , Jin-seung Choi , Jae-yong Eum
发明人： Sung-min Cho , Won-hyung Lee , Hwan-young Choi , Moon-gyu Lee , Jee-hong Min , Young-il Kim , Jin-seung Choi , Jae-yong Eum
IPC分类号： G02B532
CPC分类号： G02B26/106
摘要： A beam scanning system including: a light source; a deflection disc rotatably installed over the light sources and having a hologram pattern on each of the upper and lower surfaces thereof, for diffracting beams emitted from the light source; and a plurality of mirrors for reflecting beams that have been diffracted by the deflection disc, to change the diffracted paths of the beams. Each of the upper and lower hologram patterns is formed with a low density relative to a one-sided hologram pattern.
摘要翻译：一种光束扫描系统，包括：光源; 偏转盘，其可旋转地安装在光源上并且在其上表面和下表面中的每一个上具有全息图图案，用于衍射从光源发射的光束; 以及用于反射由偏转盘衍射的光束的多个反射镜，以改变光束的衍射路径。每个上全息图和下全息图都相对于单面全息图形成低密度。

9. 发明授权

US6157472A Multi-laser scanning unit 失效
标题翻译：多功能激光扫描单元
公开(公告)号：US6157472A
公开(公告)日：2000-12-05
申请号：US422348
申请日：1999-10-21
申请人： Jae-yong Eum , Hwan-young Choi , Sung-min Cho , Moon-gyu Lee , Jee-hong Min , Young-il Kim
发明人： Jae-yong Eum , Hwan-young Choi , Sung-min Cho , Moon-gyu Lee , Jee-hong Min , Young-il Kim
IPC分类号： B41J2/44 , G02B26/10 , H04N1/113 , G02B5/32
CPC分类号： G02B26/105
摘要： A multi-laser scanning unit (LSU) in which scanning lines incident parallel onto a photoreceptor have the same scanning direction. The multi-laser scanning unit includes: a driving source for providing a rotatory force; a deflection disk installed around a rotary shaft of the driving source having at least two sectors with a hologram pattern for diffracting and deflecting incident light, for scanning light through rotation; at least two light sources installed facing one surface of the deflection disk for irradiating light lines onto predetermined points in the at least two sectors of the deflection disk, the predetermined points are symmetrical by the rotary center of the deflection disk; a light path changing portion for changing traveling paths of the plurality of scanning lines formed by the rotation of the deflection disk, such that the centers of the scanning lines or extended imaginary lines of the scanning lines pass the rotary axis of the deflection disk; and a scanning direction changing portion for changing the scanning direction of one scanning line scanned by the deflection disk in the opposite scanning direction, such that all the scanning lines scan an image in the same scanning direction.
摘要翻译：多个激光扫描单元（LSU），其中平行于感光体的扫描线具有相同的扫描方向。多激光扫描单元包括：用于提供旋转力的驱动源; 安装在所述驱动源的旋转轴周围的偏转盘具有至少两个具有用于衍射和偏转入射光的全息图的扇区，用于通过旋转扫描光; 至少两个光源安装在偏转盘的一个表面上，用于将光线照射到偏转盘的至少两个扇区中的预定点上，预定点由偏转盘的旋转中心对称; 用于改变通过偏转盘的旋转形成的多条扫描线的行进路径的光路改变部分，使得扫描线的扫描线或延伸的假想线的中心通过偏转盘的旋转轴线; 以及扫描方向改变部分，用于改变沿相反扫描方向由偏转盘扫描的一条扫描线的扫描方向，使得所有扫描线沿相同的扫描方向扫描图像。

10. 发明授权

US6046831A Beam scanning apparatus 失效
标题翻译：光束扫描装置
公开(公告)号：US6046831A
公开(公告)日：2000-04-04
申请号：US89394
申请日：1998-06-03
申请人： Jae-yong Eum , Wong-hyung Lee , Sung-min Cho
发明人： Jae-yong Eum , Wong-hyung Lee , Sung-min Cho
IPC分类号： B41J2/44 , G02B26/10 , G03G15/01 , G03G15/04 , H04N1/12 , G02B5/32
CPC分类号： H04N1/1265 , G02B26/106 , H04N1/12 , H04N1/1911
摘要： A beam scanning apparatus includes an optical source, a beam deflector having a deflection disk which is comprised of a plurality of sectors patterned to diffract a beam emitted from the optical source and has a reflective layer for reflecting an incident beam formed on the bottom surface of the beam deflector, and a driving source for rotating the deflection disk. A beam corrector is provided for correcting the beam deflected by the beam deflector.
摘要翻译：一种光束扫描装置，包括光源，光束偏转器，其具有偏转盘，该偏转盘由多个扇形图案化以衍射从光源发射的光束的扇形区域，并具有用于反射形成在光源的底表面上的入射光束的反射层光束偏转器和用于旋转偏转盘的驱动源。光束校正器用于校正由光束偏转器偏转的光束。

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