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    • 1. 发明专利
    • X-ray detector with radiation hard photodiode design
    • 具有辐射硬光电设计的X射线探测器
    • JP2007165911A
    • 2007-06-28
    • JP2006337979
    • 2006-12-15
    • Ge Inspection Technologies Lpジーイー・インスペクション・テクノロジーズ,エルピー
    • ZELAKIEWICZ SCOTT STEPHENALBAGLI DOUGLASHENNESSY WILLIAM ANDREWCOUTURE AARON JUDY
    • H01L31/09H01L27/14H01L27/146
    • G01T1/2018
    • PROBLEM TO BE SOLVED: To provide a photodetector for X-ray applications with a photodiode design enabling operation in conventional X-ray setting, while reducing or restricting leakage and deterioration of detector pixels and those performances caused as a result of such leakage. SOLUTION: A photodetector (16) incorporates a photodiode design (34, 64) with reduced leakage at each pixel location. The photodiode has a reduced surface area and a peripheral edge of reduced length. The length may be minimized by making the photodiode round. The diode is surrounded by a reflective layer (66) that may act as a contact for the diode. The reflective layer reflects photons back towards the reduced area diode to maintain good sensitivity. The reflective/contact layer may form a capacitor with another contact layer (54) by disposing a dielectric layer (56) therebetween, thereby increasing the effective capacitance of the photodiode. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:为了提供具有能够在常规X射线设置中操作的光电二极管设计的X射线应用的光电检测器,同时减少或限制检测器像素的泄漏和劣化以及由于这种泄漏而引起的那些性能 。 解决方案:光电检测器(16)结合光电二极管设计(34,64),每个像素位置具有减少的泄漏。 光电二极管具有减小的表面积和减小长度的周边边缘。 可以通过使光电二极管圆形化来减小长度。 二极管被可用作二极管的触点的反射层(66)包围。 反射层将光子反射回减小区域二极管以保持良好的灵敏度。 反射/接触层可以通过在其间布置介电层(56)而与另一接触层(54)形成电容器,从而增加光电二极管的有效电容。 版权所有(C)2007,JPO&INPIT