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1. 发明申请

WO2014018694A2 ION BEAM SAMPLE PREPARATION APPARATUS AND METHODS 审中-公开
标题翻译：离子束样品制备装置和方法
公开(公告)号：WO2014018694A2
公开(公告)日：2014-01-30
申请号：PCT/US2013/051917
申请日：2013-07-25
申请人： GATAN, INC.
发明人： HUNT, John Andrew , COYLE, Steven Thomas , HASSEL-SHEARER, Michael
IPC分类号： H01L21/66 , G01N1/32 , H01J37/305
CPC分类号： H04N7/18 , G01N1/32 , G01N23/2251 , G01N2021/0162 , G01N2021/8416 , G02B21/00 , H01J37/3005 , H01J37/305 , H01J37/3053 , H01J37/3056 , H01J2237/184 , H01J2237/202 , H01J2237/31745 , H01L22/26
摘要： Disclosed are embodiments of an ion beam sample preparation apparatus and methods. The methods operate on a sample disposed in a vacuum chamber and include steps of directing an intensity-controllable, tilt-angle controllable ion beam at a sample holder coupled to a rotation stage. The methods further include illuminating and capturing one or more images of the sample, extracting useful features from one or more images and thereafter adjusting the sample preparation steps. Further methods are disclosed for capturing sequences of images, programmatically rotating images, and displaying sequences of images with similar rotation angles. Further methods include extracting useful features from sequences of images that may change with respect to time as ion beam preparation continues
摘要翻译：公开了离子束样品制备装置和方法的实施例。该方法对设置在真空室中的样品进行操作，并且包括在耦合到旋转台的样品架处引导强度可控的，倾斜角度可控的离子束的步骤。该方法进一步包括照射和捕获样品的一个或多个图像，从一个或多个图像中提取有用的特征，然后调整样品制备步骤。公开了用于捕获图像序列，以编程方式旋转图像以及显示具有相似旋转角度的图像序列的其他方法。其他方法包括从离子束准备继续的时候可能随时间变化的图像序列中提取有用的特征

2. 发明申请

WO2022076805A1 APPARATUS AND METHOD FOR SEMICONDUCTOR PACKAGE FAILURE ANALYSIS 审中-公开
公开(公告)号：WO2022076805A1
公开(公告)日：2022-04-14
申请号：PCT/US2021/054147
申请日：2021-10-08
申请人： GATAN, INC.
发明人： COYLE, Steven Thomas , HOSMAN, Thijs C. , HUNT, John Andrew , HASSEL-SHEARER, Michael Patrick
IPC分类号： B23K26/03 , B23K26/04 , B23K26/064 , H01L21/302
摘要： A pulsed laser apparatus for milling a sample is described. The apparatus includes a pulsed laser, a scan head for scanning a beam from the pulsed laser across the sample aan F-theta lens for focusing the scanned beam onto the sample and a confocal detector for detecton of ablation depth. Methods of pulsed laser milling are also described.

3. 发明申请

WO2014018693A1 ION BEAM SAMPLE PREPARATION APPARATUS AND METHODS 审中-公开
标题翻译：离子束样品制备装置和方法
公开(公告)号：WO2014018693A1
公开(公告)日：2014-01-30
申请号：PCT/US2013/051916
申请日：2013-07-25
申请人： GATAN, INC.
发明人： COYLE, Steven Thomas , HUNT, John Andrew , HASSEL-SHEARER, Michael
IPC分类号： G01N1/32 , H01J37/305 , H01L21/66
CPC分类号： H01J37/20 , G01N1/32 , G01N2021/8411 , H01J37/3005 , H01J37/3056 , H01J2237/184 , H01J2237/202 , H01J2237/31745
摘要： Disclosed are embodiments of an ion beam sample preparation apparatus and methods. The apparatus has disposed in a vacuum chamber at least one tilting ion beam irradiating means with intensity control, a rotation stage with rotation control, a sample holder, and an adjustable positioning stage that has two axes of positional adjustment that are operable to move the region of the sample being prepared by the ion beam relative to the ion beam. The apparatus may also include a vacuum-tight optical window for observing the sample and a shutter for protecting the optical window from debris while the sample is prepared in the ion beam.
摘要翻译：公开了离子束样品制备装置和方法的实施方案。该设备已经在真空室中设置了至少一个具有强度控制的倾斜离子束照射装置，具有旋转控制的旋转台，样品保持器和可调定位台，其具有位置调节的两个轴线，该轴线可操作以移动该区域样品由离子束相对于离子束制备。该装置还可以包括用于观察样品的真空密封光学窗口和用于在样品在离子束中制备样品时保护光学窗口免于碎片的快门。

4. 发明公开

EP4205167A1 APPARATUS AND METHOD FOR SEMICONDUCTOR PACKAGE FAILURE ANALYSIS 审中-实审
公开(公告)号：EP4205167A1
公开(公告)日：2023-07-05
申请号：EP21862778.4
申请日：2021-08-27
申请人： Gatan, Inc.
发明人： COYLE, Steven Thomas , HOSMAN, Thijs C. , HUNT, John Andrew , HASSEL-SHEARER, Michael Patrick
IPC分类号： H01L21/268 , B23K26/00 , H01L21/26 , H01L21/263

5. 发明公开

EP2878008A2 ION BEAM SAMPLE PREPARATION APPARATUS AND METHODS 有权
标题翻译： VORRICHTUNG UND VERFAHREN ZUR HERSTELLUNG VON IONENSTRAHLPROBEN
公开(公告)号：EP2878008A2
公开(公告)日：2015-06-03
申请号：EP13745536.6
申请日：2013-07-25
申请人： Gatan Inc.
发明人： HUNT, John Andrew , COYLE, Steven Thomas , HASSEL-SHEARER, Michael
IPC分类号： H01L21/66 , G01N1/32 , H01J37/305
CPC分类号： H04N7/18 , G01N1/32 , G01N23/2251 , G01N2021/0162 , G01N2021/8416 , G02B21/00 , H01J37/3005 , H01J37/305 , H01J37/3053 , H01J37/3056 , H01J2237/184 , H01J2237/202 , H01J2237/31745 , H01L22/26
摘要： Disclosed are embodiments of an ion beam sample preparation apparatus and methods. The methods operate on a sample disposed in a vacuum chamber and include steps of directing an intensity-controllable, tilt-angle controllable ion beam at a sample holder coupled to a rotation stage. The methods further include illuminating and capturing one or more images of the sample, extracting useful features from one or more images and thereafter adjusting the sample preparation steps. Further methods are disclosed for capturing sequences of images, programmatically rotating images, and displaying sequences of images with similar rotation angles. Further methods include extracting useful features from sequences of images that may change with respect to time as ion beam preparation continues.
摘要翻译：公开了离子束样品制备装置和方法的实施方案。所述方法对设置在真空室中的样品进行操作，并且包括将强度可控的倾斜角度可控离子束引导到与旋转台连接的样品保持器的步骤。所述方法还包括照亮和捕获样品的一个或多个图像，从一个或多个图像提取有用特征，然后调整样品制备步骤。公开了用于捕获图像序列，以编程方式旋转图像以及显示具有相似旋转角度的图像序列的其它方法。其他方法包括从离子束制备继续时可能随时间变化的图像序列提取有用特征。

6. 发明公开

EP2558836A2 ION BEAM SAMPLE PREPARATION APPARATUS AND METHODS 有权
标题翻译：离子束样品制备装置和方法
公开(公告)号：EP2558836A2
公开(公告)日：2013-02-20
申请号：EP11769332.5
申请日：2011-04-08
申请人： Gatan, Inc.
发明人： HUNT, John Andrew , COYLE, Steven Thomas
IPC分类号： G01N1/28 , H01J37/20
CPC分类号： G01N1/32 , H01J37/31 , H01J2237/026 , H01J2237/2007 , H01J2237/3118
摘要： Disclosed are embodiments of an ion beam sample preparation apparatus and methods for using the embodiments. The apparatus comprises an ion beam irradiating means in a vacuum chamber that may direct ions toward a sample, a shield blocking a portion of the ions directed toward the sample, and a shield retention stage with shield retention means that replaceably and removably holds the shield in a position. The shield has datum features which abut complementary datum features on the shield retention stage when the shield is held in the shield retention stage. The shield has features which enable the durable adhering of the sample to the shield for processing the sample with the ion beam. The complementary datum features on both shield and shield retention stage enable accurate and repeatable positioning of the sample in the apparatus for sample processing and reprocessing.
摘要翻译：公开了离子束样品制备装置的实施例和使用这些实施例的方法。该装置包括位于真空室内的离子束照射装置，该离子束照射装置可以引导离子朝向样品，阻挡部分离子导向样品的屏蔽，以及具有屏蔽保持装置的屏蔽保持装置，屏蔽保持装置可替换地且可移除地将屏蔽保持在一个位置。当屏蔽保持在屏蔽保持级中时，屏蔽具有基准特征，该基准特征邻接屏蔽保持级上的互补基准特征。该屏蔽具有能够使样品耐久地粘附到用于用离子束处理样品的屏蔽的特征。屏蔽和屏蔽保持台上的互补基准特征可以实现样品在样品处理和再处理过程中的准确和可重复定位。

7. 发明授权

EP2878008B1 ION BEAM SAMPLE PREPARATION APPARATUS AND METHODS 有权
标题翻译：离子束样品制备装置和方法
公开(公告)号：EP2878008B1
公开(公告)日：2018-04-11
申请号：EP13745536.6
申请日：2013-07-25
申请人： Gatan Inc.
发明人： HUNT, John Andrew , COYLE, Steven Thomas , HASSEL-SHEARER, Michael
IPC分类号： H01L21/66 , G01N1/32 , H01J37/305
CPC分类号： H04N7/18 , G01N1/32 , G01N23/2251 , G01N2021/0162 , G01N2021/8416 , G02B21/00 , H01J37/3005 , H01J37/305 , H01J37/3053 , H01J37/3056 , H01J2237/184 , H01J2237/202 , H01J2237/31745 , H01L22/26
摘要： Disclosed are embodiments of an ion beam sample preparation apparatus and methods. The methods operate on a sample disposed in a vacuum chamber and include steps of directing an intensity-controllable, tilt-angle controllable ion beam at a sample holder coupled to a rotation stage. The methods further include illuminating and capturing one or more images of the sample, extracting useful features from one or more images and thereafter adjusting the sample preparation steps. Further methods are disclosed for capturing sequences of images, programmatically rotating images, and displaying sequences of images with similar rotation angles. Further methods include extracting useful features from sequences of images that may change with respect to time as ion beam preparation continues.

8. 发明授权

EP2558838B1 ION BEAM SAMPLE PREPARATION APPARATUS AND METHODS 有权
标题翻译：离子束样品制备装置和方法
公开(公告)号：EP2558838B1
公开(公告)日：2017-05-17
申请号：EP11769334.1
申请日：2011-04-08
申请人： Gatan Inc.
发明人： HUNT, John Andrew , COYLE, Steven Thomas
IPC分类号： G01N1/32 , H01J37/20
CPC分类号： H01J37/20 , G01N1/32 , H01J37/185 , H01J37/31 , H01J2237/2007 , H01J2237/3118

9. 发明公开

EP2558837A2 ION BEAM SAMPLE PREPARATION THERMAL MANAGEMENT APPARATUS AND METHODS 有权
标题翻译： DEVICE AND METHOD FOR ION RAY样品制备的热管理
公开(公告)号：EP2558837A2
公开(公告)日：2013-02-20
申请号：EP11769333.3
申请日：2011-04-08
申请人： Gatan Inc.
发明人： HUNT, John Andrew , COYLE, Steven Thomas
IPC分类号： G01N1/28 , H01J37/20
CPC分类号： G21F3/00 , G01N1/32 , H01J37/31 , H01J2237/026 , H01J2237/2007 , H01J2237/3118
摘要： Disclosed are embodiments of an ion beam sample preparation thermal management apparatus and methods for using the embodiments. The apparatus comprises an ion beam irradiating means in a vacuum chamber that may direct ions toward a sample, a shield blocking a portion of the ions directed toward the sample, and a shield retention stage with shield retention means that replaceably and removably holds the shield in a position. The complementary datum features on both shield and shield retention stage enable accurate and repeatable positioning of the sample in the apparatus for sample processing and reprocessing. A heat sink means is configured to conduct heat away from the sample undergoing sample preparation in the ion beam. The ion beam irradiating means may modulate ion beam intensity between at least two intensities. The shield retention stage may be stationary or rotating.

10. 发明公开

EP2558839A2 ION BEAM SAMPLE PREPARATION APPARATUS AND METHODS 有权
标题翻译：离子束样品制备装置和方法
公开(公告)号：EP2558839A2
公开(公告)日：2013-02-20
申请号：EP11769335.8
申请日：2011-04-08
申请人： Gatan, Inc.
发明人： HUNT, John Andrew , COYLE, Steven Thomas
IPC分类号： G01N1/28 , H01J37/20
CPC分类号： G01N1/44 , G01N1/32 , H01J37/023 , H01J37/31 , H01J2237/0245 , H01J2237/2007 , H01J2237/3118
摘要： Disclosed are embodiments of an ion beam sample preparation apparatus and methods for using the embodiments. The apparatus comprises a tilting ion beam irradiating means in a vacuum chamber that may direct ions toward a sample, a shield blocking a portion of the ions directed toward the sample, and a shield retention stage with shield retention means that replaceably and removably holds the shield in a position. Complementary datum features on both shield and shield retention stage enable accurate and repeatable positioning of the sample in the apparatus for sample processing and reprocessing. The tilting ion beam irradiating means may direct ions at the sample from more than one tilt angle. A rotating shield retention stage is also disclosed which works in concert with the tilting ion beam irradiating means to improve the flexibility and efficiency of the apparatus in preparing samples for microscopic observation.
摘要翻译：公开了离子束样品制备装置的实施例和使用这些实施例的方法。该装置包括：可在真空室中引导离子朝向样品的倾斜离子束照射装置;阻挡朝向样品的一部分离子的屏蔽;以及屏蔽保持装置，其具有屏蔽保持装置，屏蔽保持装置可替换地且可移除地保持屏蔽在一个位置。屏蔽和屏蔽保持台上的互补基准特征使得样品在样品处理和再处理过程中能够准确且可重复地定位在装置中。倾斜离子束照射装置可以从多于一个倾角引导样品中的离子。还公开了一种旋转护罩保持台，其与倾斜离子束照射装置协同工作，以提高设备在制备用于显微镜观察的样品中的灵活性和效率。

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