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    • 10. 发明申请
    • Method Of Making Microelectronic Spring Contact Array
    • 制作微电子弹簧接触阵列的方法
    • US20060191136A1
    • 2006-08-31
    • US11382756
    • 2006-05-11
    • Benjamin EldridgeGaetan MathieuCarl Reynolds
    • Benjamin EldridgeGaetan MathieuCarl Reynolds
    • H01R43/00H05K3/10
    • G01R1/06744G01R1/06733G01R3/00Y10T29/49139Y10T29/49155Y10T29/49204Y10T29/49208Y10T29/49222Y10T29/49224
    • A method of making a microelectronic spring contact array comprises forming a plurality of spring contacts on a sacrificial substrate and then releasing the spring contacts from the sacrificial substrate. Each of the spring contacts has an elongated beam having a base end. The method of making the array includes attaching the spring contacts at their base ends to a base substrate after they have been released entirely from the sacrificial substrate, so that each contact extends from the base substrate to a distal end of its beams. The distal ends are aligned with a predetermined array of tip positions. In an embodiment of the invention, the spring contacts are formed by patterning contours of the spring contacts in a sacrificial layer on the sacrificial substrate. The walls of patterned recesses in the sacrificial layer define side profiles of the spring contacts, and a conductive material is deposited in the recesses to form the elongated beams of the spring contacts.
    • 制造微电子弹簧接触阵列的方法包括在牺牲衬底上形成多个弹簧触点,然后从牺牲衬底释放弹簧触头。 每个弹簧触点具有带有基端的细长梁。 制造阵列的方法包括在它们已经从牺牲基板完全释放之后将其基端处的弹簧触点附接到基底基板,使得每个触点从基底延伸到其波束的远端。 远端与预定阵列的尖端位置对准。 在本发明的一个实施例中,通过在牺牲衬底上的牺牲层中图形地形成弹簧触点的轮廓来形成弹簧触点。 牺牲层中的图案化凹槽的壁限定弹簧触点的侧面轮廓,并且导电材料沉积在凹部中以形成弹簧触点的细长梁。