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    • 1. 发明授权
    • Decoupling of actuators for positioning an object
    • 用于定位物体的执行器的去耦
    • US07084532B2
    • 2006-08-01
    • US10792472
    • 2004-03-03
    • Gary Peter WiddowsonMan Chung Raymond NgYen Hsi Terry Tang
    • Gary Peter WiddowsonMan Chung Raymond NgYen Hsi Terry Tang
    • H02K41/00
    • H02K41/031H02K2201/18
    • The invention provides an apparatus and a method for positioning an object coupled to a first support structure and a second support structure. A first actuator drives the first support structure along a first axis and a second actuator drives the first support structure along a second axis orthogonal to the first axis. A third actuator comprising a forcer and a stator is provided for driving the second support structure that is guided for movement relative to the first support structure along a third axis orthogonal to the first and second axes. The forcer is coupled to the second support structure and is movable with respect to the stator, and the stator is relatively stationary and decoupled from the second support structure.
    • 本发明提供一种用于定位耦合到第一支撑结构和第二支撑结构的物体的装置和方法。 第一致动器沿着第一轴驱动第一支撑结构,第二致动器沿着与第一轴正交的第二轴驱动第一支撑结构。 第三致动器包括一个锻炼器和一个定子,用于驱动第二支撑结构,该第二支撑结构被引导以相对于第一支撑结构沿着与第一和第二轴正交的第三轴线移动。 推进器联接到第二支撑结构并且可相对于定子移动,并且定子相对静止并与第二支撑结构分离。