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    • 10. 发明授权
    • Horizontal magnetic recording media having grains of chemically-ordered
FEPT of COPT
    • 具有COPT化学有序FEPT晶粒的水平磁记录介质
    • US6086974A
    • 2000-07-11
    • US920938
    • 1997-08-29
    • Jan-Ulrich ThieleDieter Klaus Weller
    • Jan-Ulrich ThieleDieter Klaus Weller
    • G11B5/64G11B5/73G11B5/66
    • G11B5/732G11B5/653G11B5/656Y10S428/90Y10T428/265
    • A horizontal magnetic recording medium that has as its magnetic film a granular film with grains of a chemically-ordered FePt or FePtX (or CoPt or CoPtX) alloy in the tetragonal L1.sub.0 structure uses an etched seed layer beneath the granular film. The granular magnetic film reveals a very high magnetocrystalline anisotropy within the individual grains. The film is produced by sputtering from a single alloy target or cosputtering from several targets. The granular structure and the chemical ordering are controlled by means of sputter parameters, e.g., temperature and deposition rate, and by the use of the etched seed layer that provides a structure for the subsequently sputter-deposited granular magnetic film. The structure of the seed layer is obtained by sputter etching, plasma etching, ion irradiation, or laser irradiation. The magnetic properties, i.e., H.sub.c and areal moment density M.sub.r t, are controlled by the granularity (grain size and grain distribution), the degree of chemical ordering, and the addition of one or more nonmagnetic materials, such as Cr, Ag, Cu, Ta, or B. The resulting granular magnetic film has magnetic properties suitable for application in high-density, horizontal magnetic recording media.
    • 具有作为其磁性膜的水平磁记录介质,其具有在四方晶L10结构中具有化学有序FePt或FePtX(或CoPt或CoPtX)合金的颗粒的颗粒膜,其使用颗粒膜下方的蚀刻种子层。 颗粒状磁性膜显示各晶粒内的非常高的磁晶各向异性。 该膜通过从单个合金靶溅射或从几个靶的共溅射制造。 颗粒结构和化学排序通过溅射参数(例如温度和沉积速率)以及通过使用提供随后溅射沉积的颗粒状磁性膜的结构的蚀刻种子层来控制。 种子层的结构通过溅射蚀刻,等离子体蚀刻,离子照射或激光照射获得。 磁特性,即Hc和面积密度Mrt由颗粒度(晶粒尺寸和晶粒分布),化学排序程度以及添加一种或多种非磁性材料如Cr,Ag,Cu, Ta或B.所得粒状磁性膜具有适用于高密度水平磁记录介质的磁性能。