专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20080084650A1 APPARATUS AND METHOD FOR SUBSTRATE CLAMPING IN A PLASMA CHAMBER 审中-公开
标题翻译：用于在等离子体室中衬底夹紧的装置和方法
公开(公告)号：US20080084650A1
公开(公告)日：2008-04-10
申请号：US11866646
申请日：2007-10-03
申请人： Ganesh Balasubramanian , Amit Bansal , Eller Juco , Mohamad Ayoub , Hyung-Joon Kim , Karthik Janakiraman , Sudha Rathi , Deenesh Padhi , Martin Seamons , Visweswaren Sivaramakrishnan , Bok Kim , Amir Al-Bayati , Derek Witty , Hichem M'Saad , Anton Baryshnikov , Chiu Chan , Shuang Liu
发明人： Ganesh Balasubramanian , Amit Bansal , Eller Juco , Mohamad Ayoub , Hyung-Joon Kim , Karthik Janakiraman , Sudha Rathi , Deenesh Padhi , Martin Seamons , Visweswaren Sivaramakrishnan , Bok Kim , Amir Al-Bayati , Derek Witty , Hichem M'Saad , Anton Baryshnikov , Chiu Chan , Shuang Liu
IPC分类号： H01L21/683
CPC分类号： H01L21/6831 , C23C16/52 , H01J37/32431 , H01L21/67069 , H01L21/67253
摘要： The present invention generally provides methods and apparatus for monitoring and maintaining flatness of a substrate in a plasma reactor. Certain embodiments of the present invention provide a method for processing a substrate comprising positioning the substrate on an electrostatic chuck, applying an RF power between the an electrode in the electrostatic chuck and a counter electrode positioned parallel to the electrostatic chuck, applying a DC bias to the electrode in the electrostatic chuck to clamp the substrate on the electrostatic chuck, and measuring an imaginary impedance of the electrostatic chuck.
摘要翻译：本发明通常提供了用于监测和维持等离子体反应器中的基板的平坦度的方法和装置。本发明的某些实施例提供了一种处理衬底的方法，包括将衬底定位在静电吸盘上，在静电吸盘中的电极与平行于静电吸盘的对置电极之间施加RF功率，将DC偏压施加到静电卡盘中的电极将基板夹在静电卡盘上，并测量静电卡盘的假想阻抗。

2. 发明申请

US20110090613A1 APPARATUS AND METHOD FOR SUBSTRATE CLAMPING IN A PLASMA CHAMBER 有权
标题翻译：用于在等离子体室中衬底夹紧的装置和方法
公开(公告)号：US20110090613A1
公开(公告)日：2011-04-21
申请号：US12950105
申请日：2010-11-19
申请人： Ganesh Balasubramanian , Amit Bansal , Eller Y. Juco , Mohamad Ayoub , Hyung-Joon Kim , Karthik Janakiraman , Sudha Rathi , Deenesh Padhi , Martin Jay Seamons , Visweswaren Sivaramakrishnan , Bok Hoen Kim , Amir Al-Bayati , Derek R. Witty , Hichem M'Saad , Anton Baryshnikov , Chiu Chan , Shuang Liu
发明人： Ganesh Balasubramanian , Amit Bansal , Eller Y. Juco , Mohamad Ayoub , Hyung-Joon Kim , Karthik Janakiraman , Sudha Rathi , Deenesh Padhi , Martin Jay Seamons , Visweswaren Sivaramakrishnan , Bok Hoen Kim , Amir Al-Bayati , Derek R. Witty , Hichem M'Saad , Anton Baryshnikov , Chiu Chan , Shuang Liu
IPC分类号： H01L21/683 , H01L21/66 , G01R27/02
CPC分类号： H01L21/6831 , C23C16/52 , H01J37/32431 , H01L21/67069 , H01L21/67253
摘要： The present invention generally provides methods and apparatus for monitoring and maintaining flatness of a substrate in a plasma reactor. Certain embodiments of the present invention provide a method for processing a substrate comprising positioning the substrate on an electrostatic chuck, applying an RF power between the an electrode in the electrostatic chuck and a counter electrode positioned parallel to the electrostatic chuck, applying a DC bias to the electrode in the electrostatic chuck to clamp the substrate on the electrostatic chuck, and measuring an imaginary impedance of the electrostatic chuck.
摘要翻译：本发明通常提供了用于监测和维持等离子体反应器中的基板的平坦度的方法和装置。本发明的某些实施例提供了一种处理衬底的方法，包括将衬底定位在静电吸盘上，在静电吸盘中的电极与平行于静电吸盘的对置电极之间施加RF功率，将DC偏压施加到静电卡盘中的电极将基板夹在静电卡盘上，并测量静电卡盘的虚拟阻抗。

3. 发明授权

US09337072B2 Apparatus and method for substrate clamping in a plasma chamber 有权
标题翻译：用于在等离子体室中进行基板夹持的装置和方法
公开(公告)号：US09337072B2
公开(公告)日：2016-05-10
申请号：US12950105
申请日：2010-11-19
申请人： Ganesh Balasubramanian , Amit Bansal , Eller Y. Juco , Mohamad Ayoub , Hyung-Joon Kim , Karthik Janakiraman , Sudha Rathi , Deenesh Padhi , Martin Jay Seamons , Visweswaren Sivaramakrishnan , Bok Hoen Kim , Amir Al-Bayati , Derek R. Witty , Hichem M'Saad , Anton Baryshnikov , Chiu Chan , Shuang Liu
发明人： Ganesh Balasubramanian , Amit Bansal , Eller Y. Juco , Mohamad Ayoub , Hyung-Joon Kim , Karthik Janakiraman , Sudha Rathi , Deenesh Padhi , Martin Jay Seamons , Visweswaren Sivaramakrishnan , Bok Hoen Kim , Amir Al-Bayati , Derek R. Witty , Hichem M'Saad , Anton Baryshnikov , Chiu Chan , Shuang Liu
IPC分类号： H02N13/00 , H01L21/683 , C23C16/52 , H01J37/32 , H01L21/67
CPC分类号： H01L21/6831 , C23C16/52 , H01J37/32431 , H01L21/67069 , H01L21/67253
摘要： The present invention generally provides methods and apparatus for monitoring and maintaining flatness of a substrate in a plasma reactor. Certain embodiments of the present invention provide a method for processing a substrate comprising positioning the substrate on an electrostatic chuck, applying an RF power between the an electrode in the electrostatic chuck and a counter electrode positioned parallel to the electrostatic chuck, applying a DC bias to the electrode in the electrostatic chuck to clamp the substrate on the electrostatic chuck, and measuring an imaginary impedance of the electrostatic chuck.
摘要翻译：本发明通常提供了用于监测和维持等离子体反应器中的基板的平坦度的方法和装置。本发明的某些实施例提供了一种处理衬底的方法，包括将衬底定位在静电吸盘上，在静电吸盘中的电极与平行于静电吸盘的对置电极之间施加RF功率，将DC偏压施加到静电卡盘中的电极将基板夹在静电卡盘上，并测量静电卡盘的假想阻抗。

4. 发明申请

US20100273222A1 CORYNEBACTERIUM GLUTAMICUM ENHANCED EXPRESSION OF MOAA GENE ENCODING MOLYBDENUM COFACTOR BIOSYNTHESIS ENZYME A AND METHOD FOR PRODUCING L-LYSINE USING THE SAME 有权
标题翻译：木瓜淀粉酶增强表达MOAA基因编码多聚乙酸酯生物合成酶A及其生产L-赖氨酸的方法
公开(公告)号：US20100273222A1
公开(公告)日：2010-10-28
申请号：US12520684
申请日：2007-12-20
申请人： Jun-Ok Moon , Jae-Woo Jang , So-Yeon Rah , Sang-Jo Lim , Jong-Soo Choi , Young-Hoon Park , Hyung-Joon Kim
发明人： Jun-Ok Moon , Jae-Woo Jang , So-Yeon Rah , Sang-Jo Lim , Jong-Soo Choi , Young-Hoon Park , Hyung-Joon Kim
IPC分类号： C12P13/08 , C12N1/20 , C12N1/21
CPC分类号： C12P13/08 , C12N9/0004
摘要： The present invention relates to a microorganism of Corynebacterium ssp. having enhanced expression of gene for encoding molybdenum cofactor biosynthesis enzyme A and a method for producing L-lysine using the same, which has effects on providing the production method of L-lysine using the Corynebacterium strain having enhanced productivity of L-lysine by intensifying expression of the moaA gene for encoding molybdnum cofactor biosynthesis enzyme A.
摘要翻译：本发明涉及棒状杆菌属微生物。具有增强的用于编码钼辅因子生物合成酶A的基因的表达和使用该辅助因子生物合成酶A的L-赖氨酸的制备方法，其具有通过增强表达来提高L-赖氨酸生产力的棒状杆菌属菌株提供L-赖氨酸的生产方法的作用的用于编码钼辅因子生物合成酶A的moaA基因。

5. 发明申请

US20080138176A1 Apparatus for manufacturing semiconductor device 审中-公开
标题翻译：半导体器件制造装置
公开(公告)号：US20080138176A1
公开(公告)日：2008-06-12
申请号：US11881012
申请日：2007-07-25
申请人： Hyung-Joon Kim , Seung-Bae Lee , Dae-Hyun Yang , Ki-Yung Lee
发明人： Hyung-Joon Kim , Seung-Bae Lee , Dae-Hyun Yang , Ki-Yung Lee
IPC分类号： H01L21/677
CPC分类号： H01L21/67173 , H01L21/6719 , H01L21/67196 , H01L21/67201
摘要： The present invention provides an apparatus for manufacturing a semiconductor device. The apparatus includes vacuum wafer transfer modules disposed in a line so as to correspond to stages, a loadlock chamber module transferring wafers in vacuum, first process chambers disposed around the vacuum wafer transfer modules so as to process the wafers transferred from the loadlock chamber module, first buffer stages disposed in the vacuum wafer transfer modules so that the wafers are loaded thereon and unloaded therefrom, a first transfer robot disposed between the first process chambers so as to transfer the wafers from the loadlock chamber module to the first process chambers and then to transfer the wafers from the loadlock chamber module onto the first buffer stages, second process chambers disposed around the vacuum wafer transfer modules so as to process the wafers transferred from the first buffer stages, and a second transfer robot disposed between the second process chambers so as to transfer the wafers, which are transferred to the first buffer stages, to the second process chambers.
摘要翻译：本发明提供一种半导体器件的制造装置。该装置包括：一排设置成对应于一级的真空晶片传送模块，一个负载锁定室模块，在真空中传送晶片，设置在真空晶片传送模块周围的第一处理室，以处理从负载锁定室模块传送的晶片，设置在真空晶片转移模块中的第一缓冲级，使得晶片在其上装载并卸载;第一传送机器人，设置在第一处理室之间，以将晶片从负载锁定室模块传送到第一处理室，然后到将晶片从负载锁定室模块转移到第一缓冲级上，第二处理室设置在真空晶片传送模块周围，以处理从第一缓冲级传送的晶片，以及设置在第二处理室之间的第二传送机器人，以便以将转移到第一缓冲级的晶片传送到第二缓冲级处理室。

6. 发明授权

US08892459B2 Affiliate investigation system and method 有权
标题翻译：会员调查制度和方法
公开(公告)号：US08892459B2
公开(公告)日：2014-11-18
申请号：US13190338
申请日：2011-07-25
申请人： Andrew Skalet , Hyung-Joon Kim , David Naffziger
发明人： Andrew Skalet , Hyung-Joon Kim , David Naffziger
IPC分类号： G06Q30/00
CPC分类号： G06Q30/018 , G06Q30/00 , H04L29/08072
摘要： Given an advertisement placed by a rogue affiliate that takes steps to hide its affiliate ID from affiliate investigators, the affiliate ID may be identified using a step-wise link follower to process the advertisement's target URIs. For each redirection step inclusively between the original target URI and the ultimate destination URI, the current URI is analyzed and requested according to either a trusted request method or a non-trusted request method depending on whether the resource to which the URI refers is known to be a trusted resource. The non-trusted request method is designed to thwart the rogue affiliate's efforts to identify an affiliate investigator as the source of the request.
摘要翻译：鉴于流氓联盟的广告，其采取步骤从联属调查员隐藏其会员身份，可以使用逐步的链接跟随者来识别会员ID，以处理广告的目标URI。对于在原始目标URI和最终目的地URI之间包括的每个重定向步骤，根据可信请求方法或不可信请求方法来分析和请求当前URI，这取决于URI引用的资源是否已知成为值得信赖的资源。不信任的请求方法旨在阻止流氓联盟成为识别联属调查员作为请求来源的努力。

7. 发明授权

US06581556B2 Device for electromechanically actuating intake and exhaust valve 失效
标题翻译：用于机电操作进气和排气阀的装置
公开(公告)号：US06581556B2
公开(公告)日：2003-06-24
申请号：US10147678
申请日：2002-05-16
申请人： Hyung-Joon Kim
发明人： Hyung-Joon Kim
IPC分类号： F01L904
CPC分类号： F01L9/04 , F01L2009/0451 , F01L2101/00
摘要： An electromechanical valve train is provided that includes a housing; an outer coil assembly including a first core having an first aperture formed therein and a first coil wound on the first core; an inner coil assembly including a second core having an second aperture formed therein and a second coil wound on the second core, the inner coil assembly being secured to the first aperture of the outer coil assembly; an armature including an upper plate, a lower plate, a rod connecting the upper plate and the lower plate, and an insulator disposed between the rod and the upper plate or between the rod and the lower plate, the rod being vertically movably inserted into the second aperture of the inner coil assembly; an upper biasing member; a lower biasing member; and a valve connected to the lower plate of the armature.
摘要翻译：提供一种机电阀系列，其包括壳体; 外部线圈组件，包括其中形成有第一孔的第一芯和缠绕在第一芯上的第一线圈; 内线圈组件，其包括具有形成在其中的第二孔的第二芯和缠绕在第二芯上的第二线圈，内线圈组件固定到外线圈组件的第一孔; 电枢，包括上板，下板，连接上板和下板的杆，以及设置在杆与上板之间或杆与下板之间的绝缘体，杆可上下移动地插入内线圈组件的第二孔; 上部偏置构件; 下偏置构件; 以及连接到电枢的下板的阀。

8. 发明授权

US07524535B2 Method of protecting metals from corrosion using thiol compounds 有权
标题翻译：使用硫醇化合物保护金属免受腐蚀的方法
公开(公告)号：US07524535B2
公开(公告)日：2009-04-28
申请号：US10786379
申请日：2004-02-25
申请人： Hyung-Joon Kim , Jinming Zhang , Richard D. Gandour , Roy Hoan Yoon
发明人： Hyung-Joon Kim , Jinming Zhang , Richard D. Gandour , Roy Hoan Yoon
IPC分类号： B05D7/14
CPC分类号： B82Y30/00 , C23C22/02 , C23C22/68 , C23C22/83 , C23C2222/20 , C23F11/161
摘要： This invention relates to a method of coating a metal surface by applying a solution containing an alkanethiol compound and a solvent to a metal surface, allowing the formation of a self-assembled monolayer, which presents as a robust barrier to corrosion. The alkanethiol compounds have a general formula, R(CH2)nSH, where R represents methyl, carboxyl, hydroxyl, formyl, or amide; n is in the range of 7 to 21, preferably in the range of 12 to 18.
摘要翻译：本发明涉及通过将含有链烷硫醇化合物和溶剂的溶液施加到金属表面来涂覆金属表面的方法，允许形成自组装单层，其呈现为腐蚀性的坚固屏障。烷硫醇化合物具有通式R（CH 2）n SH，其中R代表甲基，羧基，羟基，甲酰基或酰胺; n在7至21的范围内，优选在12至18的范围内。

9. 发明申请

US20070077576A1 Corynebacterium glutamicum genes encoding stress, resistance and tolerance proteins 审中-公开
公开(公告)号：US20070077576A1
公开(公告)日：2007-04-05
申请号：US11508673
申请日：2006-08-22
申请人： Markus Pompejus , Burkhard Kroger , Hartwig Schroder , Oskar Zelder , Gregor Haberhauer , Heung-Shick Lee , Hyung-Joon Kim
发明人： Markus Pompejus , Burkhard Kroger , Hartwig Schroder , Oskar Zelder , Gregor Haberhauer , Heung-Shick Lee , Hyung-Joon Kim
IPC分类号： C12Q1/68 , G01N33/554 , C07H21/04 , C07K14/34 , C12N1/21 , C12N15/74
CPC分类号： C12P13/04 , C07K14/34 , C07K2319/00 , C12N9/00 , C12N9/18 , C12P13/06 , C12P13/08 , C12P13/10 , C12P13/12 , C12P13/14 , C12P13/20 , C12P13/222 , C12P13/225 , C12P13/227 , C12P13/24
摘要： Isolated nucleic acid molecules, designated SRT nucleic acid molecules, which encode novel SRT proteins from Corynebacterium glutamicum are described. The invention also provides antisense nucleic acid molecules, recombinant expression vectors containing SRT nucleic acid molecules, and host cells into which the expression vectors have been introduced. The invention still further provides isolated SRT proteins, mutated SRT proteins, fusion proteins, antigenic peptides and methods for the improvement of production of a desired compound from C. glutamicum based on genetic engineering of SRT genes in this organism.

10. 发明申请

US20070059810A1 Corynebacterium glutamicum genes encoding stress, resistance and tolerance proteins 审中-公开
标题翻译：谷氨酸棒杆菌基因编码应激，抗性和耐受性蛋白质
公开(公告)号：US20070059810A1
公开(公告)日：2007-03-15
申请号：US11508783
申请日：2006-08-22
申请人： Markus Pompejus , Burkhard Kroger , Hartwig Schroder , Oskar Zelder , Gregor Haberhauer , Heung-Shick Lee , Hyung-Joon Kim
发明人： Markus Pompejus , Burkhard Kroger , Hartwig Schroder , Oskar Zelder , Gregor Haberhauer , Heung-Shick Lee , Hyung-Joon Kim
IPC分类号： C12P21/06 , C07H21/04 , C12P13/04 , C12N9/10 , C12N15/74 , C12N1/21
CPC分类号： C12P13/04 , C07K14/34 , C07K2319/00 , C12N9/00 , C12N9/18 , C12P13/06 , C12P13/08 , C12P13/10 , C12P13/12 , C12P13/14 , C12P13/20 , C12P13/222 , C12P13/225 , C12P13/227 , C12P13/24
摘要： Isolated nucleic acid molecules, designated SRT nucleic acid molecules, which encode novel SRT proteins from Corynebacterium glutamicum are described. The invention also provides antisense nucleic acid molecules, recombinant expression vectors containing SRT nucleic acid molecules, and host cells into which the expression vectors have been introduced. The invention still further provides isolated SRT proteins, mutated SRT proteins, fusion proteins, antigenic peptides and methods for the improvement of production of a desired compound from C. glutamicum based on genetic engineering of SRT genes in this organism.
摘要翻译：描述了编码来自谷氨酸棒杆菌的新SRT蛋白的分离的核酸分子，称为SRT核酸分子。本发明还提供反义核酸分子，含有SRT核酸分子的重组表达载体，以及引入了表达载体的宿主细胞。本发明还进一步提供了基于该生物体中SRT基因的遗传工程的分离的SRT蛋白，突变的SRT蛋白，融合蛋白，抗原肽以及用于从谷氨酸棒状病毒从谷氨酸棒球菌生产所需化合物的方法。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式