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1. 发明申请

WO2006042231A2 METHOD AND SYSTEM FOR HIGH-SPEED PRECISE LASER TRIMMING, SCAN LENS SYSTEM FOR USE THEREIN AND ELECTRICAL DEVICE PRODUCED THEREBY 审中-公开
标题翻译：高速精密激光切割方法与系统及其使用的扫描镜头系统及其制造的电气设备
公开(公告)号：WO2006042231A2
公开(公告)日：2006-04-20
申请号：PCT/US2005036421
申请日：2005-10-07
申请人： GSI LUMONICS CORP , GU BO , LENTO JOSEPH V , EHRMANN JONATHAN S , COUCH BRUCE L , CHU YUN FEE , JOHNSON SHEPARD D
发明人： GU BO , LENTO JOSEPH V , EHRMANN JONATHAN S , COUCH BRUCE L , CHU YUN FEE , JOHNSON SHEPARD D
IPC分类号： G06K7/10
CPC分类号： H01C17/242 , B23K26/0622 , B23K26/082
摘要： A method, system and scan lens system are provided for high-speed, laser-based, precise laser trimming at least one electrical element. The method includes generating a pulsed laser output having one or more laser pulses at a repetition rate. Each laser pulse has a pulse energy, a laser wavelength within a range of laser wavelengths, and a pulse duration. The method further includes selectively irradiating the at least one electrical element with the one or more laser pulses focused into at least one spot having a non-uniform intensity profile along a direction and a spot diameter as small as about 6 microns to about 15 microns so as to cause the one or more laser pulses to selectively remove material from the at least one element and laser trim the at least one element while avoiding substantial microcracking within the at least one element. The wavelength is short enough to produce desired short-wavelength benefits of small spot size, tight tolerance and high absorption, but not so short so as to cause microcracking.
摘要翻译：提供了一种方法，系统和扫描透镜系统，用于高速，基于激光的，精确的激光修剪至少一个电气元件。该方法包括以重复率产生具有一个或多个激光脉冲的脉冲激光输出。每个激光脉冲具有脉冲能量，在激光波长范围内的激光波长和脉冲持续时间。所述方法还包括选择性地照射所述至少一个电气元件，所述一个或多个激光脉冲聚焦在沿着方向具有不均匀强度分布的至少一个点和小至约6微米至约15微米的光点直径上以使所述一个或多个激光脉冲从所述至少一个元件选择性地去除材料，并激光修整所述至少一个元件，同时避免所述至少一个元件内的实质性微裂纹。波长足够短以产生小斑点尺寸，紧度公差和高吸收性能所需的短波长益处，但不会如此短，从而导致微裂纹。

2. 发明专利

AU2003218419A8 Method and system for high-speed, precise micromachining an array of devices 未知
公开(公告)号：AU2003218419A8
公开(公告)日：2003-10-13
申请号：AU2003218419
申请日：2003-03-27
申请人： GSI LUMONICS CORP
发明人： COUCH BRUCE L , LENTO JOSEPH V , EHRMANN JONATHAN S , CHU YUN FEE , JOHNSON SHEPARD D
IPC分类号： B23K26/00 , B23K26/38 , H01C17/22 , H01C17/242

3. 发明专利

AU2003218419A1 METHOD AND SYSTEM FOR HIGH-SPEED, PRECISE MICROMACHINING AN ARRAY OF DEVICES 未知
公开(公告)号：AU2003218419A1
公开(公告)日：2003-10-13
申请号：AU2003218419
申请日：2003-03-27
申请人： GSI LUMONICS CORP
发明人： COUCH BRUCE L , EHRMANN JONATHAN S , CHU YUN FEE , LENTO JOSEPH V , JOHNSON SHEPARD D
IPC分类号： B23K26/00 , B23K26/38 , H01C17/22 , H01C17/242

4. 发明公开

EP1487602A4 METHOD AND SYSTEM FOR HIGH-SPEED, PRECISE MICROMACHINING AN ARRAY OF DEVICES 审中-公开
标题翻译：方法和系统BAULELEMENTEN高速精密微细加工设备
公开(公告)号：EP1487602A4
公开(公告)日：2008-03-19
申请号：EP03714419
申请日：2003-03-27
申请人： GSI LUMONICS CORP
发明人： COUCH BRUCE L , EHRMANN JONATHAN S , CHU YUN FEE , LENTO JOSEPH V , JOHNSON SHEPARD D
IPC分类号： B23K26/00 , B23K26/38 , H01C17/22 , H01C17/242
CPC分类号： H01C17/242 , B23K26/351
摘要： A method and system for high-speed, precise micromachining an array of devices are disclosed wherein improved process throughput and accuracy, such as resistor trimming accuracy, are provided. The number of resistance measurements are limited by using non-measurement cuts, using non-sequential collinear cutting, using spot fan-out parallel cutting, and using a retrograde scanning technique for faster collinear cuts. Non-sequential cutting is also used to manage thermal effects and calibrated cuts are used for improved accuracy. Test voltage is controlled to avoid resistor damage.

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