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    • 3. 发明申请
    • OFFSET DETECTION AND COMPENSATION FOR MICROMACHINED INERTIAL SENSORS
    • 微机械惯性传感器的偏移检测和补偿
    • WO2011022256A2
    • 2011-02-24
    • PCT/US2010045037
    • 2010-08-10
    • ANALOG DEVICES INCCLARK WILLIAM AGEEN JOHN A
    • CLARK WILLIAM AGEEN JOHN A
    • G01C19/56
    • G01P15/097G01C19/5712
    • Error sources relating to the drive signal applied to the resonator of an inertial sensor, such as in-phase offset errors relating to the drive signal and/or electronic pass-through of the drive signal to accelerometer sense electronics, are detected by modulating the drive signal and sensing accelerometer signals that are induced by the modulated drive signal. Error sources related to aerodynamics of an inertial sensor resonator are detected by modulating the distance between the resonator and the underlying substrate and sensing accelerometer signals that are induced by such modulation. Compensating signals may be provided to substantially cancel errors caused by such error sources.
    • 通过调制驱动器来检测与施加到惯性传感器的谐振器的驱动信号有关的误差源,例如与驱动信号有关的同相偏移误差和/或驱动信号到加速度计感测电子器件的电子通过 信号和感测加速度计信号,这些信号是由调制的驱动信号引起的。 通过调制谐振器和下面的衬底之间的距离并感测由这种调制引起的加速度计信号来检测与惯性传感器谐振器的空气动力学有关的误差源。 可以提供补偿信号以基本上消除由这种误差源引起的误差。