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    • 8. 发明专利
    • Composition and device for gas sorption and their manufacturing method
    • 用于气体吸收的组合物和装置及其制造方法
    • JP2009101364A
    • 2009-05-14
    • JP2009030355
    • 2009-02-12
    • Saes Getters Spaサエス ゲッターズ ソチエタ ペル アツィオニ
    • CATTANEO LORENAGALLITOGNOTTA ALESSANDRO
    • B01J20/28B01D53/04B01D53/26B01D53/28B01J20/26C08J3/20C08K3/00C08L83/04G01N20060101G01N1/00H01L51/50H05B33/04H05B33/10
    • B01J20/28026B01J20/041B01J20/06B01J20/08B01J20/26B01J20/262B01J20/28004B01J20/3078
    • PROBLEM TO BE SOLVED: To provide a composition with a small thickness to be placed in a gas sorbing device, for sorption of both a residual gas in an evacuated chamber and impurities in an inert gas, which can be stored and transported without being kept under an inert atmosphere after production of a mixture. SOLUTION: The device is provided with a composition for gas sorption comprising a gas sorbing component A dispersed in a cross-linked porous matrix. The composition is produced by a process comprising: a step of mixing and dispersing at least one precursor into a matrix containing a polysiloxane resin, wherein the precursor can be converted into the gas sorbing component A through the following heat treatment, and the polysiloxane resin is resistant in a continuous treatment at a temperature up to 650°C when filled with an inorganic material; and a step of subjecting the thus obtained mixture to a heat treatment under vacuum or an atmosphere of a gas inert to the component A under a condition such that the precursor is converted into the gas sorbing component A and the cross-linked structure of the polysiloxane resin is retained. COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:为了提供放置在气体吸附装置中的小厚度的组合物,用于吸收真空室中的残余气体和惰性气体中的杂质,其可以在没有 在混合物生产后保持在惰性气氛下。 解决方案:该装置设置有用于气体吸附的组合物,其包含分散在交联多孔基质中的气体吸附组分A. 该组合物通过以下方法制备,所述方法包括:将至少一种前体混合并分散到含有聚硅氧烷树脂的基质中的步骤,其中通过以下热处理可将前体转化为气体吸附组分A,并且聚硅氧烷树脂为 在用无机材料填充时在高达650℃的温度下连续处理时耐受; 以及将这样得到的混合物在真空下或在对组分A无惰性气体的气氛下进行热处理的步骤,使得前体转化为气体吸附组分A和聚硅氧烷的交联结构 保留树脂。 版权所有(C)2009,JPO&INPIT