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1. 发明授权

US07142999B2 Method and device for correcting guiding errors in a coordinate measuring machine 有权
标题翻译：用于校正坐标测量机中导向误差的方法和装置
公开(公告)号：US07142999B2
公开(公告)日：2006-11-28
申请号：US10944955
申请日：2004-09-20
申请人： Günter Grupp , Andreas Fuchs , Walter Jenisch , Ralf Bernhardt , Harald Schmid , Ulrich Staaden
发明人： Günter Grupp , Andreas Fuchs , Walter Jenisch , Ralf Bernhardt , Harald Schmid , Ulrich Staaden
IPC分类号： G01F19/00 , G01C17/38
CPC分类号： G01B11/306 , G01B11/005 , G01B21/04 , G01B21/045
摘要： A method for correcting errors in a coordinate measuring machine having a measuring head which is adapted to move in at least two different spatial directions. Measuring scales and measuring lines are assigned to each spatial direction. The measuring lines of different spatial directions intersect, and correction values are determined along the measuring lines at predetermined values of the scales in order to correct for elastic and/or geometric errors of the scales and/or of the guiding mechanism for moving the measuring head. According to one aspect of the invention, the correction values determined along a measuring line of a first spatial direction are modified such that the modified correction value of this measuring line assumes a predetermined value at the point of intersection with a first measuring line of a second spatial direction.
摘要翻译：一种用于校正具有适于在至少两个不同空间方向上移动的测量头的坐标测量机中的误差的方法。测量刻度和测量线分配给每个空间方向。不同空间方向的测量线相交，校正值沿着测量线在刻度的预定值上确定，以便校正刻度和/或用于移动测量头的引导机构的弹性和/或几何误差。根据本发明的一个方面，沿着第一空间方向的测量线确定的校正值被修改，使得该测量线的修正校正值在与第二空间方向的第一测量线的交叉点处为预定值空间方向。

2. 发明申请

US20050102118A1 Method and device for correcting guiding errors in a coordinate measuring machine 有权
标题翻译：用于校正坐标测量机中导向误差的方法和装置
公开(公告)号：US20050102118A1
公开(公告)日：2005-05-12
申请号：US10944955
申请日：2004-09-20
申请人： Guenter Grupp , Andreas Fuchs , Walter Jenisch , Ralf Bernhardt , Harald Schmid , Ulrich Staaden
发明人： Guenter Grupp , Andreas Fuchs , Walter Jenisch , Ralf Bernhardt , Harald Schmid , Ulrich Staaden
IPC分类号： G01B21/00 , G01B11/00 , G01B11/30 , G01B21/04 , G01C19/00
CPC分类号： G01B11/306 , G01B11/005 , G01B21/04 , G01B21/045
摘要： A method for correcting errors in a coordinate measuring machine having a measuring head which is adapted to move in at least two different spatial directions. Measuring scales and measuring lines are assigned to each spatial direction. The measuring lines of different spatial directions intersect, and correction values are determined along the measuring lines at predetermined values of the scales in order to correct for elastic and/or geometric errors of the scales and/or of the guiding mechanism for moving the measuring head. According to one aspect of the invention, the correction values determined along a measuring line of a first spatial direction are modified such that the modified correction value of this measuring line assumes a predetermined value at the point of intersection with a first measuring line of a second spatial direction.
摘要翻译：一种用于校正具有适于在至少两个不同空间方向上移动的测量头的坐标测量机中的误差的方法。测量刻度和测量线分配给每个空间方向。不同空间方向的测量线相交，校正值沿着测量线在刻度的预定值上确定，以便校正刻度和/或用于移动测量头的引导机构的弹性和/或几何误差。根据本发明的一个方面，沿着第一空间方向的测量线确定的校正值被修改，使得该测量线的修正校正值在与第二空间方向的第一测量线的交叉点处为预定值空间方向。

3. 发明授权

US09235141B2 Inspection apparatus and method for measuring a property of a substrate 有权
标题翻译：用于测量基板的性质的检查装置和方法
公开(公告)号：US09235141B2
公开(公告)日：2016-01-12
申请号：US13186895
申请日：2011-07-20
申请人： Maurits Van Der Schaar , Arie Jeffrey Den Boef , Everhardus Cornelis Mos , Andreas Fuchs , Martyn John Coogans , Hendrik Jan Hidde Smilde
发明人： Maurits Van Der Schaar , Arie Jeffrey Den Boef , Everhardus Cornelis Mos , Andreas Fuchs , Martyn John Coogans , Hendrik Jan Hidde Smilde
IPC分类号： G03F7/20 , G01N21/95 , G01N21/956 , G03F9/00 , G01N21/47
CPC分类号： G03F7/70633 , G01B2210/56 , G01N21/4788 , G01N21/9501 , G01N21/95607 , G03F7/70616 , G03F9/70
摘要： An inspection apparatus measures a property of a substrate including a periodic structure. An illumination system provides a beam of radiation with an illumination profile including a plurality of illuminated portions. A radiation projector projects the beam of radiation onto the substrate. A detector detects radiation scattered from the periodic structure and separately detects first order diffracted radiation and at least one higher order of diffracted radiation of each of the illuminated portions. A processor determines the property of the substrate from the detected radiation. The plurality of illuminated portions are arranged such that first order diffracted radiation arising from one or more of the illuminated portions are not overlapped by zeroth order or first order diffracted radiation arising from any other of the illuminated portions. Furthermore, the plurality of illuminated portions are arranged such that first order diffracted radiation arising from the one or more of the illuminated portions are overlapped by at least one of the higher orders of diffracted radiation arising from any other of the illuminated portions.
摘要翻译：检查装置测量包括周期性结构的基板的性质。照明系统提供具有包括多个照明部分的照明轮廓的辐射束。辐射投影仪将辐射束投影到基板上。检测器检测从周期性结构散射的辐射，并分别检测每个照明部分的一级衍射辐射和衍射辐射的至少一个高阶。处理器根据检测到的辐射来确定衬底的性质。多个照明部分被布置成使得从一个或多个被照射部分产生的一级衍射辐射不会被任何其他照明部分产生的零级或一级衍射辐射重叠。此外，多个照明部分被布置成使得由一个或多个被照射部分产生的一阶衍射辐射与从任何其他照明部分产生的衍射辐射的较高阶数中的至少一个重叠。

4. 发明授权

US08786825B2 Apparatus and method of measuring a property of a substrate 有权
标题翻译：测量基材性质的装置和方法
公开(公告)号：US08786825B2
公开(公告)日：2014-07-22
申请号：US12936327
申请日：2009-04-20
申请人： Marcus Adrianus Van De Kerkhof , Maurits Van Der Schaar , Andreas Fuchs , Martyn John Coogans
发明人： Marcus Adrianus Van De Kerkhof , Maurits Van Der Schaar , Andreas Fuchs , Martyn John Coogans
IPC分类号： G03B27/54 , G03B27/42
CPC分类号： G03F7/7065 , G01N21/47 , G01N21/4788 , G01N21/9501 , G01N21/956 , G03F7/70633 , G03F9/7049 , G03F9/7088
摘要： The present invention makes the use of measurement of a diffraction spectrum in or near an image plane in order to determine a property of an exposed substrate. In particular, the positive and negative first diffraction orders are separated or diverged, detected and their intensity measured to determine overlay (or other properties) of exposed layers on the substrate.
摘要翻译：本发明使用在图像平面内或附近测量衍射光谱，以便确定曝光的基底的性质。特别地，正和负的第一衍射级被分离或发散，被检测并且测量它们的强度以确定衬底上的暴露层的覆盖层（或其它性质）。

5. 发明授权

US08724087B2 Inspection apparatus for lithography 有权
标题翻译：光刻检验装置
公开(公告)号：US08724087B2
公开(公告)日：2014-05-13
申请号：US12933481
申请日：2009-04-08
申请人： Marcus Adrianus Van De Kerkhof , Antoine Gaston Marie Kiers , Maurits Van Der Schaar , Leonardus Henricus Marie Verstappen , Scott Anderson Middlebrooks , Andreas Fuchs
发明人： Marcus Adrianus Van De Kerkhof , Antoine Gaston Marie Kiers , Maurits Van Der Schaar , Leonardus Henricus Marie Verstappen , Scott Anderson Middlebrooks , Andreas Fuchs
IPC分类号： G03B27/54
CPC分类号： G03F7/70616 , G01N21/47 , G01N21/9501
摘要： A scatterometer configured to measure a property of a substrate, includes a radiation source configured to provide a radiation beam; and a detector configured to detect a spectrum of the radiation beam reflected from a target (30) on the surface of the substrate (W) and to produce a measurement signal representative of the spectrum. The apparatus includes a beam shaper (51, 53) interposed in the radiation path between the radiation source and the detector, the beam shaper being configured to adjust the cross section of the beam dependent on the shape and/or size of the target.
摘要翻译：配置成测量衬底性质的散射仪包括被配置为提供辐射束的辐射源; 以及检测器，其被配置为检测从所述基板（W）的表面上的目标（30）反射的所述辐射束的光谱，并产生表示所述光谱的测量信号。该装置包括插入在辐射源和检测器之间的辐射路径中的光束整形器（51,53），光束整形器被配置为根据目标的形状和/或尺寸来调节光束的横截面。

6. 发明授权

US08111196B2 Stacked patch antennas 有权
标题翻译：堆叠贴片天线
公开(公告)号：US08111196B2
公开(公告)日：2012-02-07
申请号：US12425502
申请日：2009-04-17
申请人： Cheikh Thiam , Andreas Fuchs , Ayman Duzdar , Chun Kit Lai
发明人： Cheikh Thiam , Andreas Fuchs , Ayman Duzdar , Chun Kit Lai
IPC分类号： H01Q1/38
CPC分类号： H04B1/3805 , H01Q5/40 , H01Q9/0414 , H01Q21/28 , H01Q21/30
摘要： According to various exemplary embodiments, an antenna assembly generally includes one or more antennas, such as a single multi-frequency antenna, first and second stacked patch antennas, etc. The antenna assembly may be operable for receiving signals having different frequencies (e.g., a frequency associated with a satellite digital audio radio service (SDARS), a frequency associated with a global positioning system (GPS), etc.). The antenna assembly may generally include at least one antenna (e.g., a single multi-frequency antenna, first and second stacked patch antennas, etc.) having at least one feed point and tuned to at least one of a first frequency and a second frequency that is different than the first frequency. A low noise amplifier may be in communication with the at least one feed point for amplifying signals having the first frequency and signals having the second received from a signal output. A single communication link may be used for communicating an output signal of the antenna assembly.
摘要翻译：根据各种示例性实施例，天线组件通常包括一个或多个天线，诸如单个多频天线，第一和第二堆叠贴片天线等。天线组件可用于接收具有不同频率的信号（例如，与卫星数字音频无线电业务（SDARS）相关联的频率，与全球定位系统（GPS）相关联的频率等）。天线组件通常可以包括至少一个具有至少一个馈电点并被调谐到第一频率和第二频率中的至少一个的天线（例如，单个多频天线，第一和第二堆叠贴片天线等）这与第一个频率不同。低噪声放大器可以与至少一个馈电点通信，用于放大具有第一频率的信号和具有从信号输出接收的第二频率的信号。单个通信链路可以用于传送天线组件的输出信号。

7. 发明申请

US20110102753A1 Apparatus and Method of Measuring a Property of a Substrate 有权
标题翻译：测量基板特性的装置和方法
公开(公告)号：US20110102753A1
公开(公告)日：2011-05-05
申请号：US12936327
申请日：2009-04-20
申请人： Marcus Adrianus Van De Kerkhof , Maurits Van Der Schaar , Andreas Fuchs , Martyn John Coogans
发明人： Marcus Adrianus Van De Kerkhof , Maurits Van Der Schaar , Andreas Fuchs , Martyn John Coogans
IPC分类号： G03B27/54 , G01J3/28 , G01N21/47 , G03F7/20 , G03B27/52
CPC分类号： G03F7/7065 , G01N21/47 , G01N21/4788 , G01N21/9501 , G01N21/956 , G03F7/70633 , G03F9/7049 , G03F9/7088
摘要： The present invention makes the use of measurement of a diffraction spectrum in or near an image plane in order to determine a property of an exposed substrate. In particular, the positive and negative first diffraction orders are separated or diverged, detected and their intensity measured to determine overlay (or other properties) of exposed layers on the substrate.
摘要翻译：本发明使用在图像平面内或附近测量衍射光谱，以便确定曝光的基底的性质。特别地，正和负的第一衍射级被分离或发散，被检测并且测量它们的强度以确定衬底上的暴露层的覆盖层（或其它性质）。

8. 发明申请

US20100002409A1 Energy storage module 有权
标题翻译：储能模块
公开(公告)号：US20100002409A1
公开(公告)日：2010-01-07
申请号：US12311318
申请日：2007-09-27
申请人： Hans Heinrich Ebeling , Walter Ehrhardt , Andreas Fuchs , Markus Matthias Gaudenz , Alexander Hahn , Armin Kessler , Jochen Neutz , Karsten Rechenberg , Manfred Waidhas
发明人： Hans Heinrich Ebeling , Walter Ehrhardt , Andreas Fuchs , Markus Matthias Gaudenz , Alexander Hahn , Armin Kessler , Jochen Neutz , Karsten Rechenberg , Manfred Waidhas
IPC分类号： H05K7/00
CPC分类号： H01G9/00 , H01G9/155 , Y02E60/13
摘要： Energy storage modules generally include a housing with component parts arranged therein. The component parts are in this case either capacitors, for example double-layer capacitors and/or electrolyte capacitors. According to the invention, a filler is provided in the housing and binds electrolyte liquid occurring in the even of damage or else electrolyte gases. Beds of material with a large specific surface area, such as zeolites or else active carbons, are suitable as fillers. The surfaces are also possibly catalytically coated.
摘要翻译：储能模块通常包括其中布置有组件的壳体。在这种情况下，组成部件是电容器，例如双层电容器和/或电解电容器。根据本发明，在壳体中设置填充物并且结合即使损坏或电解质气体中发生的电解质液体。具有大比表面积的材料如沸石或活性炭的床适合作为填料。表面也可能是催化涂层的。

9. 发明申请

US20070296078A1 Semiconductor Module Having Low Thermal Load 审中-公开
标题翻译：具有低热负载的半导体模块
公开(公告)号：US20070296078A1
公开(公告)日：2007-12-27
申请号：US11793919
申请日：2005-11-21
申请人： Mark-Matthias Bakran , Andreas Fuchs , Matthias Hofstetter , Hans-Joachim Knaak , Andreas Nagel , Norbert Seliger
发明人： Mark-Matthias Bakran , Andreas Fuchs , Matthias Hofstetter , Hans-Joachim Knaak , Andreas Nagel , Norbert Seliger
IPC分类号： H01L23/36 , H01L23/051
CPC分类号： H01L23/5389 , H01L23/5387 , H01L24/24 , H01L24/82 , H01L25/072 , H01L2224/2402 , H01L2224/24051 , H01L2224/24226 , H01L2224/82039 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01023 , H01L2924/01029 , H01L2924/01033 , H01L2924/01074 , H01L2924/01082 , H01L2924/014 , H01L2924/12041 , H01L2924/1301 , H01L2924/1305 , H01L2924/13055 , H01L2924/1306 , H01L2924/13091 , H01L2924/30107 , H01L2924/00
摘要： At least one bearing body in a power semiconductor module has a surface section on which a first semiconductor component and at least one additional semiconductor component are arranged adjacent to each other. The semiconductor components have contact surfaces, oriented away from the surface section of the bearing body, that are in a contact in a planar manner to provide a flat connection line between the contact surfaces of the semiconductor components. The flat connection line has a lower inductivity and a lower instance dependency of inductivity compared to a bonding wire. A distance between the semiconductor components along the surface section is greater than a lateral measurement of at least one of the semiconductor components and can be, selectively, relatively large, allowing for thermal and/or temperature expansion and a lower thermal load of the semiconductor module than previously obtained.
摘要翻译：功率半导体模块中的至少一个轴承体具有表面部分，第一半导体部件和至少一个附加半导体部件相邻配置在该表面部分上。半导体部件具有远离轴承体的表面部分的接触表面，其以平面方式接触以在半导体部件的接触表面之间提供平坦的连接线。与接合线相比，扁平连接线具有较低的电感和较低的电感的依赖性。沿着表面部分的半导体部件之间的距离大于半导体部件中的至少一个的横向测量，并且可以选择性地相对较大，允许半导体模块的热和/或温度膨胀和较低的热负载比以前获得的。

10. 发明申请

US20050249237A1 Method and arrangement for the remote-controlled testing of a specimen 失效
标题翻译：样品远程控制测试的方法和布置
公开(公告)号：US20050249237A1
公开(公告)日：2005-11-10
申请号：US10519367
申请日：2003-06-02
申请人： Andreas Fuchs , Harald-J. Zainzinger , Josef Zellinger
发明人： Andreas Fuchs , Harald-J. Zainzinger , Josef Zellinger
IPC分类号： H04L12/26 , H04L29/06 , H04J3/22 , H04J3/16 , H04L9/00
CPC分类号： H04L43/50 , H04L69/08
摘要： Disclosed are a method and an arrangement for the remote-controlled testing of a specimen, the data of the control unit and the specimen being supplied in a format that corresponds to a transmission protocol used for the unsecured transmission of data. According to the inventive method, said data is converted into a format that corresponds to a transmission protocol used for the secured transmission of data, is transmitted, and is converted back in to a format corresponding to the transmission protocol used for the unsecured transmission of data before being received.
摘要翻译：公开了用于对样本进行远程控制测试的方法和装置，控制单元和样本的数据以对应于用于不安全数据传输的传输协议的格式提供。根据本发明的方法，所述数据被转换为对应于用于数据的安全传输的传输协议的格式，被发送，并且被转换回到与用于数据的不安全传输的传输协议相对应的格式在收到之前。

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