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1. 发明申请

US20100246615A1 INTRACAVITY HARMONIC GENERATION USING A RECYCLED INTERMEDIATE HARMONIC 失效
标题翻译：使用回归中间谐波的谐波谐波生成
公开(公告)号：US20100246615A1
公开(公告)日：2010-09-30
申请号：US12413246
申请日：2009-03-27
申请人： Fuzheng Zhou , Jufen Hua , Haiwen Wang , Chung-Po Huang
发明人： Fuzheng Zhou , Jufen Hua , Haiwen Wang , Chung-Po Huang
IPC分类号： H01S3/10
CPC分类号： H01S3/109 , G02F2001/354 , H01S3/09415
摘要： Lasers configured for intracavity harmonic generation of second and higher order harmonic laser beam energy include mode-matching optics, such as a curved mirror, for recycling an unused portion of an intermediate harmonic laser beam energy (e.g., second harmonic laser beam energy) to improve higher order harmonic laser beam energy generation efficiency (e.g., third or higher order harmonic laser beam energy generation efficiency) without sacrificing beam quality of the higher order harmonic laser beam energy. The curved mirror may be positioned out of a resonant laser cavity of the laser. A radius of curvature and a position of the curved mirror are selected so that a beam radius and a beam divergence of the recycled second harmonic laser beam energy are essentially the same as a beam radius and a beam divergence of incoming second harmonic laser beam energy everywhere along a beam path of the incoming second harmonic laser beam.
摘要翻译：配置用于第二和更高次谐波激光束能量的腔内谐波产生的激光器包括模式匹配光学器件，例如用于再循环中等谐波激光束能量（例如，二次谐波激光束能量）的未使用部分的曲面镜，以改善更高阶谐波激光束能量产生效率（例如，第三或更高阶谐波激光束能量产生效率），而不牺牲高阶谐波激光束能量的光束质量。曲面镜可以位于激光器的谐振激光腔外。选择曲率半径和曲面镜的位置，使得再循环的二次谐波激光束能量的光束半径和光束发散基本上与入射的二次谐波激光束能量的光束半径和光束发散度相同沿着进入的二次谐波激光束的光束路径。

2. 发明授权

US07903701B2 Intracavity harmonic generation using a recycled intermediate harmonic 失效
标题翻译：使用回收中间谐波进行腔内谐波生成
公开(公告)号：US07903701B2
公开(公告)日：2011-03-08
申请号：US12413246
申请日：2009-03-27
申请人： Fuzheng Zhou , Jufen Hua, legal representative , Haiwen Wang , Chung-Po Huang
发明人： Fuzheng Zhou , Haiwen Wang , Chung-Po Huang
IPC分类号： H01S3/10
CPC分类号： H01S3/109 , G02F2001/354 , H01S3/09415
摘要： Lasers configured for intracavity harmonic generation of second and higher order harmonic laser beam energy include mode-matching optics, such as a curved mirror, for recycling an unused portion of an intermediate harmonic laser beam energy (e.g., second harmonic laser beam energy) to improve higher order harmonic laser beam energy generation efficiency (e.g., third or higher order harmonic laser beam energy generation efficiency) without sacrificing beam quality of the higher order harmonic laser beam energy. The curved mirror may be positioned out of a resonant laser cavity of the laser. A radius of curvature and a position of the curved mirror are selected so that a beam radius and a beam divergence of the recycled second harmonic laser beam energy are essentially the same as a beam radius and a beam divergence of incoming second harmonic laser beam energy everywhere along a beam path of the incoming second harmonic laser beam.
摘要翻译：配置用于第二和更高次谐波激光束能量的腔内谐波产生的激光器包括模式匹配光学器件，例如用于再循环中等谐波激光束能量（例如，二次谐波激光束能量）的未使用部分的曲面镜，以改善更高阶谐波激光束能量产生效率（例如，第三或更高阶谐波激光束能量产生效率），而不牺牲高阶谐波激光束能量的光束质量。曲面镜可以位于激光器的谐振激光腔外。选择曲率半径和曲面镜的位置，使得再循环的二次谐波激光束能量的光束半径和光束发散基本上与入射的二次谐波激光束能量的光束半径和光束发散度相同沿着进入的二次谐波激光束的光束路径。

3. 发明授权

US5859924A Method and system for measuring object features 失效
标题翻译：测量物体特征的方法和系统
公开(公告)号：US5859924A
公开(公告)日：1999-01-12
申请号：US680342
申请日：1996-07-12
申请人： Kuo-Ching Liu , Chu-Kwo Liang , Jong-Kae Fwu , Chung-Po Huang
发明人： Kuo-Ching Liu , Chu-Kwo Liang , Jong-Kae Fwu , Chung-Po Huang
IPC分类号： G01B11/00 , G01B11/03
CPC分类号： G01B11/002
摘要： A system is provided that simultaneously gathers three-dimensional and two-dimensional data for use in inspecting objects such as chip carriers for defects. Specifically, a source laser beam is directed to an object and forms a spot at the point of impingement at a known X-Y position on the object. The laser beam is reflected at the spot and light reflected off-axially with respect to the source laser beam is detected by two position sensing detectors (PSDs). Simultaneous to detecting off-axially reflected light, retro-reflected light (i.e., the light reflected approximately co-axial with the source laser) is detected by a photo diode array.
摘要翻译：提供了一种同时收集三维和二维数据以用于检查诸如用于缺陷的芯片载体的物体的系统。具体地，源激光束被引导到物体，并且在物体上的已知X-Y位置处的冲击点处形成点。激光束在点处被反射，并且通过两个位置感测检测器（PSD）检测相对于源激光束在轴外反射的光。同时检测离轴反射光，通过光电二极管阵列检测回射光（即，与源激光大致同轴反射的光）。

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