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    • 3. 发明申请
    • Ultra low thermal expansion transparent glass ceramics
    • 超低热膨胀透明玻璃陶瓷
    • US20050065011A1
    • 2005-03-24
    • US10773934
    • 2004-02-06
    • Naoyuki Goto
    • Naoyuki Goto
    • C03C10/12C03C10/14
    • C03C3/097
    • There are provided glass-ceramics having an ultra low thermal expansion property and super flat surface capable of coping with lithography for the next generation LSI and component parts for semiconductor equipment such as masks, optical reflecting mirrors, wafer stages and reticle stages and various precision parts using such glass-ceramics. Glass-ceramics of the invention have an average linear thermal expansion coefficient within a range of 0.0±0.2×10−7/° C. within a temperature range from 0° C. to 50° C., have difference between the maximum value and the minimum value of ΔL/L of 10×10−7 or below, and comprise SiO2, Al2O3 and P2O5 with the total amount thereof in mass % being within a range from 86.0% to 89.0%.
    • 提供具有超低热膨胀特性的玻璃陶瓷和能够应付下一代LSI的光刻的超平坦表面和用于诸如掩模,光反射镜,晶片台和标线片台等各种精密零件的半导体设备的部件 使用这种玻璃陶瓷。 在0℃至50℃的温度范围内,本发明的玻璃陶瓷的平均线性热膨胀系数在0.0±0.2×10 -7 /℃的范围内,在最大值 并且ΔL/ L的最小值为10×10 -7或更低,并且包含SiO 2,Al 2 O 3和P 2 O 5,其总量以质量%计在86.0%至89.0%的范围内。
    • 4. 发明授权
    • Glass-ceramics for a light filter
    • 玻璃陶瓷用于过滤器
    • US06677259B2
    • 2004-01-13
    • US10066821
    • 2002-02-04
    • Naoyuki GotoMariko KataokaDonald G. Polensky
    • Naoyuki GotoMariko KataokaDonald G. Polensky
    • C03C1004
    • C03C10/0027G02B5/20G02B5/226
    • Glass-ceramics for a light filter capable of preventing variation of refractive index in a band-pass filter have a coefficient of thermal expansion within a range from 95×10−7/°C. to 140×10−7/°C. within a temperature range from −20° C. to +70° C. and, preferably, Young's modulus of 85 GPa and bending strength of 10 kg/mm2, and light transmittance for plate thickness of 10 mm of 60% or over within a wavelength range from 950 nm to 1600 nm. Predominant crystal phases of these glass-ceramics should preferably be (a) lithium disilicate and (b) one selected from the group consisting of &agr;-quartz, &agr;-quartz solid solution, &agr;-cristobalite and &agr;-cristobalite solid solution.
    • 用于能够防止带通滤光器中的折射率变化的光过滤器的玻璃陶瓷的热膨胀系数在95×10 -7 /℃的范围内。 至140×10 -7 /℃。 在-20℃至+ 70℃的温度范围内,优选的杨氏模量为85GPa,弯曲强度为10kg / mm 2,板厚为10mm的透光率为60%, 在950nm至1600nm的波长范围内。 这些玻璃陶瓷的主要晶相应优选为(a)二硅酸锂和(b)选自α-石英,α-石英固溶体,α-方英石和α-方英石固溶体的一种。
    • 6. 发明授权
    • Glass-ceramics
    • 玻璃陶瓷
    • US06426311B1
    • 2002-07-30
    • US09663727
    • 2000-09-15
    • Naoyuki GotoMariko KataokaToshitaka Yagi
    • Naoyuki GotoMariko KataokaToshitaka Yagi
    • C03C1014
    • G11B5/7315C03C10/0027C03C10/0045G11B5/012G11B5/82G11B17/00G11B23/00
    • There are provided glass-ceramics containing, as a predominant crystal phase or phases, at least one selected from the group consisting of &agr;-cristobalite, &agr;-cristobalite solid solution, &agr;-quartz and &agr;-quartz solid solution, containing substantially no lithium disilicate (Li2O·2SiO2), lithium silicate (Li2O·SiO2), &bgr;-spodumene, &bgr;-eucryptite, &agr;-quartz, mica or fluorrichterite, containing substantially no Cr ingredient or Mn ingredient, and having average linear thermal expansion coefficient within a range from +65×10−7/° C. to +140×10−7/° C. within a temperature range from −50° C. to +70° C., said predominant crystal phase or phases having an average crystal grain diameter of less than 0.10 &mgr;m. The glass-ceramics are suitable for use as a substrate for an information storage medium and also for use as a substrate for a light filter.
    • 提供的玻璃陶瓷作为主要晶相或相,含有至少一种选自α-方英石,α-方英石固溶体,α-石英和α-石英固溶体中的至少一种,其基本上不含二硅酸锂 (Li 2 O 2·SiO 2),硅酸锂(Li 2 O 3·SiO 2),β-锂辉石,β-锂钇石,α-石英,云母或氟铁矿,其基本上不含Cr成分或Mn成分,平均线性热膨胀系数在 在-50℃至+ 70℃的温度范围内,+ 65×10 -7 /℃至+ 140×10 -7 /℃,所述主晶相或平均晶粒直径小于0.10 妈妈 玻璃陶瓷适合用作信息存储介质的基板,也可用作光过滤器的基板。
    • 8. 发明授权
    • Glass-ceramic substrate for a magnetic information storage medium
    • 用于磁信息存储介质的玻璃陶瓷基片
    • US06395368B1
    • 2002-05-28
    • US09366578
    • 1999-08-04
    • Katsuhiko YamaguchiNaoyuki Goto
    • Katsuhiko YamaguchiNaoyuki Goto
    • G11B582
    • C03C10/00C03C3/097C03C10/0009G11B5/7315Y10S428/90Y10T428/24355
    • A glass-ceramic substrate for a magnetic information storage medium having a super flat surface comprises, as a predominant phase or phases, at least one crystal phase selected from the group consisting of lithium disilicate (Li2O.2SiO2, having an interplaner spacing of maximum peak intensity measured by an X-ray diffraction analysis within a range from 3.57 Å and 3.62 Å), quartz (SiO2, having an interplaner spacing of maximum peak intensity measured by an X-ray diffraction analysis within a range from 3.33 Å to 3.41 Å), quartz solid solution (SiO2 solid solution, having an interplaner spacing of maximum peak intensity measured by an X-ray diffraction analysis within a range from 3.33 Å to 3.41 Å), cristobalite (SiO2, having an interplaner spacing of maximum peak intensity measured by an X-ray diffraction analysis within a range from 4.04 Å to 4.14 Å) and cristobalite solid solution (SiO2 solid solution, having an interplaner spacing of maximum peak intensity measured by an X-ray diffraction analysis within a range from 4.04 Å to 4.14 Å), has a coefficient of thermal expansion within a range from +62×10−−7/° C. to +130×10−7/° C. in a temperature range from −50° C. to +70° C., has Young's modulus within a range from 80 GPa to 150 GPa, has Vickers hardness within a range from 4.5 GPa to 15.0 GPa, has a specific gravity within a range from 2.2 to 2.8, has a surface roughness (Ra) after polishing within a range from 3 Å to 9 Å and contains Al2O3 in the amount of 2% to less than 10%.
    • 用于具有超平坦表面的磁信息存储介质的玻璃陶瓷基板包括作为主要相或相的至少一个晶相,所述晶相位选自二硅酸锂(Li 2 O 2·SiO 2,具有最大峰的中间间隔 通过X射线衍射分析测量的强度在3.57和3.62的范围内),石英(SiO 2,具有通过X射线衍射分析测量的最大峰强度的中间间距在3.33至3.41范围内) ,石英固溶体(SiO 2固溶体,具有通过X射线衍射分析在3.33至3.41范围内测量的最大峰强度的中间间隔),方英石(SiO 2,具有由最大峰强度的中间间隔的距离,由 在4.04埃至4.14埃的范围内的X射线衍射分析)和方英石固溶体(SiO 2固溶体,具有通过Xr测量的最大峰强度的中间间隔间隔 在4.04Å至4.14Å范围内的ay衍射分析)的热膨胀系数在+ 62×10-7-7℃至+ 130×10-7 /℃的范围内,在-50° C.至+ 70℃,杨氏模量在80GPa至150GPa的范围内,维氏硬度在4.5GPa至15.0GPa的范围内,比重在2.2至2.8的范围内,具有表面 抛光后的粗糙度(Ra)在3至9的范围内,并含有2%至小于10%的Al2O3。