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1. 发明授权

US07542197B2 Spatial light modulator featured with an anti-reflective structure 失效
标题翻译：具有抗反射结构的空间光调制器
公开(公告)号：US07542197B2
公开(公告)日：2009-06-02
申请号：US11827552
申请日：2007-07-11
申请人： Fusao Ishii , Yoshihiro Maeda , Hirotoshi Ichikawa , Kazuhiro Watanabe , Yoshiaki Horikawa
发明人： Fusao Ishii , Yoshihiro Maeda , Hirotoshi Ichikawa , Kazuhiro Watanabe , Yoshiaki Horikawa
IPC分类号： G02B26/00 , G02B26/08 , G02F1/29
CPC分类号： G02B1/118 , G02B26/0833 , G02F1/136277 , G02F2201/38 , G02F2203/12 , H04N9/3141
摘要： A spatial light modulator supported on a device substrate includes a plurality of light modulation elements to modulate a light emitted from a light source. The spatial light modulator and the device substrate further comprises a cyclic structure on a surface of the spatial light modulator and/or the device substrate for preventing a reflection of the incident light from the cyclic structure. In an exemplary embodiment the cyclic structure includes cyclic structural elements having a distance between two cyclic elements shorter than the wavelength of an incident light for preventing a reflection of the incident light from the cyclic structure.
摘要翻译：支撑在器件衬底上的空间光调制器包括多个光调制元件，以调制从光源发射的光。空间光调制器和器件衬底还包括在空间光调制器和/或器件衬底的表面上的循环结构，用于防止来自该循环结构的入射光的反射。在一个示例性实施例中，循环结构包括具有比入射光的波长短的两个循环元件之间的距离的循环结构元件，用于防止来自该循环结构的入射光的反射。

2. 发明申请

US20080013157A1 Spatial light modulator featured with an anti-reflective structure 失效
标题翻译：具有抗反射结构的空间光调制器
公开(公告)号：US20080013157A1
公开(公告)日：2008-01-17
申请号：US11827552
申请日：2007-07-11
申请人： Fusao Ishii , Yoshihiro Maeda , Hirotoshi Ichikawa , Kazuhiro Watanabe , Yoshiaki Horikawa
发明人： Fusao Ishii , Yoshihiro Maeda , Hirotoshi Ichikawa , Kazuhiro Watanabe , Yoshiaki Horikawa
IPC分类号： G02F1/29
CPC分类号： G02B1/118 , G02B26/0833 , G02F1/136277 , G02F2201/38 , G02F2203/12 , H04N9/3141
摘要： A spatial light modulator supported on a device substrate includes a plurality of light modulation elements to modulate a light emitted from a light source. The spatial light modulator and the device substrate further comprises a cyclic structure on a surface of the spatial light modulator and/or the device substrate for preventing a reflection of the incident light from the cyclic structure. In an exemplary embodiment the cyclic structure includes cyclic structural elements having a distance between two cyclic elements shorter than the wavelength of an incident light for preventing a reflection of the incident light from the cyclic structure,
摘要翻译：支撑在器件衬底上的空间光调制器包括多个光调制元件，以调制从光源发射的光。空间光调制器和器件衬底还包括在空间光调制器和/或器件衬底的表面上的循环结构，用于防止来自该循环结构的入射光的反射。在示例性实施例中，循环结构包括具有比入射光的波长短的两个循环元件之间的距离的循环结构元件，用于防止来自该循环结构的入射光的反射，

3. 发明申请

US20080123168A1 Mirror device modulating perpendicular incident light 审中-公开
标题翻译：镜像设备调制垂直入射光
公开(公告)号：US20080123168A1
公开(公告)日：2008-05-29
申请号：US11893682
申请日：2007-08-16
申请人： Yoshihiro Maeda , Fusao Ishii , Hirotoshi Ichikawa , Yoshiaki Horikawa
发明人： Yoshihiro Maeda , Fusao Ishii , Hirotoshi Ichikawa , Yoshiaki Horikawa
IPC分类号： G02B26/02
CPC分类号： G02B26/0833 , G02B27/283 , H04N9/3129
摘要： A display system includes a light source for projecting a linearly polarized illumination light. The display system further includes a deflectable mirror device having a plurality of mirror pixels. The display system further includes a polarized light separation plane that separates reflected light from the illumination light, a wave plate disposed near the deflectable mirror device, and a projection lens that projects the reflected light from the deflectable mirror device. In this system, the optical axes of the illumination light and an ON reflected light reflected from the deflectable mirror device are substantially perpendicular to the deflectable mirror device, and the optical axis of an OFF reflected light is inclined to the optical axis of the image display projection light path.
摘要翻译：显示系统包括用于投影线偏振照明光的光源。显示系统还包括具有多个镜像素的可偏转镜装置。显示系统还包括分离来自照明光的反射光的偏振光分离平面，设置在可偏转镜装置附近的波片和投影来自可偏转镜装置的反射光的投影透镜。在该系统中，照明光的光轴和从偏转镜装置反射的ON反射光基本上垂直于可偏转镜装置，OFF反射光的光轴相对于图像显示器的光轴倾斜投影光路。

4. 发明申请

US20090009851A1 Projection apparatus with coherent light source 有权
标题翻译：具有相干光源的投影设备
公开(公告)号：US20090009851A1
公开(公告)日：2009-01-08
申请号：US12231911
申请日：2008-09-05
申请人： Taro Endo , Yoshihiro Maeda , Hirotoshi Ichikawa , Yoshiaki Horikawa , Fusao Ishii
发明人： Taro Endo , Yoshihiro Maeda , Hirotoshi Ichikawa , Yoshiaki Horikawa , Fusao Ishii
IPC分类号： G02B26/02
CPC分类号： G02B26/0841
摘要： The present invention discloses a projection apparatus comprising: a light source for emitting illumination light; a mirror device comprising a plurality of mirrors for generating an image by reflecting the illumination light toward a projecting direction by means of a deflecting operation; and a projection optical system which is placed in the optical axis of reflection light in the projecting direction of the illumination light incident to the mirror device and which projects the reflection light, wherein the optical axis of the illumination light incident to the mirror device and the optical axis of the reflection light in the projecting direction forms an angle that is larger than the expansion angle α of the flux of the illumination light that satisfies NA=n*sin α, where NA is the numerical aperture of the flux of the illumination light, and n is the reflectance.
摘要翻译：本发明公开了一种投影装置，包括：用于发射照明光的光源; 反射镜装置，包括多个反射镜，用于通过偏转操作将照明光朝向突出方向反射来产生图像; 以及投影光学系统，其被配置在入射到反射镜装置的照明光的突出方向上的反射光的光轴上，并且突出反射光，其中入射到反射镜装置的照明光的光轴和反射光在投影方向上的光轴形成大于照射光的通量的扩展角α的角度，其满足NA = n *sinαα，其中NA是照明光束的通量的数值孔径，n为反射率。

5. 发明授权

US08238019B2 Projection apparatus with coherent light source 有权
标题翻译：具有相干光源的投影设备
公开(公告)号：US08238019B2
公开(公告)日：2012-08-07
申请号：US12231911
申请日：2008-09-05
申请人： Taro Endo , Yoshihiro Maeda , Hirotoshi Ichikawa , Yoshiaki Horikawa , Fusao Ishii
发明人： Taro Endo , Yoshihiro Maeda , Hirotoshi Ichikawa , Yoshiaki Horikawa , Fusao Ishii
IPC分类号： G02B26/00 , G02B26/08 , G02F1/29
CPC分类号： G02B26/0841
摘要： The present invention discloses a projection apparatus comprising: a light source for emitting illumination light; a mirror device comprising a plurality of mirrors for generating an image by reflecting the illumination light toward a projecting direction by means of a deflecting operation; and a projection optical system which is placed in the optical axis of reflection light in the projecting direction of the illumination light incident to the mirror device and which projects the reflection light, wherein the optical axis of the illumination light incident to the mirror device and the optical axis of the reflection light in the projecting direction forms an angle that is larger than the expansion angle α of the flux of the illumination light that satisfies NA=n*sin α, where NA is the numerical aperture of the flux of the illumination light, and n is the reflectance.
摘要翻译：本发明公开了一种投影装置，包括：用于发射照明光的光源; 反射镜装置，包括多个反射镜，用于通过偏转操作将照明光朝向突出方向反射来产生图像; 以及投影光学系统，其被配置在入射到反射镜装置的照明光的突出方向上的反射光的光轴上，并且突出反射光，其中入射到反射镜装置的照明光的光轴和反射光的投影方向的光轴形成大于照射光的通量的扩展角α的角度，该角度满足NA = n *sinα，其中，NA是照明光的通量的数值孔径，n为反射率。

6. 发明授权

US08858811B2 Method for manufacturing a mirror device by means of a plurality of sacrificial layers 有权
标题翻译：通过多个牺牲层制造反射镜装置的方法
公开(公告)号：US08858811B2
公开(公告)日：2014-10-14
申请号：US12381587
申请日：2009-03-12
申请人： Yoshihiro Maeda , Fusao Ishii , Kazuhiro Watanabe , Hirotoshi Ichikawa
发明人： Yoshihiro Maeda , Fusao Ishii , Kazuhiro Watanabe , Hirotoshi Ichikawa
IPC分类号： B29D11/00 , G02B26/08
CPC分类号： G02B26/0833
摘要： A method for manufacturing a device comprising an elastic member on a substrate includes steps of: forming a sacrificial layer by forming a plurality of sacrificial sub-layers on the substrate; forming a plate member in or on the sacrificial layers connected to the substrate and substantially parallel to a top surface of the substrate; and removing the sacrificial sub-layers after forming the plate member by removing the sacrificial sub-layers in an order different from the reverse order of forming the sacrificial sub-layers.
摘要翻译：一种在衬底上制造包括弹性构件的装置的方法，包括以下步骤：通过在衬底上形成多个牺牲子层来形成牺牲层; 在连接到所述基板并且基本上平行于所述基板的顶表面的所述牺牲层中或其上形成板构件; 并且通过以不同于形成牺牲子层的相反顺序的顺序去除牺牲子层，在形成板构件之后去除牺牲子层。

7. 发明授权

US07944600B2 Mirror device with an anti-stiction layer 有权
公开(公告)号：US07944600B2
公开(公告)日：2011-05-17
申请号：US12151218
申请日：2008-05-02
申请人： Yoshihiro Maeda , Fusao Ishii , Kazuhiro Watanabe , Hirotoshi Ichikawa
发明人： Yoshihiro Maeda , Fusao Ishii , Kazuhiro Watanabe , Hirotoshi Ichikawa
IPC分类号： G02B26/00
CPC分类号： G03B21/28 , G02B26/0841 , Y10T29/49002
摘要： A micromirror device includes an elastic hinge for supporting a mirror on a substrate, and an address electrode for deflecting the mirror. The device further includes a protective layer and an oriented monolayer laid to cover a stopper also functioning as an address electrode provided below the mirror and between the mirror and the substrate.

8. 发明授权

US07880952B2 Mirror device with an anti-stiction layer 有权
标题翻译：具有防静电层的镜面装置
公开(公告)号：US07880952B2
公开(公告)日：2011-02-01
申请号：US12151186
申请日：2008-05-02
申请人： Yoshihiro Maeda , Fusao Ishii , Kazuhiro Watanabe , Hirotoshi Ichikawa
发明人： Yoshihiro Maeda , Fusao Ishii , Kazuhiro Watanabe , Hirotoshi Ichikawa
IPC分类号： G02B26/00
CPC分类号： G03B21/28 , G02B26/0841 , Y10T29/49002
摘要： A micromirror device includes an elastic hinge for supporting a mirror on a substrate, and an address electrode for deflecting the mirror. The device further includes a protective layer and an oriented monolayer laid to cover a stopper also functioning as an address electrode provided below the mirror and between the mirror and the substrate.
摘要翻译：微反射镜装置包括用于支撑基板上的反射镜的弹性铰链和用于偏转反射镜的寻址电极。该装置还包括保护层和定向单层，其被覆覆盖也用作位于反射镜下方以及反射镜和基板之间的寻址电极的塞子。

9. 发明授权

US08134772B2 Mirror device with an anti-stiction layer 有权
标题翻译：具有防静电层的镜面装置
公开(公告)号：US08134772B2
公开(公告)日：2012-03-13
申请号：US12151219
申请日：2008-05-02
申请人： Yoshihiro Maeda , Fusao Ishii , Kazuhiro Watanabe , Hirotoshi Ichikawa
发明人： Yoshihiro Maeda , Fusao Ishii , Kazuhiro Watanabe , Hirotoshi Ichikawa
IPC分类号： G02B26/00
CPC分类号： G03B21/28 , G02B26/0841 , Y10T29/49002
摘要： A micromirror device includes an elastic hinge for supporting a mirror on a substrate, and an address electrode for deflecting the mirror. The device further includes a protective layer and an oriented monolayer laid to cover a stopper also functioning as an address electrode provided below the mirror and between the mirror and the substrate.
摘要翻译：微反射镜装置包括用于支撑基板上的反射镜的弹性铰链和用于偏转反射镜的寻址电极。该装置还包括保护层和定向单层，其被覆覆盖也用作位于反射镜下方以及反射镜和基板之间的寻址电极的塞子。

10. 发明申请

US20090231667A1 Mirror device with an anti-stiction layer 有权
标题翻译：具有防静电层的镜面装置
公开(公告)号：US20090231667A1
公开(公告)日：2009-09-17
申请号：US12151186
申请日：2008-05-02
申请人： Yoshihiro Maeda , Fusao Ishii , Kazuhiro Watanabe , Hirotoshi Ichikawa
发明人： Yoshihiro Maeda , Fusao Ishii , Kazuhiro Watanabe , Hirotoshi Ichikawa
IPC分类号： G02B26/00 , B05D5/06
CPC分类号： G03B21/28 , G02B26/0841 , Y10T29/49002
摘要： A micromirror device includes an elastic hinge for supporting a mirror on a substrate, and an address electrode for deflecting the mirror. The device further includes a protective layer and an oriented monolayer laid to cover a stopper also functioning as an address electrode provided below the mirror and between the mirror and the substrate.
摘要翻译：微反射镜装置包括用于支撑基板上的反射镜的弹性铰链和用于偏转反射镜的寻址电极。该装置还包括保护层和定向单层，其被覆覆盖也用作位于反射镜下方以及反射镜和基板之间的寻址电极的塞子。

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