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1. 发明授权

US4638154A Reflection-type photoelectric switching apparatus with light-adjustable reference light detection 失效
标题翻译：具有光可调参考光检测的反射式光电开关装置
公开(公告)号：US4638154A
公开(公告)日：1987-01-20
申请号：US563642
申请日：1983-12-20
申请人： Fumiaki Itsuki , Seiji Oku
发明人： Fumiaki Itsuki , Seiji Oku
IPC分类号： H01H35/00 , G01S17/02 , G01S17/06 , H01J5/16
CPC分类号： G01S17/06 , G01S17/026
摘要： A reflection-type photoelectric switching apparatus comprising a lamp for projecting light rays to an object, a photoelectric element for receiving reflected light rays from the object, a reference photoelectric element mounted on a board in side-by-side relation with the photoelectric element, a light conducting means for guiding a part of said light rays from the lamp to the reference photoelectric element, and an adjusting means for adjusting the quantity of light rays guided by the light conducting means to be balanced with that of the reflected light rays received by the photoelectric element.
摘要翻译：一种反射型光电开关装置，包括用于将光线投射到物体的灯，用于接收来自物体的反射光线的光电元件，与光电元件并排地安装在基板上的参考光电元件，用于将来自灯的所述光线的一部分引导到参考光电元件的导光装置，以及调节装置，用于调节由导光装置引导的光线的量与由光电元件。

2. 发明授权

US06465765B2 Fluid heating apparatus 有权
标题翻译：流体加热装置
公开(公告)号：US06465765B2
公开(公告)日：2002-10-15
申请号：US09782848
申请日：2001-02-14
申请人： Masakazu Katayama , Seiji Oku , Tomonori Kojimaru , Yusuke Muraoka
发明人： Masakazu Katayama , Seiji Oku , Tomonori Kojimaru , Yusuke Muraoka
IPC分类号： H05B606
CPC分类号： H05B6/108
摘要： A fluid heating apparatus is provided which comprises a heat-generating bent tube formed of an electrically conductive material in a tubular configuration and having opposite ends connected in communication to piping through which fluid to be heated is passed, a coil provided outside the heat-generating bent tube and wound to surround the heat-generating bent tube, and a power supply unit for feeding a high-frequency current through the coil. The fluid heating apparatus suppresses the generation of particles in the path of the fluid and may be used to heat gas or liquid in an apparatus for processing semiconductor substrates and flat panel substrates.
摘要翻译：提供了一种流体加热装置，其包括由管状构造的导电材料形成的发热弯曲管，并且具有连接到与待加热流体通过的管道连通的相对端，设置在发热的外部的线圈弯曲的管并缠绕以围绕发热弯管，以及用于将高频电流馈送通过线圈的电源单元。流体加热装置抑制在流体路径中产生颗粒，并且可以用于加热半导体基板和平板基板的处理装置中的气体或液体。

3. 发明授权

US4875042A Multi channel temperature controller utilizing electronic multiplexer 失效
标题翻译：利用电子多路复用器的多通道温度控制器
公开(公告)号：US4875042A
公开(公告)日：1989-10-17
申请号：US2328
申请日：1987-01-12
申请人： Seiji Oku , Tooru Shimamura , Kazutomo Naganawa , Toshiya Tanamura
发明人： Seiji Oku , Tooru Shimamura , Kazutomo Naganawa , Toshiya Tanamura
IPC分类号： G01K1/02
CPC分类号： G01K1/026
摘要： This multi channel temperature controller includes several temperature sensors, an electronic multiplexer which receives output signals from these temperature sensors and which sequentially supplies these signals to its output according to the switching action of a selection signal, and an amplifier which receives the output of the electronic multiplexer. Thereby, noise such as due to thermal electro motive force generated in the contacts of prior art sets of reed relays for switching over such temperature sensor output signals can be eliminated. Further, optionally, there may be provided several input circuits, one interposed between each of these temperature sensors and the electronic multiplexer, and each including a capacitor which has electrostatic capacitance substantially greater than the electrostatic capacitance existing between its input circuit and the corresponding temperature sensor. Thereby, common mode voltage noises are eliminated or minimized.
摘要翻译：该多通道温度控制器包括多个温度传感器，电子多路复用器，其接收来自这些温度传感器的输出信号，并且根据选择信号的切换动作将这些信号依次提供给其输出;以及放大器，其接收电子复用器。因此，可以消除由于在现有技术的用于切换这种温度传感器输出信号的簧片继电器组的触点中产生的热电动力引起的噪声。此外，可选地，可以提供多个输入电路，一个插入在这些温度传感器和电子多路复用器中的每一个之间，并且每个输入电路包括电容器，该电容器的静电电容基本上大于其输入电路和相应的温度传感器之间存在的静电电容。从而消除或最小化共模电压噪声。

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