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1. 发明专利

JP2007255933A Sample holder, element analyzer, electron microscope and element analyzing method 有权
标题翻译：样品座，元件分析仪，电子显微镜和元件分析方法
公开(公告)号：JP2007255933A
公开(公告)日：2007-10-04
申请号：JP2006077482
申请日：2006-03-20
申请人： Fujitsu Ltd , 富士通株式会社
发明人： GOTO YASUYUKI
IPC分类号： G01N23/04 , H01J37/20
摘要： PROBLEM TO BE SOLVED: To provide an element analyzer which dispenses with the movement of a sample during analysis when the three-dimensional element constitution of the sample is analyzed in an atomic level with high precision and also dispenses the attaching/detaching work of the sample, and the sample holder or the like usable in the element analyzer.
SOLUTION: The sample holder 10 for an electron microscope loaded with a measuring target has a housing 16 having openings 28 and 28' permitting the electron beam applied to the measuring target and the detection means provided in the housing 16 to measure the position and flight time of the element dissociated from the measuring target.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种元素分析仪，其在分析时排除样品的移动，当以高精度分析样品的三维元素构成并分配附着/分离工作的样品，以及可用于元件分析仪中的样品保持器等。解决方案：用于装有测量对象的电子显微镜的样品架10具有壳体16，壳体16具有允许施加到测量对象的电子束的开口28和28'，以及设置在壳体16中的检测装置，以测量位置和从测量目标分离的元素的飞行时间。版权所有（C）2008，JPO＆INPIT

2. 发明专利

JP2006258772A Observation device of nanolevel structural composition and observation method of nanolevel structural composition 有权
标题翻译：纳米结构组合物的观测装置和纳米结构组合物观测方法
公开(公告)号：JP2006258772A
公开(公告)日：2006-09-28
申请号：JP2005080644
申请日：2005-03-18
申请人： Fujitsu Ltd , 富士通株式会社
发明人： GOTO YASUYUKI , FUKUDA MASAHIRO
IPC分类号： G01N27/62 , B82B3/00
摘要： PROBLEM TO BE SOLVED: To facilitate the alignment of a sample probe while preventing contamination or oxidation in the atmosphere in an observation device of a nanolevel structural composition and an observation method of the nanolevel structural composition.
SOLUTION: A sample processing means 3 is provided in opposed relation to the sample probe part 2 of the observation device of the nanolevel structural composition.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了便于样本探针的对准，同时防止纳米结构组成的观察装置中的气氛中的污染或氧化以及纳米级结构组成的观察方法。解决方案：样品处理装置3与纳米级结构组合物的观察装置的样品探针部分2相对。版权所有（C）2006，JPO＆NCIPI

3. 发明专利

JP2006078470A Method and system for three-dimensional fine area elemental analysis 有权
标题翻译：三维微区元素分析方法与系统
公开(公告)号：JP2006078470A
公开(公告)日：2006-03-23
申请号：JP2005225006
申请日：2005-08-03
申请人： Fujitsu Ltd , 富士通株式会社
发明人： ANAZAWA TOSHIHISA , GOTO YASUYUKI
IPC分类号： G01N27/62 , H01J49/10 , H01J49/14 , H01J49/16 , H01J49/40
摘要： PROBLEM TO BE SOLVED: To provide a method and a system for three-dimensional fine area elemental analysis which perform the elemental analysis in a condition controlled by layer, without applying high-voltage pulses required to cause electrical field evaporation on the sample, nor being affected by the difference in the electrical field evaporation of the component element. SOLUTION: In the method, after a gas species 3, which is saturation adsorbed to an analysis sample 1 and allows etching to be proceeded through irradiation of an energy beam 5, is supplied to the analysis sample 1, the energy beam 5 is irradiated to desorb only the gas species 3 adsorbed portion of the analysis sample 1; and then mass spectrometry of particles 6 derived from the desorbed analytical sample 1 is performed to conduct elemental analysis of the surface on the analysis sample 1. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种用于在由层控制的条件下进行元素分析的三维微小区域元素分析的方法和系统，而不需要对样品进行电场蒸发所需的高电压脉冲，也不受元件元件的电场蒸发差异的影响。解决方案：在该方法中，在分析样品1吸附饱和的气体种类3，通过照射能量束5进行蚀刻的气体种类3被提供给分析样品1之后，能量束5 被照射以仅解吸分析样品1的气体3吸附部分; 然后进行衍生自解吸附的分析样品1的颗粒6的质谱，以对分析样品1上的表面进行元素分析。（C）2006，JPO和NCIPI

4. 发明专利

JP2006051555A Nanometer-level structure composition observing method, manufacturing method of multi-layer film structure having interposed insulating layer, and nanometer-level structure composition observing device 有权
标题翻译：纳米级结构组合物观察方法，具有嵌入绝缘层的多层膜结构的制造方法以及纳米级结构组合物观察装置
公开(公告)号：JP2006051555A
公开(公告)日：2006-02-23
申请号：JP2004233186
申请日：2004-08-10
申请人： Fujitsu Ltd , 富士通株式会社
发明人： GOTO YASUYUKI , FUKUDA MASAHIRO
IPC分类号： B82B3/00 , G01N1/28 , G01N1/32 , H01J37/285 , H01L29/78 , H01L43/12
摘要： PROBLEM TO BE SOLVED: To provide a nanometer-level structure composition observing method, a manufacturing method of a multi-layer film structure having an interposed insulating layer, and a nanometer-level structure composition observing device, analyzing the microstructure composition in a wide range of a sample having the multi-layer thin film structure having an interposed insulating layer with high accuracy.
SOLUTION: A plurality of projected structures 2 formed of the multi-layer film structure having the interposed insulating layer 3 are provided, and only in the projected structure 2 as an observation object, the upper and lower conductive parts 4, 5 are sequentially electrically short-circuited to perform observation.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了提供纳米级结构组成观察方法，具有中间绝缘层的多层膜结构的制造方法和纳米级结构组成观察装置，分析微结构组成宽范围的具有多层薄膜结构的样品具有高精度的插入绝缘层。解决方案：设置由具有中间绝缘层3的多层膜结构形成的多个投影结构2，并且仅在作为观察对象的投影结构2中，上下导电部4,5 依次电短路进行观察。版权所有（C）2006，JPO＆NCIPI

5. 发明专利

JP2012023041A Mesh and element analysis method 有权
标题翻译： MESH和元素分析方法
公开(公告)号：JP2012023041A
公开(公告)日：2012-02-02
申请号：JP2011167820
申请日：2011-07-29
申请人： Fujitsu Ltd , 富士通株式会社
发明人： GOTO YASUYUKI
IPC分类号： H01J37/20 , G01N1/28 , G01N23/04 , H01J37/285
摘要： PROBLEM TO BE SOLVED: To provide a mesh for holding a sample which hardly damages the distal end of the sample and is highly suitable for general purposes (unnecessary to make special the shape of a recess (concave) for a sample holder to be mounted with a mesh) and an element analysis method.SOLUTION: A mesh for holding sample 14 has a ring plate shape for use in a transmission electron microscope. The mesh comprises a first and a second mesh formed by dividing the ring plate by a groove 22 provided on the upper surface of the ring plate into a first and a second semi-ring plate shape. The second mesh can be bent from the groove in a direction toward the lower surface of the ring-shaped plate and folded under the lower surface of the first mesh in the state where a sample is mounted on the first mesh of the ring plate shape including the first and the second mesh.
摘要翻译：要解决的问题：提供一种用于保持几乎不损伤样品的远端的样品的网，并且非常适合于一般目的（不需要使样品保持器的凹部（凹入）的形状特别地用网格安装）和元素分析方法。解决方案：用于保持样品14的网格具有用于透射电子显微镜中的环板形状。网格包括通过将设置在环形板的上表面上的凹槽22分隔成第一和第二半环形板而形成的第一和第二网格。第二网状物可以在朝向环状板的下表面的方向上从槽弯曲，并且在样品安装在包括第一网状物的第一网状物的状态下在第一网眼的下表面下折叠，包括第一和第二网格。版权所有（C）2012，JPO＆INPIT

6. 发明专利

JP2007242513A Element detecting method and element detecting device 有权
标题翻译：元件检测方法和元件检测装置
公开(公告)号：JP2007242513A
公开(公告)日：2007-09-20
申请号：JP2006065766
申请日：2006-03-10
申请人： Fujitsu Ltd , 富士通株式会社
发明人： GOTO YASUYUKI
IPC分类号： H01J49/40 , G01N27/64 , H01J49/10
摘要： PROBLEM TO BE SOLVED: To provide an element detecting method and device in which a highly accurate and uniform measurement is possible and a measuring method is easy as well.
SOLUTION: The element detecting device 1 which measures an element position and flying time after detecting a separated element for a test piece is provided with a chamber 10 whose air pressure can be adjusted and in which a test piece is placed, an element detecting means which is placed in the chamber to face the test piece and detects a separated element from the test piece, and irradiating means 23 to irradiate an energy beam on the test piece. The element detecting means is provided with a hole 19 through which the energy beam can pass and the irradiating means is placed on an opposite side of the test piece with the element detecting means in-between, and the energy beam passes through the hole and irradiates the test piece.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供可以进行高精度和均匀测量的元件检测方法和装置，并且测量方法也容易。解决方案：在检测用于测试件的分离元件之后测量元件位置和飞行时间的元件检测装置1设置有其空气压力可以被调节并且放置有试件的元件10，元件检测装置，其被放置在所述室中以面对所述试件并检测来自所述试件的分离的元件;以及照射装置23，以将能量束照射在所述试件上。元件检测装置设置有孔19，能量束可以通过该孔19，并且照射装置放置在测试件的相反侧，元件检测装置在其间，能量束通过孔并照射试片。版权所有（C）2007，JPO＆INPIT

7. 发明专利

JP2004031552A Semiconductor device and manufacturing method therefor 有权
公开(公告)号：JP2004031552A
公开(公告)日：2004-01-29
申请号：JP2002184139
申请日：2002-06-25
申请人： Fujitsu Ltd , 富士通株式会社
发明人： GOTO YASUYUKI
IPC分类号： H01L21/28 , H01L21/336 , H01L29/78
摘要： PROBLEM TO BE SOLVED: To provide a highly reliable semiconductor device which stably operates by adding a manufacture process for simply reforming a shape of a source electrode and that of a drain electrode in the semiconductor device and a manufacturing method of the device.
SOLUTION: The source electrode 15S and the drain electrode 15D are disposed, whose edges are detached from interelement separation regions 12 and sidewalls 14 of a gate.
COPYRIGHT: (C)2004,JPO

8. 发明专利

JP2003068084A Three dimensional structure solid state memory device 审中-公开
标题翻译：三维结构固态存储器件
公开(公告)号：JP2003068084A
公开(公告)日：2003-03-07
申请号：JP2001257884
申请日：2001-08-28
申请人： Fujitsu Ltd , 富士通株式会社
发明人： GOTO YASUYUKI
IPC分类号： G02B26/08 , G03C1/685 , G11C13/04 , H01S5/40
摘要： PROBLEM TO BE SOLVED: To provide a solid state memory device constituting a record system which can record a large amount of information though it has less capacity, in a three dimensional structure solid state memory device. SOLUTION: This device is provided with a solid state storage member 1 recording information by irradiating it with a laser beam 2A from a semiconductor laser 2 and varying an optical state, a semiconductor laser 2 provided closely at a surface of a solid state storage member 1, converging the laser beam, and irradiating one point of an information recording region 1A in the solid state storage member 1 with the laser beam 2A.
摘要翻译：要解决的问题：提供一种构成记录系统的固态存储装置，其可以在三维结构固态存储装置中能够记录大量信息，尽管容量较小。解决方案：该装置设置有固态存储构件1，其通过用半导体激光器2的激光束2A照射并改变光学状态来记录信息;密封地设置在固态存储构件1的表面的半导体激光器2 会聚该激光束，并且用激光束2A照射固态存储部件1中的信息记录区域1A的一个点。

9. 发明专利

JP2007258023A Mesh, and method of elemental analysis 有权
标题翻译： MESH和元素分析方法
公开(公告)号：JP2007258023A
公开(公告)日：2007-10-04
申请号：JP2006081655
申请日：2006-03-23
申请人： Fujitsu Ltd , 富士通株式会社
发明人： GOTO YASUYUKI
IPC分类号： H01J37/20 , G01N1/28 , G01N27/62
摘要： PROBLEM TO BE SOLVED: To provide a mesh for sample holding which can hardly damage a tip of sample and be widely used without need of a specific shape of recess of a sample holder where the mesh is mounted, and to provide a method of elemental analysis. SOLUTION: The sample holding mesh 13 used for a transmission electron microscope has a separable part (a primary mesh 13-1) and this part is made to be detachable from the remaining part (a secondary mesh 13-2) after separation so that it may not break a tip of the sample during measurement and precise elemental analysis can be performed. COPYRIGHT: (C)2008,JPO&INPIT

10. 发明专利

JP2006260807A Element measuring instrument and element measuring method 审中-公开
标题翻译：元素测量仪器和元件测量方法
公开(公告)号：JP2006260807A
公开(公告)日：2006-09-28
申请号：JP2005073158
申请日：2005-03-15
申请人： Fujitsu Ltd , Kanazawa Inst Of Technology , 学校法人金沢工業大学 , 富士通株式会社
发明人： GOTO YASUYUKI , FUKUDA MASAHIRO , NISHIKAWA OSAMU , TANIGUCHI MASAHIRO , ANAZAWA TOSHIHISA
IPC分类号： H01J49/16 , H01J49/04 , H01J49/40
摘要： PROBLEM TO BE SOLVED: To provide an element measuring instrument and an element measuring method smoothly separating elements without breaking a sample, capable of easily and accurately re-constructing three-dimensional element distribution of the sample.
SOLUTION: An adsorption gas guiding mechanism 6 for guiding adsorption gas for assisting electric field evaporation of the element of the sample 11 is arranged on a 3DAP. A gas easily adsorbed on the element of the sample 11 (high adsorption rate) like nitrogen gas is selected.
COPYRIGHT: (C)2006,JPO&NCIPI

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