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    • 3. 发明专利
    • WIRE BONDING DEVICE
    • JPS5553436A
    • 1980-04-18
    • JP12709578
    • 1978-10-16
    • FUJITSU LTD
    • ENDOU TEIICHI
    • H01L21/68H01L21/60
    • PURPOSE:To perform accurate positioning for a pellet and a capillary, by irradiating a beam of light onto a semiconductor pellet from above diagonally, causing the reflected light to strike a small light shutting metal piece placed in the center, and detecting light deviation by means of a detector, and thereby adjusting the position of the pellet. CONSTITUTION:Stage ST is mounted on precision jack mechanism J, which is controlled by control circuit CON, via stage travelling table ST'. On top of this is mounted package PK fitted with semiconductor pellet SP. Next, diagonally above pellet SP is provided light projector EL, which irradiates spot light. The reflected light from pellet SP is made to focus on light-shutting metal piece MP provided on mask M, via image focusing lens LNZ. At this time, the size of metal piece MP is set just large enough to shut the smallest light image, and the portion of spot light L deviated from the surface of pellet SP is detected by light detector PH. Subsequently, this output is sent to control circuit CON, and by operating stage ST, pellet SP is made to fit the position of capillary C provided on this.