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    • 8. 发明申请
    • Vacuum closure with linear drive unit
    • 带线性驱动单元的真空关闭
    • US20060102863A1
    • 2006-05-18
    • US11143822
    • 2005-06-02
    • Stefan BangertMichael KonigRalph LindenbergUwe SchusslerTobias StolleyFrank Fuchs
    • Stefan BangertMichael KonigRalph LindenbergUwe SchusslerTobias StolleyFrank Fuchs
    • F16K11/074
    • F16K31/04F16K51/02
    • This invention relates to a vacuum treatment installation and a device therefor for the tight, especially vacuum-tight closing of an aperture, in particular a slit-like or rectangular aperture with a length that is preferably a multiple of the width of the aperture, in particular for a lock arrangement of a vacuum treatment installation, said device having a closure member (2) and for said closure member a linear drive unit (3,4,5) which, by way of a translational movement, can move the closure member from an open position into a closed position, said closure member having a sealing surface which is disposed in a plane (16) and which, in the closed position, makes sealing contact with a counter-sealing surface on the aperture side, and said plane running perpendicular to the direction of the translational movement (14) and at an oblique angle to the aperture normal (13).
    • 本发明涉及一种真空处理装置及其装置,用于紧密,特别地真空密封孔,特别是狭缝状或矩形孔,其长度优选为孔的宽度的倍数,在 特别是用于真空处理装置的锁定装置,所述装置具有闭合构件(2),并且对于所述闭合构件,线性驱动单元(3,4,5)通过平移运动可移动闭合构件 从打开位置到关闭位置,所述封闭构件具有设置在平面(16)中的密封表面,并且在关闭位置与密封面密封接触开口侧上的反向密封表面,并且所述平面 垂直于平移运动(14)的方向延伸并且与孔径法线(13)成倾斜的角度。