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    • 3. 发明授权
    • Semiconductor optical device on an indium phosphide substrate for long operating wavelengths
    • 磷化铟衬底上的半导体光学器件,用于长波长工作
    • US07109526B2
    • 2006-09-19
    • US10893140
    • 2004-07-15
    • Jean-Louis GentnerFrancois AlexandreBruno ThedrezOlivier Gauthier-Lafaye
    • Jean-Louis GentnerFrancois AlexandreBruno ThedrezOlivier Gauthier-Lafaye
    • H01L33/00
    • B82Y20/00H01S5/3201H01S5/3235H01S5/32366H01S5/3403H01S5/343H01S5/34306H01S2302/00
    • A semiconductor optical device such as a laser or semiconductor optical amplifier (SOA) based on an indium phosphide substrate or equivalent buffer layer. The active layer of the device is based on conventional InGaAs(P) alloy, but additionally includes N in order to increase the operating wavelength to greater than 1.5 μm, preferably to a wavelength lying in the C- or L-band. The active layer composition may thus be denoted In1-xGaxAsyNzPp with x≧0.48, y≦1−z−p, z≦0.05, p≧0. The active layer may include a quantum well or multi-quantum wells in which case its thickness is preferably less than the critical thickness for lattice relaxation. In other embodiments the active layer is a “massive” layer with quasi-bulk properties. The active layer may advantageously be under tensile stress, preferably roughly between 1% and 2.2%, to manipulate the light and heavy hole bands. The active layer is typically bounded by barrier layers made of a suitable semiconductor alloy, such as AlInAs or InGaAs(P).
    • 基于铟磷化物衬底或等效缓冲层的半导体光学器件,例如激光器或半导体光放大器(SOA)。 器件的有源层基于常规的InGaAs(P)合金,但是另外包括N以便将工作波长增加到大于1.5μm,优选地增加到位于C波段或L波段中的波长。 因此,活性层组合物可以表示为:1-x Ga x N z N z, p = 0.48,y <= 1-zp,z <= 0.05,p> = 0。 有源层可以包括量子阱或多量子阱,在这种情况下,其厚度优选小于晶格弛豫的临界厚度。 在其它实施方案中,活性层是具有准体积性质的“块状”层。 活性层可以有利地处于拉伸应力下,优选大约在1%和2.2%之间,以操纵轻质和重型孔带。 有源层通常由诸如AlInAs或InGaAs(P)的合适的半导体合金制成的阻挡层限制。