会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 1. 发明授权
    • Method of integrated circuit fabrication
    • 集成电路制造方法
    • US07824962B2
    • 2010-11-02
    • US12021806
    • 2008-01-29
    • Franco MarianiWerner Kroeninger
    • Franco MarianiWerner Kroeninger
    • H01L21/44
    • H01L21/78H01L2924/10155
    • A method for fabricating an integrated circuit including forming a first trench in a rear side of a semiconductor wafer, wherein the first trench has a depth extending partially through a thickness of the semiconductor wafer, coating the rear side with a layer of coating material, including filling the first trench with the coating material, and forming a second trench in a front side of the semiconductor wafer, wherein the second trench is aligned with and has a width less than a width of the first trench, and wherein the second trench has a depth extending at least through a remaining portion of the semiconductor wafer so as to be in communication with the coating material filling the first trench.
    • 一种用于制造集成电路的方法,包括在半导体晶片的后侧形成第一沟槽,其中第一沟槽具有部分延伸穿过半导体晶片的厚度的深度,用一层涂层材料涂覆后侧,包括 用所述涂覆材料填充所述第一沟槽,以及在所述半导体晶片的前侧形成第二沟槽,其中所述第二沟槽对准并具有小于所述第一沟槽的宽度的宽度,并且其中所述第二沟槽具有 深度延伸至少穿过半导体晶片的剩余部分,以便与填充第一沟槽的涂层材料连通。
    • 6. 发明申请
    • METHOD OF INTEGRATED CIRCUIT FABRICATION
    • 集成电路制造方法
    • US20090189258A1
    • 2009-07-30
    • US12021806
    • 2008-01-29
    • Franco MarianiWerner Kroeninger
    • Franco MarianiWerner Kroeninger
    • H01L23/58H01L21/311H01L21/00
    • H01L21/78H01L2924/10155
    • A method for fabricating an integrated circuit including forming a first trench in a rear side of a semiconductor wafer, wherein the first trench has a depth extending partially through a thickness of the semiconductor wafer, coating the rear side with a layer of coating material, including filling the first trench with the coating material, and forming a second trench in a front side of the semiconductor wafer, wherein the second trench is aligned with and has a width less than a width of the first trench, and wherein the second trench has a depth extending at least through a remaining portion of the semiconductor wafer so as to be in communication with the coating material filling the first trench.
    • 一种用于制造集成电路的方法,包括在半导体晶片的后侧形成第一沟槽,其中第一沟槽具有部分延伸穿过半导体晶片的厚度的深度,用一层涂层材料涂覆后侧,包括 用所述涂覆材料填充所述第一沟槽,以及在所述半导体晶片的前侧形成第二沟槽,其中所述第二沟槽对准并具有小于所述第一沟槽的宽度的宽度,并且其中所述第二沟槽具有 深度延伸至少穿过半导体晶片的剩余部分,以便与填充第一沟槽的涂层材料连通。