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    • 5. 发明授权
    • Hermetically sealed interface
    • 密封接口
    • US5173836A
    • 1992-12-22
    • US846109
    • 1992-03-05
    • Joseph P. TomaseShiuh-Hui ChenGregory D. StammMarc K. Chason
    • Joseph P. TomaseShiuh-Hui ChenGregory D. StammMarc K. Chason
    • G01L9/00
    • G01L9/0042Y10T29/43
    • A hermetically sealed interface is constructed with a substrate (101) having a first surface (103) with a first orifice (201). The substrate (101) also has an opposing second surface (105) with a second orifice (205). The first and second orifices (201, 205) are connected via a passageway (107). The passageway (107) has an inner surface (209) with a first metal coating (111). The first metal coating (111) and the substrate (101) provide a first predetermined thermal coefficient of expansion for the passageway (107). A plug (221) with an outer surface (223) has a second metal coating (225). The second metal coating (225) and the plug (221) provide a second predetermined thermal coefficient of expansion substantially similar to the first predetermined thermal coefficient of expansion of the passageway (107). The plug (221) is disposed in the passageway (107) of the substrate (101). The first metal coating (111), of the inner surface ( 209) of the passageway (107), and the second metal coating (225), of the outer surface (223) of the plug (221), are bonded together and provide, with the plug, (221) a hermetic barrier between the first and second orifices (201, 205) of the substrate (101). Preferably, this hermetically sealed interface is used in a capacitive pressure sensor.
    • 密封界面由具有第一孔(101)的第一表面(103)的基底(101)构成。 衬底(101)还具有带有第二孔口(205)的相对的第二表面(105)。 第一和第二孔(201,205)经由通道(107)连接。 通道(107)具有带有第一金属涂层(111)的内表面(209)。 第一金属涂层(111)和基板(101)为通道(107)提供第一预定的热膨胀系数。 具有外表面(223)的插头(221)具有第二金属涂层(225)。 第二金属涂层(225)和插塞(221)提供基本上类似于通道(107)的第一预定热膨胀系数的第二预定热膨胀系数。 插头(221)设置在基板(101)的通路(107)中。 插头(221)的外表面(223)的通道(107)的内表面(209)和第二金属涂层(225)的第一金属涂层(111)结合在一起并提供 ,其中所述插头(221)在所述基板(101)的所述第一和第二孔(201,205)之间具有密封屏障。 优选地,该密封接口用于电容式压力传感器。