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1. 发明授权

US09304401B2 Measurement of the position of a radiation beam spot in lithography 有权
标题翻译：光刻中辐射束斑位置的测量
公开(公告)号：US09304401B2
公开(公告)日：2016-04-05
申请号：US14001478
申请日：2012-02-22
申请人： Felix Godfried Peter Peeters , Jozef Petrus Henricus Benschop , Michael Jozef Mathijs Renkens , Gregor Edward Van Baars , Jeroen Dekkers
发明人： Felix Godfried Peter Peeters , Jozef Petrus Henricus Benschop , Michael Jozef Mathijs Renkens , Gregor Edward Van Baars , Jeroen Dekkers
IPC分类号： G03B27/32 , G03B27/54 , G03B27/58 , G03B27/72 , G03B27/74 , G03F7/20 , G03F9/00
CPC分类号： G03F7/70133 , G03F7/70275 , G03F7/70375 , G03F7/70391 , G03F7/704 , G03F7/70516 , G03F7/708 , G03F7/7085 , G03F9/7019
摘要： A radiation spot measurement system for a lithographic apparatus, the system having a target onto which a radiation system of the lithographic apparatus may project spots of radiation for a measurement process, the target having a measurement target. The system further includes a radiation detector to detect radiation from one of the spots, and a controller to receive information from the radiation detector and to determine the position of the spot of radiation relative to an intended position of the spot of radiation.
摘要翻译：一种用于光刻设备的辐射点测量系统，该系统具有目标，光刻设备的辐射系统可以在其上投射用于测量过程的辐射点，目标具有测量目标。该系统还包括用于检测来自一个点的辐射的辐射检测器，以及用于从辐射检测器接收信息并确定相对于辐射点的预期位置的辐射点的位置的控制器。

2. 发明申请

US20130335721A1 MEASUREMENT OF THE POSITION OF A RADIATION BEAM SPOT IN LITHOGRAPHY 有权
标题翻译：辐射光束点位置的测量
公开(公告)号：US20130335721A1
公开(公告)日：2013-12-19
申请号：US14001478
申请日：2012-02-22
申请人： Felix Godfried Peter Peeters , Jozef Petrus Henricus Benschop , Michael Jozef Mathijs Renkens , Gregor Edward Van Baars , Jeroen Dekkers
发明人： Felix Godfried Peter Peeters , Jozef Petrus Henricus Benschop , Michael Jozef Mathijs Renkens , Gregor Edward Van Baars , Jeroen Dekkers
IPC分类号： G03F7/20
CPC分类号： G03F7/70133 , G03F7/70275 , G03F7/70375 , G03F7/70391 , G03F7/704 , G03F7/70516 , G03F7/708 , G03F7/7085 , G03F9/7019
摘要： A radiation spot measurement system for a lithographic apparatus, the system having a target onto which a radiation system of the lithographic apparatus may project spots of radiation for a measurement process, the target having a measurement target. The system further includes a radiation detector to detect radiation from one of the spots, and a controller to receive information from the radiation detector and to determine the position of the spot of radiation relative to an intended position of the spot of radiation.
摘要翻译：一种用于光刻设备的辐射点测量系统，该系统具有目标，光刻设备的辐射系统可以在其上投射用于测量过程的辐射点，目标具有测量目标。该系统还包括用于检测来自一个点的辐射的辐射检测器，以及用于从辐射检测器接收信息并确定相对于辐射点的预期位置的辐射点的位置的控制器。

3. 发明申请

US20100163221A1 LOCAL CONTROL OF HEAT FLOW TO MORE ACCURATELY REGULATE MACHINE TEMPERATURES 审中-公开
标题翻译：热流的本地控制更准确地调节机器温度
公开(公告)号：US20100163221A1
公开(公告)日：2010-07-01
申请号：US12095635
申请日：2006-11-14
申请人： Theo Anjes Maria Ruijl , Hendrik Jan Eggink , Jacobus Cornelis Gerardus Van Der Sanden , Ralph Theodorus Hubertus Maessen , Jeroen Dekkers
发明人： Theo Anjes Maria Ruijl , Hendrik Jan Eggink , Jacobus Cornelis Gerardus Van Der Sanden , Ralph Theodorus Hubertus Maessen , Jeroen Dekkers
IPC分类号： G05D23/19 , F25D17/00
CPC分类号： G03F7/70858 , F25D17/02 , G05D23/1934
摘要： A temperature regulation method and system (100) includes a reservoir (112) having a fluid with a temperature of a value such that, within a control range of a local temperature controller, a local set point temperature is achievable. A piping system (101) delivers the fluid from the reservoir to one or more elements needing temperature control. A heat generator/removal device (110) in one of the fluid paths is disposed at or near an element needing temperature control. For each heat generator/removal device, a local temperature controller (116) and a feedback sensor (114) are configured to control the heat generator/removal device such that an amount of heat exchanged with the fluid, at or near the element needing temperature control, results in a local temperature, monitored by the control feedback sensor to be locally and accurately maintained at the local set point temperature.
摘要翻译：温度调节方法和系统（100）包括具有流体的储存器（112），该流体的温度值使得在局部温度控制器的控制范围内可以实现局部设定点温度。管道系统（101）将流体从储存器输送到需要温度控制的一个或多个元件。一个流体路径中的发热/排出装置（110）设置在需要温度控制的元件处或附近。对于每个热发生器/去除装置，局部温度控制器（116）和反馈传感器（114）被配置为控制热发生器/去除装置，使得与流体交换的热量在需要温度的元件处或附近控制，导致局部温度，由控制反馈传感器监控，以便局部且精确地保持在局部设定点温度。

4. 发明授权

US09192271B2 Suction unit and autonomous vacuum cleaner 有权
标题翻译：抽油机和自主吸尘器
公开(公告)号：US09192271B2
公开(公告)日：2015-11-24
申请号：US12673196
申请日：2008-08-18
申请人： Jeroen Dekkers , Theo Anjes Maria Ruijl , Silvester Matheus Reijnders , Jan Van Eijk , Hubert Gerard Jean Joseph Amaury Vroomen , Thomas Petrus Hendricus Warmerdam , Robertus Mathijs Gerardus Rijs
发明人： Jeroen Dekkers , Theo Anjes Maria Ruijl , Silvester Matheus Reijnders , Jan Van Eijk , Hubert Gerard Jean Joseph Amaury Vroomen , Thomas Petrus Hendricus Warmerdam , Robertus Mathijs Gerardus Rijs
IPC分类号： A47L9/02 , A47L9/00 , A47L9/28 , A47L5/04
CPC分类号： A47L9/02 , A47L5/04 , A47L9/0072 , A47L9/009 , A47L9/2821 , A47L2201/00
摘要： The invention relates to a suction unit and relates to a vacuum cleaner. The suction unit comprises a drive system for driving the suction unit over a surface to be treated; a chassis supporting the drive system; a nozzle for removing particles from a surface to be treated which nozzle is configured to move with relation to the chassis in a direction away from the surface to be treated, the nozzle having an interior space defining an opening that faces the surface to be treated; and an outlet communicating with the interior space, the outlet being arranged for communication with a fan unit in operating conditions. The suction unit further comprises coupling means for coupling the nozzle to the chassis, wherein the coupling means is arranged to exert a force that is directed away from the surface to be treated when the under pressure in the interior space increases. In this manner the problem of the suction unit getting stuck on the floor can be overcome or at least be reduced. Furthermore the traction of the drive system can be improved. An autonomous vacuum cleaner according to the invention comprises such a suction unit and further comprises a dust chamber, and a fan unit that communicates with the dust chamber, the fan unit communicating with the outlet for creating under pressure in the interior space of the nozzle in operating conditions.
摘要翻译：本发明涉及抽吸单元，涉及一种真空吸尘器。抽吸单元包括用于在被处理表面上驱动抽吸单元的驱动系统; 支撑驱动系统的底盘; 用于从被处理表面去除颗粒的喷嘴，该喷嘴构造成在远离待处理表面的方向上相对于底架移动，喷嘴具有限定面向待处理表面的开口的内部空间; 以及与所述内部空间连通的出口，所述出口布置成用于在操作条件下与风扇单元通信。抽吸单元还包括用于将喷嘴联接到底盘的联接装置，其中联接装置被布置成当内部空间中的欠压增加时施加远离被处理表面的力。以这种方式，可以克服或至少减少吸入单元卡在地板上的问题。此外，可以提高驱动系统的牵引力。根据本发明的自主真空吸尘器包括这样的抽吸单元，并且还包括灰尘室和与灰尘室连通的风扇单元，风扇单元与出口连通，用于在喷嘴的内部空间中产生压力运行条件。

5. 发明申请

US20060070253A1 Coordinate measuring device with a vibration damping system 失效
标题翻译：具有减振系统的坐标测量装置
公开(公告)号：US20060070253A1
公开(公告)日：2006-04-06
申请号：US10532933
申请日：2003-10-17
申请人： Theo Anjes Ruijl , Jeroen Dekkers
发明人： Theo Anjes Ruijl , Jeroen Dekkers
IPC分类号： G01B5/00
CPC分类号： G05G5/05 , G01B3/008 , G01B11/007 , G01D11/14 , Y10S33/01
摘要： A coordinate measuring device having a probe comprising a stylus (14) with a sensing member (18) for contacting the object (15) to be measured, a support unit (13) to which the stylus (14) is connected through elastic means (19), and magnet means (46) for damping vibrations of the stylus (14) by generating eddy currents in conductive material. The elastic means (19) comprise at least one leaf spring (41) made of conductive material, and said magnet means (46) generate eddy currents in said leaf spring (41).
摘要翻译：一种具有探头的坐标测量装置，该探头包括具有用于接触要测量的物体（15）的检测构件（18）的触针（14），触针（14）通过弹性装置（以及用于通过在导电材料中产生涡流阻止触针（14）的振动的磁体装置（46）。弹性装置（19）包括由导电材料制成的至少一个板簧（41），并且所述磁体装置（46）在所述板簧（41）中产生涡流。

6. 发明申请

US20110239397A1 SUCTION UNIT AND AUTONOMOUS VACUUM CLEANER 有权
标题翻译：吸油机和自动真空清洁机
公开(公告)号：US20110239397A1
公开(公告)日：2011-10-06
申请号：US12673196
申请日：2008-08-18
申请人： Jeroen Dekkers , Theo Anjes Maria Ruijl , Silvester Matheus Reijnders , Jan Van Eijk , Hubert Gerard Jean Joseph Amaury Vroomen , Thomas Petrus Hendricus Warmerdam , Robertus Mathijs Gerardus Rijs
发明人： Jeroen Dekkers , Theo Anjes Maria Ruijl , Silvester Matheus Reijnders , Jan Van Eijk , Hubert Gerard Jean Joseph Amaury Vroomen , Thomas Petrus Hendricus Warmerdam , Robertus Mathijs Gerardus Rijs
IPC分类号： A47L9/02 , A47L9/28 , A47L5/00
CPC分类号： A47L9/02 , A47L5/04 , A47L9/0072 , A47L9/009 , A47L9/2821 , A47L2201/00
摘要： The invention relates to a suction unit and a vacuum cleaner. The suction unit comprises a drive system for driving the suction unit on a surface to be treated; a chassis supporting the drive system; a nozzle for removing particles from a surface to be treated, which nozzle is configured to move with relation to the chassis in a direction away from the surface to be treated, the nozzle having an interior space defining an opening that faces the surface to be treated; and an outlet communicating with the interior space, the outlet being arranged for communication with a fan unit during operating conditions. The suction unit further comprises coupling means for coupling the nozzle to the chassis, wherein the coupling means is arranged to exert a force that is directed away from the surface to be treated when the underpressure in the interior space increases. In this manner the problem of the suction unit getting stuck on the floor can be overcome or at least reduced. Furthermore, the traction of the drive system can be improved. An autonomous vacuum cleaner according to the invention comprises such a suction unit and further comprises a dust chamber, and a fan unit that communicates with the dust chamber. The fan unit communicates with the outlet for creating an underpressure in the interior space of the nozzle during operating conditions.
摘要翻译：本发明涉及抽吸单元和吸尘器。抽吸单元包括用于在被处理表面上驱动抽吸单元的驱动系统; 支撑驱动系统的底盘; 用于从待处理表面去除颗粒的喷嘴，该喷嘴构造成在远离待处理表面的方向上相对于底架移动，喷嘴具有限定面向被处理表面的开口的内部空间 ; 以及与所述内部空间连通的出口，所述出口布置成用于在操作条件期间与风扇单元通信。抽吸单元还包括用于将喷嘴联接到底架的联接装置，其中联接装置布置成当内部空间中的负压增加时施加远离被处理表面的力。以这种方式，可以克服或至少减少吸入单元卡在地板上的问题。此外，可以提高驱动系统的牵引力。根据本发明的自主真空吸尘器包括这样的抽吸单元，还包括灰尘室和与灰尘室连通的风扇单元。风扇单元与出口连通，以在操作条件下在喷嘴的内部空间中产生负压。

7. 发明授权

US07316076B2 Coordinate measuring device and a method for measuring the position of an object 失效
标题翻译：坐标测量装置和测量物体位置的方法
公开(公告)号：US07316076B2
公开(公告)日：2008-01-08
申请号：US10532913
申请日：2003-09-22
申请人： Theo Anjes Maria Ruijl , Jeroen Dekkers
发明人： Theo Anjes Maria Ruijl , Jeroen Dekkers
IPC分类号： G01B5/00
CPC分类号： G01B5/012 , G01B5/016 , G01B11/007
摘要： A coordinate measuring device having a probe for contacting the object (15) to be measured. The probe comprises a sensing member (18) for contacting the object (15), a support unit (13), a supporting element (25) connecting said sensing member (18) to said support unit (13), a detection member (22), detection means (23) for detecting the position of said detection member (22). Said detection member (22) is carried by a connection element (26) and said connection element (26) is attached to said sensing member (18). The detection member may be shaped as pyramid having three reflective surfaces. The position of the detection member can be determined by using three fibers for illuminating the surfaces and three detector screens for capturing the reflected light.
摘要翻译：一种坐标测量装置，具有用于接触被测量物体（15）的探针。探头包括用于接触物体（15）的感测构件（18），支撑单元（13），将所述检测构件（18）连接到所述支撑单元（13）的支撑元件（25），检测构件），用于检测所述检测部件（22）的位置的检测装置（23）。所述检测构件（22）由连接元件（26）承载，并且所述连接元件（26）附接到所述检测构件（18）。检测构件可以被成形为具有三个反射表面的金字塔。可以通过使用三个用于照射表面的光纤和用于捕获反射光的三个检测器屏幕来确定检测部件的位置。

8. 发明授权

US07178253B2 Coordinate measuring device with a vibration damping system 失效
标题翻译：具有减振系统的坐标测量装置
公开(公告)号：US07178253B2
公开(公告)日：2007-02-20
申请号：US10532933
申请日：2003-10-17
申请人： Theo Anjes Maria Ruijl , Jeroen Dekkers
发明人： Theo Anjes Maria Ruijl , Jeroen Dekkers
IPC分类号： G01B5/012
CPC分类号： G05G5/05 , G01B3/008 , G01B11/007 , G01D11/14 , Y10S33/01
摘要： A coordinate measuring device having a probe comprising a stylus (14) with a sensing member (18) for contacting the object (15) to be measured, a support unit (13) to which the stylus (14) is connected through elastic means (19), and magnet means (46) for damping vibrations of the stylus (14) by generating eddy currents in conductive material. The elastic means (19) comprise at least one leaf spring (41) made of conductive material, and said magnet means (46) generate eddy currents in said leaf spring (41).
摘要翻译：一种具有探头的坐标测量装置，该探头包括具有用于接触要测量的物体（15）的检测构件（18）的触针（14），触针（14）通过弹性装置（以及用于通过在导电材料中产生涡流阻止触针（14）的振动的磁体装置（46）。弹性装置（19）包括由导电材料制成的至少一个板簧（41），并且所述磁体装置（46）在所述板簧（41）中产生涡流。

9. 发明授权

US08458854B2 Device comprising at least a body and a bumper, and robot cleaner comprising such a device 有权
标题翻译：包括至少一个主体和一个保险杠的装置以及包括这种装置的机器人清洁器
公开(公告)号：US08458854B2
公开(公告)日：2013-06-11
申请号：US12864665
申请日：2009-01-23
申请人： Ronald Maarten Schneider , Jan Willem Bruggers , Robertus Mathijs Gerardus Rijs , Jeroen Dekkers
发明人： Ronald Maarten Schneider , Jan Willem Bruggers , Robertus Mathijs Gerardus Rijs , Jeroen Dekkers
IPC分类号： A47L5/00
CPC分类号： G05D1/0227
摘要： A device (1) comprises at least a body (2) and a bumper (6) which is movably attached to the body so as to protect the body from shock caused by collision with an obstacle during movement of the device across a surface. The bumper is attached to the body by means of at least one spring (9) extending in a direction which is at least substantially perpendicular to the direction into which the bumper is movable with respect to the body. Furthermore, a robot cleaner comprising such a device is provided.
摘要翻译：装置（1）包括至少一个主体（2）和保险杠（6），该保险杠（6）可移动地附接到主体上，以便在装置穿过表面移动期间保护身体免受与障碍物碰撞的冲击。保险杠通过至少一个弹簧（9）附接到主体，所述至少一个弹簧（9）沿至少基本上垂直于保险杠相对于主体可移动的方向的方向延伸。此外，提供了包括这种装置的机器人清洁器。

10. 发明申请

US20100306932A1 DEVICE COMPRISING AT LEAST A BODY AND A BUMPER, AND ROBOT CLEANER COMPRISING SUCH A DEVICE 有权
标题翻译：至少包含身体和保护装置的装置以及包含这种装置的机器人清洁器
公开(公告)号：US20100306932A1
公开(公告)日：2010-12-09
申请号：US12864665
申请日：2009-01-23
申请人： Ronald Maarten Schneider , Jan Willem Bruggers , Robertus Mathijs Gerardus Rijs , Jeroen Dekkers
发明人： Ronald Maarten Schneider , Jan Willem Bruggers , Robertus Mathijs Gerardus Rijs , Jeroen Dekkers
IPC分类号： A47L11/00 , B60R19/42
CPC分类号： G05D1/0227
摘要： A device (1) comprises at least a body (2) and a bumper (6) which is movably attached to the body so as to protect the body from shock caused by collision with an obstacle during movement of the device across a surface. The bumper is attached to the body by means of at least one spring (9) extending in a direction which is at least substantially perpendicular to the direction into which the bumper is movable with respect to the body. Furthermore,a robot cleaner comprising such a device is provided.
摘要翻译：装置（1）包括至少一个主体（2）和保险杠（6），该保险杠（6）可移动地附接到主体上，以便在装置穿过表面移动期间保护身体免受与障碍物碰撞的冲击。保险杠通过至少一个弹簧（9）附接到主体，所述至少一个弹簧（9）沿至少基本上垂直于保险杠相对于主体可移动的方向的方向延伸。此外，提供了包括这种装置的机器人清洁器。

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