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    • 2. 发明专利
    • METHOD FOR CUTTING GROOVE OF OPTICAL WAVEGUIDE PARTS
    • JPH1068832A
    • 1998-03-10
    • JP22573796
    • 1996-08-28
    • FURUKAWA ELECTRIC CO LTD
    • TAMURA SHUICHIMUGINO AKIRASHIMIZU TAKEONANRI NOBUHIRO
    • G02B6/00G02B6/13
    • PROBLEM TO BE SOLVED: To make it possible to form a groove position with high accuracy by previously trial cutting reference grooves, reading the deviation values thereof by positioning patterns having plural graduations formed in the reference groove cutting positions and executing cutting of a normal groove by compensating these deviation values. SOLUTION: The optical waveguide parts 1 are obtd. by forming an optical waveguide 2 consisting of a quartz waveguide atop a substrate formed of a silicon wafer. The positions of the reference cutting lines 3 to be cut at the optical waveguide parts 1 are provided with the positioning patterns 4. The positioning patterns 4 are composed by having plural memories. The reference grooves which are the trial grooves are formed at the cutting lines 3 of the reference grooves of the waveguide parts 1. The normal groove is cut by moving blades upward from the cutting lines 3 in the case of formation of this groove if the reference grooves formed in the positioning patterns 4 formed in the positions of, for example, the cutting lines 3 coincide with the graduations on the left side and the walls of the reference grooves and the groove width is cut with the deviation of the center of the grooves to a lower side.