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    • 9. 发明专利
    • WIRE BONDING DEVICE AND WIRE BONDING
    • JPH03285337A
    • 1991-12-16
    • JP8300390
    • 1990-03-31
    • FURUKAWA ELECTRIC CO LTD
    • KURIHARA MASAAKITANIGAWA TORU
    • H01L21/60
    • PURPOSE:To remove an external terminal film and to perform a good direct bonding by a method wherein the external terminals of a lead frame and the like are preheated in a reducing atmosphere in a transfer part, by which the external terminals are carried to a bonding part. CONSTITUTION:A transfer part 8 and a bonding part 9 are respectively provided with heater blocks 3 and 4. These blocks 3 and 4 are constituted in such a way that a temperature control can be performed independently to the blocks 3 and 4 by temperature control means 5a and 5b. Moreover, a ceiling plate 6 for gas shielding use is provided over the upper surfaces of the parts 8 and 9. One part of this plate 6 is opened at the part 9 so that a capillary pinching a wire can be made to descend. Reducing gas is made to flow on the peripheries of the parts 8 and 9 to perform a gas shielding and at the same time, the blocks 3 and 4 are respectively set into a prescribed temperature and a lead frame 2 with semiconductor chips 1 die bonded thereon is moved from the left direction to the right direction of the paper surface at a prescribed speed and a wire bonding is performed in order.