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1. 发明公开

EP0942214A4 FLUID CONTROL VALVE AND FLUID SUPPLY/EXHAUST SYSTEM 失效
标题翻译： FLUIDREREGELVENTIL UND FLUID ZU-UND ABLAUFAUSLASSSYSTEM
公开(公告)号：EP0942214A4
公开(公告)日：2002-07-31
申请号：EP97913482
申请日：1997-12-01
申请人： FUJIKIN KK , TOHOKU STEEL CO LTD , OHMI TADAHIRO , TAKAHASHI MIGAKU
发明人： OHMI TADAHIRO , TAKAHASHI MIGAKU , YAMAJI MICHIO , TANIGAWA TAKESHI , IKEDA NOBUKAZU , DOI RYOSUKE , NISHINO KOJI , YASUMOTO NAOFUMI , FUKUDA HIROYUKI , UNO TOMIO , YANAI YASUYUKI
IPC分类号： F16K7/14 , F16K31/06 , F16K31/08
CPC分类号： F16K31/082 , F16K7/14 , F16K31/0655 , F16K31/0672 , Y10T137/8242
摘要： A fluid control valve, which can control a fluid having a pressure in the order of 10 kg/cm , has a response time in the order of several milliseconds and can be made small in size, and a fluid supply/exhaust system that provides less gas counterflow in the event of a plurality of valves being used. A fluid control valve of the invention controls a fluid moving (a) in a valve body by closing and opening a portion between a valve seat and a valve holder by means of a drive unit. The drive unit comprises a rod-shaped shaft for application of pressure through the valve seat and the valve holder, and a member (a) fixed around the rod-shaped shaft. The member (a) is made from a magnetic material, and has a space between it and the shaft. A coil provided in parallel to the shaft moves the member (a) up and down by electromagnetic induction, and makes use of a spring force to close and open a portion between the valve seat and the valve holder.
摘要翻译：能够控制压力为10kg / cm 2左右的流体的流体控制阀具有数毫秒量级的响应时间，并且可以使其尺寸较小，并且流体供给/排出系统在使用多个阀的情况下提供较少的气体逆流。本发明的流体控制阀通过借助于驱动单元关闭和打开阀座和阀座之间的部分来控制流体在阀体内移动（a）。驱动单元包括用于通过阀座和阀座施加压力的杆状轴以及固定在杆状轴周围的构件（a）。构件（a）由磁性材料制成，并且在其与轴之间具有空间。与轴平行设置的线圈通过电磁感应使构件（a）上下运动，并且利用弹簧力来关闭和打开阀座与阀座之间的部分。

2. 发明公开

EP0749058A3 Pressure type flow rate control apparatus 失效
标题翻译：流量压力调节器
公开(公告)号：EP0749058A3
公开(公告)日：1998-11-11
申请号：EP96303817
申请日：1996-05-29
申请人： FUJIKIN KK
发明人： NISHINO KOJI , IKEDA NOBUKAZU , MORIMOTO AKIHIRO , MINAMI YUKIO , KAWADA KOJI , DOHI RYOSUKE , FUKUDA HIROYUKI
IPC分类号： F16K17/22 , F16K31/02 , G05D7/06 , G05D16/20 , H01L21/3065 , G05D7/00 , G05D16/00
CPC分类号： G05D7/0635 , Y10T137/5109 , Y10T137/7737 , Y10T137/7759 , Y10T137/7761 , Y10T137/777 , Y10T137/87917
摘要： A pressure type flow rate control apparatus (1) for controlling flow rate of a fluid maintains an upstream side pressure P1 of an orifice at more than about twice a downstream side pressure P2. In addition to an orifice-forming member (5) the apparatus includes a control valve (2) provided at the upstream side of the orifice, a pressure detector (3) provided between the control valve and the orifice, and an operation control device (6) for calculating a flow rate Qc from the detected pressure P1 of the pressure detector as Qc - KP1 (K being a constant) and issuing a difference as a control signal Qy between a flow rate command signal Qs and the calculated flow rate Qc to a drive unit of the control valve. The orifice upstream side pressure P1 is adjusted by opening and closing the control valve, thereby controlling the orifice downstream side flow rate.

3. 发明专利

AT292766T 未知
公开(公告)号：AT292766T
公开(公告)日：2005-04-15
申请号：AT97913482
申请日：1997-12-01
申请人： FUJIKIN KK , TOHOKU STEEL CO LTD , OHMI TADAHIRO , TAKAHASHI MIGAKU
发明人： OHMI TADAHIRO , TAKAHASHI MIGAKU , YAMAJI MICHIO , TANIGAWA TAKESHI , IKEDA NOBUKAZU , DOI RYOSUKE , NISHINO KOJI , YASUMOTO NAOFUMI , FUKUDA HIROYUKI , UNO TOMIO , YANAI YASUYUKI
IPC分类号： F16K7/14 , F16K31/06 , F16K31/08
摘要： The invention relates to a fluid control valve which controls a fluid moving through a valve body by means of opening and closing a portion between a valve seat and a valve holder using a drive unit, wherein: said drive unit comprises a rod shaped shaft for applying pressure via said valve seat and a valve rod, and a member a which is affixed around said rod shaped shaft, said member a comprises a magnetic material, and a coil having a space between it and the shaft and provided at a position parallel to said shaft moves said member a upwardly and downwardly by electromagnetic induction, and using the force of a spring, as well, the portion between said valve seat and said valve holder is opened and closed, and after an exciting current supplied to said coil is cut off, an exciting current is resupplied to said coil for a brief period after a passage of a short time t.

4. 发明专利

SG66387A1 Pressure type flow rate control apparatus 未知
公开(公告)号：SG66387A1
公开(公告)日：1999-07-20
申请号：SG1997002751
申请日：1997-08-01
申请人： FUJIKIN KK , OHMI TADAHIRO
发明人： OHMI TADAHIRO , NISHINO KOJI , IKEDA NOBUKAZU , MORIMOTO AKIHIRO , MINAMI YUKIO , KAWADA KOJI , DOHI RYOSUKE , FUKUDA HIROYUKI
IPC分类号： G05D16/20 , G05D7/06
摘要： A pressure type flow rate control apparatus (1) controls flow rate of a fluid in an environment where a ratio of P2/P1 between an absolute pressure P1 at an upstream side of an orifice and an absolute pressure P2 at a downstream side of the orifice is maintained at a value less than about 0.7. The apparatus comprises: a plate for forming the orifice (5); a control valve (2) positioned upstream of the orifice; an orifice corresponding valve (9) positioned downstream of the orifice (5); a primary pressure detector (3) positioned between the control valve (2) and the orifice (5); a secondary pressure detector (11) positioned downstream of the orifice (5); a calculation control device (6) for calculating flow rate Qc on the basis of the measured pressure P1 of the primary pressure detector (3) by a formula Qc = KP1 (K being a constant) and for outputting as a control signal Qy a difference between a flow rate command signal Qs and the calculated flow rate signal Qc to a drive unit (14) of the control valve 2; and a pressure comparing, calculating apparatus (10) for calculating the ratio of P2/P1 between the detected pressure P1 of the primary pressure detector (3) and the detected pressure P2 of the secondary pressure detector (11). The pressure P1 upstream of the orifice is adjusted by opening and closing the control valve by the control signal Qy, thereby controlling the flow rate downstream of the orifice.

5. 发明专利

AT365292T 未知
公开(公告)号：AT365292T
公开(公告)日：2007-07-15
申请号：AT06005025
申请日：1997-12-01
申请人： FUJIKIN KK , TOHOKU STEEL CO LTD , OHMI TADAHIRO , TAKAHASHI MIGAKU
发明人： OHMI TADAHIRO , TAKAHASHI MIGAKU , YAMAJI MICHIO , TANIGAWA TAKESHI , IKEDA NOBUKAZU , DOI RYOSUKE , NISHINO KOJI , YASUMOTO NAOFUMI , FUKUDA HIROYUKI , UNO TOMIO , YANAI YASUYUKI
IPC分类号： F16K31/06 , F16K7/14 , F16K31/08
摘要： The invention relates to a fluid control valve which controls a fluid moving through a valve body by means of opening and closing a portion between a valve seat and a valve holder using a drive unit, wherein: said drive unit comprises a rod shaped shaft for applying pressure via said valve seat and a valve rod, and a member a which is affixed around said rod shaped shaft, said member a comprises a magnetic material, and a coil having a space between it and the shaft and provided at a position parallel to said shaft moves said member a upwardly and downwardly by electromagnetic induction, and using the force of a spring, as well, the portion between said valve seat and said valve holder is opened and closed, and after an exciting current supplied to said coil is cut off, an exciting current is resupplied to said coil for a brief period after a passage of a short time t.

6. 发明专利

DE69732976T2 未知
公开(公告)号：DE69732976T2
公开(公告)日：2006-02-16
申请号：DE69732976
申请日：1997-12-01
申请人： FUJIKIN KK , TOHOKU STEEL CO , OHMI TADAHIRO , TAKAHASHI MIGAKU
发明人： OHMI TADAHIRO , TAKAHASHI MIGAKU , YAMAJI MICHIO , TANIGAWA TAKESHI , IKEDA NOBUKAZU , DOI RYOSUKE , NISHINO KOJI , YASUMOTO NAOFUMI , FUKUDA HIROYUKI , UNO TOMIO , YANAI YASUYUKI
IPC分类号： F16K7/14 , F16K31/06 , F16K31/08
摘要： The invention relates to a fluid control valve which controls a fluid moving through a valve body by means of opening and closing a portion between a valve seat and a valve holder using a drive unit, wherein: said drive unit comprises a rod shaped shaft for applying pressure via said valve seat and a valve rod, and a member a which is affixed around said rod shaped shaft, said member a comprises a magnetic material, and a coil having a space between it and the shaft and provided at a position parallel to said shaft moves said member a upwardly and downwardly by electromagnetic induction, and using the force of a spring, as well, the portion between said valve seat and said valve holder is opened and closed, and after an exciting current supplied to said coil is cut off, an exciting current is resupplied to said coil for a brief period after a passage of a short time t.

7. 发明专利

DE69732976D1 未知
公开(公告)号：DE69732976D1
公开(公告)日：2005-05-12
申请号：DE69732976
申请日：1997-12-01
申请人： FUJIKIN KK , TOHOKU STEEL CO , OHMI TADAHIRO , TAKAHASHI MIGAKU
发明人： OHMI TADAHIRO , TAKAHASHI MIGAKU , YAMAJI MICHIO , TANIGAWA TAKESHI , IKEDA NOBUKAZU , DOI RYOSUKE , NISHINO KOJI , YASUMOTO NAOFUMI , FUKUDA HIROYUKI , UNO TOMIO , YANAI YASUYUKI
IPC分类号： F16K7/14 , F16K31/06 , F16K31/08
摘要： The invention relates to a fluid control valve which controls a fluid moving through a valve body by means of opening and closing a portion between a valve seat and a valve holder using a drive unit, wherein: said drive unit comprises a rod shaped shaft for applying pressure via said valve seat and a valve rod, and a member a which is affixed around said rod shaped shaft, said member a comprises a magnetic material, and a coil having a space between it and the shaft and provided at a position parallel to said shaft moves said member a upwardly and downwardly by electromagnetic induction, and using the force of a spring, as well, the portion between said valve seat and said valve holder is opened and closed, and after an exciting current supplied to said coil is cut off, an exciting current is resupplied to said coil for a brief period after a passage of a short time t.

8. 发明专利

DE69615933D1 未知
公开(公告)号：DE69615933D1
公开(公告)日：2001-11-22
申请号：DE69615933
申请日：1996-05-29
申请人： FUJIKIN KK
发明人： NISHINO KOJI , IKEDA NOBUKAZU , MORIMOTO AKIHIRO , MINAMI YUKIO , KAWADA KOJI , DOHI RYOSUKE , FUKUDA HIROYUKI
IPC分类号： F16K17/22 , F16K31/02 , G05D7/06 , G05D16/20 , H01L21/3065 , G05D7/00 , G05D16/00
摘要： A pressure type flow rate control apparatus (1) for controlling flow rate of a fluid maintains an upstream side pressure P1 of an orifice at more than about twice a downstream side pressure P2. In addition to an orifice-forming member (5) the apparatus includes a control valve (2) provided at the upstream side of the orifice, a pressure detector (3) provided between the control valve and the orifice, and an operation control device (6) for calculating a flow rate Qc from the detected pressure P1 of the pressure detector as Qc - KP1 (K being a constant) and issuing a difference as a control signal Qy between a flow rate command signal Qs and the calculated flow rate Qc to a drive unit of the control valve. The orifice upstream side pressure P1 is adjusted by opening and closing the control valve, thereby controlling the orifice downstream side flow rate.

9. 发明专利

CA2212547C PRESSURE TYPE FLOW RATE CONTROL APPARATUS 未知
公开(公告)号：CA2212547C
公开(公告)日：1999-08-03
申请号：CA2212547
申请日：1997-08-08
申请人： FUJIKIN KK , OHMI TADAHIRO
发明人： MINAMI YUKIO , DOHI RYOSUKE , KAWADA KOJI , NISHINO KOJI , OHMI TADAHIRO , FUKUDA HIROYUKI , IKEDA NOBUKAZU , MORIMOTO AKIHIRO
IPC分类号： G05D7/06 , G05D16/20
摘要： A pressure type flow rate control apparatus (1) controls flow rate of a fluid in an environment where a ratio of P2/P1 between an absolute pressure P1 at an upstream side of an orifice and an absolute pressure P2 at a downstream side of the orifice is maintained at a value less than about 0.7. The apparatus comprises: a plate for forming the orifice (5); a control valve (2) positioned upstream of the orifice; an orifice corresponding valve (9) positioned downstream of the orifice (5); a primary pressure detector (3) positioned between the control valve (2) and the orifice (5); a secondary pressure detector (11) positioned downstream of the orifice (5); a calculation control device (6) for calculating flow rate Qc on the basis of the measured pressure P1 of the primary pressure detector (3) by a formula Qc = KP1 (K being a constant) and for outputting as a control signal Qy a difference between a flow rate command signal Qs and the calculated flow rate signal Qc to a drive unit (14) of the control valve 2; and a pressure comparing, calculating apparatus (10) for calculating the ratio of P2/P1 between the detected pressure P1 of the primary pressure detector (3) and the detected pressure P2 of the secondary pressure detector (11). The pressure P1 upstream of the orifice is adjusted by opening and closing the control valve by the control signal Qy, thereby controlling the flow rate downstream of the orifice.

10. 发明专利

SG11201703289YA OPTICAL GAS CONCENTRATION MEASURING METHOD, AND METHOD FOR MONITORING GAS CONCENTRATION BY SAID METHOD 未知
公开(公告)号：SG11201703289YA
公开(公告)日：2017-06-29
申请号：SG11201703289Y
申请日：2015-11-20
申请人： FUJIKIN KK , UNIV TOHOKU
发明人： NAGASE MASAAKI , NISHINO KOJI , IKEDA SHINICHI , YAMAJI MICHIO , SUGAWA SHIGETOSHI , KURODA RIHITO
IPC分类号： C23C16/52 , G01N21/27 , G01N21/33 , H01L21/205
摘要： To provide a concentration measurement method with which the concentrations of predetermined chemical components can be measured non-destructively, accurately, and rapidly by a simple means, up to the concentrations in trace amount ranges, as well as a concentration measurement method with which the concentrations of chemical components in a measurement target can be accurately and rapidly measured in real time up to the concentrations in nano-order trace amount ranges, and which is endowed with a versatility that can be realized in a variety of embodiments and modes. [Solution] In the present invention, a measurement target is irradiated, in a time sharing manner, with light of a first wavelength and light of a second wavelength that have different optical absorption rates with respect to the measurement target. The light of each wavelength, arriving optically via the measurement target as a result of irradiation with the light of each wavelength, is received at a shared light-receiving sensor. A differential signal is formed, the differential signal being of a signal pertaining to the light of the first wavelength and a signal pertaining to the light of the second wavelength, the signals outputted from the light-receiving sensor upon receipt of the light. The concentration of a chemical component in the measurement target is derived on the basis of the differential signal.

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